@inproceedings{FuerboeckThalhammerLitzenbergeretal.1999, author = {C. F{\"u}rb{\"o}ck and R. Thalhammer and M. Litzenberger and Norbert Seliger and D. Pogany and E. Gornik and G. Wachutka}, title = {Internal Characterisation of IGBTs Using the Backside Laserprober Technique}, booktitle = {Jahrestagung der GMe, Bad Hofgastein Tagungsband 1999}, year = {1999}, }