TY - CONF A1 - Thalhammer, R. A1 - Fuerboeck, C. A1 - Seliger, Norbert A1 - Deboy, G. A1 - Gornik, E. A1 - Wachutka, G. T1 - Internal characterization of IGBTs using the backside laser probing technique - Interpretation of measurement by numerical simulation T2 - Proceedings of the 10th International Symposium on Power Semiconductor Devices and ICs (Proc. of ISPSD) Y1 - 2023 UR - https://opus4.kobv.de/opus4-rosenheim/frontdoor/index/index/docId/2210 SP - 199 EP - 202 ER -