@inproceedings{ThalhammerFuerboeckSeligeretal.1998, author = {R. Thalhammer and C. Fuerboeck and Norbert Seliger and G. Deboy and E. Gornik and G. Wachutka}, title = {Internal characterization of IGBTs using the backside laser probing technique - Interpretation of measurement by numerical simulation}, booktitle = {Proceedings of the 10th International Symposium on Power Semiconductor Devices and ICs (Proc. of ISPSD)}, pages = {199 -- 202}, doi = {10.1109/ISPSD.1998.702668}, year = {1998}, }