TY - JOUR A1 - Pogany, D. A1 - Seliger, Norbert A1 - Lalinsky, T. A1 - Kuzmik, J. A1 - Habas, P. A1 - Hrkut, P. A1 - Gornik, E. T1 - Study of Thermal Effects in GaAs Micromachined Power Sensor Microsystems by an Optical Interferometer Technique T2 - Microelectronics Journal Y1 - 2023 UR - https://opus4.kobv.de/opus4-rosenheim/frontdoor/index/index/docId/2209 VL - 29 IS - 4-5 SP - 191 EP - 198 ER -