@article{PoganySeligerLalinskyetal.1998, author = {D. Pogany and Norbert Seliger and T. Lalinsky and J. Kuzmik and P. Habas and P. Hrkut and E. Gornik}, title = {Study of Thermal Effects in GaAs Micromachined Power Sensor Microsystems by an Optical Interferometer Technique}, journal = {Microelectronics Journal}, volume = {29}, number = {4-5}, pages = {191 -- 198}, doi = {10.1016/S0026-2692(97)00057-8}, year = {1998}, }