@incollection{SeligerFuerboeckHabasetal.1997, author = {Norbert Seliger and C. Fuerboeck and P. Habas and D. Pogany and E. Gornik}, title = {Backside-Laserprober Technique for Characterisation of Semiconductor Power Devices}, booktitle = {Proceedings of the Seminar Basics and Technology of Electronic Devices}, year = {1997}, }