TY - JOUR A1 - Seliger, Norbert A1 - Habaš, Predrag A1 - Gornik, Erich T1 - A study of backside laser-probe signals in MOSFETs T2 - Microelectronic Engineering Y1 - 2023 UR - https://opus4.kobv.de/opus4-rosenheim/frontdoor/index/index/docId/2197 VL - 31 IS - 1-4 SP - 87 EP - 94 ER -