TY - CONF A1 - Pogany, D. A1 - Seliger, Norbert A1 - Lalinsky, T. A1 - Kuzmik, J. A1 - Habas, P. A1 - Hrkut, P. A1 - Gornik, E. T1 - Study of thermal effects in GaAs micromachined power sensor microsystems by an optical interferometer technique T2 - International Workshop on Thermal Investigation of ICs and Systems (THERMINIC' 96) Y1 - 2023 UR - https://opus4.kobv.de/opus4-rosenheim/frontdoor/index/index/docId/2194 SP - 185 EP - 190 ER -