@inproceedings{PoganySeligerLalinskyetal.1996, author = {D. Pogany and Norbert Seliger and T. Lalinsky and J. Kuzmik and P. Habas and P. Hrkut and E. Gornik}, title = {Study of thermal effects in GaAs micromachined power sensor microsystems by an optical interferometer technique}, booktitle = {International Workshop on Thermal Investigation of ICs and Systems (THERMINIC' 96)}, pages = {185 -- 190}, year = {1996}, }