TY - CONF A1 - Pogany, D. A1 - Lalinsky, T. A1 - Seliger, Norbert A1 - Kuzmik, J. A1 - Habas, P. A1 - Hrkut, P. A1 - Gornik, E. T1 - Power Sensor Microsystems Characterization using a contactless optical laser method T2 - International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM' 96) Y1 - 2023 UR - https://opus4.kobv.de/opus4-rosenheim/frontdoor/index/index/docId/2193 SP - 201 EP - 204 ER -