TY - JOUR A1 - Pogany, D. A1 - Seliger, Norbert A1 - Litzenberger, M. A1 - Gossner, H. A1 - Stecher, M. A1 - Müller-Lynch, T. A1 - Werner, W. A1 - Gornik, E. T1 - Damage analysis in smart-power technology electrostatic discharge (ESD) protection devices T2 - Microelectronics Reliability Y1 - 2023 UR - https://opus4.kobv.de/opus4-rosenheim/frontdoor/index/index/docId/2232 SN - 0026-2714 VL - 39 IS - 6 SP - 1143 EP - 1148 ER -