Real-time analyses of metal contaminations in the ppb-range

  • In high-tech processing even smallest concentrations of metal ions in process media are of the utmost significance because they cause expensive production failures. Currently, cost-intensive equipment, special trained staff and time consuming analyses are necessary to detect these contaminations in order to avoid failures. The Centers of Excellence Nanochem and Sensorics at the University of Applied Sciences Regensburg (owner of patent PCT/EP2010/064833) and their industrial partner Micro-Epsilon GmbH are developing a new miniaturized measurement device which allows cost-effective real-time analysis of fluidic media for the first time. The system is fully automated and can be directly connected to wet-etch benches. Hence it allows continuous real-time surveillance of metal contaminations in the ppb-range through absorption spectroscopy in process media. For this purpose a very small sample amount of the process medium and a specific complexing agent are mixed together. This leads to an increase in the molar extinction coefficients and though even smallest contaminations become visible. The main parts of our development are the simulation of the different system components, their production and chemical analyses with the evaluation model.

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Metadaten
Author:Albert Hutterer, Michael Bauhuber, Helmut Hummel, Alfred Lechner
DOI:https://doi.org/10.4028/www.scientific.net/SSP.195
Parent Title (English):Solid State Phenomena
Publisher:Trans Tech Publications
Document Type:Article
Language:English
Year of first Publication:2013
Release Date:2022/12/02
Tag:Absorption; Analysis; Complexing Agent; Light Guidance; Liquid-Core Waveguide; Metal Ions; Online Measurement; Real-Time; Total Internal Reflection
Volume:195
First Page:269
Last Page:273
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Nanoanalytik und Halbleiterchemie (Nanochem)
research focus:Produktion und Systeme
Licence (German):Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG