Gated p-Si field emission cathode applied in an ionization vacuum gauge
- A commercial Bayard-Alpert ionization vacuum gauge was equipped with a field emission electron source based on a cathode consisting of an array of 16 gated, p-doped, and DLC-coated Si-tips and characterized. An anode current of about 1.3 μA led to an ion current of 7 fA at 3×10 -7 mbar and 0.8 pA at 4×10 -5 mbar. Whereas at pressures higher than 4×10 -5 mbar the emission current of the electronA commercial Bayard-Alpert ionization vacuum gauge was equipped with a field emission electron source based on a cathode consisting of an array of 16 gated, p-doped, and DLC-coated Si-tips and characterized. An anode current of about 1.3 μA led to an ion current of 7 fA at 3×10 -7 mbar and 0.8 pA at 4×10 -5 mbar. Whereas at pressures higher than 4×10 -5 mbar the emission current of the electron source decreased, the ratio of ion and anode current remained linear. A nearly constant sensitivity of ~ 17 mbar -1 of the ionization vacuum gauge within the investigated pressure range was depicted.…
| Author: | Christoph LangerORCiD, Christian PrommesbergerORCiD, Robert Damian ŁawrowskiORCiDGND, Rupert SchreinerOTHORCiDGND, Yifeng Huang, Juncong She |
|---|---|
| DOI: | https://doi.org/10.1109/IVNC.2016.7551500 |
| ISSN: | 2380-6311 |
| Parent Title (English): | 29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada |
| Publisher: | IEEE |
| Document Type: | conference proceeding (article) |
| Language: | English |
| Year of first Publication: | 2016 |
| Release Date: | 2021/05/31 |
| Tag: | DLC; Si; electron source; field emission; field emitter array; ionization vacuum gauge |
| First Page: | 145 |
| Last Page: | 146 |
| Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
| Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
| Begutachtungsstatus: | peer-reviewed |
| research focus: | Digitale Transformation |
| Frontdoor-URL: | https://opus4.kobv.de/opus4-oth-regensburg/1137 |
