Benzocyclobutene as a novel integrated spacer material in a field emission electron source
- For the realization of a miniaturized field emission electron source we tested benzocyclobutene (BCB) as a new spacer material between cathode and anode. We fabricated black silicon emitters and characterized the emission behavior with an integrated 5 μm thin and large-area spacer of BCB. The integrated BCB layer allows the realization of a compact electron source with only two componentsFor the realization of a miniaturized field emission electron source we tested benzocyclobutene (BCB) as a new spacer material between cathode and anode. We fabricated black silicon emitters and characterized the emission behavior with an integrated 5 μm thin and large-area spacer of BCB. The integrated BCB layer allows the realization of a compact electron source with only two components consisting of a cathode with BCB and a grid. The comparison with other spacer materials like polyimide (25 μm thickness) or mica (50 μm thickness) revealed for the cathode with BCB a significantly reduced operational voltage of 240 V for a field emission current of 1 μA.…
| Author: | Christian PrommesbergerORCiD, Christoph LangerORCiD, Robert Damian ŁawrowskiORCiDGND, Rupert SchreinerOTHORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1109/IVNC.2017.8051605 |
| Parent Title (English): | International Vacuum Nanoelectronics Conference (IVNC), 30th, 2017, Regensburg |
| Publisher: | IEEE |
| Document Type: | conference proceeding (article) |
| Language: | English |
| Year of first Publication: | 2017 |
| Release Date: | 2021/05/27 |
| Tag: | benzocyclobutene; black silicon; electron source; field emission; integrated spacer |
| First Page: | 192 |
| Last Page: | 193 |
| Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
| Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
| Begutachtungsstatus: | peer-reviewed |
| research focus: | Digitale Transformation |
| Frontdoor-URL: | https://opus4.kobv.de/opus4-oth-regensburg/1133 |
