Microrods and microlines by three-dimensional epitaxially grown GaN for field emission cathodes
- The three-dimensional epitaxial technique allows the realization of gallium nitride lines in addition to the rods. To optimize the properties of GaN-based field emission cathodes further investigations and an improvement of the epitaxial process were performed. The microrods and microlines consist of a one-order higher n-doped gallium nitride in comparison to the gallium nitride layer on theThe three-dimensional epitaxial technique allows the realization of gallium nitride lines in addition to the rods. To optimize the properties of GaN-based field emission cathodes further investigations and an improvement of the epitaxial process were performed. The microrods and microlines consist of a one-order higher n-doped gallium nitride in comparison to the gallium nitride layer on the sapphire substrate. The typical height of the microrods and -lines is about 5 μm. The field emission properties of these structures were investigated in diode configuration by integral field emission measurements at pressures below 10 -9 mbar. For the microrods (microlines) a voltage of 1100 V (2000 V) was measured for a field emission current of about 0.5 μA with an onset field of about 12 MV/m (24 MV/m). Furthermore, the field enhancement factors for microrods and -lines are in the range of 300 and 200, respectively.…
| Author: | Robert Damian ŁawrowskiORCiDGND, Christoph LangerORCiD, Christian PrommesbergerORCiD, Rupert SchreinerOTHORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1109/IVNC.2017.8051576 |
| Parent Title (English): | International Vacuum Nanoelectronics Conference (IVNC), 30th, 2017, Regensburg |
| Publisher: | IEEE |
| Document Type: | conference proceeding (article) |
| Language: | English |
| Year of first Publication: | 2017 |
| Release Date: | 2021/05/27 |
| Tag: | Epitaxial growth; GaN; Gallium nitride; LED; field emission |
| First Page: | 130 |
| Last Page: | 131 |
| Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
| Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
| Begutachtungsstatus: | peer-reviewed |
| research focus: | Materialien und Produktion |
| Frontdoor-URL: | https://opus4.kobv.de/opus4-oth-regensburg/1132 |
