Stable and low noise field emission from single p-type Si-tips
- Single gated p-type Si-tips with two different tip radii were fabricated. An emission current of 2.40 μA was measured for the sharp-edged tip at a voltage of 170 V. In contrast, a stable and reproducible emission behavior was observed with an increased tip radius resulting in a pronounced saturation region between 90 V and 150 V, but merely an emission current of 0.55 μA at 150 V. More remarkableSingle gated p-type Si-tips with two different tip radii were fabricated. An emission current of 2.40 μA was measured for the sharp-edged tip at a voltage of 170 V. In contrast, a stable and reproducible emission behavior was observed with an increased tip radius resulting in a pronounced saturation region between 90 V and 150 V, but merely an emission current of 0.55 μA at 150 V. More remarkable is the stable emission behavior with fluctuation of ± 4 % during a measurement period of 30 minutes. The integral emission current in a homogeneous tip array (16 emitters) showed nearly the same I-V characteristics compared to the single tip and is therefore, most dominated by only a stable single tip in the array.…


| Author: | Christian PrommesbergerORCiD, Christoph LangerORCiD, Rupert SchreinerOTHORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1109/IVNC.2018.8520018 |
| Parent Title (English): | International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan |
| Publisher: | IEEE |
| Document Type: | conference proceeding (article) |
| Language: | English |
| Year of first Publication: | 2018 |
| Release Date: | 2021/05/27 |
| Tag: | emission stability; field emission; gate-electrode; low current fluctuations; p-type Si-tips |
| Pagenumber: | 1-2 |
| Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
| Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
| Begutachtungsstatus: | peer-reviewed |
| research focus: | Digitale Transformation |
| Frontdoor-URL: | https://opus4.kobv.de/opus4-oth-regensburg/1070 |


