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The integration of graphene into microelectronic devices

  • Since 2004 the field of graphene research has attracted increasing interest worldwide. Especially the integration of graphene into microelectronic devices has the potential for numerous applications. Therefore, we summarize the current knowledge on this aspect. Surveys show that considerable progress was made in the field of graphene synthesis. However, the central issue consists of the availability of techniques suitable for production for the deposition of graphene on dielectric substrates. Besides, the encapsulation of graphene for further processing while maintaining its properties poses a challenge. Regarding the graphene/metal contact intensive research was done and recently substantial advancements were made towards contact resistances applicable for electronic devices. Generally speaking the crucial issues for graphene integration are identified today and the corresponding research tasks can be clearly defined.

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Metadaten
Author:Guenther Ruhl, Sebastian WittmannORCiD, Matthias Koenig, Daniel NeumaierORCiD
DOI:https://doi.org/10.3762/bjnano.8.107
Parent Title (English):Beilstein Journal of Nanotechnology
Publisher:Beilstein-Institut
Document Type:Article
Language:English
Year of first Publication:2017
Release Date:2022/04/24
Tag:BORON-NITRIDE; CHEMICAL-VAPOR-DEPOSITION; CONTACT-RESISTANCE; COPPER FOILS; ELECTRODES; FILMS; GROWTH; LOW-TEMPERATURE; RAMAN-SPECTROSCOPY; SUBSTRATE; contacts; deposition; encapsulation; graphene; process integration
Volume:8
First Page:1056
Last Page:1064
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
research focus:Produktion und Systeme
OpenAccess Publikationsweg:Diamond Open Access - OA-Veröffentlichung ohne Publikationskosten (Sponsoring)
Licence (German):Creative Commons - CC BY - Namensnennung 4.0 International