High current field emission from Si nanowires on pillar structures
- We investigate the influence of the geometry and doping level on the performance of n-type silicon nanowire field emitters on silicon pillar structures. Therefore, multiple cathodes with 50 by 50 pillar arrays (diameter: 5 μm, height: 30 μm, spacing: 50 μm) were fabricated and measured in diode configuration. In the first experiment, we compared two geometry types using the same material. Geometry 1 is black silicon, which is a highly dense surface covering a forest of tightly spaced silicon needles resulting from self-masking during a plasma etching process of single crystal silicon. Geometry 2 are silicon nanowires, which are individual spaced-out nanowires in a crownlike shape resulting from a plasma etching process of single crystal silicon. In the second experiment, we compared two different silicon doping levels [n-type (P), 1–10 and <0.005 Ω cm] for the same geometry. The best performance was achieved with lower doped silicon nanowire samples, emitting 2 mA at an extraction voltage of 1 kV. The geometry/material combination with the best performance was used to assemble an integrated electron source. These electron sources were measured in a triode configuration and reached onset voltages of about 125 V and emission currents of 2.5 mA at extraction voltages of 400 V, while achieving electron transmission rates as high as 85.0%.
Author: | Philipp BuchnerORCiD, Matthias HausladenORCiD, Mathias BartlORCiD, Michael Bachmann, Rupert SchreinerORCiD |
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DOI: | https://doi.org/10.1116/6.0003384 |
ISSN: | 2166-2754 |
Parent Title (English): | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
Publisher: | AIP |
Document Type: | Article |
Language: | English |
Year of first Publication: | 2024 |
Release Date: | 2024/04/19 |
Tag: | Doping; Electron sources; Field emitter arrays; Nanowires; Plasma processing; Semiconductors; Triodes |
Volume: | 42 |
Issue: | 2 |
Article Number: | 022208 |
Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
research focus: | Sensorik |
OpenAccess Publikationsweg: | Hybrid Open Access - OA-Veröffentlichung in einer Subskriptionszeitschrift/-medium |
Licence (German): | Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG |