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Si(001) step dynamics: A temporal low-energy electron diffraction study

  • We present equilibrium measurements of the dynamics of steps on Si(001) using temporal electron-diffraction spectroscopy. Activation energies and the rate limiting kinetics are identified for 950K<~T<~1130K. Unlike previous studies at higher temperatures, we can exclude evaporation and condensation of atoms or dimers from the step edges as the rate limiting process in this temperature regime. The possible reason for this difference is discussed in terms of a crossover from different rate-limiting kinetics.

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Author:Martin KammlerORCiDGND, Michael Horn- von Hoegen, N. Voss, Michael C. Tringides, A. Menzel, E. H. Conrad
DOI:https://doi.org/10.1103/PhysRevB.65.075312
Parent Title (English):Physical Review B
Publisher:APS
Document Type:Article
Language:English
Year of first Publication:2002
Release Date:2022/11/24
Volume:65
Issue:7
Article Number:075312
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Nanoanalytik und Halbleiterchemie (Nanochem)
Publication:Externe Publikationen
research focus:Produktion und Systeme
Licence (German):Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG