MetadatenAuthor: | Andreas Schels, Simon EdlerORCiD, Walter Hansch, Michael BachmannORCiD, F. Herdl, F. Dusberg, Magdalena Eder, M. Meyer, M. Dudek, A. Pahlke, Rupert SchreinerORCiDGND |
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DOI: | https://doi.org/10.1109/IVNC52431.2021.9600787 |
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ISBN: | 978-1-6654-2589-6 |
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Parent Title (English): | 2021 34th International Vacuum Nanoelectronics Conference (IVNC): 5-9 July 2021, Lyon, France |
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Publisher: | IEEE |
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Place of publication: | Piscataway, NJ |
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Editor: | Stephen Purcell, Jean-Paul Mazellier |
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Document Type: | conference proceeding (article) |
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Language: | English |
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Year of first Publication: | 2021 |
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Release Date: | 2022/04/11 |
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First Page: | 1 |
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Last Page: | 2 |
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Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
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| Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik |
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Begutachtungsstatus: | peer-reviewed |
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research focus: | Sensorik |
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Licence (German): | Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG |
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