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The “LED‐version” of the electron gun: An electron source for operation in ambient pressure environments based on silicon field emitter arrays

  • We report on our progress to develop and optimize electron sources for practical applications. A simple fabrication process is introduced based on a wafer dicing saw and a wet chemical etch step without the need for a clean room. Due to the formation of crystal facets the samples show a homogeneous geometry throughout the array. Characterization techniques are developed to systematically compare various arrays. A very defined measurement procedure based on current controlled IV-sweeps as well as lifetime measurements at various currents is proposed. To investigate the current distribution in the array a commercial CMOS detector is used and shows the potential for in depth analysis of the arrays. Finally, a compact hermetically sealed housing is presented enabling electron generation in atmospheric pressure environments.

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Metadaten
Author:Michael BachmannORCiD, Felix Düsberg, Andreas Pahlke, Simon EdlerORCiD, Andreas Schels, Florian Herdl, Matthias HausladenORCiD, Philipp Buchner, Rupert SchreinerORCiDGND
DOI:https://doi.org/10.1002/vipr.202300801
Parent Title (German):Vakuum in Forschung und Praxis
Publisher:Wiley
Document Type:Article
Language:English
Year of first Publication:2023
Release Date:2023/07/14
Volume:35
Issue:3
First Page:32
Last Page:37
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik
Begutachtungsstatus:peer-reviewed
research focus:Sensorik
Licence (German):Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG