Scaling of the field emission current from B-doped Si-tip arrays
- We have fabricated a test chip with various hexagonal arrays of B-doped Si tips (height ~ 3 μm, apex radius <; 30 nm, number 1-4447, resistivity 4 Ωcm, 100 orientation) in triangular arrangement (pitch 10 μm, density 1.16×10 6 cm -2 ) in order to systematically investigate the field emission current scaling with the number N of tips. Regulated voltage scans for 1 nA revealed rather efficient emission from nearly all tips of the arrays at an average field of 15 V/μm. The expected current plateau was always obtained at fields around 20 V/μm, but its width strongly increased with N. In this carrier depletion range, the single tip provided a much higher stability (<; 5%) of the current (2-3 nA) than at lower (>; 50 %) and higher currents (>; 30%). Integral current measurements of the hexagonal arrays resulted in a statistically improved current stability (<; 1%) but only a weak increase of the total current with N 0.28 yet. These results will be discussed with respect to the remaining inhomogeneity of the tips.
Author: | Pavel Serbun, Aliaksandr Navitski, Güntner Müller, Rupert SchreinerORCiDGND, Christian PrommesbergerORCiD, Christoph Langer, Florian Dams |
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DOI: | https://doi.org/10.1109/IVNC.2012.6316965 |
ISBN: | 978-1-4673-1984-3 |
ISBN: | 978-1-4673-1983-6 |
ISBN: | 978-1-4673-1982-9 |
ISSN: | 2380-6311 |
ISSN: | 2164-2370 |
Parent Title (English): | 25th International Vacuum Nanoelectronics Conference (IVNC) ; Jeju, Korea (South), 09.07.2012 - 13.07.2012 |
Publisher: | IEEE |
Place of publication: | Piscataway, N.J. |
Document Type: | conference proceeding (article) |
Language: | English |
Year of first Publication: | 2012 |
Release Date: | 2022/12/10 |
Tag: | Anodes; B-doped; Current measurement; Iron; Nonhomogeneous media; Voltage control; boron; current scaling; electron field emission; elemental semiconductors; field emitter arrays; silicon |
First Page: | 1 |
Last Page: | 2 |
Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
Begutachtungsstatus: | peer-reviewed |
research focus: | Produktion und Systeme |
Licence (German): | Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG |