Efficient and reliable field emission from silicon tip arrays for miniaturized electron sources
- Silicon-based cathodes with precisely aligned field emitter arrays (FEA) applicable for miniaturized electron sources were successfully developed and fabricated. The cathode chips contain about 3×105 Si tips/cm2 in a triangular array with a tip height of 2.5 μm, tip radius of 20 nm, and lateral distance between tips of 20 μm. Amazingly homogeneous and well-aligned field emission (FE) from all tips (i.e. 100% efficiency) and maximum stable currents of typically 0.1 μA for p- and 0.6 μA for n-type Si were reproducibly achieved. Current-voltage characteristics of p-type Si tips exhibit the expected saturation at around 10 nA due to limited supply of electrons from a depletion layer, while the n-type Si tips show the usual FN behaviour. Additional coating of the Si tips with a 10 nm Au layer resulted in at least 5 times higher average FE current levels i.e. typically 3 μA but lead, however, to a 30% increase of the onset voltage.
Author: | Aliaksandr Navitski, Pavel Serbun, Güntner Müller, Rupert SchreinerORCiDGND, Florian Dams |
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URL / DOI: | https://ieeexplore.ieee.org/document/6004567?arnumber=6004567 |
ISBN: | 978-3-00-035081-8 |
ISBN: | 978-1-4577-1243-2 |
ISSN: | 2380-6311 |
ISSN: | 2164-2370 |
Parent Title (English): | 2011 24th International Vacuum Nanoelectronics Conference ; 18-22 July 2011 Wuppertal |
Publisher: | IEEE |
Place of publication: | Piscataway, NJ |
Document Type: | conference proceeding (article) |
Language: | English |
Year of first Publication: | 2011 |
Release Date: | 2022/12/10 |
Tag: | cathodes; coatings; elemental semiconductors; field emission; field emitter arrays; miniaturized electron sources; silicon tips; structured cold cathode |
First Page: | 71 |
Last Page: | 72 |
Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
Begutachtungsstatus: | peer-reviewed |
research focus: | Produktion und Systeme |
Licence (German): | Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG |