Pavel Serbun, V. Porshyn, Günter Müller, S. Mingels, Dirk Lützenkirchen-Hecht, Michael Bachmann, Felix Düsberg, Florian Dams, Martin Hofmann, Andreas Pahlke, Christian Prommesberger, Christoph Langer, Robert Damian Ławrowski, Rupert Schreiner
- Precisely aligned high-aspect-ratio (HAR) silicon tip arrays were fabricated using enhanced reactive ion etching with an inductively-coupled-plasma followed by a sharpening oxidation. A gold thin film was then sputtered only on the tips of the HAR structures. Field-emission (FE) properties from Au-coated HAR p-Si tip array cathodes have been systematically investigated by means of field emission scanning microscopy (FESM). A rather high efficiency of the HAR Si structures (71% at 550 V), but limited homogeneous FE with currents of 1-600 nA might be correlated with the varying geometry of the tips and the presence of oxides. I-V measurements of single Au-coated HAR emitters revealed activation effects and the saturation current region at 3 nA. An increase of the saturation current by 4 orders of magnitude was observed during 20 hours of conditioning at constant voltage, which finally resulted in nearly reproducible FN curves with a ß-factor of 473. An excellent stability of the emission current of less than 1 % was obtained during the additional long-time conditioning at constant voltage. Optical switching under halogen lamp illumination resulted in at least 2 times higher saturation currents and showed a linear dependence of the FE current on the light color temperature.
MetadatenAuthor: | Pavel Serbun, V. Porshyn, Günter Müller, S. Mingels, Dirk Lützenkirchen-HechtORCiD, Michael BachmannORCiD, Felix Düsberg, Florian Dams, Martin Hofmann, Andreas Pahlke, Christian PrommesbergerORCiD, Christoph LangerORCiD, Robert Damian ŁawrowskiORCiD, Rupert SchreinerORCiDGND |
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DOI: | https://doi.org/10.1109/IVNC.2016.7551516 |
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ISSN: | 2380-6311 |
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Parent Title (English): | 29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada |
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Publisher: | IEEE |
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Document Type: | conference proceeding (article) |
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Language: | English |
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Year of first Publication: | 2016 |
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Release Date: | 2021/05/31 |
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Tag: | field emission; p-type Si-pillar array; photoemission; surface oxide effects |
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First Page: | 181 |
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Last Page: | 182 |
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Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
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| Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik |
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Begutachtungsstatus: | peer-reviewed |
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research focus: | Produktion und Systeme |
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