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Field emission behavior of Au-tip-coated p-type Si pillar structures

  • Precisely aligned high-aspect-ratio (HAR) silicon tip arrays were fabricated using enhanced reactive ion etching with an inductively-coupled-plasma followed by a sharpening oxidation. A gold thin film was then sputtered only on the tips of the HAR structures. Field-emission (FE) properties from Au-coated HAR p-Si tip array cathodes have been systematically investigated by means of field emission scanning microscopy (FESM). A rather high efficiency of the HAR Si structures (71% at 550 V), but limited homogeneous FE with currents of 1-600 nA might be correlated with the varying geometry of the tips and the presence of oxides. I-V measurements of single Au-coated HAR emitters revealed activation effects and the saturation current region at 3 nA. An increase of the saturation current by 4 orders of magnitude was observed during 20 hours of conditioning at constant voltage, which finally resulted in nearly reproducible FN curves with a ß-factor of 473. An excellent stability of the emission current of less than 1 % was obtained during the additional long-time conditioning at constant voltage. Optical switching under halogen lamp illumination resulted in at least 2 times higher saturation currents and showed a linear dependence of the FE current on the light color temperature.

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Metadaten
Author:Pavel Serbun, V. Porshyn, Günter Müller, S. Mingels, Dirk Lützenkirchen-HechtORCiD, Michael BachmannORCiD, Felix Düsberg, Florian Dams, Martin Hofmann, Andreas Pahlke, Christian PrommesbergerORCiD, Christoph LangerORCiD, Robert Damian ŁawrowskiORCiD, Rupert SchreinerORCiDGND
DOI:https://doi.org/10.1109/IVNC.2016.7551516
ISSN:2380-6311
Parent Title (English):29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada
Publisher:IEEE
Document Type:conference proceeding (article)
Language:English
Year of first Publication:2016
Release Date:2021/05/31
Tag:field emission; p-type Si-pillar array; photoemission; surface oxide effects
First Page:181
Last Page:182
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik
Begutachtungsstatus:peer-reviewed
research focus:Produktion und Systeme