MetadatenAuthor: | Christoph LangerORCiD, Christian PrommesbergerORCiD, Robert Damian ŁawrowskiORCiD, Rupert SchreinerORCiDGND, Yifeng Huang, Juncong She |
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DOI: | https://doi.org/10.1109/IVNC.2016.7551500 |
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ISSN: | 2380-6311 |
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Parent Title (English): | 29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada |
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Publisher: | IEEE |
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Document Type: | conference proceeding (article) |
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Language: | English |
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Year of first Publication: | 2016 |
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Release Date: | 2021/05/31 |
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Tag: | DLC; Si; electron source; field emission; field emitter array; ionization vacuum gauge |
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First Page: | 145 |
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Last Page: | 146 |
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Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
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| Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik |
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Begutachtungsstatus: | peer-reviewed |
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research focus: | Sensorik |
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