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Influence of adsorbates on the performance of a field emitter array in a high voltage triode setup

  • In the present work, black-silicon field emitter arrays (FEAs) are investigated regarding the influence of residual gas pressure on the characteristics and lifetime in the high voltage triode setup. Current-voltage-characteristics at different pressure levels are recorded and show a decreasing emission current with rising pressure. This decrease can be explained by an increase of the work function and charging of the emitter surface caused by adsorbates. The emission current can be restored to its initial value by heating of the FEA up to 110 °C during active emission. With this regeneration procedure, an extended lifetime from about 20 h to 440 h at a residual gas pressure of 10−5 mbar is achieved.

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Metadaten
Author:Simon EdlerORCiD, Michael BachmannORCiD, Janis Breuer, Florian Dams, Felix Düsberg, Martin Hofmann, Jasna Jakšič, Andreas Pahlke, Christoph LangerORCiD, Robert Damian ŁawrowskiORCiD, Christian PrommesbergerORCiD, Rupert SchreinerORCiDGND
DOI:https://doi.org/10.1063/1.4987134
Parent Title (English):Journal of Applied Physics
Document Type:Article
Language:English
Year of first Publication:2017
Release Date:2021/05/06
Volume:122
Article Number:124503
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik
Begutachtungsstatus:peer-reviewed
research focus:Sensorik
Licence (German):Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG