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Electron Beam Induced Growth of Carbon Nanotips on Tungsten and Silicon Fieldemitters
- In our experiments we grew electron emitting carbon nanostructures on tungsten tips. Subsequently, we transferred the growth process to pre-structured phosphorus-doped n-type silicon and obtained emitting carbon nanostructures directly grown on silicon. After growth of the nanostructures, the silicon field emitters showed increased emission currents of 76 nA at 1.1 kV (compared to 6 nA under the same conditions before growth).
Author: | Fabian Hecht, Florian Bauereiβ, Josef Sellmair, Philipp Buchner, Matthias HausladenORCiD, Rupert SchreinerORCiDGND |
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DOI: | https://doi.org/10.1109/IVNC57695.2023.10188960 |
ISBN: | 979-8-3503-0143-4 |
Parent Title (English): | 2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA |
Publisher: | IEEE |
Document Type: | conference proceeding (article) |
Language: | English |
Year of first Publication: | 2023 |
Release Date: | 2023/10/17 |
Tag: | Behavioral sciences; Carbon dioxide; Current measurement; Electron beams; Nanostructures; Silicon; Tungsten |
First Page: | 160 |
Last Page: | 162 |
Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
Begutachtungsstatus: | peer-reviewed |
research focus: | Sensorik |
Licence (German): | Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG |