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Field emission assisted micro plasma discharges at vacuum and atmospheric pressures

  • Spatially confined non-equilibrium plasmas at vacuum and atmospheric pressure in the dimensions from a few microns to one millimeter are a promising approach to the generation and maintenance of stable glow discharges. The realization of these micro-discharges or micro-plasmas enable more accurate investigations in the field of micro plasma research. We report on field emission assisted micro plasmas excited by an alternating current with frequencies up to 1 kHz. Due to the field enhancement caused by an array of Si nano-tip structures the ignition voltage of stable plasma discharges can be reduced by 30%.

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Metadaten
Author:Matthias LindnerORCiD, Dominik Berndt, Christian PrommesbergerORCiD, Christoph LangerORCiD, Rupert SchreinerORCiDGND
DOI:https://doi.org/10.1109/IVNC.2018.8520181
Parent Title (English):31st International Vacuum Nanoelectronics Conference (IVNC), 2018, Kyoto, Japan
Document Type:conference proceeding (article)
Language:English
Year of first Publication:2018
Release Date:2021/05/18
Pagenumber:2
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik
Begutachtungsstatus:peer-reviewed
research focus:Sensorik