Field emission assisted micro plasma discharges at vacuum and atmospheric pressures
- Spatially confined non-equilibrium plasmas at vacuum and atmospheric pressure in the dimensions from a few microns to one millimeter are a promising approach to the generation and maintenance of stable glow discharges. The realization of these micro-discharges or micro-plasmas enable more accurate investigations in the field of micro plasma research. We report on field emission assisted micro plasmas excited by an alternating current with frequencies up to 1 kHz. Due to the field enhancement caused by an array of Si nano-tip structures the ignition voltage of stable plasma discharges can be reduced by 30%.
Author: | Matthias LindnerORCiD, Dominik Berndt, Christian PrommesbergerORCiD, Christoph LangerORCiD, Rupert SchreinerORCiDGND |
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DOI: | https://doi.org/10.1109/IVNC.2018.8520181 |
Parent Title (English): | 31st International Vacuum Nanoelectronics Conference (IVNC), 2018, Kyoto, Japan |
Document Type: | conference proceeding (article) |
Language: | English |
Year of first Publication: | 2018 |
Release Date: | 2021/05/18 |
Pagenumber: | 2 |
Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
Begutachtungsstatus: | peer-reviewed |
research focus: | Sensorik |