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A Comparative Study of Field Emission from Pristine, Ion-treated and Tungsten Nanoparticle-decorated p-type Silicon Tips

  • The field electron emission characteristics of individual tips of a silicon field emitter array are analyzed. The array of conical‐shaped tips is fabricated on a p‐type silicon wafer by using reactive ion etching and sharpening oxidation. The tips are decorated with single tungsten nanoparticles at their apexes. Furthermore, the focused ion beam is also used to increase surface conductivity of some of the tips. Comparative measurements of field emission are performed by using the scanning anode probe field emission microscopy technique. All types of tips demonstrated emission activation consisting of a sudden current increase at a certain value of the applied voltage. Compared to the pristine tips, a noticeable reduction of the saturation effect in the current–voltage characteristics and a smaller light sensitivity for the decorated tips is found. For ion‐treated tips, saturation effects and light sensitivity are completely suppressed. Scanning electron microscopy observations reveal the formation of single nanoscale protrusions extending from the metal particles and from the apexes of bare ion‐treated tips after exposure under strong electric fields during the field emission measurements. The influence of protrusions growth on characteristics of silicon field emitter arrays is discussed.

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Metadaten
Author:Victor I. Kleshch, Pavel Serbun, Dirk Lützenkirchen-HechtORCiD, Anton S. Orekhov, Victor E. Ivanov, Christian PrommesbergerORCiD, Christoph LangerORCiD, Rupert SchreinerORCiDGND, Alexander N. Obraztsov
DOI:https://doi.org/10.1002/pssb.201800646
Parent Title (English):Physica Status Solidi B
Publisher:Wiley
Document Type:Article
Language:English
Year of first Publication:2019
Release Date:2021/01/29
Psyndex Keyword:field emission arrays; nanoparticles; silicon
Volume:256
Issue:9
Article Number:1800646
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik
Begutachtungsstatus:peer-reviewed
research focus:Sensorik
Licence (German):Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG