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Vacuum-sealed field emission electron gun

  • A compact vacuum-sealed field emission electron gun with an operation voltage below 5 kV is presented. With a 150 nm thick pyrolytic carbon membrane, a transmission of 40% at 5 kV is obtained. For more than 2500 h of continuous operation at an emission current of 100 nA, no significant increase (<50V ) and almost no degradation were found. From this measurement, a lifetime of more than 10 000 h at continuous operation with approximately a linear increase of the extraction voltage from about 545 V to about 730 V is predicted. This electron source enables application of field emitter arrays in poor vacuum or even ambient pressure. ACKNOWLEDGMENT This work was supported by the German Federal Ministry for Economic Affairs and Energy under Project No. ZF4081502GM8. C.P., R.L., M.H., and R.S. were supported by Grant No. ZF4562901GM8.

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Metadaten
Author:Michael BachmannORCiD, Felix Düsberg, Christoph LangerORCiD, Florian HerdlORCiD, Lukas Bergbreiter, Florian Dams, Natuski Miyakawa, Tobias Eggert, Andreas Pahlke, Simon EdlerORCiD, Christian PrommesbergerORCiD, Robert Damian ŁawrowskiORCiD, Matthias HausladenORCiD, Rupert SchreinerORCiDGND
DOI:https://doi.org/10.1116/1.5139316
Parent Title (English):Journal of Vacuum Science & Technology B
Publisher:AIP Publishing
Document Type:Article
Language:English
Year of first Publication:2020
Release Date:2022/03/04
Volume:38
Issue:2
Article Number:023203
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik
Begutachtungsstatus:peer-reviewed
research focus:Sensorik
Licence (German):Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG