TY - JOUR A1 - Rück, Thomas A1 - Müller, Max A1 - Jobst, Simon A1 - Weigl, Stefan A1 - Pangerl, Jonas A1 - Bierl, Rudolf A1 - Matysik, Frank-Michael T1 - Digital Twin of a Photoacoustic Trace Gas Sensor for Monitoring Methane in Complex Gas Compositions JF - Sensors and Actuators B: Chemical N2 - The digitalization of industrial processes requires smart sensor systems. Photoacoustic spectroscopy is well suited for this purpose as it allows for small-sized and low-cost trace gas analysis. However, the method is susceptible to changes in measurement conditions and standard calibration routines often fail to correct for all changes. We therefore created a Digital Twin (DT) of a photoacoustic trace gas sensor for methane and evaluated it regarding variations in gas composition (CH4, N2, O2, CO2, H2O), temperature and pressure. With a mean absolute percentage error of 0.8 % the accuracy of the sensor after DT compensation significantly exceeds the 24 % achieved based on standard calibration in nitrogen. For the first time, we can fully analytically compute the photoacoustic signal under moderate ambient conditions with an error in the ppbV range by taking a holistic approach. Assuming knowledge of the underlying energy transfer processes, the model of this Digital Twin can be adapted to any microphone based photoacoustic sensor for monitoring any analyte species. KW - Digital Twin KW - Photoacoustic spectroscopy KW - Smart sensor KW - Acoustic resonance monitoring KW - CoNRad KW - Calibration-free method Y1 - 2023 U6 - https://doi.org/10.1016/j.snb.2022.133119 N1 - Preprint unter: https://doi.org/10.2139/ssrn.4215170 ; https://opus4.kobv.de/opus4-oth-regensburg/frontdoor/index/index/docId/5417 IS - 378 ER - TY - CHAP A1 - Eiler, Julian A1 - Högl, Christina A1 - Lindner, Matthias A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Miniaturized Surface Dielectric Barrier Discharge Plasma Actuators for Application in Chemical Analysis Systems T2 - 2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA N2 - A new concept for a miniaturized planar ion source based on a surface dielectric barrier discharge (SDBD) is presented. A fabrication method based on a stamping process is described, and the plasma actuators are characterized based on their power in dependence of the applied voltage. The voltage for plasma ignition is approx. 1 kV with a maximum plasma power of 40 W/m at 3,4 kV. KW - Actuators KW - Discharges (electric) KW - Ion sources KW - Low Temperature Plasma KW - Plasma KW - Plasma Actuator KW - Plasmas KW - Surface Dielectric Barrier Discharge KW - Surface discharges KW - Vacuum systems KW - Voltage Y1 - 2023 SN - 979-8-3503-0143-4 U6 - https://doi.org/10.1109/IVNC57695.2023.10188884 SP - 40 EP - 42 PB - IEEE ER - TY - JOUR A1 - Zifarelli, Andrea A1 - Cantatore, Aldo Francesco Pio A1 - Sampaolo, Angelo A1 - Mueller, Max A1 - Rueck, Thomas A1 - Hoelzl, Christine A1 - Rossmadl, Hubert A1 - Patimisco, Pietro A1 - Spagnolo, Vincenzo T1 - Multivariate analysis and digital twin modelling: Alternative approaches to evaluate molecular relaxation in photoacoustic spectroscopy JF - Photoacoustics N2 - A comparative analysis of two different approaches developed to deal with molecular relaxation in photoacoustic spectroscopy is here reported. The first method employs a statistical analysis based on partial least squares regression, while the second method relies on the development of a digital twin of the photoacoustic sensor based on the theoretical modelling of the occurring relaxations. Methane detection within a gas matrix of synthetic air with variable humidity level is selected as case study. An interband cascade laser emitting at 3.345 µm is used to target methane absorption features. Two methane concentration ranges are explored targeting different absorptions, one in the order of part-per-million and one in the order of percent, while water vapor absolute concentration was varied from 0.3 % up to 2 %. The results achieved employing the detection techniques demonstrated the possibility to efficiently retrieve the target gas concentrations with accuracy > 95 % even in the case of strong influence of relaxation effects. KW - digital twin model KW - methane detection over a wide concentration range KW - multivariate analysis KW - Partial Least Squares Regression KW - QEPAS sensor KW - relaxation effects photoacoustic spectroscopy KW - water vapor influence on relaxation Y1 - 2023 U6 - https://doi.org/10.1016/j.pacs.2023.100564 SN - 2213-5979 VL - 33 PB - Elsevier ER - TY - CHAP A1 - Pangerl, Jonas A1 - Wittmann, Elisabeth A1 - Weigl, Stefan A1 - Müller, Max A1 - Bierl, Rudolf A1 - Matysik, Frank-Michael T1 - Using a Modulated Quantum Cascade Laser for Photoacoustic Spectra Recording of Exhaled Acetone and Main Breath Components T2 - Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES) N2 - Photoacoustic spectra of main breath components together with acetone are presented demonstrating spectral linearity towards different concentrations and compositions. The acetone 3σ detection limit at 1209 cm−1 is 0.28 ppbV Y1 - 2023 U6 - https://doi.org/10.1364/AIS.2022.ATu3G.1 PB - Optica Publishing Group ER - TY - CHAP A1 - Bartl, Mathias A1 - Buchner, Philipp A1 - Hausladen, Matthias A1 - Asgharzadehkhorasani, Ali A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Simulations and Investigations of Silicon Nanowire Field Emitters T2 - 37th International Vacuum Nanoelectronics Conference (IVNC), 15-19 July 2024, Brno, Czech Republic N2 - The emission behavior of field emission electron sources consisting of a silicon nanowire cathode, an extraction grid electrode and a planar anode was investigated based on a particle tracing simulation using FEM. The focus was on the influence of the grid geometry as well as the positioning of the grid relative to the emitters on the electron transmission. The highest transmission can be achieved with the emitter tips protruding 10 µm trough the extraction grid openings. The transmission decreases more rapidly with increasing distance between the tip and the grid the thicker the grid is. Y1 - 2024 U6 - https://doi.org/10.1109/IVNC63480.2024.10652355 SP - 1 EP - 2 PB - IEEE ER - TY - THES A1 - Berndt, Dominik T1 - Thermische Wasserstoffsensoren für den Automobilbereich N2 - Für den sicheren Betrieb eines Brennstoffzellenfahrzeugs sind Sensoren wichtig, welche die Wasserstoffkonzentration im Fahrzeuginterieur kontinuierlich überwachen, um möglichen Entzündungen bzw. Explosionen vorzubeugen. Dafür wurden von verschiedenen nationalen und internationalen Instanzen bestimmte Kriterien definiert, die Wasserstoffsensoren für einen Einsatz in Brennstoffzellenfahrzeugen erfüllen müssen. Im Jahr 2020gab es noch keinen einzigen kommerziell erhältlichen Sensor, der alle diese Kriterien bedienen konnte. In der vorliegenden Arbeit wurde für zwei verschiedene Sensoren die Eignung des thermischen Wirkprinzips für die Detektion von Wasserstoff im Kontext dieser Sicherheitskriterien untersucht. Dabei wurden mit einem MEMS-Sensor und einem Mikrodrahtsensor zwei vergleichsweise einfache Geometrien herangezogen, welche den eindimensionalen und zylindersymmetrischen Fall abbilden sollen. Für zwei dynamische Operationsmodi (gepulste Ströme und 3ω-Methode) wurden darauf aufbauend analytische Modelle basierend auf vereinfachten Sensorgeometrien entwickelt, um die Temperaturentwicklung des Sensorelements in Abhängigkeit der Zeit zu charakterisieren. Diese Studien wurden anschließend anhand von detaillierteren Modellen mithilfe von FEM-Simulationen ergänzt und spezifiziert. Darin konnte gezeigt werden, dass für den gepulsten Betrieb sowohl die Pulshöhe als auch die Zeitkonstante des gemessenen Widerstands- bzw. Temperaturpulses als Messgröße herangezogen werden kann. Beim 3ω-Betrieb konnte zudem eine starke Frequenzabhängigkeit dieser Widerstands- bzw. Temperaturcharakteristik beobachtet werden. Die analytischen und numerischen Studien wurden anschließend durch experimentelle Ergebnisse bestätigt. Im Hinblick auf die zuvor definierten Kriterien stellte sich heraus, dass die Auswertung der Zeitkonstante beim gepulsten Betrieb im Hinblick auf Sensitivität und Auflösungsgrenze der Auswertung der Pulshöhe deutlich unterlegen ist. Beim 3ω-Betrieb können durch die hochintegrierte Messumgebung deutlich höhere Genauigkeiten und Auflösungsgrenzen erzielt werden. Für den MEMS-Sensor wurde bei einer Anregungsfrequenz von 1 Hz mit 55 ppm die bislang geringste in der Literatur berichtete Auflösungsgrenze für einen thermischen Wasserstoffsensor erreicht. Der Leistungsverbrauch ist dabei im Vergleich zum Pulsbetrieb entsprechend des jeweiligen Tastgrads leicht bis mäßig erhöht, die Ansprechzeit wird bei beiden Operationsmodi maßgeblich durch die Sensorgeometrie beeinflusst. Die geometrischen Parameter der jeweiligen Sensoren haben ferner einen starken Einfluss auf die Sensitivität, womit die Divergenz in der Performance von MEMS-Chip und Drahtsensor erklärt werden kann. Es besteht ferner eine starke Temperatur- und Feuchtigkeitsabhängigkeit des Sensorsignals, welches bei beiden Operationsmodi indirekt proportional zur Wärmeleitfähigkeit des betrachteten Gasgemischs ist. Die Abhängigkeit vom definierten Umgebungsdruck ist lediglich für die Zeitkonstante relevant, bei der Pulshöhe besteht keine Druckabhängigkeit. Es konnte eine grundsätzliche Eignung des thermischen Messprinzips für den Einsatz eines Wasserstoffsensors im Automobilbereich festgestellt werden. Für eine Anwendung müssen allerdings Referenzsensoren für Temperatur, Feuchtigkeit und Druck implementiert werden und eine Kalibrierung in Abhängigkeit dieser Größen erfolgen. Der 3ωBetrieb ist aufgrund der höheren Genauigkeit zu bevorzugen. Während der MEMSSensor im Hinblick auf Sensitivität, Ansprechzeit und Leistungsaufnahme gut abschneidet, liegen die Vorteile des Mikrodrahtsensors in seiner Robustheit und der vergleichsweise einfachen Realisierbarkeit N2 - For the safe operation of a fuel cell vehicle, sensors that continuously monitor the hydrogen concentration in the vehicle interior are crucial in order to prevent possible ignitions or explosions. For this purpose, various national and international institutions have defined certain criteria that hydrogen sensors must meet for being used in fuel cell vehicles. In 2020, there was not yet a single commercially available sensor that could serve all of these criteria. In the present work, the suitability of the thermal operating principle for the detection of hydrogen in the context of these safety criteria was investigated for two different sensors. Two relatively simple geometries, a MEMS sensor and a micro-wire sensor, were used to represent the one-dimensional and cylinder-symmetric case. Analytical models based on simplified sensor geometries were subsequently developed for two dynamic operation modes (pulsed currents and 3ω-method) to characterize the temperature response of the sensor element as a function of time. These studies were then extended and specified using more detailed models based on FEM simulations. In these studies, it was shown that for pulsed operation, both the pulse height and the time constant of the measured resistance or temperature pulse can be used as a measurand. For 3ω-operation, a strong frequency dependence of these resistance or temperature characteristics was also observed. The analytical and numerical studies were subsequently confirmed by experimental results. With respect to the previously defined criteria, the evaluation of the time constant during pulsed operation was found to be significantly inferior to the evaluation of the pulse height in terms of sensitivity and resolution limit. For 3ω-operation, significantly higher accuracies and resolution limits could be achieved due to the highly integrated measurement environment. For the MEMS sensor, at an excitation frequency of 1 Hz, the lowest resolution limit for a thermal hydrogen sensor reported in the literature to date was achieved at 55 ppm. The power consumption is slightly increased compared to the pulse mode according to the corresponding duty cycle. The response time is significantly influenced by the sensor geometry for both operation modes. Furthermore, the geometrical parameters of the individual sensors have a strong influence on the sensitivity, which can explain the divergence in the performance of the MEMS chip and the micro-wire sensor. There is also a strong temperature and humidity dependence of the sensor signal, which is indirectly proportional to the thermal conductivity of the gas mixture. The dependence on the ambient pressure is only relevant for the time constant, there is no pressure dependence for the pulse height. A fundamental suitability of the thermal measurement principle for the use of a hydrogen sensor in the automotive sector could be identified. However, for an application, reference sensors for temperature, humidity and pressure must be implemented and calibration must be performed as a function of these variables. The 3ω-operation is preferred due to its higher accuracy. While the MEMS sensor performs well in terms of sensitivity, response time and power consumption, the advantages of the microwire sensor are based on its robustness and the fact that the manufacturing process is comparably easy. KW - Kraftfahrzeugtechnik KW - Brennstoffzellenfahrzeug KW - Wasserstoff KW - Gassensor KW - Sensortechnik KW - Feuchtigkeitsabhängigkeit KW - thermischer Wasserstoffsensor Y1 - 2023 UR - https://opus.bibliothek.uni-augsburg.de/opus4/frontdoor/deliver/index/docId/105227/file/Diss_Berndt.pdf CY - Regensburg ER - TY - JOUR A1 - Hausladen, Matthias A1 - Buchner, Philipp A1 - Bartl, Mathias A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Integrated multichip field emission electron source fabricated by laser-micromachining and MEMS technology JF - Journal of Vacuum Science & Technology B N2 - In this work, high-current field emission electron source chips were fabricated using laser-micromachining and MEMS technology. The resulting chips were combined with commercially available printed circuit boards (PCBs) to obtain a multichip electron source. By controlling the separate electron sources using an external current control circuit, we were able to divide the desired total current evenly across the individual chips deployed in the PCB-carrier. In consequence, we were able to show a decreased degradation due to the reduced current load per chip. First, a single electron source chip was measured without current regulation. A steady-state emission current of 1 mA with a high stability of ±1.3% at an extraction voltage of 250 V was observed. At this current level, a mean degradation slope of −0.7 μA/min with a nearly perfect transmission ratio of 99% ± 0.4% was determined. The measurements of a fully assembled multichip PCB-carrier electron source, using a current control circuit for regulation, showed that an even distribution of the desired total current led to a decreased degradation. This was determined by the increase in the required extraction voltage over time. For this purpose, two current levels were applied to the electron source chips of the PCB-carrier using an external current control circuit. First, 300 μA total current was evenly distributed among the individual electron source chips followed by the emission of 300 μA per electron source chip. This allows the observation of the influence of a distributed and nondistributed total current, carried by the electron source chips. Thereby, we obtained an increase in the mean degradation slope from +0.011 V/min (300 μA distributed) to +0.239 V/min (300 μA per chip), which is approximately 21 times higher. Moreover, our current control circuit improved the current stability to under 0.1% for both current levels, 300 μA distributed and 300 μA per chip. KW - MEMS technology KW - Field emitter arrays KW - Electron sources KW - Laser micromachining Y1 - 2024 U6 - https://doi.org/10.1116/6.0003233 VL - 42 IS - 1 PB - AIP Publishing ER - TY - JOUR A1 - Remškar, Maja A1 - Jelenc, Janez A1 - Czepurnyi, Nikolai A1 - Malok, Matjaž A1 - Pirker, Luka A1 - Schreiner, Rupert A1 - Hüttel, Andreas K. T1 - Modulations of the work function and morphology of a single MoS2 nanotube by charge injection JF - Nanoscale Advances N2 - Both the miniaturization of transistor components and the ongoing investigation of material systems with potential for quantum information processing have significantly increased current interest of researchers in semiconducting inorganic nanotubes. Here we report on an additional outstanding aspect of these nanostructures, namely the intrinsic coupling of electronic and mechanical properties. We observe electronic and morphology changes in a single MoS2 nanotube, exposed to charge injections by means of an atomic-force-microscopy tip. An elliptic deformation of the nanotube and helical twisting of the nanotube are visible, consistent with the reverse piezoelectric effect. Work-function changes are found to be dependent on the polarity of the injected carriers. An unexpected long-term persistence of the shape deformations is observed and explained with accumulation of structural defects and the resultant strain, which could cause a memory-like charge confinement and a long lasting modulation of the work function. Y1 - 2024 U6 - https://doi.org/10.1039/d4na00490f SN - 2516-0230 PB - Royal Society of Chemistry (RSC) ER - TY - BOOK A1 - Galka, Stefan T1 - AutoStore - was Nutzer über das System berichten können BT - Ergebnisse einer Online-Umfrage KW - Kleinteil KW - Lager KW - Intralogistik KW - Umfrage Y1 - 2020 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:bvb:898-opus4-6463 SN - 978-3-9818209-9-7 CY - Regensburg ER - TY - CHAP A1 - Escher, Lukas A1 - Rück, Thomas A1 - Jobst, Simon A1 - König, Martin A1 - Bierl, Rudolf T1 - Design and Characterization of a Low-Cost Photoacoustic Sensor for NO2 Using Lateral Illumination and Background Suppression T2 - Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP): 11–15 July 2022, Vancouver, British Columbia, Canada N2 - We introduce a low-cost photoacoustic NO2 sensor based on lateral LED illumination and optical background signal compensation. The 3σ limit of detection (LOD) was identified to be 24 ppbV. Y1 - 2022 SN - 978-1-957171-09-8 U6 - https://doi.org/10.1364/3D.2022.JTu2A.10 PB - Optica Publishing Group ER - TY - INPR A1 - Pangerl, Jonas A1 - Sukul, Pritam A1 - Rück, Thomas A1 - Escher, Lukas A1 - Miekisch, Wolfram A1 - Bierl, Rudolf A1 - Matysik, Frank-Michael T1 - Photoacoustic Trace-Analysis of Breath Isoprene and Acetone Via Interband- and Quantum Cascade Lasers N2 - This research presents two laser-based photoacoustic approaches for analyzing exhaled breath isoprene and acetone. The integration of a PTR-ToF-MS as a reference device ensured the reliability and accuracy of the PAS systems that is based on an ICL for isoprene and a QCL for acetone detection. The calibration yielded limits of detection of 26.9 ppbV and 1.7 ppbV, respectively, and corresponding normalized noise equivalent absorption coefficients (NNEAs) of 5.0E-9 Wcm-1Hz-0.5 and 4.9E-9 Wcm-1Hz-0.5. Laboratory as well as real breath sample measurements from alveolar breath revealed a robust system performance, with only one outlier within the static isoprene measurements. However, discrepancies emerged under dynamic breath sampling conditions, emphasizing the need for further optimization. Especially by knowing the dynamic nature and endogenous origin of exhaled isoprene our findings highlight the potential of breath analysis for non-invasive physio-metabolic and pathophysiological monitoring towards point-of-care devices. KW - photoacoustic spectroscopy KW - breath analysis/profiling KW - real-time mass spectroscopy KW - isoprene KW - acetone Y1 - 2024 U6 - https://doi.org/10.2139/ssrn.4834735 PB - Elsevier / SSRN ER - TY - JOUR A1 - Pangerl, Jonas A1 - Sukul, Pritam A1 - Rück, Thomas A1 - Escher, Lukas A1 - Miekisch, Wolfram A1 - Bierl, Rudolf A1 - Matysik, Frank-Michael T1 - Photoacoustic trace-analysis of breath isoprene and acetone via interband- and Quantum Cascade Lasers JF - Sensors and Actuators: B. Chemical N2 - This research presents two laser-based photoacoustic approaches for analyzing exhaled breath isoprene and acetone. The integration of a PTR-ToF-MS as a reference device ensured the reliability and accuracy of the photoacoustic systems that is based on an ICL for isoprene and a QCL for acetone detection. The calibration yielded limits of detection of 26.9 ppbV and 1.7 ppbV, respectively, and corresponding normalized noise equivalent absorption coefficients (NNEAs) of 5.0E-9 Wcm 1Hz 0.5 and 4.9E-9 Wcm 1Hz 0.5. Laboratory as well as real breath sample measurements from alveolar breath revealed a robust system performance, with only one outlier within the static isoprene measurements. However, discrepancies emerged under dynamic breath sampling conditions, emphasizing the need for further optimization. Especially by knowing the dynamic nature and endogenous origin of exhaled isoprene our findings highlight the potential of breath analysis for non-invasive physio-metabolic and pathophysiological monitoring towards point-of-care devices KW - Photoacoustic spectroscopy KW - Breath analysis/profiling KW - Real-time mass spectrometry KW - Isoprene KW - Acetone Y1 - 2025 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:bvb:898-opus4-77024 N1 - Corresponding author der OTH Regensburg: Jonas Pangerl VL - 424 PB - Elsevier ER - TY - GEN A1 - Esper, Lukas A1 - Noster, Ulf A1 - Schultheiss, Ulrich A1 - Bund, Andreas T1 - Quasi-in-Situ Analysis of Electropolished Additively Manufactured Stainless Steel Surfaces T2 - ECS Meeting Abstracts, F01: Advances in Industrial Electrochemistry and Electrochemical Engineering N2 - Progress in additive manufacturing is leading to the emergence of new areas of application. Laser Powder Bed Fusion (L-PBF) is increasingly used for the development of metallic medical implants, but for high-risk implants like vascular support structures (stents), surface quality is critical to ensure successful implantation without harming the surrounding tissue and ensure the patients’ health. Therefore, enhancing the surface quality is crucial. Electropolishing is a method for removing surface roughness by smoothing out micro-peaks and valleys. However, L-PBF structures have a high surface roughness due to metal particles adhering on the surface. To achieve a smooth surface for additively manufactured implants like stents using electropolishing, the removal of these particles needs to be studied in more detail. The objective of this study is to examine the electropolishing mechanism of 316L stainless steel samples additively manufactured through Laser Powder Bed Fusion (L-PBF). The main objective is to investigate the removal properties and surface characteristics during electropolishing. To achieve this, various surfaces were characterized for morphology and roughness during Hull cell experiments. Markings are utilized on the Hull cell sample surfaces to identify points of interest during quasi-in-situ measurements. The surfaces are then analyzed after multiple time steps, applying different currents to investigate particle dissolution. The surface characteristics are analyzed through scanning electron microscopy, and surface roughness is analyzed using laser scanning microscopy. The results show that the electropolishing process preferentially removes the adhering particles present on the surface of the samples. Increasing the current density results in faster particle dissolution and a smoother surface (see Figure 1a and b). The mechanism of material removal of various surface features, as shown in Figure 1 (red circle, yellow arrow and red square), was assessed based on the experimental results of the surface structures seen on the SEM images. It was found that different surface features were removed during the experiment at different polishing times and current densities. The amount of charge flowed was found to correlate with surface morphology. Based on the obtained results, various surface features (such as large adherent particles, agglomerates of smaller particles, and valleys) and their changes with increasing test duration and current density were observed by quasi-in situ analyses. A reduction in the diameter of round particles adhering to the surface was observed at both low and higher current densities (see Figure 1a red circle a). Increasing the polishing time resulted in leveling of both large particles and valleys (see Figure 1b red square). Also, dissolution of agglomerates of smaller particles occurred at different polishing times as a function of current density and polishing time (see Figure 1a yellow arrow) are observed. Smoothed surface structures can be observed in regions with equivalent surface charge density (see Figure 2). As a result, comparable surface morphologies may appear at the same area charge density, irrespective of a specific current density. So, it may be adequate to only consider the amount of charge flowed to describe the electropolishing of additive materials. In conclusion, comprehending the dissolution characteristics of particles on L-PBF surfaces is essential for attaining satisfactory surface finish in electropolishing. The results of this study offer valuable perspectives into the electropolishing mechanism of additively manufactured 316L stainless steel and can guide future investigations on surface finishing and polishing of additive manufactured implants like stents. Figure 1 KW - General Earth and Planetary Sciences KW - General Environmental Science Y1 - 2023 U6 - https://doi.org/10.1149/MA2023-02241342mtgabs SN - 2151-2043 VL - MA2023-02 SP - 1342 EP - 1342 PB - The Electrochemical Society ER - TY - CHAP A1 - Escher, Lukas A1 - Müller, Max A1 - Rück, Thomas A1 - Jobst, Simon A1 - Bierl, Rudolf T1 - Digitaler Zwilling photoakustischer Spurengassensoren zur Prozessüberwachung T2 - 16. Dresdner Sensor-Symposium 2022: Vorträge N2 - Stickstoffdioxid (NO2) wird hauptsächlich durch anthropogene Verbrennungsprozesse in Verkehr und Industrie in die Umgebungsluft eingebracht [1]. Die stark reaktive, oxidative Wirkung von NO2 kann bei Exposition mit höheren Konzentrationen Reizungen und allergische Reaktionen in den Atemwegen hervorrufen. Weiter führt NO2 zur Bildung von saurem Regen, Smog und Ozon (O3) die sich ebenso negativ auf die menschliche Gesundheit und Umwelt auswirken [2,3]. Aufgrund dieser Effekte wird die Spurengaskonzentration von NO2 in der Luft in Deutschland an ausgewählten, verkehrsreichen Orten gemessen. Y1 - 2022 SN - 978-3-9819376-7-1 U6 - https://doi.org/10.5162/16dss2022/3.3 PB - AMA (Association for Sensors + Measurement) ER - TY - JOUR A1 - Rück, Thomas A1 - Pangerl, Jonas A1 - Escher, Lukas A1 - Jobst, Simon A1 - Müller, Max A1 - Bierl, Rudolf A1 - Matysik, Frank-Michael T1 - Kinetic cooling in mid-infrared methane photoacoustic spectroscopy: A quantitative analysis via digital twin verification JF - Photoacoustics N2 - This study presents a detailed quantitative analysis of kinetic cooling in methane photoacoustic spectroscopy, leveraging the capabilities of a digital twin model. Using a quantum cascade laser tuned to 1210.01 cm⁻¹, we investigated the effects of varying nitrogen-oxygen matrix compositions on the photoacoustic signals of 15 ppmV methane. Notably, the photoacoustic signal amplitude decreased with increasing oxygen concentration, even falling below the background signal at oxygen levels higher than approximately 6 %V. This phenomenon was attributed to kinetic cooling, where thermal energy is extracted from the surrounding gas molecules rather than added, as validated by complex vector analysis using a previously published digital twin model. The model accurately reproduced complex signal patterns through simulations, providing insights into the underlying molecular mechanisms by quantifying individual collision contributions. These findings underscore the importance of digital twins in understanding the fundamentals of photoacoustic signal generation at the molecular level. Y1 - 2024 U6 - https://doi.org/10.1016/j.pacs.2024.100652 VL - 40 PB - Elsevier ER - TY - JOUR A1 - Jobst, Simon A1 - Recum, Patrick A1 - Écija-Arenas, Ángela A1 - Moser, Elisabeth A1 - Bierl, Rudolf A1 - Hirsch, Thomas T1 - Semi-Selective Array for the Classification of Purines with Surface Plasmon Resonance Imaging and Deep Learning Data Analysis JF - ACS sensors N2 - In process analytics or environmental monitoring, the real-time recording of the composition of complex samples over a long period of time presents a great challenge. Promising solutions are label-free techniques such as surface plasmon resonance (SPR) spectroscopy. They are, however, often limited due to poor reversibility of analyte binding. In this work, we introduce how SPR imaging in combination with a semi-selective functional surface and smart data analysis can identify small and chemically similar molecules. Our sensor uses individual functional spots made from different ratios of graphene oxide and reduced graphene oxide, which generate a unique signal pattern depending on the analyte due to different binding affinities. These patterns allow four purine bases to be distinguished after classification using a convolutional neural network (CNN) at concentrations as low as 50 μM. The validation and test set classification accuracies were constant across multiple measurements on multiple sensors using a standard CNN, which promises to serve as a future method for developing online sensors in complex mixtures. KW - surface plasmon resonance imaging KW - functional surface KW - graphene oxide KW - reduced graphene oxide KW - 2D materials KW - pattern recognition KW - small-molecule sensing Y1 - 2023 U6 - https://doi.org/10.1021/acssensors.3c01114 VL - 8 IS - 9 SP - 3530 EP - 3537 PB - American Chemical Society ER - TY - CHAP A1 - Hausler, Peter A1 - Wunderlich, Lukas A1 - Fischer, Johannes A1 - Pfab, Christina A1 - Heckscher, Simon A1 - Hirsch, Thomas A1 - Bierl, Rudolf T1 - Surface plasmon resonance imaging for detection of drug metabolites in water T2 - Proceedings of SPIE, Optical Sensors 2019, 1 - 4 April 2019, Prague, Czech Republic N2 - The analysis of surface water, groundwater, drinking water as well as sewage is important to get information about the contamination of the water cycle. Currently, these time-consuming investigations require special equipment, like for example hyphenated mass spectrometry. Surface plasmon resonance (SPR) is a faster alternative as it is highly sensitive to changes in the dielectric medium next to a thin metal layer and makes it a quasi-universal detector. Therefore, and due to the labelfree nature, SPR is a widely used sensing tool for real‐time monitoring of molecular interactions of various analytes. SPR imaging (SPRi) has several advantages to standard surface plasmon resonance, as it allows to observe many analytes in parallel as well as the integration of referencing technologies. However, the homogenous illumination of a large area (several millimeters) with a small light source is challenging and demands new approaches. Allopurinol, a drug used to lower the blood concentration of urate and hence decrease the affection of gout, gets metabolized to oxipurinol in the body and dropped out almost entirely by urinary excretion. After wastewater treatment, concentrations of oxipurinol up to 21.7 μg•L-1 are detected. Further tracking of oxipurinol in the urban water cycle showed its presence in rivers and streams or even in groundwater. Therefore, the high biological stability of oxipurinol allows this molecule to be used as a marker for domestic wastewater in the environment. For the detection of oxipurinol by SPR graphene was used as receptive layer, as the analyte can bind via π-stacking to this surface. An SPRi technique was developed and compared to conventional SPR system for the detection of oxipurinol. Y1 - 2019 U6 - https://doi.org/10.1117/12.2522324 SN - 0277-786X VL - Vol. 11028 ER - TY - CHAP A1 - Hausler, Peter A1 - Roth, Carina A1 - Aumer, F. A1 - Vitzthumecker, Thomas A1 - Genslein, Christa A1 - Hirsch, Thomas A1 - Bierl, Rudolf T1 - Miniaturisiertes Sensorsystem zur Oberflächenplasmonenresonanzspektroskopie T2 - 118. Jahrestagung der deutschen Gesellschaft für angewandte Optik (DGaO), 6.-10. Juni 2017, Dresden N2 - Die Oberflächenplasmonenresonanzspektroskopie (SPR) wird aufgrund ihrer Vorzüge der zerstörungs- und markierungsfreien Messung, sowie der hohen Sensitivität sehr erfolgreich im Labormaßstab eingesetzt. Aufgrund der hohen Kosten geschieht dies bislang hauptsächlich in der Bioanalytik und dem Wirkstoffscreening. Gezeigt wird ein Ansatz, mit dem diese Technologie auf ein ultrakompaktes, kostengünstiges Sensorsystem übertragen wird, welches in der Lage ist, hoch-sensitiv Änderungen im Brechungsindex von 10-6 Einheiten (RIU) zu detektieren. Für Wasser bewirkt eine Temperaturschwankung von 1 K bereits eine Änderung von 1 mRIU. Daher wird durch ein integriertes Referenzsystem, sowie die Miniaturisierung erreicht, dass das System gegenüber Temperaturschwankungen, weitestgehend stabil ist. In dem MOEMS wird anstatt der konventionellen 1-Punkt bzw. 2-Punkt Messung ein bildgebendes Verfahren angewendet. Die Sensorfläche von 15 x 15 mm wird dabei mit einem handelsüblichen 4 Mio. Pixel CMOS Sensor ausgewertet. Um verlässliche Datenpunkte zu erhalten benötigt man eine Fläche von 10 x 10 Pixel. Demzufolge können auf dem Sensor theoretisch bis zu 40.000 Sensorspots parallel ausgewertet werden. KW - Messtechnik KW - Optische Systeme KW - Spektroskopie Y1 - 2017 ER - TY - CHAP A1 - Hausler, Peter A1 - Genslein, Christa A1 - Roth, Carina A1 - Vitzthumecker, Thomas A1 - Hirsch, Thomas A1 - Bierl, Rudolf T1 - Miniaturized Surface Plasmon Resonance based Sensor System T2 - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS, Funchal, Madeira, Portugal N2 - We describe the miniaturization of the Surface Plasmon Resonance (SPR) technology which mainly finds its applications in pharmaceutical screening and biotechnology so far. SPR spectroscopy is a label-free, non-destructive and highly sensitive measurement principle detecting changes in the refractive index in striking distance to a gold surface. A transfer of this technology to a miniaturized sensor will broaden the range of possible applications. A promising feature which is included in the miniaturized system is the angle-dependent recording of the SPR signals without moving parts. Commercial SPR assays are mainly working with a small number of sensing spots. In contrast, the SPR imaging system shown here will allow to use an array of many sensing spots. In combination with chemical receptors designed as an artificial nose, the simultaneous detection of many analytes is envisioned for future applications. KW - Surface Plasmon Resonance Spectroscopy KW - Sensor KW - SPR-imaging KW - Miniaturization KW - Micro-Opto-Electro-Mechanical Systems Y1 - 2018 SN - 978-989-758-286-8 U6 - https://doi.org/10.5220/0006555400630066 SP - 63 EP - 66 PB - SciTePress ER - TY - JOUR A1 - Genslein, Christa A1 - Hausler, Peter A1 - Kirchner, Eva-Maria A1 - Bierl, Rudolf A1 - Baeumner, Antje J. A1 - Hirsch, Thomas T1 - Graphene-enhanced plasmonic nanohole arrays for environmental sensing in aqueous samples JF - Beilstein Journal of Nanotechnology N2 - The label-free nature of surface plasmon resonance techniques (SPR) enables a fast, specific, and sensitive analysis of molecular interactions. However, detection of highly diluted concentrations and small molecules is still challenging. It is shown here that in contrast to continuous gold films, gold nanohole arrays can significantly improve the performance of SPR devices in angle-dependent measurement mode, as a signal amplification arises from localized surface plasmons at the nanostructures. This leads consequently to an increased sensing capability of molecules bound to the nanohole array surface. Furthermore, a reduced graphene oxide (rGO) sensor surface was layered over the nanohole array. Reduced graphene oxide is a 2D nanomaterial consisting of sp2-hybridized carbon atoms and is an attractive receptor surface for SPR as it omits any bulk phase and therefore allows fast response times. In fact, it was found that nanohole arrays demonstrated a higher shift in the resonance angle of 250–380% compared to a continuous gold film. At the same time the nanohole array structure as characterized by its diameter-to-periodicity ratio had minimal influence on the binding capacity of the sensor surface. As a simple and environmentally highly relevant model, binding of the plasticizer diethyl phthalate (DEP) via π-stacking was monitored on the rGO gold nanohole array realizing a limit of detection of as low as 20 nM. The concentration-dependent signal change was studied with the best performing rGO-modified nanohole arrays. Compared to continuous gold films a diameter-to-periodicity ratio (D/P) of 0.43 lead to a 12-fold signal enhancement. Finally, the effect of environmental waters on the sensor was evaluated using samples from sea, lake and river waters spiked with analytically relevant amounts of DEP during which significant changes in the SPR signal are observed. It is expected that this concept can be successfully transferred to enhance the sensitivity in SPR sensors. KW - diethyl phthalate KW - environmental sensing KW - nanohole array KW - nanosphere lithography KW - surface plasmon resonance Y1 - 2016 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:bvb:355-epub-398623 IS - 7 SP - 1564 EP - 1573 ER - TY - CHAP A1 - Hausler, Peter A1 - Genslein, Christa A1 - Roth, Carina A1 - Hirsch, Thomas A1 - Bierl, Rudolf T1 - Mikro-Opto-Elektro-Mechanisches Sensorsystem zur Oberflächenplasmonenresonanzspektroskopie T2 - MikroSystemTechnik Kongress 2017 : MEMS, Mikroelektronik, Systeme 23.-25. Oktober 2017 in München N2 - Gezeigt wird die Miniaturisierung eines Messsystems für Oberflächenplasmonenresonanzspektroskopie (SPR), einer markierungs-, sowie zerstörungsfreien als auch hoch sensitiven Technologie. Aufgrund der hohen Kosten klassischer SPR-Geräte wird sie bisher jedoch vornehmlich in der Bio- und Medizintechnik eingesetzt. Das Messprinzip ermöglicht die Erfassung von Brechungsindexänderungen nahe einer Oberfläche. Der Transfer dieser Technologie von Laborgeräten hin zu einem miniaturisierten Sensorsystem senkt die Kosten, macht das System robuster und ermöglicht so ein wesentlich breiteres Anwendungsspektrum. Ein sehr vielversprechendes Merkmal des hier vorgestellten Systems ist die Möglichkeit den SPR-Effekt winkelabhängig zur Lichtquelle ohne bewegliche Bauteile zu verfolgen. The miniaturization of Surface Plasmon Resonance (SPR) technology, which mainly finds its applications in pharmaceutical screening and biotechnology so far, is described. SPR spectroscopy is a label-free, non destructive and highly sensitive measurement principle which is capable of detecting changes in the refractive index in striking distance to a gold surface. A transfer of this technology to a miniaturized sensor will broaden the range of possible applications. A promising feature which is included in the miniaturized system is the angle-dependent recording of the SPR signals without moving parts. KW - Bewegungselement KW - Biotechnik KW - Brechungsindex KW - Goldoberfläche KW - Laborgerät KW - Lichtquelle KW - Medizintechnik KW - Messprinzip KW - Messsystem KW - Miniaturisierung KW - Oberflächenplasmon KW - Oberflächenplasmonenresonanzspektroskopie KW - pharmazeutisches Screening KW - Sensorsystem KW - Spektroskopie Y1 - 2017 SN - 978-3-8007-4491-6 IS - CD-ROM SP - 645 EP - 647 PB - VDE-Verlag CY - Berlin ER - TY - CHAP A1 - Genslein, Christa A1 - Hauser, Peter A1 - Kirchner, Eva-Maria A1 - Bierl, Rudolf A1 - Baeumner, Antje J. A1 - Hirsch, Thomas T1 - Detection of small molecules with surface plasmon resonance by synergistic plasmonic effects of nanostructured surfaces and graphene T2 - SPIE Proceedings, Plasmonics in Biology and Medicine XIV, 2017, San Francisco, California N2 - Surface plasmon resonance depends on the dielectric medium at the vicinity and makes it a quasi-universal detector. Therefore, and due to the label-free nature, SPR is a widely used sensing tool for real‐time monitoring molecular interactions of various analytes. However, detection of highly diluted analytes and small molecules (< 400 Da) is still challenging. Gold nanohole arrays provide plasmonic hotspots with improved surface sensitivity and 2D carbon nanomaterials enable binding near the surface. Both effects together are promising in the development of SPR sensors for the efficient determination of small molecules. Graphene is known for efficient binding of molecules with delocalized aromatic π-systems. Additionally, the electromagnetic field is locally enhanced and modulated by the interaction of graphene photonics with the plasmonics of metal nanostructures. The advantages of chemical vapor deposition (CVD) graphene over reduced graphene oxide (rGO) is illustrated by a proof of concept study. In comparison to substrates consisting of a continuous film the surface sensitivity is enhanced for a nanohole arrays and further improved for CVD graphene functionalization in contrast to rGO. The feasibility of the sensor was demonstrated for the detection of adenine down to a concentration of 0.9 μM. Y1 - 2017 U6 - https://doi.org/10.1117/12.2252256 VL - 10080 IS - 1008001F ER - TY - CHAP A1 - Hausler, Peter A1 - Holler, Sven A1 - Hirsch, Thomas A1 - Bierl, Rudolf T1 - High integrated miniaturized sensor based on Surface Plasmon Resonance T2 - International Biosensor Conference, 11th Workshop on Biosensors & Bioanalytical Microtechniques in Environmental, Food & Clinical Analysis, BBMEC 11, 26.-30. September 2015, Regensburg, Germany Y1 - 2015 ER - TY - CHAP A1 - Hausler, Peter A1 - Holler, Sven A1 - Hirsch, Thomas A1 - Bierl, Rudolf T1 - Miniaturisierte Oberflächenplasmonenresonanz Sensorplattform T2 - MEMS, Mikroelektronik, Systeme, MikroSystemTechnik Kongress 2015, 26.- 28. Oktober 2015, Karlsruhe, proceedings Y1 - 2015 SN - 978-3-8007-4100-7 PB - VDE Verlag CY - Berlin ER - TY - JOUR A1 - Knörzer, S. A1 - Hiller, Karl-Anton A1 - Brandt, M. A1 - Niklas, Andreas A1 - Putzger, Jürgen A1 - Monkman, Gareth J. A1 - Danilov, Sergey N. A1 - Ganichev, Sergey D. A1 - Schulz, Irene A1 - Schmalz, Gottfried T1 - Detection of pulsed blood flow through a molar pulp chamber and surrounding tissue in vitro JF - Journal of Clinical Oral Investigations N2 - OBJECTIVES Due to severe limitations of dental pulp sensitivity tests, the direct recording of pulsed blood flow, using photoplethysmography (PPG), has been proposed. In vivo evaluation is methodologically difficult and in vitro models have hitherto been adversely influenced by shortcomings in emulating the in vivo situation. Consequently, the aim of this study was to test an improved data acquisition system and to use this configuration for recording pulsed blood in a new model. MATERIALS AND METHODS We introduced a PPG signal detection system by recording signals under different blood flow conditions at two wavelengths (625 and 940 nm). Pulsed blood flow signals were measured using an in vitro model, containing a molar with a glass pulp and a resin socket, which closely resembled in vivo conditions with regard to volumetric blood flow, pulp anatomy, and surrounding tissue. RESULTS The detection system showed improved signal strength without stronger blanketing of noise. On the tooth surface, it was possible to detect signals emanating from pulsed blood flow from the glass pulp and from surrounding tissue at 625 nm. At 940 nm, pulp derived signals were recorded, without interference signals from surrounding tissue. CONCLUSION The PPG-based method has the potential to detect pulsed blood flow in small volumes in the pulp and (at 625 nm) also in adjacent tissues. CLINICAL RELEVANCE The results show the need for clear differentiation of the spatial origins of blood flow signals of any vitality test method to be applied to teeth. KW - Dental Pulp KW - Dental Pulp Cavity KW - Dental Pulp Test KW - Laser-Doppler Flowmetry KW - Molar Y1 - 2019 U6 - https://doi.org/10.1007/s00784-018-2530-y VL - 23 IS - 3 SP - 1121 EP - 1132 PB - Springer Nature ER - TY - JOUR A1 - Zimmermann, Klaus A1 - Böhm, Valter A1 - Becker T.I., A1 - Chavez Vega, Jhohan Harvey A1 - Kaufhold, Tobias A1 - Monkman, Gareth J. A1 - Sindersberger, Dirk A1 - Diermeier, Andreas A1 - Prem, Nina T1 - Mechanical Characterization of the Field-Dependent Properties of Magnetoactive Polymers and Integrated Electrets for their Application in Soft Robotics JF - International Scientific Journal "Problems of Mechanics" Y1 - 2017 SN - 1512-0740 VL - 69 IS - 4 ER - TY - CHAP A1 - Krysztof, Michał A1 - Urbański, Paweł A1 - Grzebyk, Tomasz A1 - Hausladen, Matthias A1 - Schreiner, Rupert T1 - MEMS X-Ray Source: Electron Emitter Development T2 - 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS): 12-15 Dec. 2022, Salt Lake City, UT, USA N2 - The article presents a fabrication process and characterization of silicon emitters designed for MEMS X-ray source. The emitters, made of p-type and n-type silicon, were prepared by a modified laser micromachining process. Both types of emitters worked without any carbon nanotube coverage, which was the case in the previous realization of electron emitters. The p-type emitter gave smaller electron beam currents (<50 nA) with stable emission in a saturation region. The n-type emitter provides higher emission currents (>1 µA) not limited by saturation region, but with higher fluctuations. The final choice of emitter will be adjusted for different applications. KW - Micromechanical devices KW - MEMS KW - X-ray source KW - electron emitter KW - X-ray radiation Y1 - 2022 U6 - https://doi.org/10.1109/PowerMEMS56853.2022.10007563 SP - 248 EP - 251 PB - IEEE ER - TY - JOUR A1 - Weber, Karsten A1 - Frommeld, Debora A1 - Gerhards, Helene A1 - Krug, Henriette A1 - Kokott, Linda Ellen A1 - Bittner, Uta T1 - Speaking about enhancement – methodological issues and historical examples JF - American Journal of Bioethics Neuroscience Y1 - 2020 U6 - https://doi.org/10.1080/21507740.2020.1831650 VL - 11 IS - 4 SP - 254 EP - 256 ER - TY - JOUR A1 - Prommesberger, Christian A1 - Bachmann, Michael A1 - Düsberg, Felix A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Hofmann, Martin A1 - Pahlke, Andreas A1 - Schreiner, Rupert T1 - Regulation of the Transmitted Electron Flux in a Field-Emission Electron Source Demonstrated on Si Nanowhisker Cathodes JF - IEEE Transactions on Electron Devices N2 - We report on a method to stabilize the transmitted electron flux in a field-emission electron source using an external regulation circuit. The electron source was realized with an array of silicon (Si) nanowhiskers on the top of elongated pillar structures, a mica spacer, and an extraction grid made of Si. As for most applications, the emitted electron current from the cathode is not as crucial as the transmitted electron flux through the extraction grid toward the anode. We investigated a method which allows the regulation directly by the emitted electron flux and not merely on the cathode current. By using this method, we were able to stabilize the emitted electron flux of our electron source down to values below 1%. Simultaneously, it was shown that there is the possibility to stabilize the influencing value in the real application as well. The effectiveness of this method was demonstrated successfully with an X-ray source setup. The measured X-ray photon count rate was stabilized to a standard deviation of 0.30% at a pressure of 1 × 10 -7 mbar. Even in harsh environment of 2 × 10 -5 mbar, a stabilization of the X-ray photon count rate down to a value of 0.63% was achieved. KW - Cathodes KW - Nanostructured devices KW - Current measurement KW - Photonics KW - Electron sources KW - Emissions KW - Voltage measurement Y1 - 2017 U6 - https://doi.org/10.1109/TED.2017.2763239 SN - 5128-5133 VL - 64 IS - 12 PB - IEEE ER - TY - JOUR A1 - Breuer, Janis A1 - Bachmann, Michael A1 - Düsberg, Felix A1 - Pahlke, Andreas A1 - Edler, Simon A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert A1 - Serbun, Pavel A1 - Lützenkirchen-Hecht, Dirk T1 - Extraction of the current distribution out of saturated integral measurement data of p-type silicon field emitter arrays JF - Journal of Vacuum Science and Technology B N2 - At the moment, only complicated techniques are known for the determination of array properties of field emitter arrays such as the number of active tips, the current distribution, or the individual tip radii. In this work, a method for extracting these parameters from integral measurement data is presented. A model describing the characteristics of a single emitter, including the saturation as a function of the applied voltage and the emitter radius, is developed. It is shown that experimental data of field emitter arrays can be represented as the sum of these functions and the characteristic parameters can be fitted to field emission data of an array. Using this method, the values of the radii as well as the parameters of distribution models can be determined directly. Analysis of experimental data from p-type Si emitter arrays shows that only 1–2% of the tips contribute significantly. Y1 - 2018 U6 - https://doi.org/10.1116/1.5035189 VL - 36 IS - 5 PB - AIP Publishing ER - TY - JOUR A1 - Edler, Simon A1 - Bachmann, Michael A1 - Breuer, Janis A1 - Dams, Florian A1 - Düsberg, Felix A1 - Hofmann, Martin A1 - Jakšič, Jasna A1 - Pahlke, Andreas A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Schreiner, Rupert T1 - Influence of adsorbates on the performance of a field emitter array in a high voltage triode setup JF - Journal of Applied Physics N2 - In the present work, black-silicon field emitter arrays (FEAs) are investigated regarding the influence of residual gas pressure on the characteristics and lifetime in the high voltage triode setup. Current-voltage-characteristics at different pressure levels are recorded and show a decreasing emission current with rising pressure. This decrease can be explained by an increase of the work function and charging of the emitter surface caused by adsorbates. The emission current can be restored to its initial value by heating of the FEA up to 110 °C during active emission. With this regeneration procedure, an extended lifetime from about 20 h to 440 h at a residual gas pressure of 10−5 mbar is achieved. Y1 - 2017 U6 - https://doi.org/10.1063/1.4987134 VL - 122 ER - TY - JOUR A1 - Bachmann, Michael A1 - Dams, Florian A1 - Düsberg, Felix A1 - Hofmann, Martin A1 - Pahlke, Andreas A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Schreiner, Rupert A1 - Serbun, Pavel A1 - Lützenkirchen-Hecht, Dirk A1 - Müller, Günter T1 - Extraction of the characteristics of current-limiting elements from field emission measurement data JF - Journal of Vacuum Science & Technology B N2 - In this contribution, the authors will present an algorithm to extract the characteristics of nonideal field emission circuit elements from saturation-limited field emission measurement data. The method for calculating the voltage drop on current-limiting circuit elements is based on circuit theory as well as Newton's method. Since the only assumption the authors make on the current-limiting circuit is a connection in series, this method is applicable to most field emission data showing saturation. To be able to determine the significance of any parameter output, the uncertainties of data and extracted parameters as well as the parameter correlations are fully taken into account throughout the algorithm. N-type silicon samples with varying external serial resistors are analyzed. All results show a good agreement to the nominal resistor values. Additionally, several p-type samples are analyzed, showing a diodelike behavior. The extracted current-limiting characteristics of the p-type samples are in good agreement with a pn-junction model. The stability of the emission current of the p-type samples is measured by constant voltage measurements and compared to the extracted current-limiting characteristics. The application of the algorithm to measurement data shows that the given algorithm is a valuable tool to analyze field emission measurement data influenced by nonemissive processes. Y1 - 2017 U6 - https://doi.org/10.1116/1.4971768 VL - 35 IS - 2 ER - TY - CHAP A1 - Langer, Christoph A1 - Hausladen, Matthias A1 - Prommesberger, Christian A1 - Ławrowski, Robert Damian A1 - Bachmann, Michael A1 - Düsberg, Felix A1 - Pahlke, Andreas A1 - Shamonin (Chamonine), Mikhail A1 - Schreiner, Rupert T1 - Field emission current investigation of p-type and metallized silicon emitters in the frequency domain T2 - International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan N2 - We investigated two different field emitter arrays consisting of 10×10 p-type and 10×10 undoped Au-coated high aspect ratio silicon tips. The I-V characterization of the p-type sample showed a pronounced saturation for voltages higher than 500 V and a maximum emission current of 39 nA. The metallized sample revealed a FN-like emission up to several μA. The metallized and the p-type sample operating below the saturation region showed high current fluctuations of ±16%. Whereas, the metallized sample with current regulation and the p-type sample in the saturation yielded a current stability of ±0.4% and ±0.3%, respectively. Investigations in the frequency domain revealed the for field emission typical 1/f-noise. By operating in the saturation region (p-type sample) or using an emission current regulation (metallized sample) the noise level was reduced by at least 20 dB. Finally, the p-type sample was illuminated by a light emitting diode to increase and modulate the emission current in the saturation region. The emission current was increased by a factor of 3.7 to 145 nA. With this configuration we emulated an unstable emission behavior and evaluated the performance of our emission current regulation circuit. KW - field emission KW - field emitter array KW - silicon tip KW - current fluctuation KW - current stability KW - field emission noise Y1 - 2018 U6 - https://doi.org/10.1109/IVNC.2018.8520127 PB - IEEE ER - TY - JOUR A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert T1 - Investigations on the long-term performance of gated p-type silicon tip arrays with reproducible and stable field emission behavior JF - Journal of Vacuum Science & Technology B N2 - The authors report on the fabrication and characterization of p-type Si tip arrays with an integrated gate electrode for applications as field emission electron sources. After the reactive ion etching of the emitters, the combined thermal dry and wet oxidation was used for both the sharpening of the emitters and for the realization of an enhanced insulation layer. Au was evaporated in a self-aligned process as gate electrode. Arrays of 16 Si tips were fabricated with tip heights of about 3 μm and tip radii of about 20 nm with integrated gate electrode concentrically positioned ≈2 μm below the tip apex. Integral measurements with an additional anode showed improved field emission properties with a reproducible and stable emission behavior. A fast activation of the tips, low onset voltages of about 30 V, and moderate field emission currents up to 0.55 μA were noticed. The field emission parameters were calculated using the Fowler–Nordheim characteristics. A pronounced saturation regime was observed, and current fluctuations of less than ±1% were investigated for 30 min. Long-term measurements were carried out for a period of more than 8 h. In the first 6 h of operation, the authors observed a drift of the emission current from 0.35 to 0.55 μA caused by an increased emission surface. Y1 - 2017 U6 - https://doi.org/10.1116/1.4972519 VL - 35 IS - 1 ER - TY - CHAP A1 - Prommesberger, Christian A1 - Ławrowski, Robert Damian A1 - Langer, Christoph A1 - Mecani, Mirgen A1 - Huang, Yifeng A1 - She, Juncong A1 - Schreiner, Rupert ED - Tiginyanu (Ed.), Ion M. T1 - Field emission properties of ring-shaped Si ridges with DLC coating T2 - Proc. SPIE 10248, Nanotechnology VIII, 102480H (30 May 2017) N2 - We report on the fabrication and the emission characterization of single ring-shaped Si ridges with a coating of diamond-like carbon (DLC). The reactive ion etching and the subsequent inductively coupled plasma step were adjusted to realize ring-shaped Si ridges with a height of 7.5 μm respectively 15 μm and an apex radius of 20 – 25 nm. The samples were coated with a DLC layer (thickness ≈ 2 – 5 nm) by a filtered cathodic vacuum arc deposition system in order to lower the work function of the emitter and to improve the field emission characteristics. The field emission characterizations were done in diode configuration with cathode and anode separated by a 50 μm thick mica spacer. A higher emission current was carried out for the ring-shaped Si ridge in comparison to the point-shaped Si tips due to the increased emission area. The highest emission current of 0.22 μA at 1000 V was measured on a DLC-coated sample with the highest aspect ratio. No degradation of the emission current was observed in the plateau regime during a measurement period of 6 h. Finally, no decreasing performance of the field emission properties was found due to changes in the geometry or destructions. KW - Etching KW - Scanning electron microscopy KW - Silicon carbide KW - Carbon KW - Mica KW - Oxides Y1 - 2017 U6 - https://doi.org/10.1117/12.2265627 VL - 102480H PB - Society of Photo-Optical Instrumentation Engineers (SPIE) ER - TY - CHAP A1 - Bachmann, Michael A1 - Dams, Florian A1 - Düsberg, Felix A1 - Hofmann, Martin A1 - Pahlke, Andreas A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Schreiner, Rupert T1 - Extraction of the characteristics of limiting elements from field emission measurement data T2 - 29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada N2 - In this contribution we will present an algorithm to extract the characteristics of non-Fowler-Nordheim (FN) circuit elements from saturation limited field emission (FE) measurement data. The method for calculating the voltage drop on limiting circuit elements is based on circuit theory as well as Newton's method. Since no assumption on the limiting circuit is made, this method is applicable to any FE data showing saturation. To be able to determine the significance of any parameter output, the uncertainties of data and extracted parameters are fully taken into account throughout the algorithm. External serial resistors and a limiting p-doped substrate are analyzed, where the latter shows a diode-like behavior. Y1 - 2016 U6 - https://doi.org/10.1109/IVNC.2016.7551474 SN - 2380-6311 SP - 81 EP - 82 PB - IEEE ER - TY - CHAP A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert A1 - Huang, Yifeng A1 - She, Juncong T1 - Gated p-Si field emission cathode applied in an ionization vacuum gauge T2 - 29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada N2 - A commercial Bayard-Alpert ionization vacuum gauge was equipped with a field emission electron source based on a cathode consisting of an array of 16 gated, p-doped, and DLC-coated Si-tips and characterized. An anode current of about 1.3 μA led to an ion current of 7 fA at 3×10 -7 mbar and 0.8 pA at 4×10 -5 mbar. Whereas at pressures higher than 4×10 -5 mbar the emission current of the electron source decreased, the ratio of ion and anode current remained linear. A nearly constant sensitivity of ~ 17 mbar -1 of the ionization vacuum gauge within the investigated pressure range was depicted. KW - field emission KW - field emitter array KW - Si KW - DLC KW - electron source KW - ionization vacuum gauge Y1 - 2016 U6 - https://doi.org/10.1109/IVNC.2016.7551500 SN - 2380-6311 SP - 145 EP - 146 PB - IEEE ER - TY - CHAP A1 - Bachmann, Michael A1 - Dams, Florian A1 - Düsberg, Felix A1 - Hofmann, Martin A1 - Pahlke, Andreas A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Schreiner, Rupert T1 - Control of the electron source current T2 - International Vacuum Nanoelectronics Conference (IVNC), 30th, 2017, Regensburg N2 - A control circuit to stabilize the flux of electrons transmitted through an extractor electrode is presented. By controlling the emission current a fluctuation with a standard deviation of 0.015% is observed. However, the achievable stability of the transmitted electron current is limited due to a variation of the extraction grid current ratio showing a standard deviation of 4.33%. By regulating the difference of the emission current and the extraction grid current an improved stability of the transmitted electron current down to a standard deviation of 0.280% is observed. Even with operation at 2 × 10 -5 mbar a standard deviation of 0.558% is achieved. KW - Standards KW - Circuit stability KW - Power system stability KW - Current measurement KW - Voltage measurement KW - Electron sources KW - Stability analysis Y1 - 2017 U6 - https://doi.org/10.1109/IVNC.2017.8051550 SP - 66 EP - 67 PB - IEEE ER - TY - CHAP A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert T1 - Benzocyclobutene as a novel integrated spacer material in a field emission electron source T2 - International Vacuum Nanoelectronics Conference (IVNC), 30th, 2017, Regensburg N2 - For the realization of a miniaturized field emission electron source we tested benzocyclobutene (BCB) as a new spacer material between cathode and anode. We fabricated black silicon emitters and characterized the emission behavior with an integrated 5 μm thin and large-area spacer of BCB. The integrated BCB layer allows the realization of a compact electron source with only two components consisting of a cathode with BCB and a grid. The comparison with other spacer materials like polyimide (25 μm thickness) or mica (50 μm thickness) revealed for the cathode with BCB a significantly reduced operational voltage of 240 V for a field emission current of 1 μA. KW - field emission KW - benzocyclobutene KW - integrated spacer KW - electron source KW - black silicon Y1 - 2017 U6 - https://doi.org/10.1109/IVNC.2017.8051605 SP - 192 EP - 193 PB - IEEE ER - TY - CHAP A1 - Lindner, Matthias A1 - Berndt, Dominik A1 - Tschurtschenthal, Karl A1 - Ehrlich, Ingo A1 - Jungbauer, Bastian A1 - Schreiner, Rupert A1 - Pipa, Andrei V. A1 - Hink, Rüdiger A1 - Foest, Rüdiger A1 - Brandenburg, Ronny A1 - Neuwirth, Daniel A1 - Karpen, Norbert A1 - Bonaccurso, Elmar A1 - Weichwald, Robert A1 - Max, Alexander A1 - Caspari, Ralf T1 - Aircraft Icing Mitigation by DBD-based Micro Plasma Actuators T2 - AIAA AVIATION 2020 FORUM: June 15-19, 2020 N2 - We present the application of plasma actuators as a technology for ice prevention at airfoils. The miniaturized dielectric barrier discharge (DBD) plasma actuators (PA) were fabricated by means of microelectromechanical systems (MEMS). We elucidate how to make the actuator samples scalable and applicable to any desired shape by the use of flexible inorganic zirconia substrates. For this purpose, we applied our developed embedding method to integrate the micro actuators in modern carbon/glass fiber reinforced polymer (CFRP/GFRP) materials. Next, the embedded actuator samples were mounted on a mechanical air profile-like fixture and placed in the icing wind tunnel iCORE. The samples were tested in rime ice conditions at temperatures of -15 to -20° C and air speeds up to 30 m/s. Unlike other groups we used a thin film zirconia substrate as dielectric for the plasma actuator. Due to the low substrate thickness of just 150 µm, an operating voltage of 2 kVRMS is already sufficient enough for a stable plasma formation. The experiments show that the operated actuator was able to prevent the ice formation and first indications of a De-icing function were also found. Hence, we show that it is feasible to realize an anti-icing system with zirconia-based plasma actuators operated at lower voltages compared to conventional ones. Y1 - 2020 U6 - https://doi.org/10.2514/6.2020-3243 ER - TY - JOUR A1 - Ławrowski, Robert Damian A1 - Hausladen, Matthias A1 - Buchner, Philipp A1 - Schreiner, Rupert T1 - Silicon Field Emission Electron Source With Individually Controllable Single Emitters JF - IEEE Transactions on Electron Devices N2 - An electron source with an array of individually controllable single tips allows the observation of each emitter current simultaneously as well as the measurement of the integral current. Furthermore, the initial activation process of the individual tips and current distribution of the source can be examined. The Si cathode consists of an array of 2 x 2 conically shaped emitter structures on a borosilicate glass substrate. The emitters were fabricated by laser micromachining and wet etching. Integral field emission (FE) measurements were performed in a diode configuration in a vacuum chamber at pressures of about 10(-9) mbar with a self-aligned Si extraction grid, due to adjustment pins. The total emission current was regulated to a predefined value (4.0, 10, 20, 40, and 50 mu A) by an external regulating circuit and recorded individually during the measurement. The onset voltage for a current of 1 nA varied between 320 and 430 V. The voltage conversion factor is in the range of 7.6 x 10(4) cm(-1) to 1.3 x 10(5) cm(-1). Constant currentmeasurementsover a longer periodof time (1800 values with a sample rate of 0.5 Hz) were performed and show a total current fluctuation less than 0.6% due to the regulation circuit. Despite the stable total current in regulated operation, it was observed that the individual emitters fluctuate up to 75% for low (similar to 10(-8) A) and 5% for high (similar to 10(-5) A) currents. KW - Current distribution KW - current limiters KW - electron emission KW - electron sources KW - silicon-on-insulator Y1 - 2021 U6 - https://doi.org/10.1109/TED.2021.3093374 VL - 68 IS - 8 SP - 4116 EP - 4122 PB - IEEE ER - TY - JOUR A1 - Bachmann, Michael A1 - Düsberg, Felix A1 - Pahlke, Andreas A1 - Edler, Simon A1 - Schels, Andreas A1 - Herdl, Florian A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert T1 - High current silicon nanowire field emitter arrays JF - Journal of Vacuum Science & Technology B N2 - Arrays of n-doped silicon nanowire field emitters with a high aspect ratio are realized by a novel dry etching technique. Compared to the high current silicon emitters in the literature, the manufacturing process is much simpler and requires only a single photolithography step and two dry etching steps. The cathodes realized with this method exhibit a total current of 20 mA from an active area of 4×4 mm2, which is significantly higher than that for most known structures made from silicon and also represents good performance in comparison with other emitter types, e.g., carbon nanotubes. In addition to characterization in ultrahigh vacuum, measurements at 10−5 mbar are performed and compared with our recent silicon emitters. Compared to these cathodes, the structures with the nanowires exhibit at least two orders of magnitude higher current-carrying capability. Y1 - 2022 U6 - https://doi.org/10.1116/6.0001639 VL - 40 IS - 1 PB - AIP Publishing ER - TY - JOUR A1 - Remskar, Maja A1 - Hüttel, Andreas K. A1 - Shubina, Tatiana V. A1 - Seabaugh, Alan A1 - Fathipour, Sara A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert T1 - Confinement Related Phenomena in MoS2 Tubular Structures Grown from Vapour Phase JF - Israel Journal of Chemistry N2 - We review recently discovered phenomena observed in the MoS2 tubular structures, which were synthesized by a lasting chemical transport reaction nearly at chemical equilibrium. Such MoS2 nanotubes are distinguished by low density of structural defects, thin walls and a high aspect ratio, which intrinsically provide a confined, edge-free geometry. Quantum confinement with single electron conductance was recorded and a bright exciton photoluminescence with appearance of whispering gallery modes was observed. In addition, the field-effect transistors and field emitters based on single MoS2 nanotubes were demonstrated. These discoveries revitalize research of MoS2 curved structures grown from vapour phase, which were reported several decades ago. Y1 - 2021 U6 - https://doi.org/10.1002/ijch.202100100 SN - 1869-5868 VL - 62 IS - 3-4 SP - 1 EP - 11 PB - Wiley ER - TY - CHAP A1 - Ławrowski, Robert Damian A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Field Emission Arrays from Graphite Fabricated by Laser Micromachining T2 - 34th International Vacuum Nanoelectronics Conference (IVNC): 7/5/2021 - 7/9/2021, Lyon, France N2 - Arrays of 4x4 conical shaped emitters were directly structured by laser micromaching. Assembled as an electron source with a spacer and Si-grid, they were investigated by means of IV-measurement in ultra-high vacuum. The IV-measurements of the sample show integral emission currents up to 10 µA at a voltage of 1000 V (11 MV/m). Initially, an ideal FN-behaviour is noticeable. The deviation for higher voltage values in the FN-plot is caused by the change of the work function, which was proven by numerical calculations. KW - field emission array KW - graphite KW - laser micromachining Y1 - 2021 SN - 978-1-6654-2589-6 U6 - https://doi.org/10.1109/IVNC52431.2021.9600736 SP - 1 EP - 2 PB - IEEE ER - TY - CHAP A1 - Lindner, Matthias A1 - Berndt, Dominik A1 - Jungbauer, Bastian A1 - Ehrlich, Ingo A1 - Schreiner, Rupert A1 - Pipa, Andrei V. A1 - Hink, Rüdiger A1 - Foest, Rüdiger A1 - Brandenburg, Ronny A1 - Max, Alexander A1 - Caspari, Ralf T1 - Fabrication, surface integration and testing of miniaturized dielectric barrier discharge plasma actuators for active flow control applications T2 - AIAA Aviation 2019 Forum, 17-21 June 2019, Dallas, Texas Y1 - 2019 U6 - https://doi.org/10.2514/6.2019-2998 ER - TY - CHAP A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Dams, Florian A1 - Serbun, Pavel A1 - Bachmann, Michael A1 - Müller, Günter A1 - Schreiner, Rupert T1 - High aspect ratio silicon tip cathodes for application in field emission electron sources T2 - 2014 27th International Vacuum Nanoelectronics Conference (IVNC), 6-10 July 2014, Engelberg, Switzerland N2 - Precisely aligned arrays of sharp tip structures on top of elongated pillars were realized by using an improved fabrication process including an additional inductively-coupled-plasma reactive-ion etching step. Arrays of n-type and p-type silicon with 271 tips have been fabricated and investigated. Those structures have a total height of 5–6 µm and apex radii less than 20nm. Integral field emission measurements of the arrays yielded low onset-fields in the range of 8–12V=µm and field enhancement factors between 300 and 700. The I-E curves of n-type structures showed the usual Fowler-Nordheim behaviour, whereas p-type structures revealed a significant saturation region due to the limited number of electrons in the conduction band and a further carrier depletion effect caused by the pillar. The maximum integral current in the saturation region was 150 nA at fields above 30V=µm. An excellent stability of the emission current of less than ± 2% fluctuation was observed in the saturation region. For n-type Si a maximum integral current of 10 µA at 24V=µm and an average current stability with a fluctuation of ± 50% were measured. KW - Current measurement KW - Etching KW - FABRICATION KW - field emission KW - field emitter array KW - GEOMETRY KW - Iron KW - Sensor arrays KW - silicon KW - silicon tip Y1 - 2014 U6 - https://doi.org/10.1109/IVNC.2014.6894824 SP - 222 EP - 223 PB - IEEE ER - TY - JOUR A1 - Bachmann, Michael A1 - Düsberg, Felix A1 - Langer, Christoph A1 - Herdl, Florian A1 - Bergbreiter, Lukas A1 - Dams, Florian A1 - Miyakawa, Natuski A1 - Eggert, Tobias A1 - Pahlke, Andreas A1 - Edler, Simon A1 - Prommesberger, Christian A1 - Ławrowski, Robert Damian A1 - Hausladen, Matthias A1 - Schreiner, Rupert T1 - Vacuum-sealed field emission electron gun JF - Journal of Vacuum Science & Technology B N2 - A compact vacuum-sealed field emission electron gun with an operation voltage below 5 kV is presented. With a 150 nm thick pyrolytic carbon membrane, a transmission of 40% at 5 kV is obtained. For more than 2500 h of continuous operation at an emission current of 100 nA, no significant increase (<50V ) and almost no degradation were found. From this measurement, a lifetime of more than 10 000 h at continuous operation with approximately a linear increase of the extraction voltage from about 545 V to about 730 V is predicted. This electron source enables application of field emitter arrays in poor vacuum or even ambient pressure. ACKNOWLEDGMENT This work was supported by the German Federal Ministry for Economic Affairs and Energy under Project No. ZF4081502GM8. C.P., R.L., M.H., and R.S. were supported by Grant No. ZF4562901GM8. Y1 - 2020 U6 - https://doi.org/10.1116/1.5139316 VL - 38 IS - 2 PB - AIP Publishing ER - TY - JOUR A1 - Ławrowski, Robert Damian A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Field emission arrays from graphite fabricated by laser micromachining JF - Journal of Vacuum Science & Technology B N2 - Laser micro structuring allows the manufacturing of conical shaped emitters on a graphitized carbon substrate without any additional treatment. Integral field emission measurements were performed in a diode configuration with a 50 µm mica spacer and a metalized Si-grid in a vacuum chamber at pressures of about 10-9 mbar. Emission currents up to 10 µA at a voltage of 1000 V (11 MV/m) with a positive current drift were observed for an array of 16 emitters. A strong modification of the emitter tip is noticeable after individual measurements. A comparable alteration of the surface is also achieved by an electrochemical treatment of the samples with a potassium hydroxide solution. However, the IV-measurements of such samples show higher onset voltages, but also higher integral emission currents. For all arrays an ideal FN behaviour is only noticeable at applied voltages below 625 V (7 MV/m). Numerical calculations indicate that the deviation in the FN-plot for higher voltage values is caused by the change of the effective work function. Y1 - 2022 U6 - https://doi.org/10.1116/6.0001547 VL - 40 IS - 2 PB - AIP Publishing ER - TY - JOUR A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Dams, Florian A1 - Schreiner, Rupert T1 - Improvement of Homogenity and Aspect Ratio of Silicon Tips for Field Emission by Reactive-Ion Etching JF - Advances in materials science and engineering N2 - The homogeneity of emitters is very important for the performance of field emission (FE) devices. Reactive-ion etching (RIE) and oxidation have significant influences on the geometry of silicon tips. The RIE influences mainly the anisotropy of the emitters. Pressure has a strong impact on the anisotropic factor. Reducing the pressure results in a higher anisotropy, but the etch rate is also lower. A longer time of etching compensates this effect. Furthermore an improvement of homogeneity was observed. The impact of uprating is quite low for the anisotropic factor, but significant for the homogeneity. At low power the height and undercut of the emitters are more constant over the whole wafer. The oxidation itself is very homogeneous and has no observable effect on further variation of the homogeneity. This modified fabrication process allows solving the problem of inhomogeneity of previous field emission arrays. Y1 - 2014 U6 - https://doi.org/10.1155/2014/948708 VL - 2014 PB - Hindawi ER - TY - GEN A1 - Bieker, Johannes A1 - Schlaak, Helmut F. A1 - Wilfert, Stefan A1 - Ławrowski, Robert Damian A1 - Hausladen, Matthias A1 - Schreiner, Rupert T1 - Development of FE-based electron sources for XHVion gauges in cryogenic vacuum environments T2 - 32nd International Vacuum Nanoelectronics Conference (IVNC 2019), 22.-26.07.2019, Cincinnati, USA Y1 - 2019 ER - TY - GEN A1 - Ławrowski, Robert Damian A1 - Hausladen, Matthias A1 - Schreiner, Rupert T1 - Individually Addressable Silicon Field Emission Cathodes Fabricated by Laser Micromachining T2 - 7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef Y1 - 2020 ER -