TY - JOUR A1 - Bachmann, Michael A1 - Düsberg, Felix A1 - Pahlke, Andreas A1 - Edler, Simon A1 - Schels, Andreas A1 - Herdl, Florian A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert T1 - High current silicon nanowire field emitter arrays JF - Journal of Vacuum Science & Technology B N2 - Arrays of n-doped silicon nanowire field emitters with a high aspect ratio are realized by a novel dry etching technique. Compared to the high current silicon emitters in the literature, the manufacturing process is much simpler and requires only a single photolithography step and two dry etching steps. The cathodes realized with this method exhibit a total current of 20 mA from an active area of 4×4 mm2, which is significantly higher than that for most known structures made from silicon and also represents good performance in comparison with other emitter types, e.g., carbon nanotubes. In addition to characterization in ultrahigh vacuum, measurements at 10−5 mbar are performed and compared with our recent silicon emitters. Compared to these cathodes, the structures with the nanowires exhibit at least two orders of magnitude higher current-carrying capability. Y1 - 2022 U6 - https://doi.org/10.1116/6.0001639 VL - 40 IS - 1 PB - AIP Publishing ER - TY - JOUR A1 - Remskar, Maja A1 - Hüttel, Andreas K. A1 - Shubina, Tatiana V. A1 - Seabaugh, Alan A1 - Fathipour, Sara A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert T1 - Confinement Related Phenomena in MoS2 Tubular Structures Grown from Vapour Phase JF - Israel Journal of Chemistry N2 - We review recently discovered phenomena observed in the MoS2 tubular structures, which were synthesized by a lasting chemical transport reaction nearly at chemical equilibrium. Such MoS2 nanotubes are distinguished by low density of structural defects, thin walls and a high aspect ratio, which intrinsically provide a confined, edge-free geometry. Quantum confinement with single electron conductance was recorded and a bright exciton photoluminescence with appearance of whispering gallery modes was observed. In addition, the field-effect transistors and field emitters based on single MoS2 nanotubes were demonstrated. These discoveries revitalize research of MoS2 curved structures grown from vapour phase, which were reported several decades ago. Y1 - 2021 U6 - https://doi.org/10.1002/ijch.202100100 SN - 1869-5868 VL - 62 IS - 3-4 SP - 1 EP - 11 PB - Wiley ER - TY - CHAP A1 - Ławrowski, Robert Damian A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Field Emission Arrays from Graphite Fabricated by Laser Micromachining T2 - 34th International Vacuum Nanoelectronics Conference (IVNC): 7/5/2021 - 7/9/2021, Lyon, France N2 - Arrays of 4x4 conical shaped emitters were directly structured by laser micromaching. Assembled as an electron source with a spacer and Si-grid, they were investigated by means of IV-measurement in ultra-high vacuum. The IV-measurements of the sample show integral emission currents up to 10 µA at a voltage of 1000 V (11 MV/m). Initially, an ideal FN-behaviour is noticeable. The deviation for higher voltage values in the FN-plot is caused by the change of the work function, which was proven by numerical calculations. KW - field emission array KW - graphite KW - laser micromachining Y1 - 2021 SN - 978-1-6654-2589-6 U6 - https://doi.org/10.1109/IVNC52431.2021.9600736 SP - 1 EP - 2 PB - IEEE ER - TY - CHAP A1 - Lindner, Matthias A1 - Berndt, Dominik A1 - Jungbauer, Bastian A1 - Ehrlich, Ingo A1 - Schreiner, Rupert A1 - Pipa, Andrei V. A1 - Hink, Rüdiger A1 - Foest, Rüdiger A1 - Brandenburg, Ronny A1 - Max, Alexander A1 - Caspari, Ralf T1 - Fabrication, surface integration and testing of miniaturized dielectric barrier discharge plasma actuators for active flow control applications T2 - AIAA Aviation 2019 Forum, 17-21 June 2019, Dallas, Texas Y1 - 2019 U6 - https://doi.org/10.2514/6.2019-2998 ER - TY - CHAP A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Dams, Florian A1 - Serbun, Pavel A1 - Bachmann, Michael A1 - Müller, Günter A1 - Schreiner, Rupert T1 - High aspect ratio silicon tip cathodes for application in field emission electron sources T2 - 2014 27th International Vacuum Nanoelectronics Conference (IVNC), 6-10 July 2014, Engelberg, Switzerland N2 - Precisely aligned arrays of sharp tip structures on top of elongated pillars were realized by using an improved fabrication process including an additional inductively-coupled-plasma reactive-ion etching step. Arrays of n-type and p-type silicon with 271 tips have been fabricated and investigated. Those structures have a total height of 5–6 µm and apex radii less than 20nm. Integral field emission measurements of the arrays yielded low onset-fields in the range of 8–12V=µm and field enhancement factors between 300 and 700. The I-E curves of n-type structures showed the usual Fowler-Nordheim behaviour, whereas p-type structures revealed a significant saturation region due to the limited number of electrons in the conduction band and a further carrier depletion effect caused by the pillar. The maximum integral current in the saturation region was 150 nA at fields above 30V=µm. An excellent stability of the emission current of less than ± 2% fluctuation was observed in the saturation region. For n-type Si a maximum integral current of 10 µA at 24V=µm and an average current stability with a fluctuation of ± 50% were measured. KW - Current measurement KW - Etching KW - FABRICATION KW - field emission KW - field emitter array KW - GEOMETRY KW - Iron KW - Sensor arrays KW - silicon KW - silicon tip Y1 - 2014 U6 - https://doi.org/10.1109/IVNC.2014.6894824 SP - 222 EP - 223 PB - IEEE ER - TY - JOUR A1 - Bachmann, Michael A1 - Düsberg, Felix A1 - Langer, Christoph A1 - Herdl, Florian A1 - Bergbreiter, Lukas A1 - Dams, Florian A1 - Miyakawa, Natuski A1 - Eggert, Tobias A1 - Pahlke, Andreas A1 - Edler, Simon A1 - Prommesberger, Christian A1 - Ławrowski, Robert Damian A1 - Hausladen, Matthias A1 - Schreiner, Rupert T1 - Vacuum-sealed field emission electron gun JF - Journal of Vacuum Science & Technology B N2 - A compact vacuum-sealed field emission electron gun with an operation voltage below 5 kV is presented. With a 150 nm thick pyrolytic carbon membrane, a transmission of 40% at 5 kV is obtained. For more than 2500 h of continuous operation at an emission current of 100 nA, no significant increase (<50V ) and almost no degradation were found. From this measurement, a lifetime of more than 10 000 h at continuous operation with approximately a linear increase of the extraction voltage from about 545 V to about 730 V is predicted. This electron source enables application of field emitter arrays in poor vacuum or even ambient pressure. ACKNOWLEDGMENT This work was supported by the German Federal Ministry for Economic Affairs and Energy under Project No. ZF4081502GM8. C.P., R.L., M.H., and R.S. were supported by Grant No. ZF4562901GM8. Y1 - 2020 U6 - https://doi.org/10.1116/1.5139316 VL - 38 IS - 2 PB - AIP Publishing ER - TY - JOUR A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Ławrowski, Robert Damian A1 - Dams, Florian A1 - Schreiner, Rupert T1 - Simulation and Fabrication of Silicon Field Emission Cathodes for Cold Electron Sources JF - Advanced Materials Research N2 - We report on the simulation and fabrication of nanostructured silicon surfaces for field emission (FE) applications, e.g. ionization sensors and x-ray tubes. For the design and optimization of field-emitting silicon structures, the influence of the geometric parameters like tip height, apex radius, aperture angle and curvature shape on the field enhancement factor was investigated by simulation using finite element method. A universal geometric model which describes the real geometry of our silicon structures sufficiently accurate was taken for modeling a variety of different silicon tip structures as well as ridge structures. While a high dependency of the field enhancement on the aspect ratio and the aperture angle was found, the simulations show that the elliptic curvature affects the field enhancement only marginally. Finally, an improved process for fabrication of such silicon structures on n-type as well as p-type substrate is described, using reactive ion etching with adjustable anisotropy, wet thermal oxidation and wet etching. KW - field emission cathodes KW - field enhancement factor KW - silicon field emitter Y1 - 2014 U6 - https://doi.org/10.4028/www.scientific.net/amr.1024.48 VL - 1024 SP - 48 EP - 51 ER - TY - JOUR A1 - Ławrowski, Robert Damian A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Field emission arrays from graphite fabricated by laser micromachining JF - Journal of Vacuum Science & Technology B N2 - Laser micro structuring allows the manufacturing of conical shaped emitters on a graphitized carbon substrate without any additional treatment. Integral field emission measurements were performed in a diode configuration with a 50 µm mica spacer and a metalized Si-grid in a vacuum chamber at pressures of about 10-9 mbar. Emission currents up to 10 µA at a voltage of 1000 V (11 MV/m) with a positive current drift were observed for an array of 16 emitters. A strong modification of the emitter tip is noticeable after individual measurements. A comparable alteration of the surface is also achieved by an electrochemical treatment of the samples with a potassium hydroxide solution. However, the IV-measurements of such samples show higher onset voltages, but also higher integral emission currents. For all arrays an ideal FN behaviour is only noticeable at applied voltages below 625 V (7 MV/m). Numerical calculations indicate that the deviation in the FN-plot for higher voltage values is caused by the change of the effective work function. Y1 - 2022 U6 - https://doi.org/10.1116/6.0001547 VL - 40 IS - 2 PB - AIP Publishing ER - TY - JOUR A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Dams, Florian A1 - Schreiner, Rupert T1 - Improvement of Homogenity and Aspect Ratio of Silicon Tips for Field Emission by Reactive-Ion Etching JF - Advances in materials science and engineering N2 - The homogeneity of emitters is very important for the performance of field emission (FE) devices. Reactive-ion etching (RIE) and oxidation have significant influences on the geometry of silicon tips. The RIE influences mainly the anisotropy of the emitters. Pressure has a strong impact on the anisotropic factor. Reducing the pressure results in a higher anisotropy, but the etch rate is also lower. A longer time of etching compensates this effect. Furthermore an improvement of homogeneity was observed. The impact of uprating is quite low for the anisotropic factor, but significant for the homogeneity. At low power the height and undercut of the emitters are more constant over the whole wafer. The oxidation itself is very homogeneous and has no observable effect on further variation of the homogeneity. This modified fabrication process allows solving the problem of inhomogeneity of previous field emission arrays. Y1 - 2014 U6 - https://doi.org/10.1155/2014/948708 VL - 2014 PB - Hindawi ER - TY - GEN A1 - Bieker, Johannes A1 - Schlaak, Helmut F. A1 - Wilfert, Stefan A1 - Ławrowski, Robert Damian A1 - Hausladen, Matthias A1 - Schreiner, Rupert T1 - Development of FE-based electron sources for XHVion gauges in cryogenic vacuum environments T2 - 32nd International Vacuum Nanoelectronics Conference (IVNC 2019), 22.-26.07.2019, Cincinnati, USA Y1 - 2019 ER - TY - GEN A1 - Ławrowski, Robert Damian A1 - Hausladen, Matthias A1 - Schreiner, Rupert T1 - Individually Addressable Silicon Field Emission Cathodes Fabricated by Laser Micromachining T2 - 7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef Y1 - 2020 ER - TY - GEN A1 - Hausladen, Matthias A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert T1 - Fast Pulse Source for Field Emission Applications T2 - 7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef Y1 - 2020 ER - TY - CHAP A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Muller, F. A1 - Dams, Florian A1 - Schreiner, Rupert A1 - Serbun, Pavel A1 - Müller, Günter T1 - Comparison of integral and local field-emission properties of Mo-coated p-Si tip arrays T2 - 2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China N2 - Silicon tip arrays were fabricated by means of reactive ion etching followed by oxidation for final sharpening and molybdenum thin film coating. The field-emission (FE) properties of these Mo-coated p-Si tip arrays were systemically investigated by different measurement techniques. Integral measurements in diode configuration yielded a turn-on field (for 1 nA) of 22 V/μm and nearly stable FE currents up to 6.6 μA at 38 V/μm. The effective field enhancements factor extracted from the FN plots is about 180. Detailed investigations of these FE arrays were also performed by means of field emission scanning microscopy combined with electron microscopy. A rather limited efficiency of the tips (50% at 1500 V) and FE homogeneity (180 nA at 700 V) might be correlated with the varying morphology of the tips and the presence of oxides. Local I-V measurements of selected single tips revealed both activation and deactivation effects, which finally resulted in nearly reproducible I-V curves. Current stability measurements at a constant voltage showed rather large fluctuations (0.1-1 μA) of the FE current, which could be reduced up to 1.7% by using of a PID-regulated voltage source. SEM images showed unchanged tip shape after the current processing. KW - CATHODES KW - Coatings KW - Current measurement KW - field emission KW - Iron KW - Mo-coated KW - p-Si tip KW - Scanning electron microscopy KW - silicon KW - tip arrays KW - Vacuum technology Y1 - 2015 U6 - https://doi.org/10.1109/IVNC.2015.7225579 SP - 192 EP - 193 PB - IEEE ER - TY - CHAP A1 - Ławrowski, Robert Damian A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Dams, Florian A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Fabrication and simulation of silicon structures with high aspect ratio for field emission devices T2 - 2014 27th International Vacuum Nanoelectronics Conference (IVNC), 6-10 July 2014, Engelberg, Switzerland N2 - To obtain higher field enhancement factors of Si-tip structures, we present an improved fabrication process utilizing reactive-ion etching (RIE) with an inductively coupled plasma (ICP). In our design, a pillar under the tips is realized by a combination of RIE with ICP. With adjusted power settings (≈ 240 W) and step times (<; 5 s), vertical slopes with a low roughness of approximately 10 nm to 20 nm are possible. The remaining silicon is oxidized thermally to sharpen the emitters. A final tip radius of R <; 20 nm is obtained for the tips of the emitters. The pillar height HP can be mainly adjusted by the duration of the ICP-etching step. A total emitter height of H ≈ 6 μm with a pillar height of HP ≈ 5 μm is achieved. Simulations with COMSOL Multiphysics® are applied to calculate the field enhancement factor β. A two-dimensional model is used in rotational symmetry. In addition to the previous model, a pillar with a varying diameter ØP and height HP is added. A conventional emitter (H = 1 μm and R = 20 nm) placed on a pillar of the height HP ≈ 5 μm approximately results in a three times higher β-factor (β≈ 105). By decreasing the diameter ØP a slight increase of the β-factor is observed. However, the aspect ratio of the emitter mainly influences on the β-factor. KW - Anodes KW - CATHODES KW - FABRICATION KW - field emission KW - field emitter array KW - field enhancement factor KW - Iterative closest point algorithm KW - Lead KW - silicon tips Y1 - 2014 U6 - https://doi.org/10.1109/IVNC.2014.6894805 SP - 193 EP - 194 PB - IEEE ER - TY - CHAP A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Dams, Florian A1 - Schreiner, Rupert A1 - Ławrowski, Robert Damian T1 - Gated p-Si field emitter arrays for sensor applications T2 - 2015 28th International Vacuum Nanoelectronics Conference (IVNC) N2 - We report on gated p-type Si-tip array cathodes for implementation into field emission electron sources for sensor applications. Arrays of 16 and 100 tips with tip heights of 3 μm and tip radii below 30 nm with integrated gate electrodes concentrically positioned 2 μm below the tip apexes were fabricated using an improved process, which leads to an enhanced isolation layer quality with sufficient breakdown field strengths and low leakage currents. Integral measurements with a fixed grid potential of 400 V showed emission currents up to 35 μA for 100 tips at a cathode voltage of 150 V and an almost negligible parasitic gate current. The array with 16 p-type Si-tips showed a significant stabilization of the emission current in the range of 0.3 - 0.4 μA, for cathode voltages between 90 V and 150 V. The current fluctuation in this saturation regime was measured for 10 minutes and a value of less than ± 1% was observed. No degradation of the cathode was found after 6 hours of operation at a constant cathode voltage of 100 V and a constant grid voltage of 400 V. KW - CATHODES KW - Current measurement KW - Current stabilization KW - field emission KW - integrated gate-electrode KW - Iron KW - Logic gates KW - semiconductor KW - Semiconductor device measurement KW - silicon KW - silicon tip array Y1 - 2015 U6 - https://doi.org/10.1109/IVNC.2015.7225567 SP - 164 EP - 165 PB - IEEE ER - TY - CHAP A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Ławrowski, Robert Damian A1 - Müller, F. A1 - Schreiner, Rupert A1 - Serbun, Pavel A1 - Müller, Günter T1 - Enhanced field emission from p-doped black silicon on pillar structures T2 - 2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China N2 - Aligned square arrays of black silicon (b-Si) on top of pillars were fabricated on p-type silicon substrate by a deep-etching step combined with a b-Si process. Two 10×10 arrays with pillar heights of 8 μm and 20 μm and one b-Si reference sample without pillars were investigated. Integral field emission (FE) measurements of the arrays yielded rather low onset-fields between 6.4 V/μm and 13.5 V/μm and field enhancement factors between 430 and 800. The I-V curves showed typical Fowler-Nordheim behavior for low fields, whereas a saturation region was observed at higher fields. The maximum integral current in the saturation region was 8 μA at a field of 20 V/μm. The stability of the emission current was investigated over 3 hours and revealed moderate fluctuations of ± 8% in the saturation region. Voltage scans showed well-aligned FE from nearly all pillars. KW - black silicon KW - CATHODES KW - Current measurement KW - Etching KW - FABRICATION KW - field emission KW - field emitter array KW - Iron KW - silicon KW - Vacuum technology Y1 - 2015 U6 - https://doi.org/10.1109/IVNC.2015.7225547 SP - 104 EP - 105 PB - IEEE ER - TY - CHAP A1 - Prommesberger, Christian A1 - Ławrowski, Robert Damian A1 - Langer, Christoph A1 - Dams, Florian A1 - Schreiner, Rupert T1 - Realisierung von Siliziumspitzenarrays mit integrierter Gate-Elektrode für Anwendungen in der Vakuumsensorik T2 - 4. Landshuter Symposium Mikrosystemtechnik, Mikrosystemtechnik als Schlüsseltechnologie der Systemintegration, Tagungsband zum Symposium 12./13. März 2014, Hochschule Landshut N2 - Bei der Feldemission (kalte Emission) können Elektronen durch ein starkes elektrisches Feld eine glatte und leitende Oberfläche verlassen. Die Elektronen tunneln dabei durch eine Potentialbarriere, deren Breite durch ein äußeres elektrisches Feld verkleinert wird. Durch das Hinzufügen einer integrierten Gate-Elektrode um eine Siliziumspitze kann die notwendige Einsatzspannung für Feldemission deutlich gesenkt werden. Zwischen Si-Kathode und Gate-Elektrode befindet sich dabei eine Isolationsschicht, die höchste Anforderungen bezüglich der elektrischen Durchbruchsfestigkeit erfüllen muss. Mit einer Kombination aus Trocken- (Schichtdicke 50 nm) und Feuchtoxid (Schichtdicke 950 nm) konnte eine Isolationsschicht entwickelt werden, die im integrierten Aufbau eine minimale Durchbruchsfeldstärke von 3,2 MV/cm aufweist. Für die Realisierung von Siliziumkathoden mit integrierter Gate-Elektrode wurde ein bereits bestehender Herstellungsprozess um zusätzliche Prozessschritte erweitert. Die Übertragung der lateralen Position der Spitze erfolgt durch Strukturierung des Umkehrlacks AZ5214 und einer RIE-Ätzung der zuvor hergestellten SiO2-Schicht. Nach dem Entfernen der Lackschicht wird die vertikale Struktur der Siliziumspitzen durch einen RIE-Ätzprozess mit den Prozessgasen SF6 und O)2 realisiert. Aus einer thermischen Oxidation bei 940 °C resultiert anschließend die Isolationsschicht zwischen Si-Kathode und Gate-Elektrode . Gleichzeitig wird diese Anschärfeoxidation auch zur Realisierung der endgültigen Spitzengeometrie verwendet. Durch die lithographische Strukturierung des Photolacks AZ5214 kann dabei die Fläche der aufgedampften Gate-Elektrode festgelegt werden. Die Gate-Elektrode wird in einem selbstjustierenden Prozessschritt exakt konzentrisch um die Si-Spitze aufgedampft. Der gerichtete Aufdampfprozess bewirkt eine Abschattung, so dass das Oxidplättchen nicht komplett von Metall ummantelt wird. Die Opferschicht aus Photolack wird mit den nicht benötigten Metallflächen in einem Lift-off-Prozess entfernt. KW - elektrischer Durchbruch KW - Feldelektronenemission KW - Halbleiterschicht KW - Isolierschicht KW - Kathode KW - Silicium KW - Vakuumsensor Y1 - 2014 SN - 978-3-9812696-5-9 SP - 36 EP - 41 CY - Landshut ER - TY - CHAP A1 - Ławrowski, Robert Damian A1 - Deml, Sonja A1 - Varghese, T. A1 - Schimpke, T. T1 - Leuchtdiodenchips mit dreidimensional epitaktisch gewachsenen kristallinen GaN Säulen T2 - 7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, München N2 - Um die Eigenschaften von Leuchtdioden zu verbessern und den Herstellungsprozess zu vereinfachen, wurde ein erweitertes Verfahren der metallorganischen Gasphasenepitaxie verwendet, um dichtgepackte dreidimensionale GaN-Säulen mit hohen Aspektverhältnis auf Chipoberflächen zu wachsen. Diese selbstorganisierenden dreidimensionalen Strukturen sollen einerseits die lichtabstrahlende Oberfläche der Leuchtdiode bei gleichbleibender Chipgröße vergrößern und andererseits durch die nichtpolaren Kristallebenen an den Seiten- und Deckflächen der Säulen die Effizienz dieser Bauteile erhöhen. Messungen an ersten Bauteilen, die mit dieser Methode realisiert wurden, zeigen eine homogene blaue Emission bei Wellenlängen von 450 nm und abgestrahlte Lichtleistungen von bereits mehr als 50 mW bei Stromdichten von 120 A/cm². Diese Ergebnisse sind bereits sehr vielversprechend und lassen eine deutliche Performancesteigerung bei Optimierung der Herstellungstechnologie erwarten. N2 - In order to increase the performance and to simplify the production of light emitting diode chips, an advanced metal organic vapor-phase-epitaxy process was used for the growth of densely packed high-aspect-ratio GaN microrods on the chip surface. The purpose of these self-organizing structures is, to increase the effective light emitting surface of the chip as well as to improve the efficiency. Measurements on first structures have shown blue emission at wavelengths of 450 nm and emitted output power of more than 50 mW at current densities of 120 A/cm². These promising results let us expect a significant improvement when optimizing the fabrication process further. T2 - Light emitting diodes based on three-dimensional epitaxial grown crystalline GaN rods KW - Aufbauorganisation KW - Ausgangsleistung KW - dreidimensionale Struktur KW - Fertigungstechnologie KW - Herstellungsablauf KW - Kristallebene KW - Leuchtdiode KW - Metalldampf KW - metallorganische Gasphasenepitaxie KW - organischer Dampf KW - Produktionsprozess KW - Stromdichte KW - Wellenlänge Y1 - 2017 SN - 978-3-8007-4491-6 SP - 131 EP - 134 PB - VDE-Verlag CY - München ER - TY - CHAP A1 - Ławrowski, Robert Damian A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Dams, Florian A1 - Serbun, Pavel A1 - Müller, Günter A1 - Schreiner, Rupert T1 - Spitzen- und Kantenemitter aus Silizium mit einem hohen Aspektverhältnis für Ionisationsgassensoren T2 - Mikrosystemtechnik als Schlüsseltechnologie der Systemintegration : 4. Landshuter Symposium Mikrosystemtechnik ; Tagungsband zum Symposium ; 12./13. März 2014, Hochschule Landshut N2 - Durch die Optimierung von reaktivem Ionenätzen mit induktiv gekoppeltem Plasma ist die Herstellung von verschiedenen Siliziumkathoden mit hoher Anisotropie und hohem Aspektverhältnis für Feldemissionsanwendungen möglich. Simulationen mit COMSOL Multiphysics untermauern das Potential von solchen Spitzen- und Kantenfeldemittern. Die Ergebnisse der Simulation zeigen einen zwei- bis sechsfach höheren Feldüberhöhungsfaktor der tiefgeätzten Strukturen im Vergleich zu identischen Emittern ohne zusätzliche Tiefenätzung. Feldemissionsmessungen bestätigen die Simulationsergebnisse. Der modifizierte Herstellungsprozess der Feldemitter ermöglicht somit einen zuverlässigen Betrieb von Feldemissionselektronenquellen bei kleineren makroskopischen Feldstärken. Außerdem weisen die Messungen des Emissionsstroms im Sättigungsbereich eine weitgehende Unabhängigkeit vom elektrischen Feld auf. Lokale Feldemissionsmessungen ergeben dadurch eine deutliche Stromstabilisierung, welche über große Feldstärkenbereiche konstant bleibt. Die Nutzung der HAR-Emitter (high aspect ratio) ist damit eine gute Voraussetzung für einen zuverlässigen Betrieb der Emissionskathoden bei kleinen Feldstärken für die Anwendung in Ionisationsgassensoren. KW - Emitter KW - Feldelektronenemission KW - Gassensor KW - Herstellung KW - Ionenemission KW - Silicium Y1 - 2014 SN - 978-3-9812696-5-9 SP - 28 EP - 35 PB - Cluster Mikrosystemtechnik CY - Landshut ER - TY - JOUR A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Dams, Florian A1 - Schreiner, Rupert T1 - Improvement of Homogeneity and Aspect Ratio of Silicon Tips for Field Emission by Reactive-Ion Etching JF - Advances in Materials Science and Engineering. Special issue: Advances in Smart Materials and Applications N2 - The homogeneity of emitters is very important for the performance of field emission (FE) devices. Reactive-ion etching (RIE) and oxidation have significant influences on the geometry of silicon tips. The RIE influences mainly the anisotropy of the emitters. Pressure has a strong impact on the anisotropic factor. Reducing the pressure results in a higher anisotropy, but the etch rate is also lower. A longer time of etching compensates this effect. Furthermore an improvement of homogeneity was observed. The impact of uprating is quite low for the anisotropic factor, but significant for the homogeneity. At low power the height and undercut of the emitters are more constant over the whole wafer. The oxidation itself is very homogeneous and has no observable effect on further variation of the homogeneity. This modified fabrication process allows solving the problem of inhomogeneity of previous field emission arrays. Y1 - 2014 U6 - https://doi.org/10.1155/2014/948708 SN - 1687-8442 SN - 1687-8434 VL - 2014 SP - 1 EP - 6 PB - Hindawi ER - TY - CHAP A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Dams, Florian A1 - Schreiner, Rupert T1 - Influence of reactive ion etching parameters on the geometry of silicon tip cathodes for field emission T2 - Applied Research Conference 2013, ARC 2013 : 17th and 18th October 2013, Deggendorf Y1 - 2013 SN - 978-3-8440-2274-2 SP - 67 EP - 69 PB - Shaker CY - Aachen ER - TY - CHAP A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Dams, Florian A1 - Schreiner, Rupert T1 - Feldemissionselektronenquellen basierend auf Siliziumemittern mit hohen Aspektverhältnis T2 - Forschungsbericht der OTH Regensburg 2013 Y1 - 2013 UR - https://doi.org/10.35096/othr/pub-799 SP - 47 EP - 48 CY - Regensburg ER - TY - JOUR A1 - Lindner, Matthias A1 - Pipa, Andrei V. A1 - Brandenburg, Ronny A1 - Schreiner, Rupert T1 - Expansion of surface barrier discharge scrutinized JF - Plasma Sources Science and Technology N2 - Developing the fundamentals for the electrical diagnostics of surface dielectric barrier discharges (SDBDs) is of enormous importance for several applications, for example, flow control and gas cleaning. The main challenge is to account for the discharge expansion along the dielectric surface. Typically, a linear expansion with the amplitude of the applied voltage is observed. In this work, we report on a step-wise SDBD expansion along the Al 2 O 3 dielectric surface. More specific, the discharge occupied a certain area after ignition, which remained constant until the voltage exceeded the critical amplitude V L . This absence of expansion is seen as a linear dependence of the discharge power on the applied voltage and it was additionally confirmed by photographs with long exposure times. This novel phenomenon is more pronounced for thicker dielectrics. It is suggested that the derivative of the charge-voltage characteristics can be used for the determination of all essential parameters of the simplest equivalent circuit of SDBDs. Moreover, it was shown that the derivative of the charge-voltage characteristics for the positive half-cycle of the discharge agrees numerically with the voltage dependence of the reactor capacitance derived from photographs. This agreement between both measurement methods indicates a similar step-wise expansion of the SDBD even if a voltage amplitude above V L is applied. … Y1 - 2022 U6 - https://doi.org/10.1088/1361-6595/ac95bf VL - 31 IS - 10 PB - IOP Publishing ER - TY - CHAP A1 - Mingels, Stephan A1 - Bornmann, Benjamin A1 - Lützenkirchen-Hecht, Dirk A1 - Müller, Günter A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Schreiner, Rupert ED - Scholl, Caitlin ED - Schaa, Volker R.W. T1 - Electric Field Dependence of Photoemission from n- and p-type Si Crystals T2 - Proceedings, 35th International Free Electron Laser Conference (FEL 2013) : New York, NY, USA, August 26-19, 2013 N2 - The performance of free electron lasers depends on the brilliance of the electron source. Nowadays photo-cathodes (e.g. Cs2Te) are used despite of their high emittance. To develop robust and more brilliant cathodes we have built up an UHV system which enables systematic photoemission (PE) measurements with a tunable pulsed laser (hv) at high electric fields (E). First results on Au and Ag crystals revealed only low quantum efficiency (QE) due to fast electron relaxation. Hence, we have started QE(hv,E) investigations on n- and p-Si wafers. Resonant PE was observed above as well as below the work function O, which can be assigned to optical transitions in the electronic band structure or explained by thermally excited states at the bottom of the conduction band. As expected, only low QE values were achieved even for n-Si probably due to surface oxide. Moreover, a significant rise of the QE peaks above O were obtained for n-Si at E >8 MV/m but limited by the occurrence of parasitic field emission from dust particles. Y1 - 2013 UR - https://accelconf.web.cern.ch/FEL2013/papers/tupso49.pdf#search=%20domain%3Daccelconf%2Eweb%2Ecern%2Ech%20%20%2Bauthor%3A%22schreiner%22%20%20url%3Aaccelconf%2FFEL2013%20FileExtension%3Dpdf%20%2Durl%3Aabstract%20%2Durl%3Aaccelconf%2Fjacow SN - 9783954501267 SP - 339 EP - 343 PB - Curran CY - Red Hook, NY ER - TY - CHAP A1 - Schreiner, Rupert A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Dams, Florian A1 - Serbun, Pavel A1 - Bornmann, Benjamin A1 - Navitski, Aliaksandr A1 - Müller, Günter T1 - Highly uniform and stable electron field emission from B-doped Si-tip arrays for applications in integrated vacuum microelectronic devices T2 - 25th International Vacuum Nanoelectronics Conference (IVNC) - Jeju, Korea (South), 09.07. - 13.07.2012 N2 - In order to improve the uniformity and field emission stability of p-type silicon tip arrays for pulsed sensor applications, we have systematically studied the influence of the fabrication parameters on the tip shape and the specific operating conditions. Based on detailed design calculations of the field enhancement, we have fabricated a series of hexagonal arrays of B-doped Si-tips in a triangular arrangement, each containing a different number of tips (91, 575 and 1300) of 1 μm height, 20 nm apex radius, and 20 μm pitch. The field emission properties of both individual tips and complete arrays were investigated with by field emission scanning microscopy. The current plateaus of these tips typically occur at about 10 nA and 60 V/μm field level. In this carrier depletion range, single tips provide the highest current stability (<; 4%) and optical current switching ratios of ~2.5. Rather homogeneous emission of the tip arrays leads to an almost linear scaling of the saturation current (2 nA/tip) and to a much improved current stability (<; 1%) measured over 1 hour. KW - boron KW - circuit stability KW - elemental semiconductors KW - field emission ion microscopy KW - field emitter arrays KW - integrated optoelectronics KW - microfabrication KW - microsensors KW - optical switches KW - silicon tips Y1 - 2012 SN - 978-1-4673-1984-3 SN - 978-1-4673-1983-6 SN - 978-1-4673-1982-9 U6 - https://doi.org/10.1109/IVNC.2012.6316857 SN - 2380-6311 SN - 2164-2370 SP - 1 EP - 2 PB - IEEE CY - Piscataway, NJ. ER - TY - CHAP A1 - Schreiner, Rupert A1 - Dams, Florian A1 - Prommesberger, Christian A1 - Bornmann, Benjamin A1 - Serbun, Pavel A1 - Navitski, Aliaksandr A1 - Müller, Günter T1 - Silicon-based integrated field emission electron sources for sensor application T2 - 24th International Vacuum Nanoelectronics Conference (IVNC), 2011 : 18 - 22 July 2011, Wuppertal, Germany N2 - We report on the design, fabrication and characterization of p-type silicon field emitter arrays for the application in compact fast switchable electron sources. Since standard silicon technology has been used to prepare the devices, they can be easily integrated with other silicon based sensors and electronic components, too. The emitter arrays consist of approx. 3×105 tips per cm2, with a tip radius less than 20 nm. By using self-aligned processes, an integrated gate electrode with a diameter of  3 μm was placed concentrically around the tips. A mesh of silicon-beams with a grating period of 100 μm and beam width of 20 μm forms the anode of the electron source. A glass wafer (thickness 300 μm) acts as spacer between anode and Si-tip cathode. Characterization of the field emission properties of the emitter arrays was performed by high resolution field emission scanning microscopy. The emitter arrays exhibit a highly stable and very homogeneous emission. A maximum stable current of 0.1 μA per tip was found. A saturation level in the voltage current characteristics, which was found at around 10 nA, supports current stabilisation and will enable optical modulation of the emission current. KW - anodes KW - cathodes KW - field emission electron microscopy KW - field emission electron sources KW - field emitter arrays KW - silicon tips KW - structured cold cathode KW - vacuum sensors Y1 - 2012 UR - https://ieeexplore.ieee.org/document/6004541?arnumber=6004541 SP - 19 EP - 20 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Bornmann, Benjamin A1 - Mingels, Stephan A1 - Serbun, Pavel A1 - Lützenkirchen-Hecht, Dirk A1 - Müller, Günter A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Dams, Florian A1 - Schreiner, Rupert T1 - Photosensitivity of electron field emission from B-doped Si-tip arrays T2 - 25th International Vacuum Nanoelectronics Conference (IVNC) ; Jeju, Korea (South), 09.07.2012 - 13.07.2012 N2 - The electron current from field-emitting B-doped Si-tip arrays under illumination was studied. An improved cathode design with a patch of 271 tips yielded a reproducible cathode current between 0.2-2000 nA in the electric field range of 3.8-6.6 V/μm. The plateau in the Fowler-Nordheim plot shows the actual carrier depletion and leads to a very stable emission at ~1 μA with a current noise of less than 3.3 %. Color-filtered halogen lamp illumination was used to investigate the photo-sensitivity of the saturation current. The intensity-normalized current switching ratio increases nonlinearly with the photon energy. This hints either for secondary generation in the conduction band or deeper valence band excitation. The first is supported by a rough estimation of the quantum efficiency. Further experiments with a tunable laser and electron spectroscopy are planned. KW - boron KW - electron field emission KW - electron spectroscopy KW - elemental semiconductors KW - field emitter arrays KW - halogens KW - lamps KW - lighting KW - p-doped Si tips KW - photosensitivity KW - silicon KW - valence bands Y1 - 2012 SN - 978-1-4673-1984-3 SN - 978-1-4673-1983-6 SN - 978-1-4673-1982-9 U6 - https://doi.org/10.1109/IVNC.2012.6316980 SN - 2380-6311 SN - 2164-2370 SP - 1 EP - 2 PB - IEEE ER - TY - CHAP A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Dams, Florian A1 - Serbun, Pavel A1 - Bornmann, Benjamin A1 - Mingels, Stephan A1 - Müller, Günter A1 - Schreiner, Rupert T1 - Si-Feldemissionskathoden für Anwendungen in miniaturisierten Ionisationsvakuumsensoren T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft e.V. (DPG), Regensburg, 10. - 15. März 2013 N2 - Feldemissionselektronenquellen sind aufgrund ihrer prinzipiellen Vorteile gegenüber Glühkathoden bereits seit längerer Zeit Gegenstand der Forschung und werden bisher nur in einigen Spezialanwendungen erfolgreich eingesetzt. Hierbei werden Einzelspitzen mit Spannungen im kV-Bereich und Strömen im nA-Bereich betrieben. Dagegen werden für miniaturisierte Sensorsysteme eher Spannungen von ca. 100 V und Ströme von ca. 1 mA benötigt. Dazu wurden bisher meist Feldemissionskathoden mit CNTs vorgeschlagen, welche für Anwendungen in der Halbleiterindustrie aufgrund des Kohlenstoffanteils nicht erwünscht sind. Ziel unserer Arbeit ist es, Si-basierte Elektronenquellen zu realisieren, die mit anderen miniaturisierten Vakuumsensoren auf einem Chip integrierbar sind. Mithilfe eines optimierten Herstellungsprozesses konnten wir p-Si-Spitzenarrays mit Spitzenradien von wenigen nm realisieren [1]. Messungen an diesen Strukturen zeigen ein sehr homogenes Emissionsverhalten, das vor allem im Sättigungsbereich bei Emissionsströmen von ca. 10 nA pro Spitze zeitlich stabil (Schwankungen < 5 %) und optisch schaltbar (Faktor > 2.5) ist [2]. Y1 - 2013 UR - https://www.researchgate.net/publication/281373011_Si-Feldemissionskathoden_fur_Anwendungen_in_miniaturisierten_Ionisationsvakuumsensoren PB - Deutsche Physikalische Gesellschaft e.V. ER - TY - JOUR A1 - Bornmann, Benjamin A1 - Mingels, Stephan A1 - Dams, Florian A1 - Prommesberger, Christian A1 - Schreiner, Rupert A1 - Lützenkirchen-Hecht, Dirk A1 - Müller, Günter T1 - Electron spectrometer in adjustable triode configuration for photo-induced field emission measurements JF - The Review of scientific instruments N2 - We have constructed a new ultrahigh vacuum apparatus with a triode configuration for the systematic investigation of photo-induced field emission (PFE) from metallic or semiconducting cathodes. These are exposed to electric fields up to 400 MV∕m and laser irradiation by means of hole or mesh gates. Cathodes and gates are in situ exchangeable and adjustable with high precision to ensure a homogeneous extraction of electrons which are partially transmitted to the fixed electron spectrometer. Its hemispherical sector analyzer provides an energy resolution limit of 8 meV. The commissioning of the measurement system has been performed with a tungsten needle. Its temperature showed up in the high-energy tail of the electron spectrum, while its work function was derived from the spectral low-energy part combined with the integral current-voltage curve. First PFE measurements on B-doped Si-tip arrays yielded a small field emission current increase under green laser illumination. A shift and splitting of the energy spectra was observed which revealed different emission regimes as well as the photosensitivity of the cathode due to carrier excitation into the conduction band. For the full exploitation of the PFE system, a tunable laser over a wide eV-range is required. Y1 - 2012 U6 - https://doi.org/10.1063/1.3673475 VL - 83 IS - 1 PB - American Institute of Physics CY - Melville, NY ER - TY - CHAP A1 - Bornmann, Benjamin A1 - Mingels, Stephan A1 - Lützenkirchen-Hecht, Dirk A1 - Müller, Günter A1 - Dams, Florian A1 - Schreiner, Rupert T1 - Field emission spectroscopy studies on photo-sensitive p-doped Si-tip arrays T2 - 24th International Vacuum Nanoelectronics Conference (IVNC), 2011 : 18 - 22 July 2011, Historische Stadthalle Wuppertal, Germany N2 - The influence of laser illumination on the integral as well as on the energy-resolved electron currents from well-defined p-doped Si-tip arrays was investigated. First results have provided stable cathode currents between 100 nA and 500 μA in a field range of 2-20 V/μm. Green laser illumination resulted in an enhanced cathode current and an increased population of the conduction band which can be seen in the spectra. Charging of the cathode surface, however, leads to a shift and broadening of the spectra which complicate their analysis. Therefore, further experiments with a rotatable cathode and a varying number of tips as well as with a tunable laser are planned. KW - cathodes KW - conduction bands KW - electron field emission KW - elemental semiconductors KW - field emission spectroscopy KW - field emitter arrays KW - laser illumination KW - lighting KW - p-doped silicon tips KW - photo sensitivity KW - silicon Y1 - 2011 UR - https://ieeexplore.ieee.org/document/6004582?arnumber=6004582 SN - 978-3-00-035081-8 SN - 978-1-4577-1243-2 SN - 2380-6311 SN - 2164-2370 SP - 101 EP - 102 PB - IEEE ER - TY - CHAP A1 - Prommesberger, Christian A1 - Dams, Florian A1 - Langer, Christoph A1 - Schreiner, Rupert A1 - Rutkowski, S. A1 - Bornmann, Benjamin A1 - Müller, Günter T1 - Simulation of electron trajectories of a field emission electron source in triode configuration by using finite element methods T2 - 24th International Vacuum Nanoelectronics Conference (IVNC), 2011 : 18 - 22 July 2011, Historische Stadthalle Wuppertal, Germany N2 - The finite element simulation program COMSOL Multiphysics® was used to simulate the emission efficiency of a silicon tip electron source in triode configuration for different geometries and electrode potentials. The simulation predicts a maximum emission efficiency of 84% for an optimized structure. In a second simulation a gate electrode was concentrically arranged above a single CNT column. Here, the efficiency was simulated as a function of gate hole geometry, electrode potentials and distances between the electrodes. The simulation shows that a conical shape of the gate hole results in an efficiency up to nearly 100%. KW - carbon nanotubes KW - electron field emission KW - electron source simulation KW - finite element analysis KW - simulation of electron trajectories KW - triodes Y1 - 2011 UR - https://ieeexplore.ieee.org/document/6004589 SN - 978-3-00-035081-8 SN - 978-1-4577-1243-2 SN - 2380-6311 SN - 2164-2370 SP - 144 EP - 145 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Bachmann, Michael A1 - Dams, Florian A1 - Düsberg, F. A1 - Hofmann, Martin A1 - Pahlke, Andreas A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Prommesberger, Christian A1 - Schreiner, Rupert T1 - Stability investigation of high aspect ratio n-type silicon field emitter arrays T2 - 2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China N2 - Electron sources based on silicon field emitter arrays, produced in processes based on semiconductor technology, are good candidates for a miniaturized X-ray source. A key parameter for this application is the stability of the X-ray photon flux and, thus, the emission current. In the present work we have investigated the influence of the residual gas pressure and a resistor in series on the emission stability of a high aspect ratio n-type silicon emitter array with hybrid extraction electrode. An increase of current fluctuations was found for pressures above 10-6 mbar. High resistances in series to the emitter array alter the emission characteristics, but greatly suppress spikes in the emission current and improve its stability. This, however, strongly depends on the bias point. The field enhancement factor is not affected by the resistance. In a long term measurement the emission current was found to be constant after an initial phase of degradation. KW - Current measurement KW - emission current stability KW - field emitter array KW - Field emitter arrays KW - RESISTANCE KW - Resistors KW - semiconductor field emission KW - silicon KW - silicon tips KW - Stability analysis KW - Thermal stability KW - XRF spectroscopy Y1 - 2015 U6 - https://doi.org/10.1109/IVNC.2015.7225584 SP - 204 EP - 205 PB - IEEE ER - TY - JOUR A1 - Pangerl, Jonas A1 - Moser, Elisabeth A1 - Müller, Max A1 - Weigl, Stefan A1 - Jobst, Simon A1 - Rück, Thomas A1 - Bierl, Rudolf A1 - Matysik, Frank-Michael T1 - A sub-ppbv-level Acetone and Ethanol Quantum Cascade Laser Based Photoacoustic Sensor– Characterization and Multi-Component Spectra Recording in Synthetic Breath JF - Photoacoustics N2 - Trace gas analysis in breath is challenging due to the vast number of different components. We present a highly sensitive quantum cascade laser based photoacoustic setup for breath analysis. Scanning the range between 8263 and 8270 nm with a spectral resolution of 48 pm, we are able to quantify acetone and ethanol within a typical breath matrix containing water and CO2. We photoacoustically acquired spectra within this region of mid-infra-red light and prove that those spectra do not suffer from non-spectral interferences. The purely additive behavior of a breath sample spectrum was verified by comparing it with the independently acquired single component spectra using Pearson and Spearman correlation coefficients. A previously presented simulation approach is improved and an error attribution study is presented. With a 3σ detection limit of 6.5 ppbv in terms of ethanol and 250 pptv regarding acetone, our system is among the best performing presented so far. KW - Acetone KW - Breath analysis KW - Photoacoustic spectroscopy KW - Quantum cascade laser KW - Spectral simulation Y1 - 2023 U6 - https://doi.org/10.1016/j.pacs.2023.100473 SN - 2213-5979 N1 - Corresponding author: Jonas Pangerl VL - 30 SP - 1 EP - 12 PB - Elsevier ER - TY - JOUR A1 - Menzel, Andreas A1 - Kammler, Martin A1 - Conrad, E. H. A1 - Yeh, V. A1 - Hupalo, Myron A1 - Tringides, Michael C. T1 - Kinetics measurements of Pb island growth on Si(111) JF - Physical Review B N2 - We present the results of kinetics experiments on quantum-size-effects (QSE) Pb islands formed on Si(111). We have looked at the evolution of seven-layer Pb islands from five-layer Pb islands due to the transport of Pb atoms from the interisland region, overcoming a barrier at the island edges, and moving to the island tops. By analyzing low-energy electron-diffraction and scanning-tunneling microscopy data, we have estimated the barrier for layer formation in this system to be ∼0.32eV. This energy is much larger than that expected from QSE electronic contributions alone. Y1 - 2003 U6 - https://doi.org/10.1103/PhysRevB.67.165314 VL - 67 IS - 16 PB - American Physical Society ER - TY - CHAP A1 - Serbun, Pavel A1 - Navitski, Aliaksandr A1 - Müller, Günter A1 - Schreiner, Rupert A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Dams, Florian T1 - Scaling of the field emission current from B-doped Si-tip arrays T2 - 25th International Vacuum Nanoelectronics Conference (IVNC) ; Jeju, Korea (South), 09.07.2012 - 13.07.2012 N2 - We have fabricated a test chip with various hexagonal arrays of B-doped Si tips (height ~ 3 μm, apex radius <; 30 nm, number 1-4447, resistivity 4 Ωcm, 100 orientation) in triangular arrangement (pitch 10 μm, density 1.16×10 6 cm -2 ) in order to systematically investigate the field emission current scaling with the number N of tips. Regulated voltage scans for 1 nA revealed rather efficient emission from nearly all tips of the arrays at an average field of 15 V/μm. The expected current plateau was always obtained at fields around 20 V/μm, but its width strongly increased with N. In this carrier depletion range, the single tip provided a much higher stability (<; 5%) of the current (2-3 nA) than at lower (>; 50 %) and higher currents (>; 30%). Integral current measurements of the hexagonal arrays resulted in a statistically improved current stability (<; 1%) but only a weak increase of the total current with N 0.28 yet. These results will be discussed with respect to the remaining inhomogeneity of the tips. KW - Anodes KW - B-doped KW - boron KW - Current measurement KW - current scaling KW - electron field emission KW - elemental semiconductors KW - field emitter arrays KW - Iron KW - Nonhomogeneous media KW - silicon KW - Voltage control Y1 - 2012 SN - 978-1-4673-1984-3 SN - 978-1-4673-1983-6 SN - 978-1-4673-1982-9 U6 - https://doi.org/10.1109/IVNC.2012.6316965 SN - 2380-6311 SN - 2164-2370 SP - 1 EP - 2 PB - IEEE CY - Piscataway, N.J. ER - TY - THES A1 - Zhang, Yunjia T1 - Microcontroller Programming of a Contactless Optical Position Measurement Device N2 - This thesis focuses on programming a microcontroller to receive and process data from a waveguide optic distance sensor, and to visualize the measured distance on a display screen. During the measurement process, LED moves above the 3D-printed D-shaped waveguide. The light transmitted through the waveguide is converted into photocurrents by photodiodes located at both ends of the optical waveguide, which are then converted into voltage signals through specific electronic components. By computing the ratio of the optical power detected at each end, the relative position of the LED along the waveguide can be determined. In this project, a microcontroller is used to acquire the voltage data, correct measurement errors, calculate the LED position, and display the result on screen in real time. Compared to manual calculation of photocurrent values, using a microcontroller for automated data processing greatly improves speed and efficiency. At the same time, real-time visualization enhances the system’s practicality and usability, making it more suitable for future applications. Y1 - 2025 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:bvb:898-opus4-84647 CY - Regensburg ER - TY - CHAP A1 - Kammler, Martin A1 - Horn- von Hoegen, Michael A1 - Voss, N. A1 - Tringides, Michael C. A1 - Menzel, Andreas A1 - Conrad, E. H. T1 - Surface Dynamics of Stepped Si(001) Studied by Temporal Leed Spectroscopy T2 - Collective Diffusion on Surfaces: Correlation Effects and Adatom Interactions (NATO Science Series II: Mathematics, Physics and Chemistry N2 - We present the first demonstration of Temporal LEED Spectroscopy’s ability to measure surface dynamics as shown by a study of step dynamics on vicinal Si(001). While we measure activation energies consistent with other work, the observed microscopic mechanism driving the fluctuations is inconsistent with previous claims. We exclude evaporation/condensation of atoms from the steps as the rate limiting kinetics in the temperature range of this experiment. Possible reasons for these differences are discussed. Y1 - 2001 U6 - https://doi.org/10.1007/978-94-010-0816-7_3 VL - 29 SP - 23 EP - 32 PB - Springer ER - TY - JOUR A1 - Streubühr, C. A1 - Kalus, Annika A1 - Zhou, Ping A1 - Ligges, Manuel A1 - Hanisch-Blicharski, Anja A1 - Kammler, Martin A1 - Bovensiepen, U. A1 - Horn-von Hoegen, Michael A1 - von der Linde, D. T1 - Comparing ultrafast surface and bulk heating using time-resolved electron diffraction JF - Applied Physics Letters N2 - From measurements of the transient Debye-Waller effect in Bismuth, we determine the buildup time of the random atomic motion resulting from the electronic relaxation after short pulse laser excitation. The surface sensitive reflection high energy electron diffraction and transmission electron diffraction yield a time constant of about 12 ps and 3 ps, respectively. The different energy transfer rates indicate relatively weak coupling between bulk and surface vibrational modes. (C) 2014 AIP Publishing LLC. Y1 - 2014 U6 - https://doi.org/10.1063/1.4872055 VL - 104 SP - 1 EP - 3 PB - American Institute of Physics ER - TY - CHAP A1 - Weigl, Stefan A1 - Müller, Max A1 - Pangerl, Jonas A1 - Rück, Thomas T1 - Scopes and Limits of Photoacoustic Spectroscopy in Modern Breath Analysis T2 - Breath Analysis N2 - Photoacoustic spectroscopy is a viable tool for trace gas detection in various application fields. In recent years, this technique has been exploited more and more for modern breath analysis as well. Within this chapter, a holistic overview of photoacoustic spectroscopy is presented, while maintaining the relationship to breath analysis. Therefore, a concise description of the fundamentals of photoacoustic spectroscopy is provided. This is essential for understanding the scopes and limits of this outstanding measurement technique being described within this chapter. In the past several different types of photoacoustic measurement setups for trace gas detection have emerged, including different light sources, modulation techniques, and detection schemes. These are described shortly and advantages as well as disadvantages, especially in relation to breath analysis, are highlighted. Though being a promising sensor principle, measurement devices based on photoacoustic spectroscopy are still rare on the sensor market, especially when it comes to trace gas detection in complex gas matrices, e.g., human breath exhale. One main reason is due to possible molecular interactions influencing the relaxational behavior of the analyte altering the sensor signal. Recent results shedding light on the intricate relaxational processes within complex gas matrices are discussed in detail, providing approaches to overcome this issue. Finally, various applications of photoacoustic spectroscopy in breath analysis are described demonstrating the great potential of this technology. Y1 - 2022 SN - 978-3-031-18526-7 U6 - https://doi.org/10.1007/11663_2022_22 SP - 101 EP - 159 PB - Springer nature ER - TY - PAT A1 - Olbrich, Florian A1 - Pongratz, Christian A1 - Bierl, Rudolf A1 - Ehrlich, Ingo T1 - Method and System for Evaluating a Structural Integrity of an Aerial Vehicle T2 - Europäisches Patentblatt (09.12.2020) zur Anmeldung: OTH Regensburg, Anmeldenummer: 19179054.2, Patentnummer 1001/3748327, Veröffentlichungsnummer: 3 748 327 Y1 - 2020 SP - 395 EP - 396 ER - TY - JOUR A1 - Ławrowski, Robert Damian A1 - Pirker, Luka A1 - Kaneko, Keita A1 - Kokubo, Hiroki A1 - Bachmann, Michael A1 - Ikuno, Takashi A1 - Remskar, Maja A1 - Schreiner, Rupert T1 - Field emission from nanotubes and flakes of transition metal dichalcogenides JF - Journal of Vacuum Science and Technology B N2 - Transition metal dichalcogenides such as MoS2 and WS2 are low-dimensional semiconductor materials. MoS2 and WS2 nanotubes and flakes were grown by a chemical transport reaction under a temperature gradient. I2 was used as a transport agent for previously synthesized MoS2 and WS2, respectively. These multilayered nanotubes are indirect bandgap semiconductors with a bandgap depending on their diameter. WS2 flakes were prepared by the sulfurization of thin WOx flakes. To increase the field enhancement of such low-dimensional structures by a higher aspect ratio, two approaches were examined: (a) the MoS2 and WS2 nanotubes were attached individually by a focused ion beam with Pt on dry etched n-type Si pillars and (b) the WS2 flakes were grown directly on the surface of the (n-type and p-type) Si pillars. Integral field emission measurements were performed in a diode configuration with a 50 μm mica spacer in a vacuum chamber at pressures of about 10−9 mbar. At a voltage of 900 V (18 MV/m), the integral emission current from the nanotubes is up to 11 μA for the lateral mounted MoS2 and about 1.3 μA (1.0 μA) for the upright mounted WS2 (MoS2). The onset voltage for a current of 1 nA is about 550 V for MoS2 and 500 V for WS2, respectively. The voltage conversion factor is in the range of 6 × 104–8 × 104 cm−1 for the nanotubes. The mounted MoS2 flakes show a field emission current of about 6 μA at 18 MV/m in contrast to the directly grown WS2 flakes, which show a pronounced saturation regime and, therefore, a lower emission current of about 0.5 μA is reached at 1500 V (25 MV/m). The WS2 flakes show a two times higher (1 × 105 cm−1) voltage conversion factor in comparison to the MoS2 flakes (5 × 104 cm−1). The extracted characteristics of the current-limiting part show a difference in the behavior of the extracted current-limiting characteristics between the lateral (linear) and upright mounted (exponential) nanotubes and the MoS2 flakes. In contrast, the WS2 flakes show charge carrier depletion effects. Y1 - 2020 U6 - https://doi.org/10.1116/1.5140474 VL - 38 IS - 3 SP - 032801 PB - AIP Publishing ER - TY - JOUR A1 - Kleshch, Victor I. A1 - Serbun, Pavel A1 - Lützenkirchen-Hecht, Dirk A1 - Orekhov, Anton A1 - Ivanov, Victor E. A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Schreiner, Rupert A1 - Obraztsov, Alexander N. T1 - A Comparative Study of Field Emission from Pristine, Ion-treated and Tungsten Nanoparticle-decorated p-type Silicon Tips JF - Physica Status Solidi B N2 - The field electron emission characteristics of individual tips of a silicon field emitter array are analyzed. The array of conical‐shaped tips is fabricated on a p‐type silicon wafer by using reactive ion etching and sharpening oxidation. The tips are decorated with single tungsten nanoparticles at their apexes. Furthermore, the focused ion beam is also used to increase surface conductivity of some of the tips. Comparative measurements of field emission are performed by using the scanning anode probe field emission microscopy technique. All types of tips demonstrated emission activation consisting of a sudden current increase at a certain value of the applied voltage. Compared to the pristine tips, a noticeable reduction of the saturation effect in the current–voltage characteristics and a smaller light sensitivity for the decorated tips is found. For ion‐treated tips, saturation effects and light sensitivity are completely suppressed. Scanning electron microscopy observations reveal the formation of single nanoscale protrusions extending from the metal particles and from the apexes of bare ion‐treated tips after exposure under strong electric fields during the field emission measurements. The influence of protrusions growth on characteristics of silicon field emitter arrays is discussed. Y1 - 2019 U6 - https://doi.org/10.1002/pssb.201800646 VL - 256 IS - 9 PB - Wiley ER - TY - CHAP A1 - Serbun, Pavel A1 - Porshyn, Vitali A1 - Müller, Günter A1 - Lützenkirchen-Hecht, Dirk A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert T1 - Field emission behavior of single n- and p-type black Si pillar structures T2 - International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan N2 - We have investigated the properties of single n- and p-type black silicon (b-Si) pillars with a height of 20 μ m under strong electric field and halogen lamp or laser illumination. For both type of b-Si pillar structures, I-V measurements revealed strong activation effects, which consisted in sudden current increases during the first up/down voltage sweeps. The maximum reproducible emission current from a single n-type b-Si pillar structure was about 15 μ A. A pronounced saturation region at 240 nA was observed for a single p-type b-Si pillar. The current fluctuation over time showed a standard deviation of 28% and 2.5% for n- and p-type single b-Si pillar structures, respectively. Optical switching under halogen lamp illumination resulted in at least 3 times higher saturation currents and showed a linear dependence of the FE current on the laser power. KW - field emission KW - black silicon KW - photoemission Y1 - 2018 U6 - https://doi.org/10.1109/IVNC.2018.8520292 PB - IEEE ER - TY - JOUR A1 - Mingels, Stephan A1 - Porshyn, Vitali A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Schreiner, Rupert A1 - Lützenkirchen-Hecht, Dirk A1 - Müller, Günter T1 - Photosensitivity of p-type black Si field emitter arrays JF - Journal of Applied Physics N2 - We have investigated the properties of black Si field emitter arrays under strong electric fields and laser illumination. A low onset field of 1.8 MV/m for an emission current of 1 nA was obtained. A pronounced saturation region of the dark and photo-enhanced current was observed, which provided a short-term stability of 0.1% at 0.4 μA and 0.7% at 1.0 μA, respectively. As maximum value for the photosensitivity, an on-off current switching ratio of 43 reaching about 13 μA was achieved at a laser power of 15 mW. Electron spectra in the dark and under laser illumination are presented, showing a current and light-sensitive voltage drop across the emitters as well as hints for hot electron emission. Y1 - 2016 U6 - https://doi.org/10.1063/1.4948328 VL - 119 IS - 16 ER - TY - CHAP A1 - Serbun, Pavel A1 - Porshyn, Vitali A1 - Müller, Günter A1 - Mingels, Stephan A1 - Lützenkirchen-Hecht, Dirk A1 - Bachmann, Michael A1 - Düsberg, Felix A1 - Dams, Florian A1 - Hofmann, Martin A1 - Pahlke, Andreas A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert T1 - Field emission behavior of Au-tip-coated p-type Si pillar structures T2 - 29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada N2 - Precisely aligned high-aspect-ratio (HAR) silicon tip arrays were fabricated using enhanced reactive ion etching with an inductively-coupled-plasma followed by a sharpening oxidation. A gold thin film was then sputtered only on the tips of the HAR structures. Field-emission (FE) properties from Au-coated HAR p-Si tip array cathodes have been systematically investigated by means of field emission scanning microscopy (FESM). A rather high efficiency of the HAR Si structures (71% at 550 V), but limited homogeneous FE with currents of 1-600 nA might be correlated with the varying geometry of the tips and the presence of oxides. I-V measurements of single Au-coated HAR emitters revealed activation effects and the saturation current region at 3 nA. An increase of the saturation current by 4 orders of magnitude was observed during 20 hours of conditioning at constant voltage, which finally resulted in nearly reproducible FN curves with a ß-factor of 473. An excellent stability of the emission current of less than 1 % was obtained during the additional long-time conditioning at constant voltage. Optical switching under halogen lamp illumination resulted in at least 2 times higher saturation currents and showed a linear dependence of the FE current on the light color temperature. KW - field emission KW - p-type Si-pillar array KW - surface oxide effects KW - photoemission Y1 - 2016 U6 - https://doi.org/10.1109/IVNC.2016.7551516 SN - 2380-6311 SP - 181 EP - 182 PB - IEEE ER - TY - CHAP A1 - Serbun, Pavel A1 - Porshyn, Vitali A1 - Lützenkirchen-Hecht, Dirk A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert T1 - Photosensitivity of single silicon high-aspect-ratio tips with different doping levels T2 - International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan N2 - Photosensitivity of single lightly p-doped, highly p-doped, with an integrated p/n junction and intrinsic high-aspect-ratio (HAR) silicon tips was investigated in an ultra-high vacuum environment. The current-voltage characteristics (I-V) of the lightly doped p-type HAR tips showed a characteristic current saturation at around 10-12 nA, whereas the HAR Si tips with p/n junction showed similar saturation phenomena, however, at much smaller current values starting at ~20-30 pA. Optical switching under a halogen lamp illumination resulted in at least 2-4 times higher saturation currents and showed a linear dependence between the illumination power and the FE current, for both types of structures. In case of the highly p-doped HAR tips optical current switching effects, i. e. current saturation, were observed at rather low current levels 1-2 pA. Intrinsic HAR Si-tips showed relative unstable field emission behavior without a clear evidence of the photosensitivity. KW - field emission KW - Si p/n junction KW - p-type Si KW - photosensitivity Y1 - 2018 U6 - https://doi.org/10.1109/IVNC.2018.8520288 PB - IEEE ER - TY - CHAP A1 - Schreiner, Rupert A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Ławrowski, Robert Damian A1 - Dams, Florian A1 - Bachmann, Michael A1 - Düsberg, F. A1 - Hofmann, Martin A1 - Pahlke, Andreas A1 - Serbun, Pavel A1 - Mingels, Stephan A1 - Müller, Günter T1 - Semiconductor field emission electron sources using a modular system concept for application in sensors and x-ray-sources T2 - 2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China N2 - Semiconductor field emitters are suitable candidates for applications, which require a very stable field emission (FE) current and a high emission uniformity over the entire emission area. By using different materials and geometries, we are able to vary the FE characteristics within a wide range. Each specific application requires its own optimized design for the cathode as well as for the other parts of the FE electron source. To meet as many of these requirements as possible while using only a limited number of different prefabricated components, we established a modular system concept for our FE electron source. This allows the implementation of almost every cathode material. For first characterizations, we used gated p-type Si cathodes with 16 tips. We obtained stable FE currents of 0.4 μA for a grid-potential of 400 V and a gate potential of 100 V. Almost 100% of the electrons are emitted towards the grid-electrode. Parasitic leakage paths, as well as the electron emission towards the gate-electrode can be neglected. Approximately 10% of the electrons are transmitted through the grid and reach the external anode. This is in good agreement with the optical transmission through the grid-mesh. KW - Anodes KW - CATHODES KW - electron sources KW - GEOMETRY KW - Iron KW - Logic gates KW - semiconductor field emission KW - silicon Y1 - 2015 U6 - https://doi.org/10.1109/IVNC.2015.7225572 SP - 178 EP - 179 PB - IEEE ER - TY - CHAP A1 - Ławrowski, Robert Damian A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Schreiner, Rupert A1 - Mingels, Stephan A1 - Porshyn, Vitali A1 - Serbun, Pavel A1 - Müller, Günter T1 - Field emission from surface textured GaN with buried double-heterostructures T2 - 2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China N2 - In this contribution we report on field emission (FE) cathodes based on thin-film LED-technology and surface texturing. The FE cathode can be used both as an n-GaN cathode with an electrical contact at the top side metallization as well as a pn-GaN diode contacting only the p-GaN layer at the bottom side of the structure. The local and integral FE properties of the textured surface of the LED structure were investigated. For n-GaN an integral emission current up to 1.0 μA at an electric field of 19 V/μm was achieved. The pn-GaN diode measurements showed an integral current saturation behavior with two orders of magnitude lower FE currents. Regulated voltage scans obtained by FE scanning microscopy revealed a well-distributed emission over the whole cathode area. Measurements under pulsed tunable laser illumination and moderate electric fields indicated charge carrier generation in the buried double-heterostructures at photon energies below 3.5 eV besides normal photoemission above 4.1 eV. KW - CATHODES KW - Current measurement KW - Electric fields KW - field emission KW - Gallium nitride KW - GaN KW - Iron KW - Light emitting diodes KW - photoemission KW - Surface texture Y1 - 2015 U6 - https://doi.org/10.1109/IVNC.2015.7225548 SP - 106 EP - 107 PB - IEEE ER - TY - CHAP A1 - Bresinsky, Markus A1 - Reusner, Florian T1 - GLOBE – Learn and Innovate Digitization by a Virtual Collaboration Exercise and Living Lab T2 - Interactivity, Game Creation, Design, Learning, and Innovation. 6th International Conference, ArtsIT 2017, and Second International Conference, DLI 2017, Heraklion, Crete, Greece, October 30–31, 2017, Proceedings N2 - This paper presents an advanced interactive learning platform .dot that implements the GLOBE exercise, using innovative information and communication technologies to enhance learning and development of management and leadership skills in a complex organizational setting. GLOBE on the one hand focuses on competences around ICT and virtual collaboration, and on the other hand on digital transformation, technologies and tools at higher education institutions. By this applied science, learning and developing on the real-world platform, analysis and drive of digital innovation and transformation can be fostered. The main goal is to co-create knowledge and solutions in the following focused subjects: Management and leadership of multidisciplinary, multinational and multicultural virtual and real collaboration in a complex organizational environment. GLOBE uses real world scenarios (e.g. United Nations mission) and involves real world actors. This comprehensive educational approach should enhance learning techniques and leverage learning progress with hands-on experiences and applied science in the context of ICT and virtual collaboration, and the embodied dynamics of behavior to support innovation and development. KW - Digitization KW - Experiential learning KW - Human factors KW - ICT KW - Interactive and collaborative learning KW - Living Lab KW - Open innovation KW - Problem-based learning KW - Virtual collaboration Y1 - 2018 U6 - https://doi.org/10.1007/978-3-319-76908-0_26 SP - 273 EP - 281 PB - Springer Nature ER - TY - CHAP A1 - Mingels, Stephan A1 - Porshyn, Vitali A1 - Serbun, Pavel A1 - Lützenkirchen-Hecht, Dirk A1 - Müller, Günter A1 - Prommesberger, Christian A1 - Langer, Christoph A1 - Schreiner, Rupert A1 - Lutzenkirchen-Hecht, Dirk T1 - Photo-enhanced field emission properties of p-doped black Si arrays T2 - 2016 29th International Vacuum Nanoelectronics Conference (IVNC), 11-15 July 2016, Vancouver, BC, Canada N2 - We have carried out systematic investigations of p-type black Si field emitter arrays under laser illumination. As expected the current-voltage characteristic revealed a strong saturation providing a high photosensitivity, which had a maximum on-off ratio of 43 at a maximum current of 13 μA. The saturation current was stable in the dark as well as under illumination with fluctuations <;0.7%. Results from time-resolved measurements of the photo-sensitivity showed a rather fast response but a long decay time. Electron spectra in the dark and under laser illumination revealed the origin of the emission. KW - black Si KW - Decision support systems KW - photo-enhanced field emission Y1 - 2016 U6 - https://doi.org/10.1109/IVNC.2016.7551447 SP - 1 EP - 2 PB - IEEE ER - TY - CHAP A1 - Hausler, Peter A1 - Fischer, Johannes A1 - Wunderlich, Lukas A1 - Recum, Patrick A1 - Peller, Sebastian A1 - Hirsch, Thomas A1 - Bierl, Rudolf T1 - Miniaturisierte Sensoren basierend auf Oberflächenplasmonenresonanz, Chancen und Herausforderungen T2 - DGaO-Proceedings 2021 N2 - Derzeit gibt es zahlreiche Bereiche, wie Umwelt Monitoring und zivile Infrastruktur in denen geeignete Sensoren für die Überwachung der Systeme fehlen. SPR-basierte Sensoren haben das Potential diese Lücke zu schließen. Um für den Einsatz in der Umwelt tauglich zu werden, müssen die Sensoren noch robuster werden. Hier wird eine mögliche Lösung gezeigt. Y1 - 2021 UR - https://www.dgao-proceedings.de/download/122/122_a21.pdf PB - Dt. Gesellschaft für angewandte Optik CY - Erlangen-Nürnberg ER - TY - RPRT A1 - Höller, Christoph A1 - Quirt, David A1 - Mahn, Jeffrey A1 - Müller-Trapet, Markus T1 - Guide to calculating airborne sound transmission in buildings N2 - In recent years, the science and engineering for controlling sound transmission in buildings have shifted from a focus on individual assemblies such as walls or floors, to a focus on performance of the complete system. Standardized procedures for calculating the overall transmission, combined with standardized measurements to characterize sub-assemblies, provide much better prediction of sound transmission between adjacent indoor spaces. The International Standards Organization (ISO) has published a calculation method, ISO 15712-1 that uses laboratory test data for sub-assemblies such as walls and floors as inputs for a detailed procedure to calculate the expected sound transmission between adjacent rooms in a building. This standard works very well for some types of construction, but to use it in a North American context one must overcome two obstacles – incompatibility with the ASTM standards used by our construction industry, and low accuracy of its predictions for lightweight wood or steel frame construction. To bypass limitations of ISO 15712-1, this Guide explains how to merge ASTM and ISO test data in the ISO calculation procedure, and provides recommendations for applying extended measurement and calculation procedures for specific common types of construction. This Guide was developed in a project established by the National Research Council of Canada to support the transition of construction industry practice to using apparent sound transmission class (ASTC) for sound control objectives in the National Building Code of Canada (NBCC). However, the potential range of application goes beyond the minimum requirements of the NBCC – the Guide also facilitates design to provide enhanced sound insulation, and should be generally applicable to construction in both Canada and the USA. This publication contains a limited set of examples for several types of construction, to provide an introduction and overview of the ASTC calculation procedure. Additional examples and measurement data can be found in the companion documents to this Guide, namely NRC Research Reports RR-333 to RR-337. Furthermore, the calculation procedure outlined and illustrated in this Guide is also used by the software web application soundPATHS, which is available for free on the website of the National Research Council of Canada (see the references in Section 7 of this Guide for access details). Au cours des dernières années, les scientifiques et les ingénieurs ont fait porter leurs efforts en matière d’atténuation de la transmission du son dans les bâtiments davantage sur le rendement du système dans sa totalité que sur les ensembles de construction individuels. Les méthodes normalisées de calcul de la transmission globale, combinées à des mesures normalisées de caractérisation des sous-ensembles, permettent de mieux prédire la transmission du son entre des espaces intérieurs adjacents. L’Organisation internationale de normalisation (ISO) a publié une méthode de calcul, la norme ISO 15712-1, qui utilise des données d’essai en laboratoire pour les sous-ensembles, comme les murs et les planchers, comme données d’entrée en vue d’une méthode détaillée de calcul de la transmission du son prévue entre des pièces adjacentes dans un bâtiment. Cette norme fonctionne très bien pour certains types de construction, mais pour l’utiliser dans un contexte nord-américain, il faut surmonter deux obstacles – l’incompatibilité avec les normes ASTM utilisées par notre industrie de la construction et la faible exactitude de ses prévisions pour la construction à ossature de bois ou d’acier légère. Pour contourner les limites de la norme ISO 15712-1, le présent guide explique comment fusionner les données d’essai de l’ISO et de l’ASTM dans la méthode de calcul de l’ISO, et formule des recommandations relativement à l’application de méthodes élargies de mesure et de calcul pour des types de construction courants. Le présent guide a été élaboré dans le cadre d’un projet mis sur pied par le Conseil national de recherches du Canada afin d’appuyer la transition de la pratique de l’industrie de la construction vers l’utilisation d’un indice de transmission du son apparent (ITSA) satisfaisant aux objectifs de réduction rigoureux du Code national du bâtiment du Canada (CNBC). Toutefois, l’éventail potentiel d’applications va au-delà des exigences minimales du CNBC – le Guide facilite aussi une conception visant à améliorer l’insonorisation et devrait s’appliquer de façon générale à la construction tant au Canada qu’aux États-Unis. La présente publication contient un ensemble limité d’exemples pour plusieurs types de construction, afin de fournir une introduction et un aperçu de la méthode de calcul de l’ITSA. On trouvera d’autres exemples et données de mesure dans les documents d’accompagnement du présent guide, à savoir, les rapports de recherche RR-333 à RR-337 du CNRC. De plus, la méthode de calcul décrite et illustrée dans le présent guide est également utilisée par l’application Web soundPATHS, disponible gratuitement sur le site Web du Conseil national de recherches du Canada (voir les références à la section 7 du présent guide pour les détails d’accès). KW - airborne sound KW - apparent sound transmission class KW - ASTC KW - building KW - building acoustics KW - CLT KW - concrete KW - cross-laminated timber KW - Delta STC KW - flanking KW - hybrid KW - impact noise KW - ISO 12354 KW - ISO 15712 KW - Kij KW - linings KW - masonry KW - National Building Code Canada KW - NBCC KW - precast KW - sound KW - sound transmission KW - sound transmission class KW - STC KW - steel-framed KW - structure-borne sound KW - timber KW - transmission KW - wood-framed KW - ΔSTC KW - ΔTL Y1 - 2019 U6 - https://doi.org/10.4224/40001814 PB - National Research Council of Canada. Construction ET - 5th edition ER - TY - CHAP A1 - Shymanovich, Uladzimir A1 - Nicoul, Matthieu A1 - Lu, Wei A1 - Tarasevitch, A. A1 - Kammler, Martin A1 - Horn-von Hoegen, Michael A1 - von der Linde, D. A1 - Sokolowski-Tinten, Klaus A1 - Phipps, Claude T1 - Coherent acoustic and optical phonons in laser-excited solids studied by ultrafast time-resolved X-ray diffraction T2 - AIP Conference Proceedings N2 - We apply ultrafast time‐resolved X‐ray diffraction to directly study coherent acoustic and optical phonons in laser‐excited materials. In Au the ps acoustic response has been investigated with the particular goal to clarify the interplay of electronic and thermal pressure contributions. In Bi the extreme softening of the coherently excited A 1 g optical phonon presents strong indication that upon intense laser‐excitation the Peierls‐transition which determines the equilibrium structure of Bi can be reversed. In FeRh we studied the lattice response after a fast laser‐induced anti‐ferromagnetic to ferromagnetic phase transition. Y1 - 2010 U6 - https://doi.org/10.1063/1.3507146 IS - 1 SP - 558 EP - 566 PB - AIP ER - TY - JOUR A1 - Payer, Thomas A1 - Klein, C. A1 - Acet, M. A1 - Ney, V. A1 - Kammler, Martin A1 - Meyer zu Heringdorf, Frank-Joachim A1 - Horn-von Hoegen, Michael T1 - High-quality epitaxial Bi(111) films on Si(111) by isochronal annealing JF - Thin Solid Films N2 - Bi(111) films grown on Si(111) at room temperature show a significantly higher roughness compared to Bi films grown on Si(100) utilizing a kinetic pathway based on a low-temperature process. Isochronal annealing steps of 3 min duration each with temperatures up to 200 °C cause a relaxation of the Bi films' lattice parameter toward the Bi bulk value and yield an atomically flat Bi surface. Driving force for the relaxation and surface reordering is the magic mismatch of 11 Bi atoms to 13 Si atoms that emerges at annealing temperatures above 150 °C and reduces the remaining strain to less than 0.2%. KW - Epitaxy KW - Strain KW - Annealing KW - Bismuth KW - Silicon Y1 - 2012 U6 - https://doi.org/10.1016/j.tsf.2012.06.004 VL - 520 IS - 23 SP - 6905 EP - 6908 PB - Elsevier ER - TY - RPRT A1 - Höller, Christoph A1 - Quirt, David A1 - Mueller-Trapet, Markus T1 - Apparent sound insulation in wood-framed buildings N2 - This Report presents the results from substantial experimental studies of sound transmission, together with an explanation of calculation procedures to predict the sound transmission between adjacent spaces in a building with wood-framed walls and floors. This Report presents two types of experimental data for wood-framed constructions: - Test data for direct sound transmission through typical wood-framed wall assemblies and wood-framed floor assemblies, plus a summary of trends for such constructions and references to compilations of additional data - Test data for flanking sound transmission measured following the procedures of ISO 10848 for coupled wall/floor junctions and wall/wall junctions Worked examples for calculating the apparent sound transmission class (ASTC) rating between adjacent dwelling units are presented to illustrate how the experimental data can be applied. Y1 - 2017 U6 - https://doi.org/10.4224/23002820 PB - National Research Council of Canada. Construction ER - TY - CHAP A1 - Zhou, Ping A1 - Streubühr, C. A1 - Kalus, Annika A1 - Frigge, Tim A1 - Wall, S. A1 - Hanisch-Blicharski, Anja A1 - Kammler, Martin A1 - Ligges, Manuel A1 - Bovensiepen, U. A1 - von der Linde, D. A1 - Horn-von Hoegen, Michael T1 - Ultrafast time resolved reflection high energy electron diffraction with tilted pump pulse fronts T2 - EPJ Web of Conferences - XVIIIth International Conference on Ultrafast Phenomena N2 - We present time-resolved RHEED from a laser excited Pb(111) surface using a pulse front tilter for the compensation of the velocity mismatch of electrons and light. The laser pulses with tilted fronts were characterized by a spatially resolving cross correlator. The response of the surface upon excitation was observed to be less than 2 ps. Y1 - 2013 U6 - https://doi.org/10.1051/epjconf/20134110016 VL - 41 PB - EPJ ER - TY - CHAP A1 - Lu, Wei A1 - Nicoul, Matthieu A1 - Shymanovich, Uladzimir A1 - Tarasevitch, A. A1 - Kammler, Martin A1 - Horn-von Hoegen, Michael A1 - von der Linde, D. A1 - Sokolowski-Tinten, Klaus T1 - Transient reversal of a Peierls-transition: Extreme phonon softening in laser-excited Bismuth T2 - International Conference on Ultrafast Phenomena, Snowmass N2 - Laser-excited coherent optical phonons in Bismuth were investigated using time-resolved X-ray diffraction. The observed extreme softening of the excited A1g-mode presents strong indication that the Peierls-distortion defining the equilibrium structure of Bismuth is transiently reversed. Y1 - 2010 U6 - https://doi.org/10.1364/UP.2010.ME41 IS - ME41 PB - Optica Publishing Group ER - TY - JOUR A1 - Portavoce, A. A1 - Kammler, Martin A1 - Hull, Robert A1 - Reuter, Mark C. A1 - Copel, M. A1 - Ross, Frances M. T1 - Growth of nanostructures by locally modified surface reactivity JF - Materials Science in Semiconductor Processing N2 - The chemical vapor deposition (CVD) of Si and Ge on Si(0 0 1) substrates covered by 1 monolayer of Ga has been studied. Ga modifies surface reactivity and surface atom mobility. We show that islanding occurs during Ga-mediated CVD even in the absence of strain, allowing for the formation of islands without a wetting layer or with a thinner wetting layer. The morphology of the grown layer is highly dependent on kinetic parameters, i.e. growth temperature and growth pressure, that control Si and Ge deposition and Ga desorption. Si Ga-mediated CVD promotes the formation of self-assembled epitaxial Si islands exhibiting {1 1 3} facets. Ge islands grown by Ga-mediated CVD present reduced lateral sizes and an increased surface density compared to non Ga-mediated CVD. The growth morphology (particularly island size and density) can be understood by considering a qualitative model in which atoms are deposited only on sites whose dangling bonds are not passivated by Ga. We suggest that modification of surface reactivity during surfactant-mediated CVD can thus provide a new degree of freedom for quantum dot fabrication. KW - UHV TEM KW - UHV CVD KW - Epitaxial growth KW - Si KW - Ge KW - Surfactant Ga Y1 - 2009 U6 - https://doi.org/10.1016/j.mssp.2009.07.001 VL - 12 IS - 1-2 SP - 25 EP - 30 PB - Elsevier ER - TY - JOUR A1 - Portavoce, A. A1 - Kammler, Martin A1 - Hull, Robert A1 - Reuter, Mark C. A1 - Ross, Frances M. T1 - Mechanism of the nanoscale localization of Ge quantum dot nucleation on focused ion beam templated Si(001) surfaces JF - Nanotechnology N2 - We investigate the fundamental mechanism by which self-assembled Ge islands can be nucleated at specific sites on Si(001) using ultra-low-dose focused ion beam (FIB) pre-patterning. Island nucleation is controlled by a nanotopography that forms after the implantation of Ga ions during subsequent thermal annealing of the substrate. This nanotopography evolves during the annealing stage, changing from a nanoscale annular depression associated with each focused ion beam spot to a nanoscale pit, and eventually disappearing (planarizing). The correspondence of Ge quantum dot nucleation sites to the focused ion beam features requires a growth surface upon which the nanotopography is preserved. A further key observation is that the Ge wetting layer thickness is reduced in patterned regions, allowing the formation of islands on the templated regions without nucleation elsewhere. These results provide routes to the greatly enhanced design and control of quantum dot distributions and dimensions. Y1 - 2006 U6 - https://doi.org/10.1088/0957-4484/17/17/028 VL - 17 IS - 17 SP - 4451 EP - 4455 PB - IOP ER - TY - JOUR A1 - Ross, Frances M. A1 - Kammler, Martin A1 - Reuter, Mark C. A1 - Hull, Robert T1 - In-situ observations of self-assembled island nucleation on patterned substrates JF - Philosophical Magazine N2 - We compare in-situ electron microscopy observations of Ge island growth on Si surfaces modulated by different techniques. Si(001) substrates were patterned either using a focused Ga ion beam or lithographically to produce similar feature sizes. In the case of the focused-ion-beam patterned substrates, chemical or strain effects caused by low Ga doses control the positions at which islands nucleate. Nucleation on topographically modulated substrates, with the pattern produced either by high-dose sputtering or lithographically, is controlled by the nature of the side walls of topographic features. The two patterning approaches have different benefits in creating arrays of islands for device applications. Y1 - 2004 U6 - https://doi.org/10.1080/14786430410001671430 VL - 84 IS - 25-26 SP - 2687 EP - 2702 PB - Taylor & Francis ER - TY - JOUR A1 - Menzel, Andreas A1 - Conrad, E. H. A1 - Tringides, Michael C. A1 - Kammler, Martin A1 - Horn- von Hoegen, Michael T1 - Finite collection time effects in autocovariance function measurements JF - Journal of Applied Physics N2 - In this paper we discuss how finite data sets influence experimental measurements of the autocovariance function. Autocovariance estimators are biased, meaning that the expectation value for any measured autocovariance function is not identical to the actual autocovariance function. In this work we show that the measured autocovariance function for a finite length time series must become negative for some lag times. We derive analytic corrections to these finite time errors for different types of correlated random sequences. Our results explain the apparent anticorrelated noise observed in experimental observations. Y1 - 2003 U6 - https://doi.org/10.1063/1.1537466 VL - 93 IS - 4 SP - 2229 EP - 2235 PB - AIP Publishing ER - TY - JOUR A1 - Kammler, Martin A1 - Hull, Robert A1 - Reuter, Mark C. A1 - Ross, Frances M. T1 - Lateral control of self-assembled island nucleation by focused-ion-beam micropatterning JF - Applied Physics Letters N2 - We demonstrate that the nucleation sites of nanoscale, self-assembled Ge islands on Si(001) can be controlled by patterning the Si surface in situ with a focused ion beam. At low doses of 6000 Ga+ ions per <100 nm spot, the selective growth is achieved without modifying the initial surface topography. At larger doses, topographic effects produced by sputtering and redeposition control the selective nucleation sites. Islands grown on irradiated spots are smaller with higher aspect ratio than islands grown on clean Si(001), suggesting a strong surfactant effect of Ga. Y1 - 2003 U6 - https://doi.org/10.1063/1.1542680 VL - 82 IS - 7 SP - 1093 EP - 1095 ER - TY - JOUR A1 - Sokolowski-Tinten, Klaus A1 - Blome, Christian A1 - Blums, Juris A1 - Shymanovich, Uladzimir A1 - Nicoul, Matthieu A1 - Cavalleri, Andrea A1 - Tarasevitch, A. A1 - Horn-von Hoegen, Michael A1 - Kammler, Martin A1 - von der Linde, D. T1 - Ultrafast X-ray diffraction JF - Ultrafast Phenomena XIV N2 - In the last few years the generation of femtosecond pulses in the X-ray regime has become possible. These ultrashort X-ray pulses have enabled femtosecond time- resolution to be extended to X-rays. Y1 - 2005 U6 - https://doi.org/10.1007/3-540-27213-5_53 VL - 79 SP - 170 EP - 174 PB - Springer ER - TY - CHAP A1 - Höller, Christoph A1 - Zeitler, Berndt A1 - Reinhold, Steffi A1 - Jakob, A. A1 - Hopkins, C. T1 - Charakterisierung von Körperschallquellen auf der Empfangsplatte mit Hilfe von orthogonalen Funktionen T2 - Tagungsband - DAGA 2019 : 45. Jahrestagung für Akustik : 18.-21. März 2019, Rostock Y1 - 2019 UR - https://pub.dega-akustik.de/DAGA_2019/data/daga19_proceedings.pdf SN - 978-3-939296-14-0 SP - 93 EP - 96 PB - Deutsche Gesellschaft für Akustik e.V. CY - Berlin ER - TY - JOUR A1 - Kammler, Martin A1 - Hull, Robert A1 - Portavoce, A. A1 - Reuter, Mark C. A1 - Ross, Frances M. T1 - In-Situ Focused Ion Beam Micropatterning of Ge Islands JF - Microscopy and Microanalysis Y1 - 2003 U6 - https://doi.org/10.1017/S1431927603441214 VL - 9 IS - S02 SP - 132 EP - 134 PB - Microscopy Society of America ER - TY - JOUR A1 - Moser, Elisabeth A1 - Jobst, Simon A1 - Bierl, Rudolf A1 - Jenko, Frank T1 - A Deep Learning System to Transform Cross-Section Spectra to Varying Environmental Conditions JF - Vibrational Spectroscopy N2 - Absorption cross-sections provide a basis for many gas sensing applications. Therefore, any error in molecular cross-sections caused by varying environmental conditions propagates to spectroscopic applications. Original molecular cross-sections in varying environmental conditions can only be simulated for some molecules, whereas for most multi-atom molecules, one must rely on high-precision measurements at certain environmental configurations. In this study, a deep learning system trained with simulated absorption cross-sections for predicting cross-sections at a different pressure configuration is presented. The system’s capability to transfer to measured, multi-atom cross-sections is demonstrated. Thus, it provides an alternative to (pseudo-) line lists whenever the required information for simulation is unavailable. The predictive performance of the system was evaluated on validation data via simulation, and its transfer learning capabilities were demonstrated on actual measurement chlorine nitrate data. From the comparison between the system and line lists, the system shows slightly worse performance than pseudo-line lists but its predictive quality is still deemed acceptable with less than 5% relative integral change with a highly localized error around the peak center. This opens a promising way for further research to use deep learning to simulate the effect of varying environmental conditions on absorption cross-sections. KW - Spectroscopy KW - Deep learning KW - Simulation KW - Pressure broadening KW - Pseudo-line lists KW - Transfer learning Y1 - 2022 U6 - https://doi.org/10.1016/j.vibspec.2022.103410 SN - 0924-2031 VL - 122 IS - September PB - Elsevier ER - TY - CHAP A1 - Schreiner, Rupert A1 - Langer, Christoph A1 - Prommesberger, Christian A1 - Mingels, Stephan A1 - Serbun, Pavel A1 - Müller, Günter T1 - Field emission from surface textured extraction facets of GaN light emitting diodes T2 - 26th International Vacuum Nanoelectronics Conference (IVNC), 8-12 July 2013, Roanoke, VA, USA N2 - We report on the field emission properties of GaN LED surfaces. The textured extraction facet acts both as light scattering layer in order to increase the light extraction efficiency of the LED as well as nanostructured cathode surface for the field emission (FE) of electrons. The LED emits blue light with a peak wavelength of around 450 nm. The FE properties were investigated by a scanning microscope. Integral measurements as well as regulated voltage scans for 1 nA FE current over an area of 400 * 400 µm2were used to investigate both overall and local FE properties. A high number of well-distributed emitters with an average field enhancement factor ß of 85 and stable integral emission currents up to 100 µA at an electric field of   80 V/µm (Øanode= 880 µm) were found. Photo-field-emission spectroscopy (PFES) using a tunable pulsed laser revealed an enhanced photo absorption of the InGaN/GaN quantum well structures near the emission wavelength of the LED (<3.5 eV), whereas at high photon energies (>4.1 eV) photoemission from the GaN surface was observed. KW - Gallium nitride KW - Iron KW - Light emitting diodes KW - Cathodes KW - Surface texture KW - Surface waves KW - Photonics Y1 - 2013 U6 - https://doi.org/10.1109/ivnc.2013.6624721 PB - IEEE ER - TY - CHAP A1 - Moser, Elisabeth A1 - Pangerl, Jonas A1 - Jobst, Simon A1 - Weigl, Stefan A1 - Bierl, Rudolf T1 - Modeling the Photoacoustic Spectrum of a Quantum Cascade Laser for Human Breath T2 - Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES): July 11 - 15, 2022, Vancouver, British Columbia Canada N2 - A modeling approach to create a photoacoustic spectrum from synthetic data is presented and evaluated. The resulting model reaches a MAPE score of 2.7% and can be used to enable data-driven development in future work. KW - Quantenkaskadenlaser KW - Photoakustische Spektrometrie KW - Atemluft Y1 - 2022 SN - 978-1-957171-10-4 U6 - https://doi.org/10.1364/AIS.2022.ATu3G.2 PB - Optica Publishing Group ER - TY - JOUR A1 - Goldschmidt, Jens A1 - Moser, Elisabeth A1 - Nitzsche, Leonard A1 - Bierl, Rudolf A1 - Wöllenstein, Jürgen T1 - Improving the performance of artificial neural networks trained on synthetic data in gas spectroscopy – a study on two sensing approaches JF - tm - Technisches Messen N2 - Artificial neural networks (ANNs) are used in quantitative infrared gas spectroscopy to predict concentrations on multi-component absorption spectra. Training of ANNs requires vast amounts of labelled training data which may be elaborate and time consuming to obtain. Additional data can be gained by the utilization of synthetically generated spectra, but at the cost of systematic deviations to measured data. Here, we present two approaches to train ANNs with a combination of comparatively small, measured data sets and synthetically generated data. For the first approach a neural network is trained hybridly with synthetically generated infrared absorption spectra of mixtures of N2O and CO and measured zero-gas spectra, taken with a mid-infrared dual comb spectrometer. This improves the mean absolute error (MAE) of the network predictions from 0.46 to 0.01 ppmV and 0.24 to 0.01 ppmV for the concentration predictions of N2O and CO respectively for zero-gas measurements which was previously observed for training with purely synthetic data. At the same time a similar performance on spectra from gas mixtures of 0–100 ppmV N2O and 0 to 60 ppmV CO was achieved. For the second approach an ANN pre-trained on synthetic infrared spectra of mixtures of acetone and ethanol is retrained on a small dataset consisting of 26 spectra taken with a mid-infrared photoacoustic spectrometer. In this case the MAE for the concentration predictions of ethanol and acetone are improved by 45 % and 20 % in comparison to purely synthetic training. This shows the capability of using synthetically generated data to train ANNs in combination with small amounts of measured data to further improve neural networks for gas sensing and the transferability between different sensing approaches. N2 - Künstliche neuronale Netze werden in der quantitativen Infrarot-Gasspektroskopie eingesetzt, um Gaskonzentrationen in Multi-Komponenten-Absorptionsspektren vorherzusagen. Das Training von künstlichen neuronalen Netzen benötigt große Mengen an Trainingsdaten, was mit einem hohen Arbeits- und Zeitaufwand verbunden ist. Zusätzliche Trainingsdaten können durch synthetisch generierte Spektren gewonnen werden, sind jedoch mit systematischen Abweichungen zu tatsächlich gemessenen Daten verbunden. In dieser Arbeit werden zwei Ansätze präsentiert, um künstliche neuronale Netze mit einer Kombination aus vergleichsweise kleinen, gemessenen Datensätzen und synthetisch erzeugten Daten zu trainieren. Für den ersten Ansatz wird das neuronale Netz hybrid mit synthetisch erzeugten Infrarot-Absorptionsspektren von Mischungen aus N2O und CO und gemessenen Null-Gas-Spektren trainiert, welche mit einem Doppel-Kamm-Spektrometer im Mittelinfraroten aufgenommen wurden. Dieses Vorgehen verbessert den mittleren, absoluten Fehler der Netzvorhersagen von 0,46 auf 0,01 ppmV und 0,24 auf 0,01 ppmV für N2O bzw. für CO für Null-Gas-Messungen, im Vergleich zu den Vorhersagen des neuronalen Netzes, welches nur mit synthetisch erzeugten Daten trainiert wurde. Gleichzeitig zeigte das hybrid trainierte Netz eine gleichbleibende Performance für Konzentrationsvorhersagen für Spektren aus Gasmischungen von 0 bis 100 ppmV N2O und 0 bis 60 ppmV CO. Für den zweiten Ansatz wird ein neuronales Netz, welches bereits mit synthetischen erzeugten Infrarotspektren von Mischungen aus Aceton und Ethanol trainiert wurde, erneut auf einem kleinen gemessenen Datensatz bestehend aus 26 Spektren trainiert, welche mit einem photoakustischen Spektrometer im mittleren Infrarot aufgenommen wurden. In diesem Fall hat sich der mittlere absolute Fehler der Konzentrationsvorhersage für Ethanol und Aceton um 45 % bzw. 20 % im Vergleich zu einem rein synthetischen Training verbessert. Das zeigt das Potential synthetisch erzeugte Daten für das Training von künstlichen neuronalen Netzen in Kombination mit kleinen gemessenen Datensätzen zu nutzen, um neuronale Netze für den Einsatz im Bereich der Gassensorik zu verbessern und gleichzeitig die Übertragbarkeit der Methodik auf verschiedene Messansätze. Y1 - 2023 U6 - https://doi.org/10.1515/teme-2023-0051 PB - Oldenbourg Wissenschaftsverlag ET - Online veröffentlicht ER - TY - CHAP A1 - Ulreich, Fabian A1 - Moser, Elisabeth A1 - Olbrich, Florian A1 - Ebert, Martin A1 - Bierl, Rudolf A1 - Kaup, André ED - Keil, Rudolf ED - Tschorn, Jan Alexander ED - Tümler, Johannes ED - Altinsoy, Mehmet Ercan T1 - Luminance Simulation in CARLA under Cloud Coverage - Model Validation and Implications T2 - 2023 IEEE International Workshop on Metrology for Automotive (MetroAutomotive), -30 June 2023, Modena, Italy N2 - To decrease the number of kilometers driven during the development of autonomous cars or driving assistance systems, performant simulation tools are necessary. Currently, domain distance effects between simulation and reality are limiting the successful application of rendering engines in data-driven perception tasks. In order to mitigate those domain distance effects, simulation tools have to be as close to reality as possible for the given task. For optical sensors like cameras, the luminance of the scene is essential. We provide within this paper a method to measure the luminance of rendered scenes within CARLA, an often used open-source simulation environment. Thereby, it is possible to validate the environment and weather models by taking real-world measurements with photometric sensors or with the help of open-source weather data, published e.g. by the German federal service for weather data (DWD - "Deutscher Wetterdienst"). Employing our proposed luminance measurement, the domain gap resulting from the simulation can be specified, which makes it possible to evaluate the statements about the safety of the automated driving system determined within the simulation. We show that the ratio between global and diffuse radiation modeled by the default atmosphere models within CARLA are under limited conditions similar to real-world measurements taken by the DWD. Nevertheless, we show, that the ratio’s temporal variability in real-world situations is not modeled by CARLA. KW - Atmospheric measurements KW - Atmospheric modeling KW - Cameras KW - carla KW - Cloud computing KW - cloud coverage KW - Data models KW - luminance KW - meteorology KW - Simulation KW - Soft sensors KW - weather KW - Wind Y1 - 2023 SN - 979-8-3503-2187-6 U6 - https://doi.org/10.1109/MetroAutomotive57488.2023.10219098 SP - 228 EP - 233 PB - IEEE ER - TY - JOUR A1 - Müller, Max A1 - Weigl, Stefan A1 - Müller-Williams, Jennifer A1 - Lindauer, Matthias A1 - Rück, Thomas A1 - Jobst, Simon A1 - Bierl, Rudolf A1 - Matysik, Frank-Michael T1 - Comparison of photoacoustic spectroscopy and cavity ring-down spectroscopy for ambient methane monitoring at Hohenpeißenberg JF - Atmospheric Measurement Techniques N2 - With an atmospheric concentration of approximately 2000 parts per billion (ppbV, 10−9), methane (CH4) is the second most abundant greenhouse gas (GHG) in the atmosphere after carbon dioxide (CO2). The task of long-term and spatially resolved GHG monitoring to verify whether climate policy actions are effective is becoming more crucial as climate change progresses. In this paper we report the CH4 concentration readings of our photoacoustic (PA) sensor over a 5 d period at Hohenpeißenberg, Germany. As a reference device, a calibrated cavity ring-down spectrometer, Picarro G2301, from the meteorological observatory of the German Weather Service (DWD) was employed. Trace gas measurements with photoacoustic instruments promise to provide low detection limits at comparably low costs. However, PA devices are often susceptible to cross-sensitivities related to fluctuating environmental conditions, e.g. ambient humidity. The obtained results show that for PA sensor systems non-radiative relaxation effects induced by varying humidity are a non-negligible factor. Applying algorithm compensation techniques, which are capable of calculating the influence of non-radiative relaxation effects on the photoacoustic signal, increase the accuracy of the photoacoustic sensor significantly. With an average relative deviation of 1.11 % from the G2301, the photoacoustic sensor shows good agreement with the reference instrument. Y1 - 2023 U6 - https://doi.org/10.5194/amt-16-4263-2023 SN - 1867-8548 VL - 16 IS - 18 SP - 4263 EP - 4270 PB - Copernicus Publications ER - TY - JOUR A1 - Fritz, D. M. A1 - Reis, D. A. A1 - Adams, B. A1 - Akre, R. A. A1 - Arthur, J. A1 - Blome, Christian A1 - Bucksbaum, P. H. A1 - Cavalieri, A. L. A1 - Engemann, S. A1 - Fahy, S. A1 - Falcone, R. W. A1 - Fuoss, P. H. A1 - Gaffney, K. J. A1 - George, M. J. A1 - Hajdu, J. A1 - Hertlein, M. P. A1 - Hillyard, P. B. A1 - Horn-von Hoegen, Michael A1 - Kammler, Martin A1 - Kaspar, J. A1 - Kienberger, R. A1 - Krejcik, P. A1 - Lee, S. H. A1 - Lindenberg, A. M. A1 - McFarland, B. A1 - Meyer, D. A1 - Montagne, T. A1 - Murray, E. D. A1 - Nelson, A. J. A1 - Nicoul, Matthieu A1 - Pahl, R. A1 - Rudati, J. A1 - Schlarb, H. A1 - Siddons, D. P. A1 - Sokolowski-Tinten, Klaus A1 - Tschentscher, Th A1 - von der Linde, D. A1 - Hastings, J. B. T1 - Ultrafast bond softening in bismuth: mapping a solid's interatomic potential with X-rays JF - Science N2 - Intense femtosecond laser excitation can produce transient states of matter that would otherwise be inaccessible to laboratory investigation. At high excitation densities, the interatomic forces that bind solids and determine many of their properties can be substantially altered. Here, we present the detailed mapping of the carrier density-dependent interatomic potential of bismuth approaching a solid-solid phase transition. Our experiments combine stroboscopic techniques that use a high-brightness linear electron accelerator-based x-ray source with pulse-by-pulse timing reconstruction for femtosecond resolution, allowing quantitative characterization of the interatomic potential energy surface of the highly excited solid. Y1 - 2007 U6 - https://doi.org/10.1126/science.1135009 VL - 315 IS - 5812 SP - 633 EP - 636 PB - AAAS ER - TY - CHAP A1 - Sokolowski-Tinten, Klaus A1 - Blome, Christian A1 - Blums, Juris A1 - Shymanovich, Uladzimir A1 - Nicoul, Matthieu A1 - Cavalleri, Andrea A1 - Tarasevitch, A. A1 - Horn-von Hoegen, Michael A1 - Kammler, Martin A1 - von der Linde, Dietrich ED - Kobayashi, Tetsuro T1 - Ultrafast X-ray diffraction T2 - Ultrafast Phenomena XIV N2 - In the last few years the generation of femtosecond pulses in the X-ray regime has become possible. These ultrashort X-ray pulses have enabled femtosecond time- resolution to be extended to X-rays. Y1 - 2004 SN - 978-3-540-27213-7 U6 - https://doi.org/10.1007/3-540-27213-5_53 VL - 79 SP - 170 EP - 174 PB - Springer CY - Berlin, Heidelberg ER - TY - JOUR A1 - Kammler, Martin A1 - Horn- von Hoegen, Michael A1 - Voss, N. A1 - Tringides, Michael C. A1 - Menzel, Andreas A1 - Conrad, E. H. T1 - Si(001) step dynamics: A temporal low-energy electron diffraction study JF - Physical Review B N2 - We present equilibrium measurements of the dynamics of steps on Si(001) using temporal electron-diffraction spectroscopy. Activation energies and the rate limiting kinetics are identified for 950K<~T<~1130K. Unlike previous studies at higher temperatures, we can exclude evaporation and condensation of atoms or dimers from the step edges as the rate limiting process in this temperature regime. The possible reason for this difference is discussed in terms of a crossover from different rate-limiting kinetics. Y1 - 2002 U6 - https://doi.org/10.1103/PhysRevB.65.075312 VL - 65 IS - 7 PB - APS ER - TY - CHAP A1 - Navitski, Aliaksandr A1 - Serbun, Pavel A1 - Müller, Günter A1 - Schreiner, Rupert A1 - Dams, Florian T1 - Efficient and reliable field emission from silicon tip arrays for miniaturized electron sources T2 - 2011 24th International Vacuum Nanoelectronics Conference ; 18-22 July 2011 Wuppertal N2 - Silicon-based cathodes with precisely aligned field emitter arrays (FEA) applicable for miniaturized electron sources were successfully developed and fabricated. The cathode chips contain about 3×105 Si tips/cm2 in a triangular array with a tip height of 2.5 μm, tip radius of 20 nm, and lateral distance between tips of 20 μm. Amazingly homogeneous and well-aligned field emission (FE) from all tips (i.e. 100% efficiency) and maximum stable currents of typically 0.1 μA for p- and 0.6 μA for n-type Si were reproducibly achieved. Current-voltage characteristics of p-type Si tips exhibit the expected saturation at around 10 nA due to limited supply of electrons from a depletion layer, while the n-type Si tips show the usual FN behaviour. Additional coating of the Si tips with a 10 nm Au layer resulted in at least 5 times higher average FE current levels i.e. typically 3 μA but lead, however, to a 30% increase of the onset voltage. KW - cathodes KW - coatings KW - elemental semiconductors KW - field emission KW - field emitter arrays KW - miniaturized electron sources KW - silicon tips KW - structured cold cathode Y1 - 2011 UR - https://ieeexplore.ieee.org/document/6004567?arnumber=6004567 SN - 978-3-00-035081-8 SN - 978-1-4577-1243-2 SN - 2380-6311 SN - 2164-2370 SP - 71 EP - 72 PB - IEEE CY - Piscataway, NJ ER - TY - JOUR A1 - Pirker, Luka A1 - Ławrowski, Robert Damian A1 - Schreiner, Rupert A1 - Remškar, Maja A1 - Višić, Bojana T1 - MoₓWₓ₋₁S₂ Nanotubes for Advanced Field Emission Application JF - Advanced Functional Materials N2 - Transition metal dichalcogenide (TMDC) nanotubes complement the field of low-dimensional materials with their quasi-1D morphology and a wide set of intriguing properties. By introducing different transition metals into the crystal structure, their properties can be tailored for specific purpose and applications. Herein, the characterization and a subsequent preparation of single-nanotube field emission devices of MoxWx-1S2 nanotubes prepared via the chemical vapor transport reaction is presented. Energy-dispersive X-ray spectroscopy, Raman spectroscopy, and X-ray diffraction indicate that the molybdenum and tungsten atoms are randomly distributed within the crystal structure and that the material is highly crystalline. High resolution transmission electron microscopy and electron diffraction (ED) patterns further corroborate these findings. A detailed analysis of the ED patterns from an eight-layer nanotube reveal that the nanotubes grow in the 2H structure, with each shell consists of one bilayer. The work function of the nanotubes is comparable to that of pure MoS2 and lower of pure WS2 NTs, making them ideal candidates for field emission applications. Two devices with different geometrical setup are prepared and tested as field emitters, showing promising results for single nanotube field emission applications. Y1 - 2023 U6 - https://doi.org/10.1002/adfm.202213869 SN - 1616-3028 N1 - Early View. Online Version of Record before inclusion in an issue SP - 1 EP - 8 PB - Wiley ER - TY - INPR A1 - Pangerl, Jonas A1 - Moser, Elisabeth A1 - Müller, Max A1 - Weigl, Stefan A1 - Jobst, Simon A1 - Rück, Thomas A1 - Bierl, Rudolf A1 - Matysik, Frank-Michael T1 - A Highly Sensitive Acetone and Ethanol Quantum Cascade Laser Based Photoacoustic Sensor: Characterization and Multi-Component Spectra Recording in Synthetic Breath T2 - SSRN Electronic Journal N2 - Trace gas analysis in breath is challenging due to the vast number of different components. We present a highly sensitive quantum cascade laser based photoacoustic setup for breath analysis. Scanning the range between 8260 and 8270 nm with a spectral resolution of 48 pm, we are able to quantify acetone and ethanol within a typical breath matrix containing water and CO2. We photoacoustically acquired spectra within this region of mid-infra-red light and prove that those spectra do not suffer from non-spectral interferences. The purely additive behavior of a breath sample spectrum was verified by comparing it with the independently acquired single component spectra using Pearson and Spearman correlation coefficients. A previously presented simulation approach is improved and an error attribution study is presented. With a 3σ detection limit of 6.5 ppbV in terms of ethanol and 250 pptV regarding acetone, our system is among the best performing presented so far. KW - Photoacoustic spectroscopy KW - quantum cascade laser KW - spectral simulation KW - breath analysis KW - acetone Y1 - 2022 U6 - https://doi.org/10.2139/ssrn.4305376 PB - Elsevier ER - TY - PAT A1 - Olbrich, Florian A1 - Pongratz, Christian A1 - Bierl, Rudolf A1 - Ehrlich, Ingo T1 - Method and System for Evaluating a Structural Integrity of an Aerial Vehicle Y1 - 2024 ER - TY - CHAP A1 - Peller, Sebastian A1 - Zankl, Tobias A1 - Fischer, Christoph A1 - Bierl, Rudolf T1 - Fast sound field characterization of beamforming capable capacitive micromachined ultrasonic transducer (CMUT) arrays by refracto-vibrometry T2 - IEEE IUS 2023, International Ultrasonics Symposium, Montréal, September 3-8, 2023 N2 - We introduce a time-optimized setup based on refracto-vibrometry for the purpose of scanning the sound field of capacitive micromachined ultrasonic transducer (CMUT) arrays primarily for the qualification of their beamforming capability. In comparison to commonly used microphones on a traversing stage the proposed method is substantially faster and consumes only a few minutes of time for a complete two-dimensional sound field containing about 100.000 scan points. T2 - Schnelle Schallfeld-Charakterisierung von CMUT-Arrays mithilfe von Refrakto-Vibrometrie KW - CMUT KW - LDV KW - refracto-vibrometry KW - sound field KW - beamforming Y1 - 2023 SN - 979-8-3503-4645-9 U6 - https://doi.org/10.1109/IUS51837.2023.10308126 SN - 1948-5727 SP - 1 EP - 3 PB - IEEE ER - TY - CHAP A1 - Herdl, Florian A1 - Bachmann, Michael A1 - Wohlfartsstätter, Dominik A1 - Düsberg, Felix A1 - Dudeck, Markus A1 - Eder, Magdalena A1 - Meyer, Manuel A1 - Pahlke, Andreas A1 - Edler, Simon A1 - Schels, Andreas A1 - Hansch, Walter A1 - Schreiner, Rupert A1 - Wohlfartsstatter, Dominik A1 - Dusberg, Felix T1 - A novel current dependent field emission performance test T2 - 2021 34th International Vacuum Nanoelectronics Conference (IVNC): 5-9 July 2021, Lyon, France N2 - A current dependent performance test for comparison of different field emitter arrays is introduced. Statistical analysis is enabled due to a short measurement time and as a main feature the electric field shift, comparable to the degradation of the emitter is examined. Significance of the test method is shown by a comparison of field emitter arrays with different doping levels. KW - Current measurement KW - Field emitter arrays KW - Statistical analysis KW - Systematics KW - Time measurement KW - Tools KW - Vacuum systems Y1 - 2021 U6 - https://doi.org/10.1109/IVNC52431.2021.9600695 SP - 1 EP - 2 ER - TY - CHAP A1 - Bieker, Johannes A1 - Roustaie, Farough A1 - Schlaak, Helmut F. A1 - Langer, Christoph A1 - Schreiner, Rupert T1 - Field emission characterization of in-situ deposited metallic nanocones T2 - 2017 30th International Vacuum Nanoelectronics Conference (IVNC), 10-14 July 2017, Regensburg, Germany N2 - An in-situ fabrication technique based on ion track etched template electrodeposition of metallic nanocones was used for the production of field emitter cathodes. Gold nanocones with a height of 24 microns, a base diameter between 3 to 4 microns and a tip diameter below 300 nanometers were deposited on a circular electrode with a diameter of 2.5 mm. The integral field emission (FE) measurements of samples with cone densities of 6 · 104 cones/cm2 (sample A) and 1 · 106 cones/cm2 (sample B) yielded in a maximum current of 37.5 μA at an applied field of 12.5 V/μm for sample A and 29.1 μA at 9.4 V/μm for sample B. The stability of emission current was investigated for over 48 hours and no degradation was observed. KW - CATHODES KW - Current measurement KW - FABRICATION KW - field emission KW - ion track template KW - Ions KW - Iron KW - nanocones KW - Vacuum technology KW - Voltage measurement Y1 - 2017 U6 - https://doi.org/10.1109/IVNC.2017.8051571 SP - 120 EP - 121 PB - IEEE ER - TY - CHAP A1 - Schels, Andreas A1 - Edler, Simon A1 - Hansch, Walter A1 - Bachmann, Michael A1 - Herdl, Florian A1 - Dusberg, F. A1 - Eder, Magdalena A1 - Meyer, Manuel A1 - Dudek, M. A1 - Pahlke, Andreas A1 - Schreiner, Rupert ED - Purcell, Stephen ED - Mazellier, Jean-Paul T1 - Current dependent performance test used on different types of silicon field emitter arrays T2 - 2021 34th International Vacuum Nanoelectronics Conference (IVNC): 5-9 July 2021, Lyon, France N2 - A current dependent performance test is used to investigate the influence of doping and emitter geometry on the lifetime of silicon field emitter arrays. The measurements reveal an improved performance for lower n-type dopant concentrations. Furthermore, two new types of field emitters are introduced by slightly varying the original fabrication process [1]. The comparison shows superiority of tip like emitters over blade like structures. Y1 - 2021 SN - 978-1-6654-2589-6 U6 - https://doi.org/10.1109/IVNC52431.2021.9600787 SP - 1 EP - 2 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Höller, Christoph A1 - Quirt, David A1 - Zeitler, Berndt A1 - Sabourin, Ivan T1 - Apparent sound insulation in cold-formed steel-framed buildings T2 - 24th International Congress on Sound and Vibration (ICSV 24), 23-27 July 2017, London, UK Y1 - 2017 UR - https://www.iiav.org/icsv24/index.php?va=viewpage&vaid=366 PB - Curran Associates, Inc ER - TY - CHAP A1 - Höller, Christoph A1 - Zeitler, Berndt A1 - Schneider, M. A1 - Schanda, Ulrich T1 - Tieffrequenter Trittschall – Stand der Wissenschaft und Technik T2 - Fortschritte der Akustik - DAGA 2020 : 46. Deutsche Jahrestagung für Akustik Y1 - 2020 UR - https://www.dega-akustik.de/publikationen/online-proceedings PB - Deutsche Gesellschaft für Akustik e.V. ER - TY - JOUR A1 - Krenzer, Boris A1 - Hanisch-Blicharski, Anja A1 - Schneider, Paul A1 - Payer, Thomas A1 - Möllenbeck, Simone A1 - Osmani, O. A1 - Kammler, Martin A1 - Meyer, R. A1 - Horn-von Hoegen, Michael T1 - Phonon confinement effects in ultrathin epitaxial bismuth films on silicon studied by time-resolved electron diffraction JF - Physical Review B N2 - The transient temperature evolution of ultrathin bismuth films, epitaxially grown on a silicon single crystal, upon femtosecond laser excitation is studied by time-resolved electron diffraction. The exponential decay of the film temperature is explained by phonon reflection at the interface, which results in a strongly reduced thermal conduction in the cross plane of the layered system. The thermal boundary conductance is found to be as low as 1273 W/(K cm2). Model calculations, including phonon confinement effects, explain the linear relationship between the observed film-temperature decay constant and the film thickness. Even for 2.5 nm thin films the phonon transmission probability across the interface is given by bulk properties. Our simulations show that phonon confinement effects are negligible for bismuth-film thicknesses larger than 1 nm. Y1 - 2009 U6 - https://doi.org/10.1103/PhysRevB.80.024307 VL - 80 IS - 2 PB - APS ER - TY - JOUR A1 - Klein, C. A1 - Nabbefeld, T. A1 - Hattab, H. A1 - Meyer, D. A1 - Jnawali, G. A1 - Kammler, Martin A1 - Meyer zu Heringdorf, Frank-Joachim A1 - Golla-Franz, A. A1 - Müller, B. H. A1 - Schmidt, Thomas A1 - Henzler, M. A1 - Horn-von Hoegen, Michael T1 - Lost in reciprocal space? Determination of the scattering condition in spot profile analysis low-energy electron diffraction JF - Review of scientific instruments N2 - The precise knowledge of the diffraction condition, i.e., the angle of incidence and electron energy, is crucial for the study of surface morphology through spot profile analysis low-energy electron diffraction (LEED). We demonstrate four different procedures to determine the diffraction condition: employing the distortion of the LEED pattern under large angles of incidence, the layer-by-layer growth oscillations during homoepitaxial growth, a G(S) analysis of a rough surface, and the intersection of facet rods with 3D Bragg conditions. Y1 - 2011 U6 - https://doi.org/10.1063/1.3554305 VL - 82 IS - 3 PB - American Institute of Physics ER - TY - JOUR A1 - Schmidt, Thomas A1 - Kröger, Roland A1 - Clausen, T. A1 - Falta, J. A1 - Janzen, Andreas A1 - Kammler, Martin A1 - Kury, P. A1 - Zahl, P. A1 - Horn-von Hoegen, Michael T1 - Surfactant-mediated epitaxy of Ge on Si(111): Beyond the surface JF - Applied Physics Letters N2 - For a characterization of interface and “bulk” properties of Ge films grown on Si(111) by Sb surfactant-mediated epitaxy, grazing incidence x-ray diffraction and transmission electron microscopy have been used. The interface roughness, defect structure, and strain state have been investigated in dependence of film thickness and growth temperature. For all growth parameters, atomically smooth interfaces are observed. For thin Ge layers, about 75% of the strain induced by the lattice mismatch is relaxed by misfit dislocations at the Ge/Si interface. Only a slight increase of the degree of relaxation is found for thicker films. At growth temperatures below about 600 °C, the formation of twins is observed, which can be avoided at higher temperatures. Y1 - 2005 U6 - https://doi.org/10.1063/1.1882760 VL - 86 IS - 11 PB - AIP ER - TY - JOUR A1 - Frigge, Tim A1 - Wall, S. A1 - Krenzer, Boris A1 - Wippermann, St. A1 - Sanna, Simone A1 - Klasing, Friedrich A1 - Hanisch-Blicharski, Anja A1 - Kammler, Martin A1 - Schmidt, Wolf Gero A1 - Horn-von Hoegen, Michael T1 - Abstract - A Reply to the Comment by H. Shim et al. JF - Physical review letters Y1 - 2013 U6 - https://doi.org/10.1103/PhysRevLett.111.149602 VL - 111 IS - 14 PB - American Physical Society ER - TY - JOUR A1 - Chee, See Wee A1 - Kammler, Martin A1 - Graham, Jeremy A1 - Ross, Frances M. A1 - Hull, Robert T1 - Direct Imaging of Microstructural Changes in Si Induced by FIB-Patterning with Si ++ and Ga + Ions JF - Microscopy and Microanalysis Y1 - 2011 U6 - https://doi.org/10.1017/S1431927611004156 VL - 17 IS - S2 SP - 656 EP - 657 PB - Cambridge University Press ER - TY - CHAP A1 - Roth, Carina A1 - Hausler, Peter A1 - Bierl, Rudolf T1 - Einbindung eines 2D-Photodetektors in einen hochintegrierten SPR-Imaging-Sensor T2 - 7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, München N2 - Die Oberflächenplasmonenresonanzspektroskopie (SPR) ist eine hochempfindliche Messmethode, die es erlaubt, Gase und Flüssigkeiten zerstörungs- und markierungsfrei in Echtzeit zu analysieren. Bisher vornehmlich im Labormaßstab in der Bioanalytik und dem Wirkstoffscreening eingesetzt, soll diese Technologie nun miniaturisiert und für weitere Anwendungsgebiete zugänglich gemacht werden. Dazu wird ein kompakter Micro-Opto-Electro-Mechanical Systems Sensor (MOEMS) entwickelt, der mit Hilfe des SPR Imaging Änderungen der chemischen Zusammensetzung verschiedener Flüssigkeiten inline messen kann. N2 - Surface plasmon resonance spectroscopy (SPR) is a highly sensitive measurement method which allows the analysis of gases and liquids in real-time in a non-destructive and marking-free manner. Presently SPR is predominantly used for pharmaceutical screening and biotechnical analysis. Now this technology is to be miniaturized and made accessible for further application areas. For this purpose, a compact micro-opto-electro-mechanical system sensor (MOEMS) is developed, which can measure changes in the chemical composition of different fluids using SPR imaging. T2 - Integration of a 2D-photodetector in a SPR-Imaging-Sensor KW - Bildsensor KW - Bioanalytik KW - chemische Zusammensetzung KW - Fotodetektor KW - Labormaßstab KW - Messmethode KW - mikrooptoelektromechanisches System KW - Oberflächenplasmon KW - Oberflächenplasmonenresonanzspektroskopie KW - pharmazeutisches Screening KW - Spektroskopie KW - Wirkstoff Y1 - 2017 SN - 978-3-8007-4491-6 SP - 848 EP - 850 PB - VDE-Verlag CY - München ER - TY - JOUR A1 - Schels, Andreas A1 - Herdl, Florian A1 - Hausladen, Matthias A1 - Wohlfartsstätter, Dominik A1 - Edler, Simon A1 - Bachmann, Michael A1 - Pahlke, Andreas A1 - Schreiner, Rupert A1 - Hansch, Walter T1 - Quantitative Field Emission Imaging for Studying the Doping-Dependent Emission Behavior of Silicon Field Emitter Arrays JF - Micromachines N2 - Field emitter arrays (FEAs) are a promising component for novel vacuum micro- and nanoelectronic devices, such as microwave power amplifiers or fast-switching X-ray sources. However, the interrelated mechanisms responsible for FEA degradation and failure are not fully understood. Therefore, we present a measurement method for quantitative observation of individual emission sites during integral operation using a low-cost, commercially available CMOS imaging sensor. The emission and degradation behavior of three differently doped FEAs is investigated in current-regulated operation. The measurements reveal that the limited current of the p-doped emitters leads to an activation of up to 55% of the individual tips in the array, while the activation of the n-type FEA stopped at around 30%. This enhanced activation results in a more continuous and uniform current distribution for the p-type FEA. An analysis of the individual emitter characteristics before and after a constant current measurement provides novel perspectives on degradation behavior. A burn-in process that trims the emitting tips to an integral current-specific ideal field enhancement factor is observed. In this process, blunt tips are sharpened while sharp tips are dulled, resulting in homogenization within the FEA. The methodology is described in detail, making it easily adaptable for other groups to apply in the further development of promising FEAs. Y1 - 2023 U6 - https://doi.org/10.3390/mi14112008 VL - 14 IS - 11 PB - MDPI ER - TY - CHAP A1 - Schels, Andreas A1 - Herdl, Florian A1 - Hausladen, Matthias A1 - Wohlfartsstätter, Dominik A1 - Bachmann, Michael A1 - Edler, Simon A1 - Düsberg, Felix A1 - Pahlke, Andreas A1 - Buchner, Philipp A1 - Schreiner, Rupert A1 - Hansch, Walter T1 - Beta Factor Mapping of Individual Emitting Tips During Integral Operation of Field Emission Arrays T2 - 2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA N2 - Emission uniformity mappings of field emitter arrays provide important insight into degradation mechanisms, but are often laborious, non-integral, costly, or not quantifiable. Here, a low-cost Raspberry Pi HQ camera is used as an extraction anode to quantify the emission distribution in field emitter arrays. A verification measurement using controlled SEM electron beams proves, that current-voltage characteristics of individual emission sites can be determined by combining the integral electrical data with the image data. The characteristics are used to quantify the field enhancement factors of an 30x30 silicon field emitter array during integral operation. Comparison of the field enhancement factor distributions before and after a one-hour constant current operation at 1 µA shows an increase from 50 actively emitting tips before to 156 after the measurement. It is shown, that the distribution of field enhancement factors shifts towards lower values, due to the increasing degradation for high field enhancement tips, especially above 1500. KW - field emission KW - field emission imaging KW - field emission distribution KW - field enhancement factor KW - CMOS imaging KW - beta factor Y1 - 2023 SN - 979-8-3503-0143-4 U6 - https://doi.org/10.1109/IVNC57695.2023.10188957 SP - 224 EP - 226 PB - IEEE ER - TY - CHAP A1 - Herdl, Florian A1 - Kueddelsmann, Maximillian J. A1 - Schels, Andreas A1 - Bachmann, Michael A1 - Edler, Simon A1 - Wohlfartsstätter, Dominik A1 - Düsberg, Felix A1 - Prugger, Alexander A1 - Dillig, Michael A1 - Dams, Florian A1 - Schreiner, Rupert A1 - Coileáin, Cormac Ó. A1 - Zimmermann, Stefan A1 - Pahlke, Andreas A1 - Duesberg, Georg S. T1 - Characterization and Operation of Graphene-Oxide-Semiconductor Emitters at Atmospheric Pressure Levels T2 - 2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA N2 - In recent years Graphene-Oxide-Semiconductor (GOS) electron emitters have attracted a lot of interest due to their outstanding durability in modest vacuum conditions. However, the performance at ambient pressure remains largely unexplored. In this study GOS-emitters are characterized in nitrogen and air at atmospheric pressure, and compared with their vacuum characteristics. For this purpose, lifetime and IV-characteristics measurements are shown. Furthermore, the GOS-emitter was operated as an ionization source for ion mobility spectrometry (IMS) at ambient conditions. KW - durability KW - graphene compounds KW - ion mobility KW - semiconductor-insulator boundaries Y1 - 2023 SN - 979-8-3503-0143-4 U6 - https://doi.org/10.1109/IVNC57695.2023.10188974 SP - 14 EP - 16 PB - IEEE ER - TY - CHAP A1 - Hausladen, Matthias A1 - Buchner, Philipp A1 - Schels, Andreas A1 - Edler, Simon A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - An Integrated Field Emission Electron Source on a Chip Fabricated by Laser-Micromachining and Mems Technology T2 - 2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA N2 - A silicon field emission electron source consisting of a cathode and a grid electrode has been fabricated by laser micromachining. The cathode features 21×21 tips on an area of 4×4 mm 2 , With a self-aligning MEMS technology for the aperture grid, a high electron transmission (99 %) was achieved. Onset voltages of 50…70 V were observed for an emission current of 1 nA. A stable emission current of 1 mA ± 1.3 % at an extraction voltage of 250 V was observed during a 30-min operation. KW - Apertures KW - Field Emission KW - Field Emission Array KW - Ions KW - Laser-Micromachining KW - Lasers KW - Micromechanical devices KW - Silicon KW - Silicon Field Emission Array KW - Steady-state KW - Vacuum systems Y1 - 2023 SN - 979-8-3503-0143-4 U6 - https://doi.org/10.1109/IVNC57695.2023.10189001 SP - 115 EP - 116 PB - IEEE ER - TY - CHAP A1 - Buchner, Philipp A1 - Hausladen, Matthias A1 - Schels, Andreas A1 - Herdl, Florian A1 - Edler, Simon A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - An Integrated Silicon Nanowire Field Emission Electron Source on a Chip with High Electron Transmission T2 - 2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA N2 - Silicon nanowire field emission arrays (50 × 50 pillars) were fabricated on a silicon glass hybrid wafer. The glass acts both as the support for the whole structure and insulator between cathode and extraction grid. The extraction grid matches the emitter structures and is optically aligned and adhered to the emitter chip by a vacuum compatible epoxide adhesive. These chips exhibit an emission current of about 600 μA at an extraction voltage of 300 V. The electron transmission through the grid is above 80 %. 58-hour longtime measurements were conducted showing low degradation of the emission current and high stability of electron transmission. KW - Semiconductor device measurement KW - Stimulated emission KW - Optical device fabrication KW - Glass KW - Power system stability KW - Insulators KW - Electron optics Y1 - 2023 SN - 979-8-3503-0143-4 U6 - https://doi.org/10.1109/IVNC57695.2023.10188878 SP - 6 EP - 8 PB - IEEE ER - TY - CHAP A1 - Hausladen, Matthias A1 - Schels, Andreas A1 - Buchner, Philipp A1 - Bartl, Mathias A1 - Asgharzade, Ali A1 - Edler, Simon A1 - Wohlfartsstätter, Dominik A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Improved Method for Determining the Distribution of FEA Currents by Optical CMOS Sensors T2 - 37th International Vacuum Nanoelectronics Conference (IVNC), 15-19 July 2024, Brno, Czech Republic N2 - CMOS image sensors are utilized to determine the time- and spatially-resolved distribution of the electron emission of silicon field emission arrays. During initial experiments, rather low field emission currents already visibly damaged the sensor surface, altering the system accuracy over the measurement time. Therefore, we coated the sensor surface with copper for protection. In contrast to the original insulating surface, the Cu coating provides a conductive surface for incident electrons and improves heat dissipation in addition. This prevents localized surface charges and surface damages which stabilize the system accuracy. Y1 - 2024 U6 - https://doi.org/10.1109/IVNC63480.2024.10652543 SP - 1 EP - 2 PB - IEEE ER - TY - JOUR A1 - Bachmann, Michael A1 - Düsberg, Felix A1 - Pahlke, Andreas A1 - Edler, Simon A1 - Schels, Andreas A1 - Herdl, Florian A1 - Hausladen, Matthias A1 - Buchner, Philipp A1 - Schreiner, Rupert T1 - The “LED‐version” of the electron gun: An electron source for operation in ambient pressure environments based on silicon field emitter arrays JF - Vakuum in Forschung und Praxis N2 - We report on our progress to develop and optimize electron sources for practical applications. A simple fabrication process is introduced based on a wafer dicing saw and a wet chemical etch step without the need for a clean room. Due to the formation of crystal facets the samples show a homogeneous geometry throughout the array. Characterization techniques are developed to systematically compare various arrays. A very defined measurement procedure based on current controlled IV-sweeps as well as lifetime measurements at various currents is proposed. To investigate the current distribution in the array a commercial CMOS detector is used and shows the potential for in depth analysis of the arrays. Finally, a compact hermetically sealed housing is presented enabling electron generation in atmospheric pressure environments. Y1 - 2023 U6 - https://doi.org/10.1002/vipr.202300801 VL - 35 IS - 3 SP - 32 EP - 37 PB - Wiley ER - TY - THES A1 - Zhong, Gantong T1 - Calibration and Performance Evaluation of Contactless Optical Position Sensors Based on 3D Printed Optical Waveguides N2 - This work presents the design, implementation, and performance evaluation of a positionsensing system based on a 3D printed optical waveguide. Building upon the conceptual foundation of D-shaped polymer optical fiber (POF) sensors [1], this study introduces a novel waveguide structure fabricated via multi-material fused filament fabrication (FFF) 3D printing. The waveguide incorporates a square-core geometry with integrated mechanical brackets and selective black cladding layer to enhance optical confinement and minimize boundary-induced nonlinearity. Three successive design iterations were developed and evaluated, with each version refined based on calibration results and structural observations. The final version demonstrated high fabrication stability and improved optical behavior, enabling consistent calibration across multiple samples. Using a center-corrected linear attenuation model, the position of a side-coupled LED was estimated from dual photodiode signals and compared with true light source position. The measurement results for five independently printed waveguides show mean absolute errors below 0.2 mm and standard deviations as low as 0.268 mm. The sensor response was found to be highly linear over the 5–55 mm sensing range, with worst-case errors bounded within ±1.7 mm. Compared with traditional D-shaped POF sensors, where performance is limited by manual polishing variability and nonuniform attenuation, the 3D-printed approach offers superior linearity, submillimeter accuracy, and batch-to-batch reproducibility. These findings prove the feasibility of 3D-printed optical waveguides in scalable and precise position sensing applications, marking a further step toward the batch fabrication and and potential industrialization of contactless optical position sensors. A conclusion of the research findings and suggestions for future improvements were provided at the end of this thesis, offering insights for the further development in this area. Y1 - 2025 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:bvb:898-opus4-84668 CY - Regensburg ER - TY - JOUR A1 - Hausladen, Matthias A1 - Schels, Andreas A1 - Buchner, Philipp A1 - Bartl, Mathias A1 - Asgharzade, Ali A1 - Edler, Simon A1 - Wohlfartsstätter, Dominik A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Measurement of field emission array current distributions by metal-coated CMOS image sensors JF - Journal of Vacuum Science & Technology B N2 - A CMOS image sensor is utilized to determine the time- and spatially resolved distribution of the total electron emission current of a silicon field emission array. The sensor measures electron emission without the need for phosphorus screens or scintillators as converters. However, in initial experiments, rather low field emission currents of several hundreds of nanoamperes per emitter already damaged the sensor surface, which altered the systems’ signal response over the measurement time. In consequence, we coated the CMOS sensor surface with a Cu layer for surface protection. In contrast to the original insulating surface, Cu is an excellent current- and heat-conductor, which avoids lens charging by providing a conductive path for incident electrons and has an improved heat dissipation capability. Measurements using a segmented field emission cathode with four individually addressable tips demonstrate a consistent correlation between the emission current and the sensor signal of the metal-coated image sensor. Furthermore, the characterization of a field emission array showed that single tip emission currents of up to 12 μA per tip are measurable without discernible damage effects of the sensor’s surface. KW - Bremsstrahlung KW - Laser micromachining KW - Image sensors KW - Field emitter arrays Y1 - 2024 U6 - https://doi.org/10.1116/6.0004074 VL - 42 IS - 6 PB - AIP Publishing ER - TY - JOUR A1 - Schreiner, Rupert A1 - Wiedmann, J. A1 - Coenning, W. A1 - Porsche, J. A1 - Gentner, Jean-Louis A1 - Berroth, Manfred A1 - Scholz, Ferdinand A1 - Schweizer, H. T1 - Fabrication approach for antiphase narrow linewidth complex coupled 1.55 μm DFB lasers JF - Electronics Letters N2 - A new method for fabricating narrow linewidth antiphase complex coupled MQW DFB lasers by periodically etching the active layer and quartemary InGaAsP overgrowth is reported. The minimum linewidth for a 375 µm long ridge waveguide laser is only 250 kHz at an optical output power of 4 mW. KW - etching KW - optical fabrication KW - quantum well lasers KW - ridge waveguides KW - distributed feedback lasers Y1 - 1999 U6 - https://doi.org/10.1049/el:19990132 SN - 0013-5194 VL - 35 IS - 2 SP - 146 EP - 148 PB - The Institution of Engineering and Technology IET ER - TY - JOUR A1 - Hausladen, Matthias A1 - Schels, Andreas A1 - Asgharzade, Ali A1 - Buchner, Philipp A1 - Bartl, Mathias A1 - Wohlfartsstätter, Dominik A1 - Edler, Simon A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Investigation of Influencing Factors on the Measurement Signal of a CMOS Image Sensor for Measuring Field Emission Currents JF - Sensors Y1 - 2025 U6 - https://doi.org/10.3390/s25051529 N1 - Corresponding author der OTH Regensburg: Matthias Hausladen VL - 25 IS - 5 PB - MDPI ER -