TY - JOUR A1 - Ruhl, Guenther A1 - Wittmann, Sebastian A1 - Koenig, Matthias A1 - Neumaier, Daniel T1 - The integration of graphene into microelectronic devices JF - Beilstein Journal of Nanotechnology N2 - Since 2004 the field of graphene research has attracted increasing interest worldwide. Especially the integration of graphene into microelectronic devices has the potential for numerous applications. Therefore, we summarize the current knowledge on this aspect. Surveys show that considerable progress was made in the field of graphene synthesis. However, the central issue consists of the availability of techniques suitable for production for the deposition of graphene on dielectric substrates. Besides, the encapsulation of graphene for further processing while maintaining its properties poses a challenge. Regarding the graphene/metal contact intensive research was done and recently substantial advancements were made towards contact resistances applicable for electronic devices. Generally speaking the crucial issues for graphene integration are identified today and the corresponding research tasks can be clearly defined. KW - BORON-NITRIDE KW - CHEMICAL-VAPOR-DEPOSITION KW - CONTACT-RESISTANCE KW - contacts KW - COPPER FOILS KW - deposition KW - ELECTRODES KW - encapsulation KW - FILMS KW - graphene KW - GROWTH KW - LOW-TEMPERATURE KW - process integration KW - RAMAN-SPECTROSCOPY KW - SUBSTRATE Y1 - 2017 U6 - https://doi.org/10.3762/bjnano.8.107 VL - 8 SP - 1056 EP - 1064 PB - Beilstein-Institut ER -