TY - CHAP A1 - Krysztof, Michał A1 - Urbański, Paweł A1 - Grzebyk, Tomasz A1 - Hausladen, Matthias A1 - Schreiner, Rupert T1 - MEMS X-Ray Source: Electron Emitter Development T2 - 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS): 12-15 Dec. 2022, Salt Lake City, UT, USA N2 - The article presents a fabrication process and characterization of silicon emitters designed for MEMS X-ray source. The emitters, made of p-type and n-type silicon, were prepared by a modified laser micromachining process. Both types of emitters worked without any carbon nanotube coverage, which was the case in the previous realization of electron emitters. The p-type emitter gave smaller electron beam currents (<50 nA) with stable emission in a saturation region. The n-type emitter provides higher emission currents (>1 µA) not limited by saturation region, but with higher fluctuations. The final choice of emitter will be adjusted for different applications. KW - Micromechanical devices KW - MEMS KW - X-ray source KW - electron emitter KW - X-ray radiation Y1 - 2022 U6 - https://doi.org/10.1109/PowerMEMS56853.2022.10007563 SP - 248 EP - 251 PB - IEEE ER -