TY - JOUR A1 - Hornberger, Helga A1 - Weissmann, R. A1 - Lutz, N. T1 - Machining of silica glasses using excimer laser radiation JF - Glastechnische Berichte - Glass Science and Technology Y1 - 1996 VL - 69 IS - 2 SP - 44 EP - 49 ER -