TY - JOUR A1 - Broser, Christian A1 - Falter, Thomas A1 - Ławrowski, Robert Damian A1 - Altenbuchner, Amelie A1 - Vögele, Daniel A1 - Koss, Claus A1 - Schlampp, Matthias A1 - Dunnweber, Jan A1 - Steffens, Oliver A1 - Heckner, Markus A1 - Jaritz, Sabine A1 - Schiegl, Thomas A1 - Corsten, Sabine A1 - Lauer, Norina A1 - Guertler, Katherine A1 - Koenig, Eric A1 - Haug, Sonja A1 - Huber, Dominik A1 - Birkenmaier, Clemens A1 - Krenkel, Lars A1 - Wagner, Thomas A1 - Justus, Xenia A1 - Saßmannshausen, Sean Patrick A1 - Kleine, Nadine A1 - Weber, Karsten A1 - Braun, Carina N. A1 - Giacoppo, Giuliano A1 - Heinrich, Michael A1 - Just, Tobias A1 - Schreck, Thomas A1 - Schnabl, Andreas A1 - Gilmore, Amador Téran A1 - Roeslin, Samuel A1 - Schmid, Sandra A1 - Wellnitz, Felix A1 - Malz, Sebastian A1 - Maurial, Andreas A1 - Hauser, Florian A1 - Mottok, Jürgen A1 - Klettke, Meike A1 - Scherzinger, Stefanie A1 - Störl, Uta A1 - Heckner, Markus A1 - Bazo, Alexander A1 - Wolff, Christian A1 - Kopper, Andreas A1 - Westner, Markus A1 - Pongratz, Christian A1 - Ehrlich, Ingo A1 - Briem, Ulrich A1 - Hederer, Sebastian A1 - Wagner, Marcus A1 - Schillinger, Moritz A1 - Görlach, Julien A1 - Hierl, Stefan A1 - Siegl, Marco A1 - Langer, Christoph A1 - Hausladen, Matthias A1 - Schreiner, Rupert A1 - Haslbeck, Matthias A1 - Kreuzer, Reinhard A1 - Brückl, Oliver A1 - Dawoud, Belal A1 - Rabl, Hans-Peter A1 - Gamisch, Bernd A1 - Schmidt, Ottfried A1 - Heberl, Michael A1 - Gänsbauer, Bianca A1 - Bick, Werner A1 - Ellermeier, Andreas A1 - Monkman, Gareth J. A1 - Prem, Nina A1 - Sindersberger, Dirk A1 - Tschurtschenthaler, Karl A1 - Aurbach, Maximilian A1 - Dendorfer, Sebastian A1 - Betz, Michael A. A1 - Szecsey, Tamara A1 - Mauerer, Wolfgang A1 - Murr, Florian ED - Baier, Wolfgang T1 - Forschung 2018 T3 - Forschungsberichte der OTH Regensburg - 2018 KW - Forschung KW - Forschungsbericht Y1 - 2018 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:bvb:898-opus4-13826 SN - 978-3-9818209-5-9 CY - Regensburg ER - TY - CHAP A1 - Betz, Michael A. A1 - Lechner, Alfred T1 - Sprayganik - Spraytool für organische Halbleiter T2 - 7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, München N2 - Sprühbeschichtung stellt einen kostengünstigen und materialeffizienten aber komplexen Prozess dar. Um diese Vorteile für die Abscheidung teurer organischer Halbleiter zu nutzen, wurde ein Sprühbeschichter entwickelt, der neueste Anforderungen an den Prozess erfüllt. Zudem konnten selbstansaugende Mikrosprühdüsen mikrotechnologisch in Silizium realisiert werden, welche bereits eine bis zu vierfache Materialeffizienz im Vergleich zu herkömmlichen airbrush-Düsen nachweisen konnten. Die neueste Düsengeneration zeigt nun eine weiter verbesserte Zerstäubung, was bei gesprühten OPDs zu einer reduzierten Dunkelstromdichte von 9,1×10-6 mA·cm-2 (-5 V) und erhöhten externen Quanteneffizienz von 78,5% (530 nm, -5 V) führt. N2 - Generally, spray coating is a cheap and material efficient but complex process. To exploit those advantages for deposition of expensive organic semiconductors, we developed a spray coater to fulfil latest requirements. Furthermore, it was possible to realize venturi micro nozzles that already showed up to 4-fold material efficiency when compared to conventional airbrush-nozzles. The latest nozzle layout shows an even better atomization resulting in photodiodes with a reduced dark current density of 9,1×10-6 mA·cm-2 (-5 V) and increased external quantum efficiency of 78,5% (530 nm, -5 V). KW - Dunkelstrom KW - organischer Halbleiter KW - Photodiode KW - Silicium KW - Spritzbeschichten KW - Spritzschicht KW - Sprühdüse KW - Zerstäubung Y1 - 2017 SN - 978-3-8007-4491-6 SP - 747 EP - 750 PB - VDE-Verlag CY - München ER - TY - JOUR A1 - Betz, Michael A. A1 - Büchele, Patric A1 - Brünnler, Manfred A1 - Deml, Sonja A1 - Lechner, Alfred T1 - Silicon micro venturi nozzles for cost-efficient spray coating of thin organic P3HT/PCBM layers JF - Journal of micromechanics and microengineering N2 - Improvements on spray coating are of particular interest to different fields of technology as it is a scalable deposition method and processing from solutions offer various application possibilities outside of typical facilities. When it comes to the deposition of expensive and film-forming media such as organic semiconductors, consumption and nozzle cleaning issues are of particular importance. We demonstrate the simple steps to design and fabricate micro venturi nozzles for economical spray coating with a consumption as low as 30-50 mu l.min(-1). For spray coating an active area of 25 cm(2) a 2.45-4.01 fold coating efficiency is observed compared to a conventional airbrush nozzle set. The electrical characterization of first diodes sprayed with an active layer thickness of similar to 750 nm using a single micronozzle at a coating speed of 1.7 cm(2).min(-1) reveals a good external quantum efficiency of 72.9% at 532 nm and a dark current of similar to 7.4.10(-5) mA.cm(-2), both measured at -2 V. Furthermore, the high resistance of the micronozzles against solvents and most acids is provided through realization in a silicon wafer with silicon dioxide encapsulation, therefore allowing easy and effective cleaning. KW - deep reactive ion etching KW - microfluidics KW - organic photodiodes KW - organic semiconductors KW - spray coating KW - venturi nozzles Y1 - 2017 U6 - https://doi.org/10.1088/0960-1317/27/1/015019 VL - 27 IS - 1 PB - IOP Publishing ER -