TY - JOUR A1 - Peter, Daniel A1 - Holsteyns, Frank A1 - Dalmer, Michael A1 - Kruwinus, Hans A1 - Lechner, Alfred A1 - Bensch, Wolfgang T1 - A Study on the Structure Collapse Mechanisms for High Aspect Ratio Structures with Application to Clean Processing JF - ECS Meeting Abstracts Y1 - 2009 U6 - https://doi.org/10.1149/MA2009-02/24/2084 VL - MA2009-02 IS - 24 PB - IOP Science ER -