TY - JOUR A1 - Peter, Daniel A1 - Dalmer, Michael A1 - Lechner, Alfred A1 - Gigler, Alexander M. A1 - Stark, Robert W. A1 - Bensch, Wolfgang T1 - The influence of liquid media on the fracture strength of polysilicon nanostructures JF - Solid State Phenomena N2 - The mechanical stability of nanostructures depends on the surrounding medium. Their stability was probed by lateral force microscopy in liquid media. Previously reported data on water and isopropanol showed an increase in the fracture strength for the latter. Further tests with other alcohols (ethanol, 1-butanol) also showed an increasing strength. The interface between the liquid and the surface is the decisive factor for the influence of the media. When altering the interface with a cationic surfactant or a self-assembled monolayer, an increase of the fracture force by 100 % compared to de-ionized water could be measured. KW - pattern collapse KW - fracture strength KW - damage KW - atomic force microscopy Y1 - 2012 U6 - https://doi.org/10.4028/www.scientific.net/SSP.187.127 VL - 187 SP - 127 EP - 130 PB - Trans Tech Publications ER -