TY - JOUR A1 - Chee, See Wee A1 - Kammler, Martin A1 - Graham, Jeremy A1 - Ross, Frances M. A1 - Hull, Robert T1 - Direct Imaging of Microstructural Changes in Si Induced by FIB-Patterning with Si ++ and Ga + Ions JF - Microscopy and Microanalysis Y1 - 2011 U6 - https://doi.org/10.1017/S1431927611004156 VL - 17 IS - S2 SP - 656 EP - 657 PB - Cambridge University Press ER -