TY - JOUR A1 - Bieker, Johannes A1 - Roustaie, Farough A1 - Schlaak, Helmut F. A1 - Langer, Christoph A1 - Schreiner, Rupert A1 - Lotz, Marcel A1 - Wilfert, Stefan T1 - Field emission characterization of in situ deposited gold nanocones with variable cone densities JF - Journal of Vacuum Science and Technology B N2 - For the fabrication of field emitter cathodes with metallic nanocones, an in situ fabrication technique based on electrodeposition in an ion track etched polymer template was used. Three samples with nanocones made of gold and different cone densities were deposited on a circular electrode with a diameter of 2.5 mm, using templates with pore density of 6 × 104, 4 × 105, and 1 × 106 cones/cm2. The cones had a height of 24 μm, a base diameter between 3 and 3.75 μm, and a tip diameter below 500 nm. Integral field emission measurements revealed onset fields of down to 3.1 V/μm and average field enhancement factors of up to 1240. For one sample, the maximum emission current from the cathode reached 142.2 μA at an applied voltage of 338 V between cathode and extraction grid, which had a distance of 50 μm. To investigate the stability of the field emission current, cumulative long-term measurements were performed for over 50 h. A stable emission current of (31.0 ± 1.3) μA at an average applied voltage of 290 V (E = 5.8 V/μm) was observed. For currents above 100 μA, a decrease of the current and therefore a degradation of the emitter structures occurred. Y1 - 2018 U6 - https://doi.org/10.1116/1.5009504 VL - 36 IS - 2 PB - AIP Publishing ER - TY - CHAP A1 - Bieker, Johannes A1 - Roustaie, Farough A1 - Langer, Christoph A1 - Schreiner, Rupert A1 - Schlaak, Helmut F. T1 - Innovatives Verfahren zur Herstellung und Integration metallischer Nanokonen für die Feldemission T2 - MikroSystemTechnik Kongress 2017 : MEMS, Mikroelektronik, Systeme 23.-25. Oktober 2017 in München N2 - In den letzten Jahren wurde am Institut für Elektromechanische Konstruktionen die Fabrikation und Integration von metallischen Nanodrähten und Nanokonen mittels Template-basierter Abscheidung erforscht. Diese Variante der in-situ Abscheidung von metallischen Nanostrukturen bietet eine Vielzahl von Anwendungsmöglichkeiten. Im Rahmen dieses Beitrags werden das Herstellungsverfahren zur Herstellung metallischer Nanokonen vorgestellt. Dies beinhaltet sowohl die Templatepräparation mittels asymmetrischen Ätzens als auch die anschließende Integration mittels galvanischer Abscheidung. Eine Anwendung der metallischen Nanokonen stellt die Verwendung als Feldemitter in der Vakuumelektronik dar. Es werden erste Messungen der Langzeitstabilität des Feldemissionsstromes der metallischen Konen präsentiert. N2 - Recently the fabrication and integration of metallic nanowires and nanocones based on ion-track etched templates has been in the focus of research at the Institute for Electromechanical Design at the TU Darmstadt. Using the method for the in-situ deposition various applications are feasible. In this paper we present the fabrication method for in-situ deposition of metallic nanocones, including the preparation of the polymer templates based on asymmetric etching and the process description for integration via electrodeposition. Giving one example for an application, the metallic nanocones can be used as field emitters in vacuum electronics. The field emission properties will be presented briefly. T2 - Innovative fabrication method for in-situ deposition of metallic nanocones for field emission KW - Ätzen KW - Feldemission KW - galvanische Abscheidung KW - Herstellverfahren KW - Langzeitstabilität KW - Nanodraht KW - Nanostruktur KW - Polymer KW - Prozessbeschreibung KW - Vakuum Y1 - 2017 SN - 978-3-8007-4491-6 IS - CD-ROM SP - 797 EP - 800 PB - VDE-Verlag CY - München ER - TY - CHAP A1 - Bieker, Johannes A1 - Roustaie, Farough A1 - Schlaak, Helmut F. A1 - Langer, Christoph A1 - Schreiner, Rupert T1 - Field emission characterization of in-situ deposited metallic nanocones T2 - 2017 30th International Vacuum Nanoelectronics Conference (IVNC), 10-14 July 2017, Regensburg, Germany N2 - An in-situ fabrication technique based on ion track etched template electrodeposition of metallic nanocones was used for the production of field emitter cathodes. Gold nanocones with a height of 24 microns, a base diameter between 3 to 4 microns and a tip diameter below 300 nanometers were deposited on a circular electrode with a diameter of 2.5 mm. The integral field emission (FE) measurements of samples with cone densities of 6 · 104 cones/cm2 (sample A) and 1 · 106 cones/cm2 (sample B) yielded in a maximum current of 37.5 μA at an applied field of 12.5 V/μm for sample A and 29.1 μA at 9.4 V/μm for sample B. The stability of emission current was investigated for over 48 hours and no degradation was observed. KW - CATHODES KW - Current measurement KW - FABRICATION KW - field emission KW - ion track template KW - Ions KW - Iron KW - nanocones KW - Vacuum technology KW - Voltage measurement Y1 - 2017 U6 - https://doi.org/10.1109/IVNC.2017.8051571 SP - 120 EP - 121 PB - IEEE ER -