TY - CHAP A1 - Bartl, Mathias A1 - Buchner, Philipp A1 - Hausladen, Matthias A1 - Asgharzadehkhorasani, Ali A1 - Bachmann, Michael A1 - Schreiner, Rupert T1 - Simulations and Investigations of Silicon Nanowire Field Emitters T2 - 37th International Vacuum Nanoelectronics Conference (IVNC), 15-19 July 2024, Brno, Czech Republic N2 - The emission behavior of field emission electron sources consisting of a silicon nanowire cathode, an extraction grid electrode and a planar anode was investigated based on a particle tracing simulation using FEM. The focus was on the influence of the grid geometry as well as the positioning of the grid relative to the emitters on the electron transmission. The highest transmission can be achieved with the emitter tips protruding 10 µm trough the extraction grid openings. The transmission decreases more rapidly with increasing distance between the tip and the grid the thicker the grid is. Y1 - 2024 U6 - https://doi.org/10.1109/IVNC63480.2024.10652355 SP - 1 EP - 2 PB - IEEE ER -