TY - CHAP A1 - Peller, Sebastian A1 - Zankl, Tobias A1 - Fischer, Christoph A1 - Bierl, Rudolf T1 - Fast sound field characterization of beamforming capable capacitive micromachined ultrasonic transducer (CMUT) arrays by refracto-vibrometry T2 - IEEE IUS 2023, International Ultrasonics Symposium, Montréal, September 3-8, 2023 N2 - We introduce a time-optimized setup based on refracto-vibrometry for the purpose of scanning the sound field of capacitive micromachined ultrasonic transducer (CMUT) arrays primarily for the qualification of their beamforming capability. In comparison to commonly used microphones on a traversing stage the proposed method is substantially faster and consumes only a few minutes of time for a complete two-dimensional sound field containing about 100.000 scan points. T2 - Schnelle Schallfeld-Charakterisierung von CMUT-Arrays mithilfe von Refrakto-Vibrometrie KW - CMUT KW - LDV KW - refracto-vibrometry KW - sound field KW - beamforming Y1 - 2023 SN - 979-8-3503-4645-9 U6 - https://doi.org/10.1109/IUS51837.2023.10308126 SN - 1948-5727 SP - 1 EP - 3 PB - IEEE ER -