1137 2016 eng 145 146 conferenceobject IEEE 0 2021-02-05 -- -- A commercial Bayard-Alpert ionization vacuum gauge was equipped with a field emission electron source based on a cathode consisting of an array of 16 gated, p-doped, and DLC-coated Si-tips and characterized. An anode current of about 1.3 μA led to an ion current of 7 fA at 3×10 -7 mbar and 0.8 pA at 4×10 -5 mbar. Whereas at pressures higher than 4×10 -5 mbar the emission current of the electron source decreased, the ratio of ion and anode current remained linear. A nearly constant sensitivity of ~ 17 mbar -1 of the ionization vacuum gauge within the investigated pressure range was depicted. 29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada 2380-6311 10.1109/IVNC.2016.7551500 publish peer-reviewed Christoph Langer Christian Prommesberger Robert Damian Ławrowski Rupert Schreiner Yifeng Huang Juncong She eng uncontrolled field emission eng uncontrolled field emitter array eng uncontrolled Si eng uncontrolled DLC eng uncontrolled electron source eng uncontrolled ionization vacuum gauge Angewandte Physik Fakultät Angewandte Natur- und Kulturwissenschaften Schreiner, Rupert (Prof. Dr.), Konferenzbeiträge - Labor für Mikrosensorik Labor Mikrosensorik Digitale Transformation