<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>8116</id>
    <completedYear/>
    <publishedYear>2025</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferencesummary</type>
    <publisherName>Deutsche Physikalische Gesellschaft e.V.</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2025-05-28</completedDate>
    <publishedDate>2025-03-19</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Miniaturized Pirani vacuum sensor with active heat-loss compensation</title>
    <abstract language="eng">Pirani sensors measure the thermal conductivity of the residual gas in a vacuum by creating a thermal gradient between a heated sensor element and a heat sink. The heat flux from the sensor element to the heat sink over the residual gas is a measure of the vacuum and can be determined by the electrical power applied. In addition to the heat flux over the gas, there are further energy losses from the heating structure due to radiation and parasitic heat fluxes via the suspensions of the sensor element. These losses reduce the sensitivity of the sensor. For this reason, a Micro-Pirani sensor in the shape of a microhotplate was developed that actively compensates the heat flux via the suspensions. This was achieved by placing additional heating structures on the suspensions, which interrupt the heat flow from the sensor element via the suspensions during operation. This active compensation improves the sensitivity at low pressures, enabling vacuum measurements from atmospheric pressure down to 10e-6 mbar.</abstract>
    <parentTitle language="eng">Verhandlungen der Deutschen Physikalischen Gesellschaft e.V. (DPG), Regensburg, 16. - 21. März 2025</parentTitle>
    <identifier type="url">https://www.dpg-verhandlungen.de/year/2025/conference/regensburg/part/o/session/66/contribution/7</identifier>
    <identifier type="issn">2751-0522</identifier>
    <enrichment key="opus.source">publish</enrichment>
    <licence>Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG</licence>
    <author>Julian Eiler</author>
    <author>Stefan Weber</author>
    <author>Peter Gerlesberger</author>
    <author>Heinz Plöchinger</author>
    <author>Rupert Schreiner</author>
    <collection role="institutes" number="FakANK">Fakultät Angewandte Natur- und Kulturwissenschaften</collection>
    <collection role="persons" number="schreinerlmconf">Schreiner, Rupert (Prof. Dr.), Konferenzbeiträge - Labor für Mikrosensorik</collection>
    <collection role="othforschungsschwerpunkt" number="16317">Sensorik</collection>
    <collection role="institutes" number="">Labor Mikrosensorik</collection>
    <collection role="DFGFachsystematik" number="1">Ingenieurwissenschaften</collection>
  </doc>
</export-example>
