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    <id>5537</id>
    <completedYear/>
    <publishedYear>2009</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>24</issue>
    <volume>MA2009-02</volume>
    <type>article</type>
    <publisherName>IOP Science</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">A Study on the Structure Collapse Mechanisms for High Aspect Ratio Structures with Application to Clean Processing</title>
    <parentTitle language="eng">ECS Meeting Abstracts</parentTitle>
    <identifier type="doi">10.1149/MA2009-02/24/2084</identifier>
    <enrichment key="opus.import.date">2022-10-29T17:49:03+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
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    <enrichment key="opus.doi.autoCreate">false</enrichment>
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    <licence>Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG</licence>
    <author>Daniel Peter</author>
    <author>Frank Holsteyns</author>
    <author>Michael Dalmer</author>
    <author>Hans Kruwinus</author>
    <author>Alfred Lechner</author>
    <author>Wolfgang Bensch</author>
    <collection role="institutes" number="FakANK">Fakultät Angewandte Natur- und Kulturwissenschaften</collection>
    <collection role="othforschungsschwerpunkt" number="16316">Produktion und Systeme</collection>
    <collection role="institutes" number="">Labor Nanoanalytik und Halbleiterchemie (Nanochem)</collection>
  </doc>
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