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  <doc>
    <id>1442</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>VDE-Verlag</publisherName>
    <publisherPlace>Berlin</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>2017-10-25</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Resonance frequency tuning and process design of a micromechanical capacitive cantilever in a photoacoustic trace-gas sensing device</title>
    <abstract language="eng">Photoacoustic spectroscopy is an efficient method to detect the concentration of trace gases with following advantages: short response time, high sensitivity, continuous and real-time monitoring and the option of miniaturization without the need of complex mirror-based multi-pass cell designs. A micromechanical cantilever is used as a key component in a two-part "Cantilever-Resonator" system that detects the weak photoacoustic signal. The resonance frequency of cantilever needs to be tuned to match the resonance frequency of resonator in order to achieve the maximum vibration amplitude of the "Cantilever-Resonator" system. This paper reports a post-fabrication method to tune the resonance frequency of cantilevers via focused ion beam (FIB) and a capacitive solution for the cantilever to transform the acoustic signal to electrical signal.</abstract>
    <parentTitle language="deu">7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, München</parentTitle>
    <identifier type="isbn">978-3-8007-4491-6</identifier>
    <enrichment key="opus.source">publish</enrichment>
    <author>Qi Zhou</author>
    <author>Ferdinand Landgraf</author>
    <author>Thomas Rück</author>
    <author>Rudolf Bierl</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="FakANK">Fakultät Angewandte Natur- und Kulturwissenschaften</collection>
    <collection role="persons" number="bierlsappz">Bierl, Rudolf (Prof. Dr.) - Sensorik-ApplikationsZentrum</collection>
    <collection role="othforschungsschwerpunkt" number="16317">Sensorik</collection>
    <collection role="institutes" number="">Sensorik-Applikationszentrum (SappZ)</collection>
  </doc>
  <doc>
    <id>1438</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>article</type>
    <publisherName>VDE-Verlag</publisherName>
    <publisherPlace>Berlin</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2017-10-25</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Entwicklung eines mikromechanischen kapazitiven Schalldetektors im resonanten Betrieb für die photoakustische Spurengasanalyse</title>
    <parentTitle language="deu">7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, München</parentTitle>
    <enrichment key="opus.source">publish</enrichment>
    <author>Andreas Zagler</author>
    <author>Ferdinand Landgraf</author>
    <author>Thomas Rück</author>
    <author>Rudolf Bierl</author>
    <collection role="institutes" number="FakANK">Fakultät Angewandte Natur- und Kulturwissenschaften</collection>
    <collection role="persons" number="bierlsappz">Bierl, Rudolf (Prof. Dr.) - Sensorik-ApplikationsZentrum</collection>
    <collection role="othforschungsschwerpunkt" number="16317">Sensorik</collection>
    <collection role="institutes" number="">Sensorik-Applikationszentrum (SappZ)</collection>
  </doc>
  <doc>
    <id>1453</id>
    <completedYear/>
    <publishedYear>2015</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>report</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2015-01-01</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Herstellung und Analyse der Resonanzfrequenz eines MEMS Cantilever für das CEPAS Verfahren</title>
    <abstract language="deu">Diese Abhandlung beschreibt das Konzept eines mikroeletromechanischen Systems (MEMS), das im Messverfahren der cantilever enhanced  photoacoustic spectroscopy (CEPAS) Verwendung finden soll. &#13;
Es wird die Herstellung eines einseitig eingespannten Biegebalkens aus Silizium mittels deep reactiv ion etching (DRIE) beschrieben. Des Weiteren wird die Resonanzfrequenz dieses Cantilevers mit Hilfe Laservibrometertechnik untersucht. Die resultierenden resonanten Schwingungen 0.Ordnung werden mit den Ergebnissen einer vereinfachten theoretischen Näherung verglichen. Die Messergebnisse stehen in gutem Zusammenhang mit den theoretischen Werten. Solche Cantilever, die aus silicon on insula tor (SOI) Wafer angefertigt wurden, weisen bei einer Zielfrequenz ein mittlere Abweichung von Δf = 118±26Hz (bzw.Δf =0,76±0,17%) auf.</abstract>
    <enrichment key="opus.source">publish</enrichment>
    <author>J. Unger</author>
    <author>Thomas Rück</author>
    <author>Ferdinand Landgraf</author>
    <author>Rudolf Bierl</author>
    <collection role="institutes" number="FakANK">Fakultät Angewandte Natur- und Kulturwissenschaften</collection>
    <collection role="persons" number="bierlsappz">Bierl, Rudolf (Prof. Dr.) - Sensorik-ApplikationsZentrum</collection>
    <collection role="othforschungsschwerpunkt" number="16317">Sensorik</collection>
    <collection role="institutes" number="">Sensorik-Applikationszentrum (SappZ)</collection>
  </doc>
  <doc>
    <id>1559</id>
    <completedYear/>
    <publishedYear>2015</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2021-03-21</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Specification of an improved photoacoustic setup for high-sensitive, low-cost NO2 trace gas detection</title>
    <parentTitle language="eng">18th International Conference on Photoacoustic and Photothermal Phenomena (ICPPP18), 2015, September 6-10, Novi Sad, Serbia</parentTitle>
    <enrichment key="opus.source">publish</enrichment>
    <author>Thomas Rück</author>
    <author>Ferdinand Landgraf</author>
    <author>I. Läpple</author>
    <author>J. Unger</author>
    <author>Frank-Michael Matysik</author>
    <author>Rudolf Bierl</author>
    <collection role="institutes" number="FakANK">Fakultät Angewandte Natur- und Kulturwissenschaften</collection>
    <collection role="persons" number="bierlsappz">Bierl, Rudolf (Prof. Dr.) - Sensorik-ApplikationsZentrum</collection>
    <collection role="othforschungsschwerpunkt" number="16317">Sensorik</collection>
    <collection role="institutes" number="">Sensorik-Applikationszentrum (SappZ)</collection>
  </doc>
</export-example>
