<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>4659</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst>747</pageFirst>
    <pageLast>750</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>bookpart</type>
    <publisherName>VDE-Verlag</publisherName>
    <publisherPlace>München</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Sprayganik - Spraytool für organische Halbleiter</title>
    <abstract language="deu">Sprühbeschichtung stellt einen kostengünstigen und materialeffizienten aber komplexen Prozess dar. Um diese Vorteile für die Abscheidung teurer organischer Halbleiter zu nutzen, wurde ein Sprühbeschichter entwickelt, der neueste Anforderungen an den Prozess erfüllt. Zudem konnten selbstansaugende Mikrosprühdüsen mikrotechnologisch in Silizium realisiert werden, welche bereits eine bis zu vierfache Materialeffizienz im Vergleich zu herkömmlichen airbrush-Düsen nachweisen konnten. Die neueste Düsengeneration zeigt nun eine weiter verbesserte Zerstäubung, was bei gesprühten OPDs zu einer reduzierten Dunkelstromdichte von 9,1×10-6 mA·cm-2 (-5 V) und erhöhten externen Quanteneffizienz von 78,5% (530 nm, -5 V) führt.</abstract>
    <abstract language="eng">Generally, spray coating is a cheap and material efficient but complex process. To exploit those advantages for deposition of expensive organic semiconductors, we developed a spray coater to fulfil latest requirements. Furthermore, it was possible to realize venturi micro nozzles that already showed up to 4-fold material efficiency when compared to conventional airbrush-nozzles. The latest nozzle layout shows an even better atomization resulting in photodiodes with a reduced dark current density of 9,1×10-6 mA·cm-2 (-5 V) and increased external quantum efficiency of 78,5% (530 nm, -5 V).</abstract>
    <parentTitle language="deu">7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, München</parentTitle>
    <identifier type="isbn">978-3-8007-4491-6</identifier>
    <enrichment key="opus.import.date">2022-07-03T14:30:54+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">importuser</enrichment>
    <licence>Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG</licence>
    <author>Michael A. Betz</author>
    <author>Alfred Lechner</author>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Dunkelstrom</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>organischer Halbleiter</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Photodiode</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Silicium</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Spritzbeschichten</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Spritzschicht</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Sprühdüse</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>uncontrolled</type>
      <value>Zerstäubung</value>
    </subject>
    <collection role="institutes" number="FakANK">Fakultät Angewandte Natur- und Kulturwissenschaften</collection>
    <collection role="othforschungsschwerpunkt" number="16316">Produktion und Systeme</collection>
    <collection role="institutes" number="">Labor Nanoanalytik und Halbleiterchemie (Nanochem)</collection>
  </doc>
  <doc>
    <id>3207</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>1</issue>
    <volume>27</volume>
    <type>article</type>
    <publisherName>IOP Publishing</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Silicon micro venturi nozzles for cost-efficient spray coating of thin organic P3HT/PCBM layers</title>
    <abstract language="eng">Improvements on spray coating are of particular interest to different fields of technology as it is a scalable deposition method and processing from solutions offer various application possibilities outside of typical facilities. When it comes to the deposition of expensive and film-forming media such as organic semiconductors, consumption and nozzle cleaning issues are of particular importance. We demonstrate the simple steps to design and fabricate micro venturi nozzles for economical spray coating with a consumption as low as 30-50 mu l.min(-1). For spray coating an active area of 25 cm(2) a 2.45-4.01 fold coating efficiency is observed compared to a conventional airbrush nozzle set. The electrical characterization of first diodes sprayed with an active layer thickness of similar to 750 nm using a single micronozzle at a coating speed of 1.7 cm(2).min(-1) reveals a good external quantum efficiency of 72.9% at 532 nm and a dark current of similar to 7.4.10(-5) mA.cm(-2), both measured at -2 V. Furthermore, the high resistance of the micronozzles against solvents and most acids is provided through realization in a silicon wafer with silicon dioxide encapsulation, therefore allowing easy and effective cleaning.</abstract>
    <parentTitle language="eng">Journal of micromechanics and microengineering</parentTitle>
    <identifier type="doi">10.1088/0960-1317/27/1/015019</identifier>
    <enrichment key="opus.import.date">2022-03-17T07:14:43+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">importuser</enrichment>
    <enrichment key="BegutachtungStatus">peer-reviewed</enrichment>
    <author>Michael A. Betz</author>
    <author>Patric Büchele</author>
    <author>Manfred Brünnler</author>
    <author>Sonja Deml</author>
    <author>Alfred Lechner</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>deep reactive ion etching</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>microfluidics</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>organic photodiodes</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>organic semiconductors</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>spray coating</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>venturi nozzles</value>
    </subject>
    <collection role="institutes" number="FakANK">Fakultät Angewandte Natur- und Kulturwissenschaften</collection>
    <collection role="othforschungsschwerpunkt" number="16316">Produktion und Systeme</collection>
    <collection role="oaweg" number="">Hybrid Open Access - OA-Veröffentlichung in einer Subskriptionszeitschrift/-medium</collection>
    <collection role="institutes" number="">Labor Nanoanalytik und Halbleiterchemie (Nanochem)</collection>
  </doc>
</export-example>
