@article{BetzBuecheleBruennleretal., author = {Betz, Michael A. and B{\"u}chele, Patric and Br{\"u}nnler, Manfred and Deml, Sonja and Lechner, Alfred}, title = {Silicon micro venturi nozzles for cost-efficient spray coating of thin organic P3HT/PCBM layers}, series = {Journal of micromechanics and microengineering}, volume = {27}, journal = {Journal of micromechanics and microengineering}, number = {1}, publisher = {IOP Publishing}, doi = {10.1088/0960-1317/27/1/015019}, abstract = {Improvements on spray coating are of particular interest to different fields of technology as it is a scalable deposition method and processing from solutions offer various application possibilities outside of typical facilities. When it comes to the deposition of expensive and film-forming media such as organic semiconductors, consumption and nozzle cleaning issues are of particular importance. We demonstrate the simple steps to design and fabricate micro venturi nozzles for economical spray coating with a consumption as low as 30-50 mu l.min(-1). For spray coating an active area of 25 cm(2) a 2.45-4.01 fold coating efficiency is observed compared to a conventional airbrush nozzle set. The electrical characterization of first diodes sprayed with an active layer thickness of similar to 750 nm using a single micronozzle at a coating speed of 1.7 cm(2).min(-1) reveals a good external quantum efficiency of 72.9\% at 532 nm and a dark current of similar to 7.4.10(-5) mA.cm(-2), both measured at -2 V. Furthermore, the high resistance of the micronozzles against solvents and most acids is provided through realization in a silicon wafer with silicon dioxide encapsulation, therefore allowing easy and effective cleaning.}, language = {en} } @article{LiebherrHuttererMickertetal., author = {Liebherr, Raphaela B. and Hutterer, Albert and Mickert, Matthias J. and Vogl, Franziska C. and Beutner, Andrea and Lechner, Alfred and Hummel, Helmut and Gorris, Hans H.}, title = {Three-in-one enzyme assay based on single molecule detection in femtoliter arrays}, series = {Analytical and bioanalytical chemistry}, volume = {407}, journal = {Analytical and bioanalytical chemistry}, number = {24}, publisher = {Springer}, doi = {10.1007/s00216-015-8910-0}, pages = {7443 -- 7452}, abstract = {Large arrays of femtoliter-sized chambers are important tools for single molecule research as well as bioanalytical applications. We have optimized the design and fabrication of two array types consisting of 250 × 250 (62 500) femtoliter chambers either by surface etching of fused silica slides or by polydimethylsiloxane (PDMS) molding. Highly diluted solutions of β-galactosidase were enclosed in such arrays to monitor the fluorogenic reactions of hundreds of individual enzyme molecules in parallel by wide-field fluorescence microscopy. An efficient mechanical sealing procedure was developed to prevent diffusion of the fluorescent reaction product out of the chambers. Different approaches for minimizing non-specific surface adsorption were explored. The signal acquisition was optimized to grant both a large field of view and an efficient signal acquisition from each femtoliter chamber. The optimized femtoliter array has enabled a three-in-one enzyme assay system: First, the concentration of active enzyme can be determined in a digital way by counting fluorescent chambers in the array. Second, the activity of the enzyme bulk solution is given by averaging many individual substrate turnover rates without the need for knowing the exact enzyme concentration. Third-unlike conventional enzyme assays-the distribution of individual substrate turnover rates yields insight into the conformational heterogeneity in an enzyme population. The substrate turnover rates of single β-galactosidase molecules were found to be broadly distributed and independent of the type of femtoliter array. In general, both types of femtoliter arrays are highly sensitive platforms for enzyme analysis at the single molecule level and yield consistent results.}, language = {en} } @article{BauhuberMikrievskijLechner, author = {Bauhuber, Michael and Mikrievskij, Andreas and Lechner, Alfred}, title = {Isotropic wet chemical etching of deep channels with optical surface quality in silicon with HNA based etching solutions}, series = {Materials Science in Semiconductor Processing}, volume = {16}, journal = {Materials Science in Semiconductor Processing}, number = {6}, publisher = {Elsevier}, doi = {10.1016/j.mssp.2013.05.017}, pages = {1428 -- 1433}, abstract = {Online trace analysis based on UV/Vis spectroscopy requires long detection paths. Therefore an isotropic wet etch process in silicon is developed to fabricate a 300 µm deep channel with low channel wall roughness for desired light guidance application. Four etchant compositions were compared in terms of etching rate, surface roughness and selectivity in a beaker process. The best fitting mixture was selected. To further increase the surface quality (bubble issue) a spin etcher tool is used for producing the channels. The dependence of homogeneity and defect density on media flux, and rotation velocity was investigated. Results show that high rotation velocity and high media flux lead to great defects in the channel wall. Through rotation of the wafer during etching, the etching rate of silicon rises compared to the beaker process due to the rapid removal of etch products and simultaneous supply of fresh etchant. After 38 min of etching, 300 µm deep semi-circular channels with high optical quality (Rq=10 nm±2 nm) over 3 m were produced.}, language = {de} } @article{HuttererBauhuberHummeletal., author = {Hutterer, Albert and Bauhuber, Michael and Hummel, Helmut and Lechner, Alfred}, title = {Real-time analyses of metal contaminations in the ppb-range}, series = {Solid State Phenomena}, volume = {195}, journal = {Solid State Phenomena}, publisher = {Trans Tech Publications}, doi = {10.4028/www.scientific.net/SSP.195}, pages = {269 -- 273}, abstract = {In high-tech processing even smallest concentrations of metal ions in process media are of the utmost significance because they cause expensive production failures. Currently, cost-intensive equipment, special trained staff and time consuming analyses are necessary to detect these contaminations in order to avoid failures. The Centers of Excellence Nanochem and Sensorics at the University of Applied Sciences Regensburg (owner of patent PCT/EP2010/064833) and their industrial partner Micro-Epsilon GmbH are developing a new miniaturized measurement device which allows cost-effective real-time analysis of fluidic media for the first time. The system is fully automated and can be directly connected to wet-etch benches. Hence it allows continuous real-time surveillance of metal contaminations in the ppb-range through absorption spectroscopy in process media. For this purpose a very small sample amount of the process medium and a specific complexing agent are mixed together. This leads to an increase in the molar extinction coefficients and though even smallest contaminations become visible. The main parts of our development are the simulation of the different system components, their production and chemical analyses with the evaluation model.}, language = {en} } @article{PeterDalmerLechneretal., author = {Peter, Daniel and Dalmer, Michael and Lechner, Alfred and Gigler, Alexander M. and Stark, Robert W. and Bensch, Wolfgang}, title = {Measurement of the mechanical stability of semiconductor line structures in drying liquids with application to pattern collapse}, series = {Journal of Micromechanics and Microengineering}, volume = {21}, journal = {Journal of Micromechanics and Microengineering}, number = {2}, publisher = {IOP Science}, doi = {10.1088/0960-1317/21/2/025001}, abstract = {Enhanced particle removal processes in wet cleaning as well as drying processes of semiconductor wafers can cause significant lateral forces on surface structures. These forces, however, must not exceed the mechanical stability of structures on the wafer. Thus, a mechanical fracture test was used to assess the lateral mechanical stability of polysilicon line structures in relevant process liquids. The mechanical test was based on nanomanipulation with an atomic force microscope. Compared to fracture tests in air, data acquired in liquid isopropanol revealed a stabilizing effect. The differences in fracture forces can be attributed to a stress corrosion process on the surface. The size of the generated damage was influenced by the viscosity of the surrounding media.}, language = {en} } @inproceedings{PeterDalmerLotnyketal., author = {Peter, Daniel and Dalmer, Michael and Lotnyk, Andriy and Kienle, Lorenz and Lechner, Alfred and Bensch, Wolfgang}, title = {Solid bridging during pattern collapse (stiction) studied on silicon nanoparticles}, series = {MRS Online Proceedings Library}, volume = {1299}, booktitle = {MRS Online Proceedings Library}, publisher = {Springer Nature}, doi = {10.1557/opl.2011.397}, pages = {191 -- 196}, abstract = {The high surface to volume ratio of nanoparticles allows a detailed experimental study of the surface phenomena associated with solid bridging. Besides bulk analyses, the local view on the structure and composition via HRTEM is particularly essential. 50 nm core shell particles consisting of a silicon (Si) core and a SiO2 shell were used as model system to understand surface phenomena appearing for Si-based nanostructures. Evaporative drying from de-ionized water shows the most significant bridging effect based on SiO2. There is only a localized deposition of oxides between the particles during the drying process and no overall oxidation. For the deposition material, silicates are the most likely candidates.}, language = {en} } @article{PeterHolsteynsDalmeretal., author = {Peter, Daniel and Holsteyns, Frank and Dalmer, Michael and Kruwinus, Hans and Lechner, Alfred and Bensch, Wolfgang}, title = {A Study on the Structure Collapse Mechanisms for High Aspect Ratio Structures with Application to Clean Processing}, series = {ECS Meeting Abstracts}, volume = {MA2009-02}, journal = {ECS Meeting Abstracts}, number = {24}, publisher = {IOP Science}, doi = {10.1149/MA2009-02/24/2084}, language = {en} } @unpublished{SchwarzPastoetterTranetal., author = {Schwarz, Tobias and Past{\"o}tter, Angelina and Tran, Trung and Schlosser, Marc and Kaulen, Corinna and Lechner, Alfred and Kammler, Martin and Slabon, Adam}, title = {Effect of Temperature on the Growth of Cu(I)O Nanocubes: The Impact of the Copper Precursor Species}, series = {SSRN}, journal = {SSRN}, publisher = {Elsevier}, doi = {10.2139/ssrn.4909639}, abstract = {Cuprous oxide (Cu2O) nanoparticles were synthesized using a wet chemical surfactant free method at different synthesis temperatures from 25 ◦C to 60 ◦C. Morphology, size, and chemical composition of the prepared Cu2O nanoparticles were analyzed by SEM, PXRD, and ATR-IR. We discovered that the chemical composition of the Cu2O nanoparticles remained unaffected by the synthesis temperature. However, morphology and size of the nanoparticles showed a strong temperature dependency. This could be attributed to the temperature induced formation of cupric oxide (CuO) species from the copper hydroxide (Cu(OH)2 ) precursor which also functions as copper precursor for the Cu2O nanoparticle growth. The cupric oxide species was determined to be the main cause for the formation of micrometer sized particles, whereas with the Cu(OH)2 precursor species for the Cu2O nanoparticles nanocubes with smaller edge lengths as well as octahedrons were obtained.}, language = {en} } @article{PeterDalmerLechneretal., author = {Peter, Daniel and Dalmer, Michael and Lechner, Alfred and Gigler, Alexander M. and Stark, Robert W. and Bensch, Wolfgang}, title = {The influence of liquid media on the fracture strength of polysilicon nanostructures}, series = {Solid State Phenomena}, volume = {187}, journal = {Solid State Phenomena}, publisher = {Trans Tech Publications}, doi = {10.4028/www.scientific.net/SSP.187.127}, pages = {127 -- 130}, abstract = {The mechanical stability of nanostructures depends on the surrounding medium. Their stability was probed by lateral force microscopy in liquid media. Previously reported data on water and isopropanol showed an increase in the fracture strength for the latter. Further tests with other alcohols (ethanol, 1-butanol) also showed an increasing strength. The interface between the liquid and the surface is the decisive factor for the influence of the media. When altering the interface with a cationic surfactant or a self-assembled monolayer, an increase of the fracture force by 100 \% compared to de-ionized water could be measured.}, language = {en} } @article{SokolowskiTintenBlomeBlumsetal., author = {Sokolowski-Tinten, Klaus and Blome, Christian and Blums, Juris and Dietrich, Clemens and Tarsevitch, Alexander and Horn-von Hoegen, Michael and von der Linde, Dietrich and Cavalleri, Andrea and Kammler, Martin and Uschmann, Ingo and Foerster, Eckhart}, title = {Femtosecond X-ray Diffraction Study of Large Amplitude Coherent Optical Phonons in Laser-Excited Bismuth}, series = {Conference on Lasers and Electro-Optics, 1-6 June 2003, Baltimore, Maryland}, journal = {Conference on Lasers and Electro-Optics, 1-6 June 2003, Baltimore, Maryland}, publisher = {Optical Society of America}, abstract = {Femtosecond time-resolved X-ray diffraction was used to directly study optical phonons in laser-excited Bismuth. A periodic modulation of the diffraction efficiency reveals initially coherent lattice distortions with atomic displacements of nearly 10\% of the nearest- neighbor-distance.}, language = {en} } @article{WallKrenzerWippermannetal., author = {Wall, Simone and Krenzer, Boris and Wippermann, Stefan and Sanna, Simone and Klasing, Friedrich and Hanisch-Blicharski, Anja and Kammler, Martin and Schmidt, Wolf Gero and Horn-von Hoegen, Michael}, title = {Atomistic picture of charge density wave formation at surfaces}, series = {Physical review letters}, volume = {109}, journal = {Physical review letters}, number = {18}, publisher = {APS}, doi = {10.1103/PhysRevLett.109.186101}, abstract = {We used ultrafast electron diffraction and density-functional theory calculations to gain insight into the charge density wave (CDW) formation on In/Si(111). Weak excitation by a femtosecond-laser pulse results in the melting of the CDW. The immediate freezing is hindered by a barrier for the motion of atoms during the phase transition: The melted CDW constitutes a long-lived, supercooled phase and is strong evidence for a first-order transition. The freezing into the CDW is triggered by preexisting adsorbates. Starting at these condensation nuclei, the CDW expands one dimensionally on the In/Si(111) surface, with a constant velocity of more than 80 m/s.}, language = {en} } @article{FriggeKalusKlasingetal., author = {Frigge, Tim and Kalus, Annika and Klasing, Friedrich and Kammler, Martin and Hanisch-Blicharski, Anja and Horn-von Hoegen, Michael}, title = {Nanoscale Heat Transport in Self-Organized Ge Clusters on Si(001)}, series = {MRS Online Proceedings Library}, journal = {MRS Online Proceedings Library}, publisher = {Springer}, doi = {10.1557/opl.2013.148}, pages = {45 -- 50}, abstract = {Ultrafast time resolved transmission electron diffraction (TED) in a reflection geometry was used to study the cooling behavior of self-organized, well defined nanoscale germanium hut and dome clusters on Si(001). The clusters were heated in a pump-probe scheme by fs-laser pulses. The resulting transient temperature rise was then determined from the drop in diffraction intensity caused by the Debye-Waller effect. From a cooling time of τ=177 ps we estimated a strongly reduced heat transfer compared with homogeneous films of equivalent thickness.}, language = {en} } @article{MoellenbeckHanischBlicharskiSchneideretal., author = {M{\"o}llenbeck, Simone and Hanisch-Blicharski, Anja and Schneider, Paul and Ligges, Manuel and Zhou, Ping and Kammler, Martin and Krenzer, Boris and Horn-von Hoegen, Michael}, title = {Ultra-fast Time-Resolved Electron Diffraction of Strongly Driven Phase Transitions on Silicon Surfaces}, series = {MRS Online Proceedings Library}, journal = {MRS Online Proceedings Library}, publisher = {Springer}, doi = {10.1557/PROC-1230-MM03-09}, abstract = {The dynamics of strongly driven phase transitions at surfaces are studied by ultra-fast time-resolved reflection high energy electron diffraction. The surfaces are excited by an intense fs-laser pulse (pump) and probed by an ultra-short electron pulse with variable time delay. The order-disorder phase transition from a c(4 {\~A}— 2) to a(2 {\~A}— 1) of the bare Si(001) surface shows a transient decrease of the intensity of the c(4 {\~A}— 2) spots which recovers on a time scale of a few hundred picoseconds indicating the excitation of the phase transition. On Si(111) a monolayer of Indium induces a (4 {\~A}— 1) reconstruction which undergoes a Peierls like phase transition to a (8 {\~A}— "2") reconstruction below 100 K. Upon laser excitation with a fluence of 3.4 mJ/cm 2 at a temperature of 72 K the phase transition was strongly driven. The (8 {\~A}— "2")-diffraction spots instantaneously disappears, while the intensity of the (4 {\~A}— 1)-spots increases. This increase of the (4 {\~A}— 1) spot intensity excludes an explanation by the Debye-Waller-Effect and is evidence for a true structural phase transition at a surface. {\^A}© 2010 Materials Research Society.}, language = {en} } @article{LuNicoulShymanovichetal., author = {Lu, Wei and Nicoul, Matthieu and Shymanovich, Uladzimir and Tarsevitch, Alexander and Kammler, Martin and Horn-von Hoegen, Michael and von der Linde, Dietrich and Sokolowski-Tinten, Klaus}, title = {Extreme Phonon Softening in Laser-excited Bismuth - Towards an Inverse Peierls-transition}, series = {MRS Online Proceedings Library}, volume = {1230}, journal = {MRS Online Proceedings Library}, publisher = {Springer}, doi = {10.1557/PROC-1230-MM03-05}, abstract = {Large amplitude coherent optical phonons have been investigated in laser-excited Bismuth by means of femtosecond time-resolved X-ray diffraction. For absorbed laser fluences above 2 mJ/cm2, the experimental data reveal an extreme softening of the excited A1g-mode down to frequencies of about 1 THz, only 1/3 of the unperturbed A1g-frequency. At even stronger excitation the measured diffraction signals no longer exhibit an oscillatory behavior presenting strong indication that upon intense laser-excitation the Peierls-distortion, which defines the equilibrium structure of Bismuth, can be transiently reversed.}, language = {en} } @article{HanischBlicharskiKrenzerMoellenbecketal., author = {Hanisch-Blicharski, Anja and Krenzer, Boris and M{\"o}llenbeck, Simone and Ligges, Manuel and Zhou, Ping and Kammler, Martin and Horn-von Hoegen, Michael}, title = {Transient Cooling of Ultrathin Epitaxial Bi(111)-Films on Si(111) Upon Femtosecond Laser Excitation Studied by Ultrafast Reflection High Energy Electron Diffraction}, series = {MRS Online Proceedings Library}, journal = {MRS Online Proceedings Library}, publisher = {Springer}, doi = {10.1557/PROC-1172-T04-08}, pages = {1 -- 6}, abstract = {With time resolved ultrafast electron diffraction the cooling process across the interface between a thin film and the underlying substrate was studied after excitation with short laser pulses. From the exponential decay of the surface temperature evolution a thermal boundary conductance of 1430 W/(cm2K) is determined for a 9.7 nm thin Bi(111) film on Si(111). A linear dependence between laser fluence and initial temperature rise was measured for film-thicknesses between 2.5 nm and 34.5 nm. The ratio of initial temperature rise and laser fluence for different film-thicknesses is compared to a model taking multilayer optics into account. The data agree well with this model.}, language = {en} } @article{AlFalouKammlerHornvonHoegen, author = {Al-Falou, A. A. and Kammler, Martin and Horn-von Hoegen, Michael}, title = {Strain state analysis of hetero-epitaxial systems}, series = {Europhysics Letters}, volume = {69}, journal = {Europhysics Letters}, number = {4}, publisher = {IOP}, doi = {10.1209/epl/i2004-10399-6}, pages = {570 -- 576}, abstract = {We present a new method to analyze the strain state of epitaxial hetero structures by high-resolution spot profile analysis low-energy electron diffraction. From the variation of the spot profiles with the vertical scattering vector we determine the hetero film roughness, the change of interlayer spacing due to tetragonal distortion, and the variation of the interlayer distance due to partial relaxation of the strained rough film. The practical implementation of this method is simple and can be used to determine the onset of strain-relieving defects during the growth process.}, language = {en} } @article{KammlerHornvonHoegen, author = {Kammler, Martin and Horn-von Hoegen, Michael}, title = {Low energy electron diffraction of epitaxial growth of bismuth on Si(111)}, series = {Surface Science}, volume = {576}, journal = {Surface Science}, number = {1-3}, publisher = {Elsevier}, doi = {10.1016/j.susc.2004.11.033}, pages = {56 -- 60}, abstract = {The epitaxial growth of Bi on Si(1 1 1) studied by spot profile analyzing low energy electron diffraction shows for low coverage rotationally disordered Bi cluster with preferred orientations following the threefold symmetry of the Si substrate. With further deposition the Bi cluster coalesces and the surface orientation changes from the pseudo cubic Bi(1 1 0) surface orientation of the Bi cluster into the hexagonal Bi(1 1 1) surface of the resulting Bi film.}, language = {en} }