@inproceedings{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Contact Classification using Tactile Arrays}, series = {2007 3rd International Conference on Intelligent Sensors, Sensor Networks and Information (ISSNIP), 3, 03.-06.12.2007, Melbourne, VIC, Australia}, booktitle = {2007 3rd International Conference on Intelligent Sensors, Sensor Networks and Information (ISSNIP), 3, 03.-06.12.2007, Melbourne, VIC, Australia}, doi = {10.1109/ISSNIP.2007.4496848}, pages = {227 -- 232}, abstract = {This paper proposed a contact recognition algorithm capable of determining contact surfaces types by tactile sensor fusion. This algorithm can recognize grasped objects using a 2- fingered robot hand, on which tactile sensors are mounted. Experiments have demonstrated reliable surface classification and accurate transformation independent of object shape and orientation. The contribution of this paper regards the relations between a surface and the points cloud defining it. Particularly, we investigate on the possibility that there is some intrinsic feature of a points cloud under quadric surface, allowing us to discriminate or classify a dataset defining a surface from the acquisition noise.}, language = {en} } @article{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Contact Recognition using Tactile Sensor}, series = {Annals Universitaria Craiova-Series: Automation, Computers, Electronics and Mechatronics}, volume = {4 (31)}, journal = {Annals Universitaria Craiova-Series: Automation, Computers, Electronics and Mechatronics}, number = {2}, pages = {103 -- 108}, abstract = {The surface recognition algorithm that determines the types of contact surfacesby fusing information collected by the tactile sensor system is proposed. The tactilesystem will be determined from the shape of the object image which can then becharacterized using the mathematical properties of Quadric surface. This algorithm canrecognize 3-D objects using a 2-fingered robot gripper, on which tactile sensors aremounted. Experiments have demonstrated the reliability of the surface classificationmethod and the accuracy of transformations independent of an object's shape, translationand rotation.}, language = {en} } @article{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Optimisation of Prehension Force through Tactile Sensing}, series = {Journal of Advanced Manufacturing Technology}, journal = {Journal of Advanced Manufacturing Technology}, publisher = {Universiti Teknikal Malaysia Melaka}, issn = {2289-8107}, language = {en} } @article{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Contact Recognition through Tactile Sensing}, series = {ACTA Universitatis Apulensis; Seria Mathematics-Informatics}, journal = {ACTA Universitatis Apulensis; Seria Mathematics-Informatics}, publisher = {Department of Mathematics and Informatics}, address = {Alba Iulia}, issn = {1582-5329}, language = {en} } @inproceedings{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Contact Recognition using Tactile Sensor}, series = {Proc. International Symposium on System Theory, Automation, Robotics, Computers, Informatics, Electronics and Instrumentation (SINTES13), Romania}, booktitle = {Proc. International Symposium on System Theory, Automation, Robotics, Computers, Informatics, Electronics and Instrumentation (SINTES13), Romania}, pages = {285 -- 290}, language = {en} } @inproceedings{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Pre-slip detection based Tactile Sensing}, series = {Proc. 3rd International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP 2007), Melbourne}, booktitle = {Proc. 3rd International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP 2007), Melbourne}, pages = {233 -- 238}, language = {en} } @inproceedings{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Contact classification using tactile arrays}, series = {Proc. International Conference on Engineering \& ICT 2007 (ICEI 2007), 27th to 29th November 2007, Malacca, Malaysia}, booktitle = {Proc. International Conference on Engineering \& ICT 2007 (ICEI 2007), 27th to 29th November 2007, Malacca, Malaysia}, language = {en} } @inproceedings{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Optimisation of Prehension Force through Tactile Sensing}, series = {Proc. International Conference on Engineering \& ICT 2007 (ICEI 2007), Malaysia}, booktitle = {Proc. International Conference on Engineering \& ICT 2007 (ICEI 2007), Malaysia}, language = {en} } @article{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Slip Prediction through Tactile Sensing}, series = {Sensors \& Transducers}, volume = {90}, journal = {Sensors \& Transducers}, number = {Special Issue April 2008}, publisher = {International Frequency Sensor Association, IFSA}, issn = {1726-5479}, pages = {310 -- 324}, abstract = {This paper introduces a new way to predict contact slip using a resistive tactile sensor. The prototype sensor can be used to provide intrinsic information relating to geometrical features situated on the surface of grasped objects. Information along the gripper finger surface is obtained with a measurement resolution dependant on the number of discrete tactile elements. The tactile sensor predicts the partial slip of a tactile surface by sensing micro vibrations in tangential forces which are caused by an expansion of the slip regions within the contact area. The location of the local slip is not specified but its occurrence can be predicted immediately following micro vibration detection. Predictive models have been used to develop a set of rules which predict the slip based on fluctuations in tactile signal data.  }, language = {en} } @inproceedings{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Pre-slip sensing using tactile sensor}, series = {Proceedings / SINTES 13, International Symposium on Systems Theory, Automation, Robotics, Computers, Informatics, Electronics and Instrumentation, October 18 - 20, 2007, Craiova - Romania}, booktitle = {Proceedings / SINTES 13, International Symposium on Systems Theory, Automation, Robotics, Computers, Informatics, Electronics and Instrumentation, October 18 - 20, 2007, Craiova - Romania}, pages = {279 -- 284}, language = {en} } @article{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Pre-slip sensing using tactile sensor}, series = {Annals Universitaria Criaiova-Series: Automation, Computers, Electronics and Mechatronics}, volume = {4 (31)}, journal = {Annals Universitaria Criaiova-Series: Automation, Computers, Electronics and Mechatronics}, number = {2}, pages = {109 -- 114}, language = {en} } @inproceedings{PetcharteeMonkman, author = {Petchartee, Somrak and Monkman, Gareth J.}, title = {Pre-slip Sensing through Tactile Sensing}, series = {Proc. 2nd International Conference on Sensing Technology (ICST 2007), New Zealand}, booktitle = {Proc. 2nd International Conference on Sensing Technology (ICST 2007), New Zealand}, pages = {62 -- 67}, language = {en} } @article{LangerBerndtSchreiner, author = {Langer, Christoph and Berndt, Dominik and Schreiner, Rupert}, title = {Sensitivity of thermal conductivity vacuum gauges for constant current and constant temperature operation}, series = {Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics}, volume = {40}, journal = {Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics}, number = {5}, publisher = {AIP Publishing}, doi = {10.1116/6.0001964}, abstract = {To optimize the measurement range of thermal conductivity vacuum gauges, an expression for the sensitivity is required that takes into account all geometrical, material-specific, and operating parameters. Therefore, equations of the sensor output signal as a function of the pressure for the constant current and the constant temperature mode have been developed analytically. Based on these equations, the sensitivity of the vacuum gauge and its influencing parameters was investigated and discussed. For comparable conditions, the constant temperature operation shows a significantly higher sensitivity for high pressures, while the constant current operation shows higher sensitivity at low pressures. The sensitivity in both the constant current and the constant temperature mode depends on the ratio of the filament surface area and the parasitic thermal conductance. In addition, for the constant current operation, the sensitivity also depends on the current value and the temperature coefficient of the filament resistor. For the constant temperature operation, the sensitivity additionally depends on the distance of the filament and the reference plane. However, to extend the measurement range of a thermal conductivity vacuum gauge toward low pressures, a reduction of the parasitic thermal conductance is mandatory for both the constant current and the constant temperature mode.}, language = {en} } @unpublished{RueckMuellerJobstetal., author = {R{\"u}ck, Thomas and M{\"u}ller, Max and Jobst, Simon and Weigl, Stefan and Pangerl, Jonas and Bierl, Rudolf and Matysik, Frank-Michael}, title = {Digital Twin of a Photoacoustic Trace Gas Sensor for Monitoring Methane in Complex Gas Compositions}, publisher = {Elsevier / SSRN}, doi = {10.2139/ssrn.4215170}, pages = {22}, abstract = {The digitalization of industrial processes requires smart sensor systems. Photoacoustic spectroscopy is well suited for this purpose as it allows for small-sized and low-cost trace gas analysis. However, the method is susceptible to changes in measurement conditions and standard calibration routines often fail to correct for all changes. We therefore created a Digital Twin (DT) of a photoacoustic trace gas sensor for methane and evaluated it regarding variations in gas composition (CH4, N2, O2, CO2, H2O), temperature and pressure. With a mean absolute percentage error of 0.8 \% the accuracy of the sensor after DT compensation significantly exceeds the 24 \% achieved based on standard calibration in nitrogen. For the first time, we can fully analytically compute the photoacoustic signal under moderate ambient conditions with an error in the ppbV range by taking a holistic approach. Assuming knowledge of the underlying energy transfer processes, the model of this Digital Twin can be adapted to any microphone based photoacoustic sensor for monitoring any analyte species.}, language = {en} } @inproceedings{MuellerRueckJobstetal., author = {M{\"u}ller, Max and R{\"u}ck, Thomas and Jobst, Simon and Pangerl, Jonas and Bierl, Rudolf and Matysik, Frank-Michael}, title = {Creating a Digital Twin of a Photoacoustic Gas Sensor for Methane Detection in Complex Gas Matrices}, series = {Proceedings Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES): 11-15 July 2022, Vancouver, British Columbia, Canada}, booktitle = {Proceedings Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES): 11-15 July 2022, Vancouver, British Columbia, Canada}, publisher = {Optica Publishing Group}, isbn = {978-1-957171-10-4}, doi = {10.1364/LACSEA.2022.LW4D.2}, abstract = {We present the calculation results from a digital twin (DT) of our photoacoustic (PA) sensor for methane detection, regarding gas composition, temperature and pressure variations.}, language = {en} } @inproceedings{SchreinerMulotWiedmannetal., author = {Schreiner, Rupert and Mulot, M. and Wiedmann, J{\"o}rg and Coenning, W. and Porsche, J. and Gentner, Jean-Louis and Berroth, Manfred and Scholz, Ferdinand and Schwizer, H.}, title = {Dynamic measurements on narrow linewidth complex coupled 1.55 μm DFB lasers with gain and index grating in antiphase}, series = {Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99), 16-20 May 1999, Davos, Switzerland}, booktitle = {Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99), 16-20 May 1999, Davos, Switzerland}, publisher = {IEEE}, address = {Piscataway}, isbn = {0-7803-5562-8}, doi = {10.1109/ICIPRM.1999.773626}, pages = {25 -- 28}, abstract = {We report on dynamic measurements on antiphase complex coupled 1.55 /spl mu/m DFB lasers. The antiphase complex coupling mechanism is realized by periodically etching the active layer and quarternary InGaAsP overgrowth. This new fabrication approach results in very narrow linewidths measured on devices with rather short resonator lengths. The minimum linewidth for a 375 /spl mu/m long ridge waveguide laser was only 250 kHz at an optical output power of 4 mW. The RC-limited 3dB-bandwidth for those devices was /spl sim/6 GHz. Using circuit model corrections, the intrinsic bandwidth limitation of those lasers was found to be 17.4 GHz.}, language = {en} } @inproceedings{SchreinerNaegeleKoerbletal., author = {Schreiner, Rupert and Naegele, Peter and Koerbl, Michael and Groening, Albert and Gentner, Jean-Louis and Schweizer, Heinz C.}, title = {Monolithically integrated tunable laterally-coupled distributed feedback lasers with self-aligned Ti/Pt/Au ohmic contacts}, series = {Proceedings Volume 4871, Semiconductor Lasers and Optical Amplifiers for Lightwave Communication SystemsSemiconductor Lasers and Optical Amplifiers for Lightwave Communication Systems}, booktitle = {Proceedings Volume 4871, Semiconductor Lasers and Optical Amplifiers for Lightwave Communication SystemsSemiconductor Lasers and Optical Amplifiers for Lightwave Communication Systems}, editor = {Mirin, Richard P. and Menoni, Carmen S.}, publisher = {SPIE}, doi = {10.1117/12.457281}, pages = {160}, abstract = {We present a new method for fabrication of tunable InGaAsP-InP single mode lasers without epitaxial overgrowth. These devices show the advantage of a considerably simplified fabrication process compared to conventional tunable laser types. The lasers comprise an active Bragg reflector integrated with an uncorrugated separately pumped gain region. To overcome the extensive and expensive overgrowth step we realized a surface grating on both sides of the ridge mesa, which provides DFB operation. By adjusting the current through the Bragg reflector, the wavelength can be tuned between 1590.8 nm and 1595.2 nm. A maximum of 11 wavelength channels with an average spacing of ~0.5 nm and a constant optical output power of ~0.5 mW are addressable.}, language = {en} } @article{CheongAwKarimovetal., author = {Cheong, Kuan Yew and Aw, Kean and Karimov, Khasan S. and Zhao, Feng and Mahroof-Tahir, Mohammad and Schreiner, Rupert}, title = {Advances in Smart Materials and Applications}, series = {Advances in Materials Science and Engineering}, journal = {Advances in Materials Science and Engineering}, publisher = {Hindawi}, doi = {10.1155/2014/517342}, abstract = {This is one of a series of special issues published in Advances in Materials Science and Engineering, focusing on the latest advances of smart materials and their applications. Evolution of engineering materials is strongly depending on the growing transformation of complexity in engineering products. New materials being designed are required to provide specific properties and demonstrate certain functional characteristics by manipulating their dimension, chemistry, and structure through various advanced technologies. Therefore, "smartness" of a material has become the topic of interest. Properties of smart materials may change accordingly to the applied external stimuli. Under the direction of the editorial team, we showcase advances of organic and inorganic based smart materials and their applications in areas of specific interest such as energy, environment, and health. A total of 9 articles are published in this special issue. Six articles are focused on production, synthesis, and optimization of smart materials; and the remaining are dedicated to application of smart materials.}, language = {en} } @inproceedings{SaravananGerlachPeschkeetal., author = {Saravanan, Brem Kumar and Gerlach, Philipp and Peschke, Martin and Knoedl, Thomas and Schreiner, Rupert and Hanke, Christian and Stegmueller, Bernhard}, title = {Integrated DFB laser electro-absorption modulator based on identical MQW-double stack active layer for high-speed modulation beyond 10 GBIT/S}, series = {16th IPRM. 2004 International Conference on Indium Phosphide and Related Materials, 31 May - 04 June 2004, Kagoshima, Japan}, booktitle = {16th IPRM. 2004 International Conference on Indium Phosphide and Related Materials, 31 May - 04 June 2004, Kagoshima, Japan}, publisher = {IEEE}, isbn = {0-7803-8595-0}, doi = {10.1109/ICIPRM.2004.1442656}, pages = {236 -- 238}, abstract = {Integrated DFBLD-EAM-SOA devices utilizing an identical MQW active region have been realized in the AlGaInAs/InP material system. A fiber-coupled optical power of >6 mW with a 10 dB static extinction, 44 dB SMSR single-mode spectrum and a 3 dBe cutoff frequency of 25 GHz was measured.}, language = {en} } @article{ZahnerSchreinerStierstorferetal., author = {Zahner, Th and Schreiner, Rupert and Stierstorfer, R. and Kus, O. and Li, S. T. and Roessler, R. and Pedarnig, J. D. and B{\"a}uerle, D. and Lengfellner, H.}, title = {Off-diagonal Seebeck effect and anisotropic thermopower in Bi2Sr2CaCu2O8 thin films}, series = {Europhysics Letters}, volume = {40}, journal = {Europhysics Letters}, number = {6}, publisher = {IOP Sciences}, doi = {10.1209/epl/i1997-00521-4}, pages = {673 -- 678}, abstract = {The anisotropy ΔS of the thermopower in thin films of the high-Tc superconductor Bi2Sr2CaCu2O8 is investigated using off-c-axis epitaxial film growth and the off-diagonal Seebeck effect. The measurements represent a new method for the investigation of anisotropic transport properties in solids, taking advantage of the availability of oriented grown crystalline thin films instead of using bulk crystals. First results for the temperature dependence ΔS(T) in Bi2Sr2CaCu2O8 thin films are presented and described within a two-band model. Subjecting the films to heat treatments in different gases at relatively low temperatures, ΔS could reversibly be changed in a wide range.}, language = {en} } @inproceedings{KnodlHankeSaravananetal., author = {Knodl, Thomas and Hanke, Christian and Saravanan, Brem Kumar and Peschke, Martin and Schreiner, Rupert and Stegmuller, Bernhard}, title = {Integrated 1.3-μm InGaAlAs-InP laser-modulator with double-stack MQW layer structure}, series = {Proceedings Volume 5451, Integrated Optics and Photonic Integrated Circuits}, booktitle = {Proceedings Volume 5451, Integrated Optics and Photonic Integrated Circuits}, editor = {Righini, Giancarlo C. and Honkanen, Seppo}, publisher = {SPIE}, doi = {10.1117/12.544610}, pages = {1}, abstract = {We present first experimental results of the successful transfer of our monolithic integrated double-stack multi quantum well laser-modulator approach from the traditional InGaAsP/InP to the more promising InGaAlAs/InP material system. In continuous wave operation at room temperature, the devices achieved threshold currents of <21 mA, fiber coupled optical power levels up to 570 μW and static extinction ratios in the range of 15 dB/V. The measured small-signal modulation bandwidth of about 10 GHz is capacitance limited due to a conservative device layout.}, language = {en} } @inproceedings{SchreinerGrabeldingerWiedmannetal., author = {Schreiner, Rupert and Grabeldinger, H. and Wiedmann, J. and Wunstel, K. and Porsche, J. and Scholz, Ferdinand and Schweizer, H.}, title = {Complex coupled 1.55 mu m tunable super-grating DFB lasers and photonic filters}, series = {Compound semiconductors 1999 : proceedings of the Twenty-Sixth International Symposium on Compound Semiconductors held in Berlin, Germany, 22 - 26 August 1999}, booktitle = {Compound semiconductors 1999 : proceedings of the Twenty-Sixth International Symposium on Compound Semiconductors held in Berlin, Germany, 22 - 26 August 1999}, publisher = {Inst. of Physics Publ.}, address = {Bristol [u.a.]}, isbn = {0-7503-0704-8}, abstract = {We report on the investigation and realization of photonic filters based on the combination of fractional compositions of a few basic grating periods. Using a minimum set of two basic periods Lambda(1) and Lambda(2) we demonstrate comb-like few mode photonic band gap structures with arbitrary numbers of bands and frequency spacing between the bands. Optically integrated filters of different comb periods result in switchable wavelength filters for channel selection in WDM applications.}, language = {en} } @inproceedings{SchreinerSchweizer, author = {Schreiner, Rupert and Schweizer, Heinz C.}, title = {High frequency operation of 1.57 μm laterally gain coupled DFB lasers with self aligned ohmic contacts and nickel surface gratings}, series = {IEEE 18th International Semiconductor Laser Conference; 29 Sept.-3 Oct. 2002, Garmisch, Germany}, booktitle = {IEEE 18th International Semiconductor Laser Conference; 29 Sept.-3 Oct. 2002, Garmisch, Germany}, publisher = {IEEE}, isbn = {0-7803-7598-X}, doi = {10.1109/ISLC.2002.1041099}, pages = {21 -- 22}, abstract = {Laterally coupled DFB lasers with self-aligned ohmic contacts show the advantage of a, considerably simplified fabrication process. Side-mode-suppresion-ratios up to 55 dB and 3 dB-bandwidths beyond 15 GHz were obtained for these devices.}, language = {en} } @inproceedings{ThelenVolbertNunes, author = {Thelen, Simon and Volbert, Klaus and Nunes, Danilo Weber}, title = {A Survey on Algorithmic Problems in Wireless Systems}, series = {Proceedings of the 12th International Conference on Sensor Networks (SENSORNETS), Vol 1, Feb 23, 2023 - Feb 24, 2023, Lisbon, Portugal}, booktitle = {Proceedings of the 12th International Conference on Sensor Networks (SENSORNETS), Vol 1, Feb 23, 2023 - Feb 24, 2023, Lisbon, Portugal}, publisher = {SCITEPRESS - Science and Technology Publications}, isbn = {978-989-758-635-4}, doi = {10.5220/0011791200003399}, pages = {101 -- 111}, abstract = {Considering the ongoing growth of Wireless Sensor Networks (WSNs) and the challenges they pose due to their hardware limitations as well as the intrinsic complexity of their interactions, specialized algorithms have the potential to help solving these challenges. We present a survey on recent developments regarding algorithmic problems which have applications in wireless systems and WSNs in particular. Focusing on the intersection between WSNs and algorithms, we give an overview of recent results inside this intersection, concerning topics such as routing, interference minimization, latency reduction, localization among others. Progress on solving these problems could be potentially beneficial for the industry as a whole by increasing network throughput, reducing latency or making systems more energy-efficient. We summarize and structure these recent developments and list interesting open problems to be investigated in future works.}, language = {en} } @unpublished{MuellerWeiglMuellerWilliamsetal., author = {M{\"u}ller, Max and Weigl, Stefan and M{\"u}ller-Williams, Jennifer and Lindauer, Matthias and R{\"u}ck, Thomas and Jobst, Simon and Bierl, Rudolf and Matysik, Frank-Michael}, title = {Ambient methane monitoring at Hohenpeißenberg utilizing photoacoustic spectroscopy and cavity ring down spectroscopy}, doi = {10.5194/egusphere-2023-1010}, abstract = {With an atmospheric concentration of approximately 2000 parts per billion (ppbV, 10-9) methane (CH4) is the second most abundant greenhouse gas (GHG) in the atmosphere after carbon dioxide (CO2). The task of long-term and spatially resolved GHG monitoring to verify whether climate policy actions are effective, is becoming more crucial as climate change progresses. In this paper we report the CH4 concentration readings of our photoacoustic (PA) sensor over a five day period at Hohenpeißenberg, Germany. As a reference device a calibrated cavity ringdown spectrometer Picarro G2301 from the meteorological observatory was employed. Trace gas measurements with photoacoustic instruments promise to provide low detection limits at comparably low costs. However, PA devices are often susceptible to cross-sensitivities related to environmental influences. The obtained results show that relaxation effects due to fluctuating environmental conditions, e.g. ambient humidity, are a non-negligible factor in PA sensor systems. Applying algorithm compensation techniques, which are capable of calculating the influence of relaxational effects on the photoacoustic signal, increase the accuracy of the photoacoustic sensor significantly. With an average relative deviation of 1.11 \% from the G2301, the photoacoustic sensor shows good agreement with the reference instrument.}, language = {en} } @inproceedings{PodstranskyHausladenZlamaletal., author = {Podstr{\´a}nsk{\´y}, J{\´a}chym and Hausladen, Matthias and Zl{\´a}mal, Jakub and Kn{\´a}pek, Alexandr and Schreiner, Rupert}, title = {Single Column Multiple Electron Beam Imaging from N-Type Silicon}, series = {37th International Vacuum Nanoelectronics Conference (IVNC), 15-19 July 2024, Brno, Czech Republic}, booktitle = {37th International Vacuum Nanoelectronics Conference (IVNC), 15-19 July 2024, Brno, Czech Republic}, publisher = {IEEE}, isbn = {979-8-3503-7976-1}, doi = {10.1109/IVNC63480.2024.10652470}, pages = {1 -- 2}, abstract = {This work is aimed at measuring the electron emission from multiple cathodes formed by n-doped silicon and imaging the electron beams focused by an einzel lens on a CMOS camera. The experimental results are compared with computer simulation to understand the electron emission from the semiconductor cathode and the observed imaging imperfections. Finally, modifications to the experimental setup are suggested that should lead to improvement in the extraction current and spot size of focused electron beams and also better understanding of the processes taking place in the experiment.}, language = {en} } @article{BeckerBoehmChavezVegaetal., author = {Becker, Tatiana I. and B{\"o}hm, Valter and Chavez Vega, Jhohan Harvey and Odenbach, Stefan and Raikher, Yuriy L. and Zimmermann, Klaus}, title = {Magnetic-field-controlled mechanical behavior of magneto-sensitive elastomers in applications for actuator and sensor systems}, series = {Archive of Applied Mechanics}, volume = {89}, journal = {Archive of Applied Mechanics}, number = {1}, publisher = {Springer Nature}, doi = {10.1007/s00419-018-1477-4}, pages = {133 -- 152}, abstract = {The development of actuator and sensor systems with complex adaptive behavior and operating sensitivity is one of the actual scientific challenges. Smart materials like magneto-sensitive elastomers (MSEs) offer great potential for designing such intelligent devices, because they possess unique magnetic-field-dependent properties. The present paper deals with investigations of the free and forced vibrational behavior displayed by cantilever beams of MSEs containing magnetically soft particles in a uniform magnetic field. It is shown experimentally as well as theoretically that the first bending eigenfrequency of MSE beams depends strongly on the strength of an applied magnetic field. The proposed magneto-mechanical model is based on the vibrational dynamics of thin rods and predicts reliably the amplitude-frequency characteristics depending on the geometric configuration of the MSE and its material parameters. It is found that the vibration response of an MSE beam under kinematic excitation of its base can be modified indirectly by a magnetic field control due to the change of the vibration characteristics. As a result, the resonance can occur in different ranges of the excitation frequency. The dependencies of the amplification ratio on the excitation frequency are obtained experimentally and compared with the result provided by the theoretical model. Moreover, investigations on the potential use of the field-induced plasticity effect of MSEs in form-fit gripper applications are presented. This effect can be used to realize shape adaptable system parts. It is found that the mechanical properties of each component and its concentration within the mixture have an impact on the mechanical behavior of the whole MSE compound. Such parameters as the strength of magnetic field and geometry of the MSE sample have influence on the quality of shape adaptation. The evidence presented provides a good basis for the realization of MSE-based actuator and sensor systems with adaptable sensitivity.}, language = {en} } @article{PremChavezVegaBoehmetal., author = {Prem, Nina and Chavez Vega, Jhohan Harvey and B{\"o}hm, Valter and Sindersberger, Dirk and Monkman, Gareth J. and Zimmermann, Klaus}, title = {Properties of Polydimethylsiloxane and Magnetoactive Polymers with Electroconductive Particles}, series = {Macromolecular Chemistry and Physics}, volume = {219}, journal = {Macromolecular Chemistry and Physics}, number = {18}, publisher = {Wiley}, doi = {10.1002/macp.201800222}, abstract = {Magnetoactive polymers are intelligent materials whose mechanical and electrical characteristics are reversibly influenced by external magnetic stimuli. They consist of a highly elastic polymer matrix in which magnetically soft and/or hard particles are distributed by means of special fabrication processes. In addition to ferromagnetic particles such as carbonyl iron powder, electrically conductive particles may also be embedded into the polymer matrix. After characterizing a range of compounds, this work focuses on a comparison of the electrical properties and the suitability of various materials for applications, with particular emphasis on integration into 3D and 6D printing processes. 6D printing is based on the selective positioning of particles in a 3D polymer matrix with a further three degrees of freedom for a graduated dispersion of the particles at certain points and in desired directions. The aim is therefore to ensure that the polymers containing electroconductive tracks have the best possible electrical properties, that is, low resistivity but are still capable of being printed. A comparison between the traditionally used compounds containing graphite and carbon black is made for the first time. This latter is found to be greatly superior both in terms of electrical conductivity and applicability to 3D printing and 6D printing.}, language = {en} } @article{RueckMuellerJobstetal., author = {R{\"u}ck, Thomas and M{\"u}ller, Max and Jobst, Simon and Weigl, Stefan and Pangerl, Jonas and Bierl, Rudolf and Matysik, Frank-Michael}, title = {Digital Twin of a Photoacoustic Trace Gas Sensor for Monitoring Methane in Complex Gas Compositions}, series = {Sensors and Actuators B: Chemical}, journal = {Sensors and Actuators B: Chemical}, number = {378}, doi = {10.1016/j.snb.2022.133119}, abstract = {The digitalization of industrial processes requires smart sensor systems. Photoacoustic spectroscopy is well suited for this purpose as it allows for small-sized and low-cost trace gas analysis. However, the method is susceptible to changes in measurement conditions and standard calibration routines often fail to correct for all changes. We therefore created a Digital Twin (DT) of a photoacoustic trace gas sensor for methane and evaluated it regarding variations in gas composition (CH4, N2, O2, CO2, H2O), temperature and pressure. With a mean absolute percentage error of 0.8 \% the accuracy of the sensor after DT compensation significantly exceeds the 24 \% achieved based on standard calibration in nitrogen. For the first time, we can fully analytically compute the photoacoustic signal under moderate ambient conditions with an error in the ppbV range by taking a holistic approach. Assuming knowledge of the underlying energy transfer processes, the model of this Digital Twin can be adapted to any microphone based photoacoustic sensor for monitoring any analyte species.}, language = {en} } @inproceedings{EilerHoeglLindneretal., author = {Eiler, Julian and H{\"o}gl, Christina and Lindner, Matthias and Bachmann, Michael and Schreiner, Rupert}, title = {Miniaturized Surface Dielectric Barrier Discharge Plasma Actuators for Application in Chemical Analysis Systems}, series = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, booktitle = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, publisher = {IEEE}, isbn = {979-8-3503-0143-4}, doi = {10.1109/IVNC57695.2023.10188884}, pages = {40 -- 42}, abstract = {A new concept for a miniaturized planar ion source based on a surface dielectric barrier discharge (SDBD) is presented. A fabrication method based on a stamping process is described, and the plasma actuators are characterized based on their power in dependence of the applied voltage. The voltage for plasma ignition is approx. 1 kV with a maximum plasma power of 40 W/m at 3,4 kV.}, language = {en} } @article{ZifarelliCantatoreSampaoloetal., author = {Zifarelli, Andrea and Cantatore, Aldo Francesco Pio and Sampaolo, Angelo and Mueller, Max and Rueck, Thomas and Hoelzl, Christine and Rossmadl, Hubert and Patimisco, Pietro and Spagnolo, Vincenzo}, title = {Multivariate analysis and digital twin modelling: Alternative approaches to evaluate molecular relaxation in photoacoustic spectroscopy}, series = {Photoacoustics}, volume = {33}, journal = {Photoacoustics}, publisher = {Elsevier}, issn = {2213-5979}, doi = {10.1016/j.pacs.2023.100564}, abstract = {A comparative analysis of two different approaches developed to deal with molecular relaxation in photoacoustic spectroscopy is here reported. The first method employs a statistical analysis based on partial least squares regression, while the second method relies on the development of a digital twin of the photoacoustic sensor based on the theoretical modelling of the occurring relaxations. Methane detection within a gas matrix of synthetic air with variable humidity level is selected as case study. An interband cascade laser emitting at 3.345 µm is used to target methane absorption features. Two methane concentration ranges are explored targeting different absorptions, one in the order of part-per-million and one in the order of percent, while water vapor absolute concentration was varied from 0.3 \% up to 2 \%. The results achieved employing the detection techniques demonstrated the possibility to efficiently retrieve the target gas concentrations with accuracy > 95 \% even in the case of strong influence of relaxation effects.}, language = {en} } @inproceedings{PangerlWittmannWeigletal., author = {Pangerl, Jonas and Wittmann, Elisabeth and Weigl, Stefan and M{\"u}ller, Max and Bierl, Rudolf and Matysik, Frank-Michael}, title = {Using a Modulated Quantum Cascade Laser for Photoacoustic Spectra Recording of Exhaled Acetone and Main Breath Components}, series = {Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES)}, booktitle = {Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES)}, publisher = {Optica Publishing Group}, doi = {10.1364/AIS.2022.ATu3G.1}, abstract = {Photoacoustic spectra of main breath components together with acetone are presented demonstrating spectral linearity towards different concentrations and compositions. The acetone 3σ detection limit at 1209 cm-1 is 0.28 ppbV}, language = {en} } @inproceedings{BartlBuchnerHausladenetal., author = {Bartl, Mathias and Buchner, Philipp and Hausladen, Matthias and Asgharzadehkhorasani, Ali and Bachmann, Michael and Schreiner, Rupert}, title = {Simulations and Investigations of Silicon Nanowire Field Emitters}, series = {37th International Vacuum Nanoelectronics Conference (IVNC), 15-19 July 2024, Brno, Czech Republic}, booktitle = {37th International Vacuum Nanoelectronics Conference (IVNC), 15-19 July 2024, Brno, Czech Republic}, publisher = {IEEE}, doi = {10.1109/IVNC63480.2024.10652355}, pages = {1 -- 2}, abstract = {The emission behavior of field emission electron sources consisting of a silicon nanowire cathode, an extraction grid electrode and a planar anode was investigated based on a particle tracing simulation using FEM. The focus was on the influence of the grid geometry as well as the positioning of the grid relative to the emitters on the electron transmission. The highest transmission can be achieved with the emitter tips protruding 10 µm trough the extraction grid openings. The transmission decreases more rapidly with increasing distance between the tip and the grid the thicker the grid is.}, language = {en} } @phdthesis{Berndt, author = {Berndt, Dominik}, title = {Thermische Wasserstoffsensoren f{\"u}r den Automobilbereich}, address = {Regensburg}, abstract = {F{\"u}r den sicheren Betrieb eines Brennstoffzellenfahrzeugs sind Sensoren wichtig, welche die Wasserstoffkonzentration im Fahrzeuginterieur kontinuierlich {\"u}berwachen, um m{\"o}glichen Entz{\"u}ndungen bzw. Explosionen vorzubeugen. Daf{\"u}r wurden von verschiedenen nationalen und internationalen Instanzen bestimmte Kriterien definiert, die Wasserstoffsensoren f{\"u}r einen Einsatz in Brennstoffzellenfahrzeugen erf{\"u}llen m{\"u}ssen. Im Jahr 2020gab es noch keinen einzigen kommerziell erh{\"a}ltlichen Sensor, der alle diese Kriterien bedienen konnte. In der vorliegenden Arbeit wurde f{\"u}r zwei verschiedene Sensoren die Eignung des thermischen Wirkprinzips f{\"u}r die Detektion von Wasserstoff im Kontext dieser Sicherheitskriterien untersucht. Dabei wurden mit einem MEMS-Sensor und einem Mikrodrahtsensor zwei vergleichsweise einfache Geometrien herangezogen, welche den eindimensionalen und zylindersymmetrischen Fall abbilden sollen. F{\"u}r zwei dynamische Operationsmodi (gepulste Str{\"o}me und 3ω-Methode) wurden darauf aufbauend analytische Modelle basierend auf vereinfachten Sensorgeometrien entwickelt, um die Temperaturentwicklung des Sensorelements in Abh{\"a}ngigkeit der Zeit zu charakterisieren. Diese Studien wurden anschließend anhand von detaillierteren Modellen mithilfe von FEM-Simulationen erg{\"a}nzt und spezifiziert. Darin konnte gezeigt werden, dass f{\"u}r den gepulsten Betrieb sowohl die Pulsh{\"o}he als auch die Zeitkonstante des gemessenen Widerstands- bzw. Temperaturpulses als Messgr{\"o}ße herangezogen werden kann. Beim 3ω-Betrieb konnte zudem eine starke Frequenzabh{\"a}ngigkeit dieser Widerstands- bzw. Temperaturcharakteristik beobachtet werden. Die analytischen und numerischen Studien wurden anschließend durch experimentelle Ergebnisse best{\"a}tigt. Im Hinblick auf die zuvor definierten Kriterien stellte sich heraus, dass die Auswertung der Zeitkonstante beim gepulsten Betrieb im Hinblick auf Sensitivit{\"a}t und Aufl{\"o}sungsgrenze der Auswertung der Pulsh{\"o}he deutlich unterlegen ist. Beim 3ω-Betrieb k{\"o}nnen durch die hochintegrierte Messumgebung deutlich h{\"o}here Genauigkeiten und Aufl{\"o}sungsgrenzen erzielt werden. F{\"u}r den MEMS-Sensor wurde bei einer Anregungsfrequenz von 1 Hz mit 55 ppm die bislang geringste in der Literatur berichtete Aufl{\"o}sungsgrenze f{\"u}r einen thermischen Wasserstoffsensor erreicht. Der Leistungsverbrauch ist dabei im Vergleich zum Pulsbetrieb entsprechend des jeweiligen Tastgrads leicht bis m{\"a}ßig erh{\"o}ht, die Ansprechzeit wird bei beiden Operationsmodi maßgeblich durch die Sensorgeometrie beeinflusst. Die geometrischen Parameter der jeweiligen Sensoren haben ferner einen starken Einfluss auf die Sensitivit{\"a}t, womit die Divergenz in der Performance von MEMS-Chip und Drahtsensor erkl{\"a}rt werden kann. Es besteht ferner eine starke Temperatur- und Feuchtigkeitsabh{\"a}ngigkeit des Sensorsignals, welches bei beiden Operationsmodi indirekt proportional zur W{\"a}rmeleitf{\"a}higkeit des betrachteten Gasgemischs ist. Die Abh{\"a}ngigkeit vom definierten Umgebungsdruck ist lediglich f{\"u}r die Zeitkonstante relevant, bei der Pulsh{\"o}he besteht keine Druckabh{\"a}ngigkeit. Es konnte eine grunds{\"a}tzliche Eignung des thermischen Messprinzips f{\"u}r den Einsatz eines Wasserstoffsensors im Automobilbereich festgestellt werden. F{\"u}r eine Anwendung m{\"u}ssen allerdings Referenzsensoren f{\"u}r Temperatur, Feuchtigkeit und Druck implementiert werden und eine Kalibrierung in Abh{\"a}ngigkeit dieser Gr{\"o}ßen erfolgen. Der 3ωBetrieb ist aufgrund der h{\"o}heren Genauigkeit zu bevorzugen. W{\"a}hrend der MEMSSensor im Hinblick auf Sensitivit{\"a}t, Ansprechzeit und Leistungsaufnahme gut abschneidet, liegen die Vorteile des Mikrodrahtsensors in seiner Robustheit und der vergleichsweise einfachen Realisierbarkeit}, subject = {Kraftfahrzeugtechnik}, language = {de} } @article{HausladenBuchnerBartletal., author = {Hausladen, Matthias and Buchner, Philipp and Bartl, Mathias and Bachmann, Michael and Schreiner, Rupert}, title = {Integrated multichip field emission electron source fabricated by laser-micromachining and MEMS technology}, series = {Journal of Vacuum Science \& Technology B}, volume = {42}, journal = {Journal of Vacuum Science \& Technology B}, number = {1}, publisher = {AIP Publishing}, doi = {10.1116/6.0003233}, abstract = {In this work, high-current field emission electron source chips were fabricated using laser-micromachining and MEMS technology. The resulting chips were combined with commercially available printed circuit boards (PCBs) to obtain a multichip electron source. By controlling the separate electron sources using an external current control circuit, we were able to divide the desired total current evenly across the individual chips deployed in the PCB-carrier. In consequence, we were able to show a decreased degradation due to the reduced current load per chip. First, a single electron source chip was measured without current regulation. A steady-state emission current of 1 mA with a high stability of ±1.3\% at an extraction voltage of 250 V was observed. At this current level, a mean degradation slope of -0.7 μA/min with a nearly perfect transmission ratio of 99\% ± 0.4\% was determined. The measurements of a fully assembled multichip PCB-carrier electron source, using a current control circuit for regulation, showed that an even distribution of the desired total current led to a decreased degradation. This was determined by the increase in the required extraction voltage over time. For this purpose, two current levels were applied to the electron source chips of the PCB-carrier using an external current control circuit. First, 300 μA total current was evenly distributed among the individual electron source chips followed by the emission of 300 μA per electron source chip. This allows the observation of the influence of a distributed and nondistributed total current, carried by the electron source chips. Thereby, we obtained an increase in the mean degradation slope from +0.011 V/min (300 μA distributed) to +0.239 V/min (300 μA per chip), which is approximately 21 times higher. Moreover, our current control circuit improved the current stability to under 0.1\% for both current levels, 300 μA distributed and 300 μA per chip.}, language = {en} } @article{RemškarJelencCzepurnyietal., author = {Remškar, Maja and Jelenc, Janez and Czepurnyi, Nikolai and Malok, Matjaž and Pirker, Luka and Schreiner, Rupert and H{\"u}ttel, Andreas K.}, title = {Modulations of the work function and morphology of a single MoS2 nanotube by charge injection}, series = {Nanoscale Advances}, journal = {Nanoscale Advances}, publisher = {Royal Society of Chemistry (RSC)}, issn = {2516-0230}, doi = {10.1039/d4na00490f}, abstract = {Both the miniaturization of transistor components and the ongoing investigation of material systems with potential for quantum information processing have significantly increased current interest of researchers in semiconducting inorganic nanotubes. Here we report on an additional outstanding aspect of these nanostructures, namely the intrinsic coupling of electronic and mechanical properties. We observe electronic and morphology changes in a single MoS2 nanotube, exposed to charge injections by means of an atomic-force-microscopy tip. An elliptic deformation of the nanotube and helical twisting of the nanotube are visible, consistent with the reverse piezoelectric effect. Work-function changes are found to be dependent on the polarity of the injected carriers. An unexpected long-term persistence of the shape deformations is observed and explained with accumulation of structural defects and the resultant strain, which could cause a memory-like charge confinement and a long lasting modulation of the work function.}, language = {en} } @book{Galka, author = {Galka, Stefan}, title = {AutoStore - was Nutzer {\"u}ber das System berichten k{\"o}nnen}, address = {Regensburg}, isbn = {978-3-9818209-9-7}, doi = {10.35096/othr/pub-646}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-6463}, publisher = {Ostbayerische Technische Hochschule Regensburg}, subject = {Kleinteil}, language = {de} } @inproceedings{EscherRueckJobstetal., author = {Escher, Lukas and R{\"u}ck, Thomas and Jobst, Simon and K{\"o}nig, Martin and Bierl, Rudolf}, title = {Design and Characterization of a Low-Cost Photoacoustic Sensor for NO2 Using Lateral Illumination and Background Suppression}, series = {Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP): 11-15 July 2022, Vancouver, British Columbia, Canada}, booktitle = {Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP): 11-15 July 2022, Vancouver, British Columbia, Canada}, publisher = {Optica Publishing Group}, isbn = {978-1-957171-09-8}, doi = {10.1364/3D.2022.JTu2A.10}, abstract = {We introduce a low-cost photoacoustic NO2 sensor based on lateral LED illumination and optical background signal compensation. The 3σ limit of detection (LOD) was identified to be 24 ppbV.}, language = {en} } @unpublished{PangerlSukulRuecketal., author = {Pangerl, Jonas and Sukul, Pritam and R{\"u}ck, Thomas and Escher, Lukas and Miekisch, Wolfram and Bierl, Rudolf and Matysik, Frank-Michael}, title = {Photoacoustic Trace-Analysis of Breath Isoprene and Acetone Via Interband- and Quantum Cascade Lasers}, publisher = {Elsevier / SSRN}, doi = {10.2139/ssrn.4834735}, abstract = {This research presents two laser-based photoacoustic approaches for analyzing exhaled breath isoprene and acetone. The integration of a PTR-ToF-MS as a reference device ensured the reliability and accuracy of the PAS systems that is based on an ICL for isoprene and a QCL for acetone detection. The calibration yielded limits of detection of 26.9 ppbV and 1.7 ppbV, respectively, and corresponding normalized noise equivalent absorption coefficients (NNEAs) of 5.0E-9 Wcm-1Hz-0.5 and 4.9E-9 Wcm-1Hz-0.5. Laboratory as well as real breath sample measurements from alveolar breath revealed a robust system performance, with only one outlier within the static isoprene measurements. However, discrepancies emerged under dynamic breath sampling conditions, emphasizing the need for further optimization. Especially by knowing the dynamic nature and endogenous origin of exhaled isoprene our findings highlight the potential of breath analysis for non-invasive physio-metabolic and pathophysiological monitoring towards point-of-care devices.}, language = {en} } @article{PangerlSukulRuecketal., author = {Pangerl, Jonas and Sukul, Pritam and R{\"u}ck, Thomas and Escher, Lukas and Miekisch, Wolfram and Bierl, Rudolf and Matysik, Frank-Michael}, title = {Photoacoustic trace-analysis of breath isoprene and acetone via interband- and Quantum Cascade Lasers}, series = {Sensors and Actuators: B. Chemical}, volume = {424}, journal = {Sensors and Actuators: B. Chemical}, publisher = {Elsevier}, doi = {10.1016/j.snb.2024.136886}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-77024}, pages = {12}, abstract = {This research presents two laser-based photoacoustic approaches for analyzing exhaled breath isoprene and acetone. The integration of a PTR-ToF-MS as a reference device ensured the reliability and accuracy of the photoacoustic systems that is based on an ICL for isoprene and a QCL for acetone detection. The calibration yielded limits of detection of 26.9 ppbV and 1.7 ppbV, respectively, and corresponding normalized noise equivalent absorption coefficients (NNEAs) of 5.0E-9 Wcm 1Hz 0.5 and 4.9E-9 Wcm 1Hz 0.5. Laboratory as well as real breath sample measurements from alveolar breath revealed a robust system performance, with only one outlier within the static isoprene measurements. However, discrepancies emerged under dynamic breath sampling conditions, emphasizing the need for further optimization. Especially by knowing the dynamic nature and endogenous origin of exhaled isoprene our findings highlight the potential of breath analysis for non-invasive physio-metabolic and pathophysiological monitoring towards point-of-care devices}, language = {en} } @misc{EsperNosterSchultheissetal., author = {Esper, Lukas and Noster, Ulf and Schultheiss, Ulrich and Bund, Andreas}, title = {Quasi-in-Situ Analysis of Electropolished Additively Manufactured Stainless Steel Surfaces}, series = {ECS Meeting Abstracts, F01: Advances in Industrial Electrochemistry and Electrochemical Engineering}, volume = {MA2023-02}, journal = {ECS Meeting Abstracts, F01: Advances in Industrial Electrochemistry and Electrochemical Engineering}, publisher = {The Electrochemical Society}, issn = {2151-2043}, doi = {10.1149/MA2023-02241342mtgabs}, pages = {1342 -- 1342}, abstract = {Progress in additive manufacturing is leading to the emergence of new areas of application. Laser Powder Bed Fusion (L-PBF) is increasingly used for the development of metallic medical implants, but for high-risk implants like vascular support structures (stents), surface quality is critical to ensure successful implantation without harming the surrounding tissue and ensure the patients' health. Therefore, enhancing the surface quality is crucial. Electropolishing is a method for removing surface roughness by smoothing out micro-peaks and valleys. However, L-PBF structures have a high surface roughness due to metal particles adhering on the surface. To achieve a smooth surface for additively manufactured implants like stents using electropolishing, the removal of these particles needs to be studied in more detail. The objective of this study is to examine the electropolishing mechanism of 316L stainless steel samples additively manufactured through Laser Powder Bed Fusion (L-PBF). The main objective is to investigate the removal properties and surface characteristics during electropolishing. To achieve this, various surfaces were characterized for morphology and roughness during Hull cell experiments. Markings are utilized on the Hull cell sample surfaces to identify points of interest during quasi-in-situ measurements. The surfaces are then analyzed after multiple time steps, applying different currents to investigate particle dissolution. The surface characteristics are analyzed through scanning electron microscopy, and surface roughness is analyzed using laser scanning microscopy. The results show that the electropolishing process preferentially removes the adhering particles present on the surface of the samples. Increasing the current density results in faster particle dissolution and a smoother surface (see Figure 1a and b). The mechanism of material removal of various surface features, as shown in Figure 1 (red circle, yellow arrow and red square), was assessed based on the experimental results of the surface structures seen on the SEM images. It was found that different surface features were removed during the experiment at different polishing times and current densities. The amount of charge flowed was found to correlate with surface morphology. Based on the obtained results, various surface features (such as large adherent particles, agglomerates of smaller particles, and valleys) and their changes with increasing test duration and current density were observed by quasi-in situ analyses. A reduction in the diameter of round particles adhering to the surface was observed at both low and higher current densities (see Figure 1a red circle a). Increasing the polishing time resulted in leveling of both large particles and valleys (see Figure 1b red square). Also, dissolution of agglomerates of smaller particles occurred at different polishing times as a function of current density and polishing time (see Figure 1a yellow arrow) are observed. Smoothed surface structures can be observed in regions with equivalent surface charge density (see Figure 2). As a result, comparable surface morphologies may appear at the same area charge density, irrespective of a specific current density. So, it may be adequate to only consider the amount of charge flowed to describe the electropolishing of additive materials. In conclusion, comprehending the dissolution characteristics of particles on L-PBF surfaces is essential for attaining satisfactory surface finish in electropolishing. The results of this study offer valuable perspectives into the electropolishing mechanism of additively manufactured 316L stainless steel and can guide future investigations on surface finishing and polishing of additive manufactured implants like stents. Figure 1}, language = {en} } @inproceedings{EscherMuellerRuecketal., author = {Escher, Lukas and M{\"u}ller, Max and R{\"u}ck, Thomas and Jobst, Simon and Bierl, Rudolf}, title = {Digitaler Zwilling photoakustischer Spurengassensoren zur Prozess{\"u}berwachung}, series = {16. Dresdner Sensor-Symposium 2022: Vortr{\"a}ge}, booktitle = {16. Dresdner Sensor-Symposium 2022: Vortr{\"a}ge}, publisher = {AMA (Association for Sensors + Measurement)}, isbn = {978-3-9819376-7-1}, doi = {10.5162/16dss2022/3.3}, abstract = {Stickstoffdioxid (NO2) wird haupts{\"a}chlich durch anthropogene Verbrennungsprozesse in Verkehr und Industrie in die Umgebungsluft eingebracht [1]. Die stark reaktive, oxidative Wirkung von NO2 kann bei Exposition mit h{\"o}heren Konzentrationen Reizungen und allergische Reaktionen in den Atemwegen hervorrufen. Weiter f{\"u}hrt NO2 zur Bildung von saurem Regen, Smog und Ozon (O3) die sich ebenso negativ auf die menschliche Gesundheit und Umwelt auswirken [2,3]. Aufgrund dieser Effekte wird die Spurengaskonzentration von NO2 in der Luft in Deutschland an ausgew{\"a}hlten, verkehrsreichen Orten gemessen.}, language = {de} } @article{RueckPangerlEscheretal., author = {R{\"u}ck, Thomas and Pangerl, Jonas and Escher, Lukas and Jobst, Simon and M{\"u}ller, Max and Bierl, Rudolf and Matysik, Frank-Michael}, title = {Kinetic cooling in mid-infrared methane photoacoustic spectroscopy: A quantitative analysis via digital twin verification}, series = {Photoacoustics}, volume = {40}, journal = {Photoacoustics}, publisher = {Elsevier}, doi = {10.1016/j.pacs.2024.100652}, abstract = {This study presents a detailed quantitative analysis of kinetic cooling in methane photoacoustic spectroscopy, leveraging the capabilities of a digital twin model. Using a quantum cascade laser tuned to 1210.01 cm⁻¹, we investigated the effects of varying nitrogen-oxygen matrix compositions on the photoacoustic signals of 15 ppmV methane. Notably, the photoacoustic signal amplitude decreased with increasing oxygen concentration, even falling below the background signal at oxygen levels higher than approximately 6 \%V. This phenomenon was attributed to kinetic cooling, where thermal energy is extracted from the surrounding gas molecules rather than added, as validated by complex vector analysis using a previously published digital twin model. The model accurately reproduced complex signal patterns through simulations, providing insights into the underlying molecular mechanisms by quantifying individual collision contributions. These findings underscore the importance of digital twins in understanding the fundamentals of photoacoustic signal generation at the molecular level.}, language = {en} } @article{JobstRecumEcijaArenasetal.2023, author = {Jobst, Simon and Recum, Patrick and {\´E}cija-Arenas, {\´A}ngela and Moser, Elisabeth and Bierl, Rudolf and Hirsch, Thomas}, title = {Semi-Selective Array for the Classification of Purines with Surface Plasmon Resonance Imaging and Deep Learning Data Analysis}, series = {ACS sensors}, volume = {8}, journal = {ACS sensors}, number = {9}, publisher = {American Chemical Society}, doi = {10.1021/acssensors.3c01114}, pages = {3530 -- 3537}, year = {2023}, abstract = {In process analytics or environmental monitoring, the real-time recording of the composition of complex samples over a long period of time presents a great challenge. Promising solutions are label-free techniques such as surface plasmon resonance (SPR) spectroscopy. They are, however, often limited due to poor reversibility of analyte binding. In this work, we introduce how SPR imaging in combination with a semi-selective functional surface and smart data analysis can identify small and chemically similar molecules. Our sensor uses individual functional spots made from different ratios of graphene oxide and reduced graphene oxide, which generate a unique signal pattern depending on the analyte due to different binding affinities. These patterns allow four purine bases to be distinguished after classification using a convolutional neural network (CNN) at concentrations as low as 50 μM. The validation and test set classification accuracies were constant across multiple measurements on multiple sensors using a standard CNN, which promises to serve as a future method for developing online sensors in complex mixtures.}, language = {en} } @inproceedings{HauslerWunderlichFischeretal., author = {Hausler, Peter and Wunderlich, Lukas and Fischer, Johannes and Pfab, Christina and Heckscher, Simon and Hirsch, Thomas and Bierl, Rudolf}, title = {Surface plasmon resonance imaging for detection of drug metabolites in water}, series = {Proceedings of SPIE, Optical Sensors 2019, 1 - 4 April 2019, Prague, Czech Republic}, volume = {Vol. 11028}, booktitle = {Proceedings of SPIE, Optical Sensors 2019, 1 - 4 April 2019, Prague, Czech Republic}, issn = {0277-786X}, doi = {10.1117/12.2522324}, pages = {11}, abstract = {The analysis of surface water, groundwater, drinking water as well as sewage is important to get information about the contamination of the water cycle. Currently, these time-consuming investigations require special equipment, like for example hyphenated mass spectrometry. Surface plasmon resonance (SPR) is a faster alternative as it is highly sensitive to changes in the dielectric medium next to a thin metal layer and makes it a quasi-universal detector. Therefore, and due to the labelfree nature, SPR is a widely used sensing tool for real-time monitoring of molecular interactions of various analytes. SPR imaging (SPRi) has several advantages to standard surface plasmon resonance, as it allows to observe many analytes in parallel as well as the integration of referencing technologies. However, the homogenous illumination of a large area (several millimeters) with a small light source is challenging and demands new approaches. Allopurinol, a drug used to lower the blood concentration of urate and hence decrease the affection of gout, gets metabolized to oxipurinol in the body and dropped out almost entirely by urinary excretion. After wastewater treatment, concentrations of oxipurinol up to 21.7 μg•L-1 are detected. Further tracking of oxipurinol in the urban water cycle showed its presence in rivers and streams or even in groundwater. Therefore, the high biological stability of oxipurinol allows this molecule to be used as a marker for domestic wastewater in the environment. For the detection of oxipurinol by SPR graphene was used as receptive layer, as the analyte can bind via π-stacking to this surface. An SPRi technique was developed and compared to conventional SPR system for the detection of oxipurinol.}, language = {en} } @inproceedings{HauslerRothAumeretal., author = {Hausler, Peter and Roth, Carina and Aumer, F. and Vitzthumecker, Thomas and Genslein, Christa and Hirsch, Thomas and Bierl, Rudolf}, title = {Miniaturisiertes Sensorsystem zur Oberfl{\"a}chenplasmonenresonanzspektroskopie}, series = {118. Jahrestagung der deutschen Gesellschaft f{\"u}r angewandte Optik (DGaO), 6.-10. Juni 2017, Dresden}, booktitle = {118. Jahrestagung der deutschen Gesellschaft f{\"u}r angewandte Optik (DGaO), 6.-10. Juni 2017, Dresden}, abstract = {Die Oberfl{\"a}chenplasmonenresonanzspektroskopie (SPR) wird aufgrund ihrer Vorz{\"u}ge der zerst{\"o}rungs- und markierungsfreien Messung, sowie der hohen Sensitivit{\"a}t sehr erfolgreich im Labormaßstab eingesetzt. Aufgrund der hohen Kosten geschieht dies bislang haupts{\"a}chlich in der Bioanalytik und dem Wirkstoffscreening. Gezeigt wird ein Ansatz, mit dem diese Technologie auf ein ultrakompaktes, kosteng{\"u}nstiges Sensorsystem {\"u}bertragen wird, welches in der Lage ist, hoch-sensitiv {\"A}nderungen im Brechungsindex von 10-6 Einheiten (RIU) zu detektieren. F{\"u}r Wasser bewirkt eine Temperaturschwankung von 1 K bereits eine {\"A}nderung von 1 mRIU. Daher wird durch ein integriertes Referenzsystem, sowie die Miniaturisierung erreicht, dass das System gegen{\"u}ber Temperaturschwankungen, weitestgehend stabil ist. In dem MOEMS wird anstatt der konventionellen 1-Punkt bzw. 2-Punkt Messung ein bildgebendes Verfahren angewendet. Die Sensorfl{\"a}che von 15 x 15 mm wird dabei mit einem handels{\"u}blichen 4 Mio. Pixel CMOS Sensor ausgewertet. Um verl{\"a}ssliche Datenpunkte zu erhalten ben{\"o}tigt man eine Fl{\"a}che von 10 x 10 Pixel. Demzufolge k{\"o}nnen auf dem Sensor theoretisch bis zu 40.000 Sensorspots parallel ausgewertet werden.}, language = {de} } @inproceedings{HauslerGensleinRothetal., author = {Hausler, Peter and Genslein, Christa and Roth, Carina and Vitzthumecker, Thomas and Hirsch, Thomas and Bierl, Rudolf}, title = {Miniaturized Surface Plasmon Resonance based Sensor System}, series = {Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS, Funchal, Madeira, Portugal}, booktitle = {Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS, Funchal, Madeira, Portugal}, publisher = {SciTePress}, isbn = {978-989-758-286-8}, doi = {10.5220/0006555400630066}, pages = {63 -- 66}, abstract = {We describe the miniaturization of the Surface Plasmon Resonance (SPR) technology which mainly finds its applications in pharmaceutical screening and biotechnology so far. SPR spectroscopy is a label-free, non-destructive and highly sensitive measurement principle detecting changes in the refractive index in striking distance to a gold surface. A transfer of this technology to a miniaturized sensor will broaden the range of possible applications. A promising feature which is included in the miniaturized system is the angle-dependent recording of the SPR signals without moving parts. Commercial SPR assays are mainly working with a small number of sensing spots. In contrast, the SPR imaging system shown here will allow to use an array of many sensing spots. In combination with chemical receptors designed as an artificial nose, the simultaneous detection of many analytes is envisioned for future applications.}, language = {en} } @article{GensleinHauslerKirchneretal., author = {Genslein, Christa and Hausler, Peter and Kirchner, Eva-Maria and Bierl, Rudolf and Baeumner, Antje J. and Hirsch, Thomas}, title = {Graphene-enhanced plasmonic nanohole arrays for environmental sensing in aqueous samples}, series = {Beilstein Journal of Nanotechnology}, journal = {Beilstein Journal of Nanotechnology}, number = {7}, doi = {10.3762/bjnano.7.150}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:355-epub-398623}, pages = {1564 -- 1573}, abstract = {The label-free nature of surface plasmon resonance techniques (SPR) enables a fast, specific, and sensitive analysis of molecular interactions. However, detection of highly diluted concentrations and small molecules is still challenging. It is shown here that in contrast to continuous gold films, gold nanohole arrays can significantly improve the performance of SPR devices in angle-dependent measurement mode, as a signal amplification arises from localized surface plasmons at the nanostructures. This leads consequently to an increased sensing capability of molecules bound to the nanohole array surface. Furthermore, a reduced graphene oxide (rGO) sensor surface was layered over the nanohole array. Reduced graphene oxide is a 2D nanomaterial consisting of sp2-hybridized carbon atoms and is an attractive receptor surface for SPR as it omits any bulk phase and therefore allows fast response times. In fact, it was found that nanohole arrays demonstrated a higher shift in the resonance angle of 250-380\% compared to a continuous gold film. At the same time the nanohole array structure as characterized by its diameter-to-periodicity ratio had minimal influence on the binding capacity of the sensor surface. As a simple and environmentally highly relevant model, binding of the plasticizer diethyl phthalate (DEP) via π-stacking was monitored on the rGO gold nanohole array realizing a limit of detection of as low as 20 nM. The concentration-dependent signal change was studied with the best performing rGO-modified nanohole arrays. Compared to continuous gold films a diameter-to-periodicity ratio (D/P) of 0.43 lead to a 12-fold signal enhancement. Finally, the effect of environmental waters on the sensor was evaluated using samples from sea, lake and river waters spiked with analytically relevant amounts of DEP during which significant changes in the SPR signal are observed. It is expected that this concept can be successfully transferred to enhance the sensitivity in SPR sensors.}, language = {en} } @inproceedings{HauslerGensleinRothetal., author = {Hausler, Peter and Genslein, Christa and Roth, Carina and Hirsch, Thomas and Bierl, Rudolf}, title = {Mikro-Opto-Elektro-Mechanisches Sensorsystem zur Oberfl{\"a}chenplasmonenresonanzspektroskopie}, series = {MikroSystemTechnik Kongress 2017 : MEMS, Mikroelektronik, Systeme 23.-25. Oktober 2017 in M{\"u}nchen}, booktitle = {MikroSystemTechnik Kongress 2017 : MEMS, Mikroelektronik, Systeme 23.-25. Oktober 2017 in M{\"u}nchen}, number = {CD-ROM}, publisher = {VDE-Verlag}, address = {Berlin}, isbn = {978-3-8007-4491-6}, pages = {645 -- 647}, abstract = {Gezeigt wird die Miniaturisierung eines Messsystems f{\"u}r Oberfl{\"a}chenplasmonenresonanzspektroskopie (SPR), einer markierungs-, sowie zerst{\"o}rungsfreien als auch hoch sensitiven Technologie. Aufgrund der hohen Kosten klassischer SPR-Ger{\"a}te wird sie bisher jedoch vornehmlich in der Bio- und Medizintechnik eingesetzt. Das Messprinzip erm{\"o}glicht die Erfassung von Brechungsindex{\"a}nderungen nahe einer Oberfl{\"a}che. Der Transfer dieser Technologie von Laborger{\"a}ten hin zu einem miniaturisierten Sensorsystem senkt die Kosten, macht das System robuster und erm{\"o}glicht so ein wesentlich breiteres Anwendungsspektrum. Ein sehr vielversprechendes Merkmal des hier vorgestellten Systems ist die M{\"o}glichkeit den SPR-Effekt winkelabh{\"a}ngig zur Lichtquelle ohne bewegliche Bauteile zu verfolgen. The miniaturization of Surface Plasmon Resonance (SPR) technology, which mainly finds its applications in pharmaceutical screening and biotechnology so far, is described. SPR spectroscopy is a label-free, non destructive and highly sensitive measurement principle which is capable of detecting changes in the refractive index in striking distance to a gold surface. A transfer of this technology to a miniaturized sensor will broaden the range of possible applications. A promising feature which is included in the miniaturized system is the angle-dependent recording of the SPR signals without moving parts.}, language = {de} } @inproceedings{GensleinHauserKirchneretal., author = {Genslein, Christa and Hauser, Peter and Kirchner, Eva-Maria and Bierl, Rudolf and Baeumner, Antje J. and Hirsch, Thomas}, title = {Detection of small molecules with surface plasmon resonance by synergistic plasmonic effects of nanostructured surfaces and graphene}, series = {SPIE Proceedings, Plasmonics in Biology and Medicine XIV, 2017, San Francisco, California}, volume = {10080}, booktitle = {SPIE Proceedings, Plasmonics in Biology and Medicine XIV, 2017, San Francisco, California}, number = {1008001F}, doi = {10.1117/12.2252256}, abstract = {Surface plasmon resonance depends on the dielectric medium at the vicinity and makes it a quasi-universal detector. Therefore, and due to the label-free nature, SPR is a widely used sensing tool for real-time monitoring molecular interactions of various analytes. However, detection of highly diluted analytes and small molecules (< 400 Da) is still challenging. Gold nanohole arrays provide plasmonic hotspots with improved surface sensitivity and 2D carbon nanomaterials enable binding near the surface. Both effects together are promising in the development of SPR sensors for the efficient determination of small molecules. Graphene is known for efficient binding of molecules with delocalized aromatic π-systems. Additionally, the electromagnetic field is locally enhanced and modulated by the interaction of graphene photonics with the plasmonics of metal nanostructures. The advantages of chemical vapor deposition (CVD) graphene over reduced graphene oxide (rGO) is illustrated by a proof of concept study. In comparison to substrates consisting of a continuous film the surface sensitivity is enhanced for a nanohole arrays and further improved for CVD graphene functionalization in contrast to rGO. The feasibility of the sensor was demonstrated for the detection of adenine down to a concentration of 0.9 μM.}, language = {en} } @inproceedings{HauslerHollerHirschetal., author = {Hausler, Peter and Holler, Sven and Hirsch, Thomas and Bierl, Rudolf}, title = {High integrated miniaturized sensor based on Surface Plasmon Resonance}, series = {International Biosensor Conference, 11th Workshop on Biosensors \& Bioanalytical Microtechniques in Environmental, Food \& Clinical Analysis, BBMEC 11, 26.-30. September 2015, Regensburg, Germany}, booktitle = {International Biosensor Conference, 11th Workshop on Biosensors \& Bioanalytical Microtechniques in Environmental, Food \& Clinical Analysis, BBMEC 11, 26.-30. September 2015, Regensburg, Germany}, language = {en} } @inproceedings{HauslerHollerHirschetal., author = {Hausler, Peter and Holler, Sven and Hirsch, Thomas and Bierl, Rudolf}, title = {Miniaturisierte Oberfl{\"a}chenplasmonenresonanz Sensorplattform}, series = {MEMS, Mikroelektronik, Systeme, MikroSystemTechnik Kongress 2015, 26.- 28. Oktober 2015, Karlsruhe, proceedings}, booktitle = {MEMS, Mikroelektronik, Systeme, MikroSystemTechnik Kongress 2015, 26.- 28. Oktober 2015, Karlsruhe, proceedings}, publisher = {VDE Verlag}, address = {Berlin}, isbn = {978-3-8007-4100-7}, language = {de} } @article{KnoerzerHillerBrandtetal., author = {Kn{\"o}rzer, S. and Hiller, Karl-Anton and Brandt, M. and Niklas, Andreas and Putzger, J{\"u}rgen and Monkman, Gareth J. and Danilov, Sergey N. and Ganichev, Sergey D. and Schulz, Irene and Schmalz, Gottfried}, title = {Detection of pulsed blood flow through a molar pulp chamber and surrounding tissue in vitro}, series = {Journal of Clinical Oral Investigations}, volume = {23}, journal = {Journal of Clinical Oral Investigations}, number = {3}, publisher = {Springer Nature}, doi = {10.1007/s00784-018-2530-y}, pages = {1121 -- 1132}, abstract = {OBJECTIVES Due to severe limitations of dental pulp sensitivity tests, the direct recording of pulsed blood flow, using photoplethysmography (PPG), has been proposed. In vivo evaluation is methodologically difficult and in vitro models have hitherto been adversely influenced by shortcomings in emulating the in vivo situation. Consequently, the aim of this study was to test an improved data acquisition system and to use this configuration for recording pulsed blood in a new model. MATERIALS AND METHODS We introduced a PPG signal detection system by recording signals under different blood flow conditions at two wavelengths (625 and 940 nm). Pulsed blood flow signals were measured using an in vitro model, containing a molar with a glass pulp and a resin socket, which closely resembled in vivo conditions with regard to volumetric blood flow, pulp anatomy, and surrounding tissue. RESULTS The detection system showed improved signal strength without stronger blanketing of noise. On the tooth surface, it was possible to detect signals emanating from pulsed blood flow from the glass pulp and from surrounding tissue at 625 nm. At 940 nm, pulp derived signals were recorded, without interference signals from surrounding tissue. CONCLUSION The PPG-based method has the potential to detect pulsed blood flow in small volumes in the pulp and (at 625 nm) also in adjacent tissues. CLINICAL RELEVANCE The results show the need for clear differentiation of the spatial origins of blood flow signals of any vitality test method to be applied to teeth.}, language = {en} } @article{ZimmermannBoehmBeckerTIetal., author = {Zimmermann, Klaus and B{\"o}hm, Valter and Becker T.I., and Chavez Vega, Jhohan Harvey and Kaufhold, Tobias and Monkman, Gareth J. and Sindersberger, Dirk and Diermeier, Andreas and Prem, Nina}, title = {Mechanical Characterization of the Field-Dependent Properties of Magnetoactive Polymers and Integrated Electrets for their Application in Soft Robotics}, series = {International Scientific Journal "Problems of Mechanics"}, volume = {69}, journal = {International Scientific Journal "Problems of Mechanics"}, number = {4}, issn = {1512-0740}, language = {en} } @inproceedings{KrysztofUrbańskiGrzebyketal., author = {Krysztof, Michał and Urbański, Paweł and Grzebyk, Tomasz and Hausladen, Matthias and Schreiner, Rupert}, title = {MEMS X-Ray Source: Electron Emitter Development}, series = {2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS): 12-15 Dec. 2022, Salt Lake City, UT, USA}, booktitle = {2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS): 12-15 Dec. 2022, Salt Lake City, UT, USA}, publisher = {IEEE}, doi = {10.1109/PowerMEMS56853.2022.10007563}, pages = {248 -- 251}, abstract = {The article presents a fabrication process and characterization of silicon emitters designed for MEMS X-ray source. The emitters, made of p-type and n-type silicon, were prepared by a modified laser micromachining process. Both types of emitters worked without any carbon nanotube coverage, which was the case in the previous realization of electron emitters. The p-type emitter gave smaller electron beam currents (<50 nA) with stable emission in a saturation region. The n-type emitter provides higher emission currents (>1 µA) not limited by saturation region, but with higher fluctuations. The final choice of emitter will be adjusted for different applications.}, language = {en} } @article{WeberFrommeldGerhardsetal., author = {Weber, Karsten and Frommeld, Debora and Gerhards, Helene and Krug, Henriette and Kokott, Linda Ellen and Bittner, Uta}, title = {Speaking about enhancement - methodological issues and historical examples}, series = {American Journal of Bioethics Neuroscience}, volume = {11}, journal = {American Journal of Bioethics Neuroscience}, number = {4}, doi = {10.1080/21507740.2020.1831650}, pages = {254 -- 256}, language = {en} } @article{PrommesbergerBachmannDuesbergetal., author = {Prommesberger, Christian and Bachmann, Michael and D{\"u}sberg, Felix and Langer, Christoph and Ławrowski, Robert Damian and Hofmann, Martin and Pahlke, Andreas and Schreiner, Rupert}, title = {Regulation of the Transmitted Electron Flux in a Field-Emission Electron Source Demonstrated on Si Nanowhisker Cathodes}, series = {IEEE Transactions on Electron Devices}, volume = {64}, journal = {IEEE Transactions on Electron Devices}, number = {12}, publisher = {IEEE}, issn = {5128-5133}, doi = {10.1109/TED.2017.2763239}, abstract = {We report on a method to stabilize the transmitted electron flux in a field-emission electron source using an external regulation circuit. The electron source was realized with an array of silicon (Si) nanowhiskers on the top of elongated pillar structures, a mica spacer, and an extraction grid made of Si. As for most applications, the emitted electron current from the cathode is not as crucial as the transmitted electron flux through the extraction grid toward the anode. We investigated a method which allows the regulation directly by the emitted electron flux and not merely on the cathode current. By using this method, we were able to stabilize the emitted electron flux of our electron source down to values below 1\%. Simultaneously, it was shown that there is the possibility to stabilize the influencing value in the real application as well. The effectiveness of this method was demonstrated successfully with an X-ray source setup. The measured X-ray photon count rate was stabilized to a standard deviation of 0.30\% at a pressure of 1 × 10 -7 mbar. Even in harsh environment of 2 × 10 -5 mbar, a stabilization of the X-ray photon count rate down to a value of 0.63\% was achieved.}, language = {en} } @article{BreuerBachmannDuesbergetal., author = {Breuer, Janis and Bachmann, Michael and D{\"u}sberg, Felix and Pahlke, Andreas and Edler, Simon and Langer, Christoph and Prommesberger, Christian and Ławrowski, Robert Damian and Schreiner, Rupert and Serbun, Pavel and L{\"u}tzenkirchen-Hecht, Dirk}, title = {Extraction of the current distribution out of saturated integral measurement data of p-type silicon field emitter arrays}, series = {Journal of Vacuum Science and Technology B}, volume = {36}, journal = {Journal of Vacuum Science and Technology B}, number = {5}, publisher = {AIP Publishing}, doi = {10.1116/1.5035189}, abstract = {At the moment, only complicated techniques are known for the determination of array properties of field emitter arrays such as the number of active tips, the current distribution, or the individual tip radii. In this work, a method for extracting these parameters from integral measurement data is presented. A model describing the characteristics of a single emitter, including the saturation as a function of the applied voltage and the emitter radius, is developed. It is shown that experimental data of field emitter arrays can be represented as the sum of these functions and the characteristic parameters can be fitted to field emission data of an array. Using this method, the values of the radii as well as the parameters of distribution models can be determined directly. Analysis of experimental data from p-type Si emitter arrays shows that only 1-2\% of the tips contribute significantly.}, language = {en} } @article{EdlerBachmannBreueretal., author = {Edler, Simon and Bachmann, Michael and Breuer, Janis and Dams, Florian and D{\"u}sberg, Felix and Hofmann, Martin and Jakšič, Jasna and Pahlke, Andreas and Langer, Christoph and Ławrowski, Robert Damian and Prommesberger, Christian and Schreiner, Rupert}, title = {Influence of adsorbates on the performance of a field emitter array in a high voltage triode setup}, series = {Journal of Applied Physics}, volume = {122}, journal = {Journal of Applied Physics}, doi = {10.1063/1.4987134}, abstract = {In the present work, black-silicon field emitter arrays (FEAs) are investigated regarding the influence of residual gas pressure on the characteristics and lifetime in the high voltage triode setup. Current-voltage-characteristics at different pressure levels are recorded and show a decreasing emission current with rising pressure. This decrease can be explained by an increase of the work function and charging of the emitter surface caused by adsorbates. The emission current can be restored to its initial value by heating of the FEA up to 110 °C during active emission. With this regeneration procedure, an extended lifetime from about 20 h to 440 h at a residual gas pressure of 10-5 mbar is achieved.}, language = {en} } @article{BachmannDamsDuesbergetal., author = {Bachmann, Michael and Dams, Florian and D{\"u}sberg, Felix and Hofmann, Martin and Pahlke, Andreas and Langer, Christoph and Ławrowski, Robert Damian and Prommesberger, Christian and Schreiner, Rupert and Serbun, Pavel and L{\"u}tzenkirchen-Hecht, Dirk and M{\"u}ller, G{\"u}nter}, title = {Extraction of the characteristics of current-limiting elements from field emission measurement data}, series = {Journal of Vacuum Science \& Technology B}, volume = {35}, journal = {Journal of Vacuum Science \& Technology B}, number = {2}, doi = {10.1116/1.4971768}, abstract = {In this contribution, the authors will present an algorithm to extract the characteristics of nonideal field emission circuit elements from saturation-limited field emission measurement data. The method for calculating the voltage drop on current-limiting circuit elements is based on circuit theory as well as Newton's method. Since the only assumption the authors make on the current-limiting circuit is a connection in series, this method is applicable to most field emission data showing saturation. To be able to determine the significance of any parameter output, the uncertainties of data and extracted parameters as well as the parameter correlations are fully taken into account throughout the algorithm. N-type silicon samples with varying external serial resistors are analyzed. All results show a good agreement to the nominal resistor values. Additionally, several p-type samples are analyzed, showing a diodelike behavior. The extracted current-limiting characteristics of the p-type samples are in good agreement with a pn-junction model. The stability of the emission current of the p-type samples is measured by constant voltage measurements and compared to the extracted current-limiting characteristics. The application of the algorithm to measurement data shows that the given algorithm is a valuable tool to analyze field emission measurement data influenced by nonemissive processes.}, language = {en} } @inproceedings{LangerHausladenPrommesbergeretal., author = {Langer, Christoph and Hausladen, Matthias and Prommesberger, Christian and Ławrowski, Robert Damian and Bachmann, Michael and D{\"u}sberg, Felix and Pahlke, Andreas and Shamonin (Chamonine), Mikhail and Schreiner, Rupert}, title = {Field emission current investigation of p-type and metallized silicon emitters in the frequency domain}, series = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, booktitle = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, publisher = {IEEE}, doi = {10.1109/IVNC.2018.8520127}, pages = {1-2}, abstract = {We investigated two different field emitter arrays consisting of 10×10 p-type and 10×10 undoped Au-coated high aspect ratio silicon tips. The I-V characterization of the p-type sample showed a pronounced saturation for voltages higher than 500 V and a maximum emission current of 39 nA. The metallized sample revealed a FN-like emission up to several μA. The metallized and the p-type sample operating below the saturation region showed high current fluctuations of ±16\%. Whereas, the metallized sample with current regulation and the p-type sample in the saturation yielded a current stability of ±0.4\% and ±0.3\%, respectively. Investigations in the frequency domain revealed the for field emission typical 1/f-noise. By operating in the saturation region (p-type sample) or using an emission current regulation (metallized sample) the noise level was reduced by at least 20 dB. Finally, the p-type sample was illuminated by a light emitting diode to increase and modulate the emission current in the saturation region. The emission current was increased by a factor of 3.7 to 145 nA. With this configuration we emulated an unstable emission behavior and evaluated the performance of our emission current regulation circuit.}, language = {en} } @article{PrommesbergerLangerŁawrowskietal., author = {Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {Investigations on the long-term performance of gated p-type silicon tip arrays with reproducible and stable field emission behavior}, series = {Journal of Vacuum Science \& Technology B}, volume = {35}, journal = {Journal of Vacuum Science \& Technology B}, number = {1}, doi = {10.1116/1.4972519}, abstract = {The authors report on the fabrication and characterization of p-type Si tip arrays with an integrated gate electrode for applications as field emission electron sources. After the reactive ion etching of the emitters, the combined thermal dry and wet oxidation was used for both the sharpening of the emitters and for the realization of an enhanced insulation layer. Au was evaporated in a self-aligned process as gate electrode. Arrays of 16 Si tips were fabricated with tip heights of about 3 μm and tip radii of about 20 nm with integrated gate electrode concentrically positioned ≈2 μm below the tip apex. Integral measurements with an additional anode showed improved field emission properties with a reproducible and stable emission behavior. A fast activation of the tips, low onset voltages of about 30 V, and moderate field emission currents up to 0.55 μA were noticed. The field emission parameters were calculated using the Fowler-Nordheim characteristics. A pronounced saturation regime was observed, and current fluctuations of less than ±1\% were investigated for 30 min. Long-term measurements were carried out for a period of more than 8 h. In the first 6 h of operation, the authors observed a drift of the emission current from 0.35 to 0.55 μA caused by an increased emission surface.}, language = {en} } @inproceedings{PrommesbergerŁawrowskiLangeretal., author = {Prommesberger, Christian and Ławrowski, Robert Damian and Langer, Christoph and Mecani, Mirgen and Huang, Yifeng and She, Juncong and Schreiner, Rupert}, title = {Field emission properties of ring-shaped Si ridges with DLC coating}, series = {Proc. SPIE 10248, Nanotechnology VIII, 102480H (30 May 2017)}, volume = {102480H}, booktitle = {Proc. SPIE 10248, Nanotechnology VIII, 102480H (30 May 2017)}, editor = {Tiginyanu (Ed.), Ion M.}, publisher = {Society of Photo-Optical Instrumentation Engineers (SPIE)}, doi = {10.1117/12.2265627}, abstract = {We report on the fabrication and the emission characterization of single ring-shaped Si ridges with a coating of diamond-like carbon (DLC). The reactive ion etching and the subsequent inductively coupled plasma step were adjusted to realize ring-shaped Si ridges with a height of 7.5 μm respectively 15 μm and an apex radius of 20 - 25 nm. The samples were coated with a DLC layer (thickness ≈ 2 - 5 nm) by a filtered cathodic vacuum arc deposition system in order to lower the work function of the emitter and to improve the field emission characteristics. The field emission characterizations were done in diode configuration with cathode and anode separated by a 50 μm thick mica spacer. A higher emission current was carried out for the ring-shaped Si ridge in comparison to the point-shaped Si tips due to the increased emission area. The highest emission current of 0.22 μA at 1000 V was measured on a DLC-coated sample with the highest aspect ratio. No degradation of the emission current was observed in the plateau regime during a measurement period of 6 h. Finally, no decreasing performance of the field emission properties was found due to changes in the geometry or destructions.}, language = {en} } @inproceedings{BachmannDamsDuesbergetal., author = {Bachmann, Michael and Dams, Florian and D{\"u}sberg, Felix and Hofmann, Martin and Pahlke, Andreas and Langer, Christoph and Ławrowski, Robert Damian and Prommesberger, Christian and Schreiner, Rupert}, title = {Extraction of the characteristics of limiting elements from field emission measurement data}, series = {29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada}, booktitle = {29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada}, publisher = {IEEE}, issn = {2380-6311}, doi = {10.1109/IVNC.2016.7551474}, pages = {81 -- 82}, abstract = {In this contribution we will present an algorithm to extract the characteristics of non-Fowler-Nordheim (FN) circuit elements from saturation limited field emission (FE) measurement data. The method for calculating the voltage drop on limiting circuit elements is based on circuit theory as well as Newton's method. Since no assumption on the limiting circuit is made, this method is applicable to any FE data showing saturation. To be able to determine the significance of any parameter output, the uncertainties of data and extracted parameters are fully taken into account throughout the algorithm. External serial resistors and a limiting p-doped substrate are analyzed, where the latter shows a diode-like behavior.}, language = {en} } @inproceedings{LangerPrommesbergerŁawrowskietal., author = {Langer, Christoph and Prommesberger, Christian and Ławrowski, Robert Damian and Schreiner, Rupert and Huang, Yifeng and She, Juncong}, title = {Gated p-Si field emission cathode applied in an ionization vacuum gauge}, series = {29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada}, booktitle = {29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada}, publisher = {IEEE}, issn = {2380-6311}, doi = {10.1109/IVNC.2016.7551500}, pages = {145 -- 146}, abstract = {A commercial Bayard-Alpert ionization vacuum gauge was equipped with a field emission electron source based on a cathode consisting of an array of 16 gated, p-doped, and DLC-coated Si-tips and characterized. An anode current of about 1.3 μA led to an ion current of 7 fA at 3×10 -7 mbar and 0.8 pA at 4×10 -5 mbar. Whereas at pressures higher than 4×10 -5 mbar the emission current of the electron source decreased, the ratio of ion and anode current remained linear. A nearly constant sensitivity of ~ 17 mbar -1 of the ionization vacuum gauge within the investigated pressure range was depicted.}, language = {en} } @inproceedings{BachmannDamsDuesbergetal., author = {Bachmann, Michael and Dams, Florian and D{\"u}sberg, Felix and Hofmann, Martin and Pahlke, Andreas and Langer, Christoph and Ławrowski, Robert Damian and Prommesberger, Christian and Schreiner, Rupert}, title = {Control of the electron source current}, series = {International Vacuum Nanoelectronics Conference (IVNC), 30th, 2017, Regensburg}, booktitle = {International Vacuum Nanoelectronics Conference (IVNC), 30th, 2017, Regensburg}, publisher = {IEEE}, doi = {10.1109/IVNC.2017.8051550}, pages = {66 -- 67}, abstract = {A control circuit to stabilize the flux of electrons transmitted through an extractor electrode is presented. By controlling the emission current a fluctuation with a standard deviation of 0.015\% is observed. However, the achievable stability of the transmitted electron current is limited due to a variation of the extraction grid current ratio showing a standard deviation of 4.33\%. By regulating the difference of the emission current and the extraction grid current an improved stability of the transmitted electron current down to a standard deviation of 0.280\% is observed. Even with operation at 2 × 10 -5 mbar a standard deviation of 0.558\% is achieved.}, language = {en} } @inproceedings{PrommesbergerLangerŁawrowskietal., author = {Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {Benzocyclobutene as a novel integrated spacer material in a field emission electron source}, series = {International Vacuum Nanoelectronics Conference (IVNC), 30th, 2017, Regensburg}, booktitle = {International Vacuum Nanoelectronics Conference (IVNC), 30th, 2017, Regensburg}, publisher = {IEEE}, doi = {10.1109/IVNC.2017.8051605}, pages = {192 -- 193}, abstract = {For the realization of a miniaturized field emission electron source we tested benzocyclobutene (BCB) as a new spacer material between cathode and anode. We fabricated black silicon emitters and characterized the emission behavior with an integrated 5 μm thin and large-area spacer of BCB. The integrated BCB layer allows the realization of a compact electron source with only two components consisting of a cathode with BCB and a grid. The comparison with other spacer materials like polyimide (25 μm thickness) or mica (50 μm thickness) revealed for the cathode with BCB a significantly reduced operational voltage of 240 V for a field emission current of 1 μA.}, language = {en} } @inproceedings{LindnerBerndtTschurtschenthaletal., author = {Lindner, Matthias and Berndt, Dominik and Tschurtschenthal, Karl and Ehrlich, Ingo and Jungbauer, Bastian and Schreiner, Rupert and Pipa, Andrei V. and Hink, R{\"u}diger and Foest, R{\"u}diger and Brandenburg, Ronny and Neuwirth, Daniel and Karpen, Norbert and Bonaccurso, Elmar and Weichwald, Robert and Max, Alexander and Caspari, Ralf}, title = {Aircraft Icing Mitigation by DBD-based Micro Plasma Actuators}, series = {AIAA AVIATION 2020 FORUM: June 15-19, 2020}, booktitle = {AIAA AVIATION 2020 FORUM: June 15-19, 2020}, doi = {10.2514/6.2020-3243}, abstract = {We present the application of plasma actuators as a technology for ice prevention at airfoils. The miniaturized dielectric barrier discharge (DBD) plasma actuators (PA) were fabricated by means of microelectromechanical systems (MEMS). We elucidate how to make the actuator samples scalable and applicable to any desired shape by the use of flexible inorganic zirconia substrates. For this purpose, we applied our developed embedding method to integrate the micro actuators in modern carbon/glass fiber reinforced polymer (CFRP/GFRP) materials. Next, the embedded actuator samples were mounted on a mechanical air profile-like fixture and placed in the icing wind tunnel iCORE. The samples were tested in rime ice conditions at temperatures of -15 to -20° C and air speeds up to 30 m/s. Unlike other groups we used a thin film zirconia substrate as dielectric for the plasma actuator. Due to the low substrate thickness of just 150 µm, an operating voltage of 2 kVRMS is already sufficient enough for a stable plasma formation. The experiments show that the operated actuator was able to prevent the ice formation and first indications of a De-icing function were also found. Hence, we show that it is feasible to realize an anti-icing system with zirconia-based plasma actuators operated at lower voltages compared to conventional ones.}, language = {en} } @article{ŁawrowskiHausladenBuchneretal., author = {Ławrowski, Robert Damian and Hausladen, Matthias and Buchner, Philipp and Schreiner, Rupert}, title = {Silicon Field Emission Electron Source With Individually Controllable Single Emitters}, series = {IEEE Transactions on Electron Devices}, volume = {68}, journal = {IEEE Transactions on Electron Devices}, number = {8}, publisher = {IEEE}, doi = {10.1109/TED.2021.3093374}, pages = {4116 -- 4122}, abstract = {An electron source with an array of individually controllable single tips allows the observation of each emitter current simultaneously as well as the measurement of the integral current. Furthermore, the initial activation process of the individual tips and current distribution of the source can be examined. The Si cathode consists of an array of 2 x 2 conically shaped emitter structures on a borosilicate glass substrate. The emitters were fabricated by laser micromachining and wet etching. Integral field emission (FE) measurements were performed in a diode configuration in a vacuum chamber at pressures of about 10(-9) mbar with a self-aligned Si extraction grid, due to adjustment pins. The total emission current was regulated to a predefined value (4.0, 10, 20, 40, and 50 mu A) by an external regulating circuit and recorded individually during the measurement. The onset voltage for a current of 1 nA varied between 320 and 430 V. The voltage conversion factor is in the range of 7.6 x 10(4) cm(-1) to 1.3 x 10(5) cm(-1). Constant currentmeasurementsover a longer periodof time (1800 values with a sample rate of 0.5 Hz) were performed and show a total current fluctuation less than 0.6\% due to the regulation circuit. Despite the stable total current in regulated operation, it was observed that the individual emitters fluctuate up to 75\% for low (similar to 10(-8) A) and 5\% for high (similar to 10(-5) A) currents.}, language = {en} } @article{BachmannDuesbergPahlkeetal., author = {Bachmann, Michael and D{\"u}sberg, Felix and Pahlke, Andreas and Edler, Simon and Schels, Andreas and Herdl, Florian and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {High current silicon nanowire field emitter arrays}, series = {Journal of Vacuum Science \& Technology B}, volume = {40}, journal = {Journal of Vacuum Science \& Technology B}, number = {1}, publisher = {AIP Publishing}, doi = {10.1116/6.0001639}, abstract = {Arrays of n-doped silicon nanowire field emitters with a high aspect ratio are realized by a novel dry etching technique. Compared to the high current silicon emitters in the literature, the manufacturing process is much simpler and requires only a single photolithography step and two dry etching steps. The cathodes realized with this method exhibit a total current of 20 mA from an active area of 4×4 mm2, which is significantly higher than that for most known structures made from silicon and also represents good performance in comparison with other emitter types, e.g., carbon nanotubes. In addition to characterization in ultrahigh vacuum, measurements at 10-5 mbar are performed and compared with our recent silicon emitters. Compared to these cathodes, the structures with the nanowires exhibit at least two orders of magnitude higher current-carrying capability.}, language = {en} } @article{RemskarHuettelShubinaetal., author = {Remskar, Maja and H{\"u}ttel, Andreas K. and Shubina, Tatiana V. and Seabaugh, Alan and Fathipour, Sara and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {Confinement Related Phenomena in MoS2 Tubular Structures Grown from Vapour Phase}, series = {Israel Journal of Chemistry}, volume = {62}, journal = {Israel Journal of Chemistry}, number = {3-4}, publisher = {Wiley}, issn = {1869-5868}, doi = {10.1002/ijch.202100100}, pages = {1 -- 11}, abstract = {We review recently discovered phenomena observed in the MoS2 tubular structures, which were synthesized by a lasting chemical transport reaction nearly at chemical equilibrium. Such MoS2 nanotubes are distinguished by low density of structural defects, thin walls and a high aspect ratio, which intrinsically provide a confined, edge-free geometry. Quantum confinement with single electron conductance was recorded and a bright exciton photoluminescence with appearance of whispering gallery modes was observed. In addition, the field-effect transistors and field emitters based on single MoS2 nanotubes were demonstrated. These discoveries revitalize research of MoS2 curved structures grown from vapour phase, which were reported several decades ago.}, language = {en} } @inproceedings{ŁawrowskiBachmannSchreiner, author = {Ławrowski, Robert Damian and Bachmann, Michael and Schreiner, Rupert}, title = {Field Emission Arrays from Graphite Fabricated by Laser Micromachining}, series = {34th International Vacuum Nanoelectronics Conference (IVNC): 7/5/2021 - 7/9/2021, Lyon, France}, booktitle = {34th International Vacuum Nanoelectronics Conference (IVNC): 7/5/2021 - 7/9/2021, Lyon, France}, publisher = {IEEE}, isbn = {978-1-6654-2589-6}, doi = {10.1109/IVNC52431.2021.9600736}, pages = {1 -- 2}, abstract = {Arrays of 4x4 conical shaped emitters were directly structured by laser micromaching. Assembled as an electron source with a spacer and Si-grid, they were investigated by means of IV-measurement in ultra-high vacuum. The IV-measurements of the sample show integral emission currents up to 10 µA at a voltage of 1000 V (11 MV/m). Initially, an ideal FN-behaviour is noticeable. The deviation for higher voltage values in the FN-plot is caused by the change of the work function, which was proven by numerical calculations.}, language = {en} } @inproceedings{LindnerBerndtJungbaueretal., author = {Lindner, Matthias and Berndt, Dominik and Jungbauer, Bastian and Ehrlich, Ingo and Schreiner, Rupert and Pipa, Andrei V. and Hink, R{\"u}diger and Foest, R{\"u}diger and Brandenburg, Ronny and Max, Alexander and Caspari, Ralf}, title = {Fabrication, surface integration and testing of miniaturized dielectric barrier discharge plasma actuators for active flow control applications}, series = {AIAA Aviation 2019 Forum, 17-21 June 2019, Dallas, Texas}, booktitle = {AIAA Aviation 2019 Forum, 17-21 June 2019, Dallas, Texas}, doi = {10.2514/6.2019-2998}, language = {en} } @inproceedings{LangerŁawrowskiPrommesbergeretal., author = {Langer, Christoph and Ławrowski, Robert Damian and Prommesberger, Christian and Dams, Florian and Serbun, Pavel and Bachmann, Michael and M{\"u}ller, G{\"u}nter and Schreiner, Rupert}, title = {High aspect ratio silicon tip cathodes for application in field emission electron sources}, series = {2014 27th International Vacuum Nanoelectronics Conference (IVNC), 6-10 July 2014, Engelberg, Switzerland}, booktitle = {2014 27th International Vacuum Nanoelectronics Conference (IVNC), 6-10 July 2014, Engelberg, Switzerland}, publisher = {IEEE}, doi = {10.1109/IVNC.2014.6894824}, pages = {222 -- 223}, abstract = {Precisely aligned arrays of sharp tip structures on top of elongated pillars were realized by using an improved fabrication process including an additional inductively-coupled-plasma reactive-ion etching step. Arrays of n-type and p-type silicon with 271 tips have been fabricated and investigated. Those structures have a total height of 5-6 µm and apex radii less than 20nm. Integral field emission measurements of the arrays yielded low onset-fields in the range of 8-12V=µm and field enhancement factors between 300 and 700. The I-E curves of n-type structures showed the usual Fowler-Nordheim behaviour, whereas p-type structures revealed a significant saturation region due to the limited number of electrons in the conduction band and a further carrier depletion effect caused by the pillar. The maximum integral current in the saturation region was 150 nA at fields above 30V=µm. An excellent stability of the emission current of less than ± 2\% fluctuation was observed in the saturation region. For n-type Si a maximum integral current of 10 µA at 24V=µm and an average current stability with a fluctuation of ± 50\% were measured.}, language = {en} } @article{BachmannDuesbergLangeretal., author = {Bachmann, Michael and D{\"u}sberg, Felix and Langer, Christoph and Herdl, Florian and Bergbreiter, Lukas and Dams, Florian and Miyakawa, Natuski and Eggert, Tobias and Pahlke, Andreas and Edler, Simon and Prommesberger, Christian and Ławrowski, Robert Damian and Hausladen, Matthias and Schreiner, Rupert}, title = {Vacuum-sealed field emission electron gun}, series = {Journal of Vacuum Science \& Technology B}, volume = {38}, journal = {Journal of Vacuum Science \& Technology B}, number = {2}, publisher = {AIP Publishing}, doi = {10.1116/1.5139316}, abstract = {A compact vacuum-sealed field emission electron gun with an operation voltage below 5 kV is presented. With a 150 nm thick pyrolytic carbon membrane, a transmission of 40\% at 5 kV is obtained. For more than 2500 h of continuous operation at an emission current of 100 nA, no significant increase (<50V ) and almost no degradation were found. From this measurement, a lifetime of more than 10 000 h at continuous operation with approximately a linear increase of the extraction voltage from about 545 V to about 730 V is predicted. This electron source enables application of field emitter arrays in poor vacuum or even ambient pressure. ACKNOWLEDGMENT This work was supported by the German Federal Ministry for Economic Affairs and Energy under Project No. ZF4081502GM8. C.P., R.L., M.H., and R.S. were supported by Grant No. ZF4562901GM8.}, language = {en} } @article{ŁawrowskiBachmannSchreiner, author = {Ławrowski, Robert Damian and Bachmann, Michael and Schreiner, Rupert}, title = {Field emission arrays from graphite fabricated by laser micromachining}, series = {Journal of Vacuum Science \& Technology B}, volume = {40}, journal = {Journal of Vacuum Science \& Technology B}, number = {2}, publisher = {AIP Publishing}, doi = {10.1116/6.0001547}, abstract = {Laser micro structuring allows the manufacturing of conical shaped emitters on a graphitized carbon substrate without any additional treatment. Integral field emission measurements were performed in a diode configuration with a 50 µm mica spacer and a metalized Si-grid in a vacuum chamber at pressures of about 10-9 mbar. Emission currents up to 10 µA at a voltage of 1000 V (11 MV/m) with a positive current drift were observed for an array of 16 emitters. A strong modification of the emitter tip is noticeable after individual measurements. A comparable alteration of the surface is also achieved by an electrochemical treatment of the samples with a potassium hydroxide solution. However, the IV-measurements of such samples show higher onset voltages, but also higher integral emission currents. For all arrays an ideal FN behaviour is only noticeable at applied voltages below 625 V (7 MV/m). Numerical calculations indicate that the deviation in the FN-plot for higher voltage values is caused by the change of the effective work function.}, language = {en} } @article{ŁawrowskiPrommesbergerLangeretal., author = {Ławrowski, Robert Damian and Prommesberger, Christian and Langer, Christoph and Dams, Florian and Schreiner, Rupert}, title = {Improvement of Homogenity and Aspect Ratio of Silicon Tips for Field Emission by Reactive-Ion Etching}, series = {Advances in materials science and engineering}, volume = {2014}, journal = {Advances in materials science and engineering}, publisher = {Hindawi}, doi = {10.1155/2014/948708}, abstract = {The homogeneity of emitters is very important for the performance of field emission (FE) devices. Reactive-ion etching (RIE) and oxidation have significant influences on the geometry of silicon tips. The RIE influences mainly the anisotropy of the emitters. Pressure has a strong impact on the anisotropic factor. Reducing the pressure results in a higher anisotropy, but the etch rate is also lower. A longer time of etching compensates this effect. Furthermore an improvement of homogeneity was observed. The impact of uprating is quite low for the anisotropic factor, but significant for the homogeneity. At low power the height and undercut of the emitters are more constant over the whole wafer. The oxidation itself is very homogeneous and has no observable effect on further variation of the homogeneity. This modified fabrication process allows solving the problem of inhomogeneity of previous field emission arrays.}, language = {en} } @misc{BiekerSchlaakWilfertetal., author = {Bieker, Johannes and Schlaak, Helmut F. and Wilfert, Stefan and Ławrowski, Robert Damian and Hausladen, Matthias and Schreiner, Rupert}, title = {Development of FE-based electron sources for XHVion gauges in cryogenic vacuum environments}, series = {32nd International Vacuum Nanoelectronics Conference (IVNC 2019), 22.-26.07.2019, Cincinnati, USA}, journal = {32nd International Vacuum Nanoelectronics Conference (IVNC 2019), 22.-26.07.2019, Cincinnati, USA}, language = {en} } @misc{ŁawrowskiHausladenSchreiner, author = {Ławrowski, Robert Damian and Hausladen, Matthias and Schreiner, Rupert}, title = {Individually Addressable Silicon Field Emission Cathodes Fabricated by Laser Micromachining}, series = {7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef}, journal = {7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef}, language = {en} } @misc{HausladenŁawrowskiSchreiner, author = {Hausladen, Matthias and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {Fast Pulse Source for Field Emission Applications}, series = {7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef}, journal = {7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef}, language = {en} } @inproceedings{PrommesbergerLangerŁawrowskietal., author = {Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Muller, F. and Dams, Florian and Schreiner, Rupert and Serbun, Pavel and M{\"u}ller, G{\"u}nter}, title = {Comparison of integral and local field-emission properties of Mo-coated p-Si tip arrays}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225579}, pages = {192 -- 193}, abstract = {Silicon tip arrays were fabricated by means of reactive ion etching followed by oxidation for final sharpening and molybdenum thin film coating. The field-emission (FE) properties of these Mo-coated p-Si tip arrays were systemically investigated by different measurement techniques. Integral measurements in diode configuration yielded a turn-on field (for 1 nA) of 22 V/μm and nearly stable FE currents up to 6.6 μA at 38 V/μm. The effective field enhancements factor extracted from the FN plots is about 180. Detailed investigations of these FE arrays were also performed by means of field emission scanning microscopy combined with electron microscopy. A rather limited efficiency of the tips (50\% at 1500 V) and FE homogeneity (180 nA at 700 V) might be correlated with the varying morphology of the tips and the presence of oxides. Local I-V measurements of selected single tips revealed both activation and deactivation effects, which finally resulted in nearly reproducible I-V curves. Current stability measurements at a constant voltage showed rather large fluctuations (0.1-1 μA) of the FE current, which could be reduced up to 1.7\% by using of a PID-regulated voltage source. SEM images showed unchanged tip shape after the current processing.}, language = {en} } @inproceedings{ŁawrowskiLangerPrommesbergeretal., author = {Ławrowski, Robert Damian and Langer, Christoph and Prommesberger, Christian and Dams, Florian and Bachmann, Michael and Schreiner, Rupert}, title = {Fabrication and simulation of silicon structures with high aspect ratio for field emission devices}, series = {2014 27th International Vacuum Nanoelectronics Conference (IVNC), 6-10 July 2014, Engelberg, Switzerland}, booktitle = {2014 27th International Vacuum Nanoelectronics Conference (IVNC), 6-10 July 2014, Engelberg, Switzerland}, publisher = {IEEE}, doi = {10.1109/IVNC.2014.6894805}, pages = {193 -- 194}, abstract = {To obtain higher field enhancement factors of Si-tip structures, we present an improved fabrication process utilizing reactive-ion etching (RIE) with an inductively coupled plasma (ICP). In our design, a pillar under the tips is realized by a combination of RIE with ICP. With adjusted power settings (≈ 240 W) and step times (<; 5 s), vertical slopes with a low roughness of approximately 10 nm to 20 nm are possible. The remaining silicon is oxidized thermally to sharpen the emitters. A final tip radius of R <; 20 nm is obtained for the tips of the emitters. The pillar height HP can be mainly adjusted by the duration of the ICP-etching step. A total emitter height of H ≈ 6 μm with a pillar height of HP ≈ 5 μm is achieved. Simulations with COMSOL Multiphysics® are applied to calculate the field enhancement factor β. A two-dimensional model is used in rotational symmetry. In addition to the previous model, a pillar with a varying diameter {\O}P and height HP is added. A conventional emitter (H = 1 μm and R = 20 nm) placed on a pillar of the height HP ≈ 5 μm approximately results in a three times higher β-factor (β≈ 105). By decreasing the diameter {\O}P a slight increase of the β-factor is observed. However, the aspect ratio of the emitter mainly influences on the β-factor.}, language = {en} } @inproceedings{PrommesbergerLangerŁawrowskietal., author = {Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Dams, Florian and Schreiner, Rupert and Ławrowski, Robert Damian}, title = {Gated p-Si field emitter arrays for sensor applications}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC)}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC)}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225567}, pages = {164 -- 165}, abstract = {We report on gated p-type Si-tip array cathodes for implementation into field emission electron sources for sensor applications. Arrays of 16 and 100 tips with tip heights of 3 μm and tip radii below 30 nm with integrated gate electrodes concentrically positioned 2 μm below the tip apexes were fabricated using an improved process, which leads to an enhanced isolation layer quality with sufficient breakdown field strengths and low leakage currents. Integral measurements with a fixed grid potential of 400 V showed emission currents up to 35 μA for 100 tips at a cathode voltage of 150 V and an almost negligible parasitic gate current. The array with 16 p-type Si-tips showed a significant stabilization of the emission current in the range of 0.3 - 0.4 μA, for cathode voltages between 90 V and 150 V. The current fluctuation in this saturation regime was measured for 10 minutes and a value of less than ± 1\% was observed. No degradation of the cathode was found after 6 hours of operation at a constant cathode voltage of 100 V and a constant grid voltage of 400 V.}, language = {en} } @inproceedings{LangerPrommesbergerŁawrowskietal., author = {Langer, Christoph and Prommesberger, Christian and Ławrowski, Robert Damian and M{\"u}ller, F. and Schreiner, Rupert and Serbun, Pavel and M{\"u}ller, G{\"u}nter}, title = {Enhanced field emission from p-doped black silicon on pillar structures}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225547}, pages = {104 -- 105}, abstract = {Aligned square arrays of black silicon (b-Si) on top of pillars were fabricated on p-type silicon substrate by a deep-etching step combined with a b-Si process. Two 10×10 arrays with pillar heights of 8 μm and 20 μm and one b-Si reference sample without pillars were investigated. Integral field emission (FE) measurements of the arrays yielded rather low onset-fields between 6.4 V/μm and 13.5 V/μm and field enhancement factors between 430 and 800. The I-V curves showed typical Fowler-Nordheim behavior for low fields, whereas a saturation region was observed at higher fields. The maximum integral current in the saturation region was 8 μA at a field of 20 V/μm. The stability of the emission current was investigated over 3 hours and revealed moderate fluctuations of ± 8\% in the saturation region. Voltage scans showed well-aligned FE from nearly all pillars.}, language = {en} } @inproceedings{PrommesbergerŁawrowskiLangeretal., author = {Prommesberger, Christian and Ławrowski, Robert Damian and Langer, Christoph and Dams, Florian and Schreiner, Rupert}, title = {Realisierung von Siliziumspitzenarrays mit integrierter Gate-Elektrode f{\"u}r Anwendungen in der Vakuumsensorik}, series = {4. Landshuter Symposium Mikrosystemtechnik, Mikrosystemtechnik als Schl{\"u}sseltechnologie der Systemintegration, Tagungsband zum Symposium 12./13. M{\"a}rz 2014, Hochschule Landshut}, booktitle = {4. Landshuter Symposium Mikrosystemtechnik, Mikrosystemtechnik als Schl{\"u}sseltechnologie der Systemintegration, Tagungsband zum Symposium 12./13. M{\"a}rz 2014, Hochschule Landshut}, address = {Landshut}, isbn = {978-3-9812696-5-9}, pages = {36 -- 41}, abstract = {Bei der Feldemission (kalte Emission) k{\"o}nnen Elektronen durch ein starkes elektrisches Feld eine glatte und leitende Oberfl{\"a}che verlassen. Die Elektronen tunneln dabei durch eine Potentialbarriere, deren Breite durch ein {\"a}ußeres elektrisches Feld verkleinert wird. Durch das Hinzuf{\"u}gen einer integrierten Gate-Elektrode um eine Siliziumspitze kann die notwendige Einsatzspannung f{\"u}r Feldemission deutlich gesenkt werden. Zwischen Si-Kathode und Gate-Elektrode befindet sich dabei eine Isolationsschicht, die h{\"o}chste Anforderungen bez{\"u}glich der elektrischen Durchbruchsfestigkeit erf{\"u}llen muss. Mit einer Kombination aus Trocken- (Schichtdicke 50 nm) und Feuchtoxid (Schichtdicke 950 nm) konnte eine Isolationsschicht entwickelt werden, die im integrierten Aufbau eine minimale Durchbruchsfeldst{\"a}rke von 3,2 MV/cm aufweist. F{\"u}r die Realisierung von Siliziumkathoden mit integrierter Gate-Elektrode wurde ein bereits bestehender Herstellungsprozess um zus{\"a}tzliche Prozessschritte erweitert. Die {\"U}bertragung der lateralen Position der Spitze erfolgt durch Strukturierung des Umkehrlacks AZ5214 und einer RIE-{\"A}tzung der zuvor hergestellten SiO2-Schicht. Nach dem Entfernen der Lackschicht wird die vertikale Struktur der Siliziumspitzen durch einen RIE-{\"A}tzprozess mit den Prozessgasen SF6 und O)2 realisiert. Aus einer thermischen Oxidation bei 940 °C resultiert anschließend die Isolationsschicht zwischen Si-Kathode und Gate-Elektrode . Gleichzeitig wird diese Ansch{\"a}rfeoxidation auch zur Realisierung der endg{\"u}ltigen Spitzengeometrie verwendet. Durch die lithographische Strukturierung des Photolacks AZ5214 kann dabei die Fl{\"a}che der aufgedampften Gate-Elektrode festgelegt werden. Die Gate-Elektrode wird in einem selbstjustierenden Prozessschritt exakt konzentrisch um die Si-Spitze aufgedampft. Der gerichtete Aufdampfprozess bewirkt eine Abschattung, so dass das Oxidpl{\"a}ttchen nicht komplett von Metall ummantelt wird. Die Opferschicht aus Photolack wird mit den nicht ben{\"o}tigten Metallfl{\"a}chen in einem Lift-off-Prozess entfernt.}, language = {de} } @inproceedings{ŁawrowskiDemlVargheseetal., author = {Ławrowski, Robert Damian and Deml, Sonja and Varghese, T. and Schimpke, T.}, title = {Leuchtdiodenchips mit dreidimensional epitaktisch gewachsenen kristallinen GaN S{\"a}ulen}, series = {7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, M{\"u}nchen}, booktitle = {7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, M{\"u}nchen}, publisher = {VDE-Verlag}, address = {M{\"u}nchen}, isbn = {978-3-8007-4491-6}, pages = {131 -- 134}, abstract = {Um die Eigenschaften von Leuchtdioden zu verbessern und den Herstellungsprozess zu vereinfachen, wurde ein erweitertes Verfahren der metallorganischen Gasphasenepitaxie verwendet, um dichtgepackte dreidimensionale GaN-S{\"a}ulen mit hohen Aspektverh{\"a}ltnis auf Chipoberfl{\"a}chen zu wachsen. Diese selbstorganisierenden dreidimensionalen Strukturen sollen einerseits die lichtabstrahlende Oberfl{\"a}che der Leuchtdiode bei gleichbleibender Chipgr{\"o}ße vergr{\"o}ßern und andererseits durch die nichtpolaren Kristallebenen an den Seiten- und Deckfl{\"a}chen der S{\"a}ulen die Effizienz dieser Bauteile erh{\"o}hen. Messungen an ersten Bauteilen, die mit dieser Methode realisiert wurden, zeigen eine homogene blaue Emission bei Wellenl{\"a}ngen von 450 nm und abgestrahlte Lichtleistungen von bereits mehr als 50 mW bei Stromdichten von 120 A/cm². Diese Ergebnisse sind bereits sehr vielversprechend und lassen eine deutliche Performancesteigerung bei Optimierung der Herstellungstechnologie erwarten.}, language = {de} } @inproceedings{ŁawrowskiLangerPrommesbergeretal., author = {Ławrowski, Robert Damian and Langer, Christoph and Prommesberger, Christian and Dams, Florian and Serbun, Pavel and M{\"u}ller, G{\"u}nter and Schreiner, Rupert}, title = {Spitzen- und Kantenemitter aus Silizium mit einem hohen Aspektverh{\"a}ltnis f{\"u}r Ionisationsgassensoren}, series = {Mikrosystemtechnik als Schl{\"u}sseltechnologie der Systemintegration : 4. Landshuter Symposium Mikrosystemtechnik ; Tagungsband zum Symposium ; 12./13. M{\"a}rz 2014, Hochschule Landshut}, booktitle = {Mikrosystemtechnik als Schl{\"u}sseltechnologie der Systemintegration : 4. Landshuter Symposium Mikrosystemtechnik ; Tagungsband zum Symposium ; 12./13. M{\"a}rz 2014, Hochschule Landshut}, publisher = {Cluster Mikrosystemtechnik}, address = {Landshut}, isbn = {978-3-9812696-5-9}, pages = {28 -- 35}, abstract = {Durch die Optimierung von reaktivem Ionen{\"a}tzen mit induktiv gekoppeltem Plasma ist die Herstellung von verschiedenen Siliziumkathoden mit hoher Anisotropie und hohem Aspektverh{\"a}ltnis f{\"u}r Feldemissionsanwendungen m{\"o}glich. Simulationen mit COMSOL Multiphysics untermauern das Potential von solchen Spitzen- und Kantenfeldemittern. Die Ergebnisse der Simulation zeigen einen zwei- bis sechsfach h{\"o}heren Feld{\"u}berh{\"o}hungsfaktor der tiefge{\"a}tzten Strukturen im Vergleich zu identischen Emittern ohne zus{\"a}tzliche Tiefen{\"a}tzung. Feldemissionsmessungen best{\"a}tigen die Simulationsergebnisse. Der modifizierte Herstellungsprozess der Feldemitter erm{\"o}glicht somit einen zuverl{\"a}ssigen Betrieb von Feldemissionselektronenquellen bei kleineren makroskopischen Feldst{\"a}rken. Außerdem weisen die Messungen des Emissionsstroms im S{\"a}ttigungsbereich eine weitgehende Unabh{\"a}ngigkeit vom elektrischen Feld auf. Lokale Feldemissionsmessungen ergeben dadurch eine deutliche Stromstabilisierung, welche {\"u}ber große Feldst{\"a}rkenbereiche konstant bleibt. Die Nutzung der HAR-Emitter (high aspect ratio) ist damit eine gute Voraussetzung f{\"u}r einen zuverl{\"a}ssigen Betrieb der Emissionskathoden bei kleinen Feldst{\"a}rken f{\"u}r die Anwendung in Ionisationsgassensoren.}, language = {de} } @article{LindnerPipaBrandenburgetal., author = {Lindner, Matthias and Pipa, Andrei V. and Brandenburg, Ronny and Schreiner, Rupert}, title = {Expansion of surface barrier discharge scrutinized}, series = {Plasma Sources Science and Technology}, volume = {31}, journal = {Plasma Sources Science and Technology}, number = {10}, publisher = {IOP Publishing}, doi = {10.1088/1361-6595/ac95bf}, abstract = {Developing the fundamentals for the electrical diagnostics of surface dielectric barrier discharges (SDBDs) is of enormous importance for several applications, for example, flow control and gas cleaning. The main challenge is to account for the discharge expansion along the dielectric surface. Typically, a linear expansion with the amplitude of the applied voltage is observed. In this work, we report on a step-wise SDBD expansion along the Al 2 O 3 dielectric surface. More specific, the discharge occupied a certain area after ignition, which remained constant until the voltage exceeded the critical amplitude V L . This absence of expansion is seen as a linear dependence of the discharge power on the applied voltage and it was additionally confirmed by photographs with long exposure times. This novel phenomenon is more pronounced for thicker dielectrics. It is suggested that the derivative of the charge-voltage characteristics can be used for the determination of all essential parameters of the simplest equivalent circuit of SDBDs. Moreover, it was shown that the derivative of the charge-voltage characteristics for the positive half-cycle of the discharge agrees numerically with the voltage dependence of the reactor capacitance derived from photographs. This agreement between both measurement methods indicates a similar step-wise expansion of the SDBD even if a voltage amplitude above V L is applied. …}, language = {en} } @article{BornmannMingelsDamsetal., author = {Bornmann, Benjamin and Mingels, Stephan and Dams, Florian and Prommesberger, Christian and Schreiner, Rupert and L{\"u}tzenkirchen-Hecht, Dirk and M{\"u}ller, G{\"u}nter}, title = {Electron spectrometer in adjustable triode configuration for photo-induced field emission measurements}, series = {The Review of scientific instruments}, volume = {83}, journal = {The Review of scientific instruments}, number = {1}, publisher = {American Institute of Physics}, address = {Melville, NY}, doi = {10.1063/1.3673475}, abstract = {We have constructed a new ultrahigh vacuum apparatus with a triode configuration for the systematic investigation of photo-induced field emission (PFE) from metallic or semiconducting cathodes. These are exposed to electric fields up to 400 MV∕m and laser irradiation by means of hole or mesh gates. Cathodes and gates are in situ exchangeable and adjustable with high precision to ensure a homogeneous extraction of electrons which are partially transmitted to the fixed electron spectrometer. Its hemispherical sector analyzer provides an energy resolution limit of 8 meV. The commissioning of the measurement system has been performed with a tungsten needle. Its temperature showed up in the high-energy tail of the electron spectrum, while its work function was derived from the spectral low-energy part combined with the integral current-voltage curve. First PFE measurements on B-doped Si-tip arrays yielded a small field emission current increase under green laser illumination. A shift and splitting of the energy spectra was observed which revealed different emission regimes as well as the photosensitivity of the cathode due to carrier excitation into the conduction band. For the full exploitation of the PFE system, a tunable laser over a wide eV-range is required.}, language = {en} } @inproceedings{MayerMonkman, author = {Mayer, Matthias and Monkman, Gareth J.}, title = {Modern permanent magnetic materials: Advances and limits}, series = {Inductica - Berlin Messe, 22-24 May 2007}, booktitle = {Inductica - Berlin Messe, 22-24 May 2007}, language = {en} } @inproceedings{BachmannDamsDuesbergetal., author = {Bachmann, Michael and Dams, Florian and D{\"u}sberg, F. and Hofmann, Martin and Pahlke, Andreas and Langer, Christoph and Ławrowski, Robert Damian and Prommesberger, Christian and Schreiner, Rupert}, title = {Stability investigation of high aspect ratio n-type silicon field emitter arrays}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225584}, pages = {204 -- 205}, abstract = {Electron sources based on silicon field emitter arrays, produced in processes based on semiconductor technology, are good candidates for a miniaturized X-ray source. A key parameter for this application is the stability of the X-ray photon flux and, thus, the emission current. In the present work we have investigated the influence of the residual gas pressure and a resistor in series on the emission stability of a high aspect ratio n-type silicon emitter array with hybrid extraction electrode. An increase of current fluctuations was found for pressures above 10-6 mbar. High resistances in series to the emitter array alter the emission characteristics, but greatly suppress spikes in the emission current and improve its stability. This, however, strongly depends on the bias point. The field enhancement factor is not affected by the resistance. In a long term measurement the emission current was found to be constant after an initial phase of degradation.}, language = {en} } @article{PangerlMoserMuelleretal., author = {Pangerl, Jonas and Moser, Elisabeth and M{\"u}ller, Max and Weigl, Stefan and Jobst, Simon and R{\"u}ck, Thomas and Bierl, Rudolf and Matysik, Frank-Michael}, title = {A sub-ppbv-level Acetone and Ethanol Quantum Cascade Laser Based Photoacoustic Sensor- Characterization and Multi-Component Spectra Recording in Synthetic Breath}, series = {Photoacoustics}, volume = {30}, journal = {Photoacoustics}, publisher = {Elsevier}, issn = {2213-5979}, doi = {10.1016/j.pacs.2023.100473}, pages = {1 -- 12}, abstract = {Trace gas analysis in breath is challenging due to the vast number of different components. We present a highly sensitive quantum cascade laser based photoacoustic setup for breath analysis. Scanning the range between 8263 and 8270 nm with a spectral resolution of 48 pm, we are able to quantify acetone and ethanol within a typical breath matrix containing water and CO2. We photoacoustically acquired spectra within this region of mid-infra-red light and prove that those spectra do not suffer from non-spectral interferences. The purely additive behavior of a breath sample spectrum was verified by comparing it with the independently acquired single component spectra using Pearson and Spearman correlation coefficients. A previously presented simulation approach is improved and an error attribution study is presented. With a 3σ detection limit of 6.5 ppbv in terms of ethanol and 250 pptv regarding acetone, our system is among the best performing presented so far.}, language = {en} } @masterthesis{Zhang, type = {Bachelor Thesis}, author = {Zhang, Yunjia}, title = {Microcontroller Programming of a Contactless Optical Position Measurement Device}, address = {Regensburg}, doi = {10.35096/othr/pub-8464}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-84647}, school = {Ostbayerische Technische Hochschule Regensburg}, pages = {37}, abstract = {This thesis focuses on programming a microcontroller to receive and process data from a waveguide optic distance sensor, and to visualize the measured distance on a display screen. During the measurement process, LED moves above the 3D-printed D-shaped waveguide. The light transmitted through the waveguide is converted into photocurrents by photodiodes located at both ends of the optical waveguide, which are then converted into voltage signals through specific electronic components. By computing the ratio of the optical power detected at each end, the relative position of the LED along the waveguide can be determined. In this project, a microcontroller is used to acquire the voltage data, correct measurement errors, calculate the LED position, and display the result on screen in real time. Compared to manual calculation of photocurrent values, using a microcontroller for automated data processing greatly improves speed and efficiency. At the same time, real-time visualization enhances the system's practicality and usability, making it more suitable for future applications.}, language = {en} } @incollection{WeiglMuellerPangerletal., author = {Weigl, Stefan and M{\"u}ller, Max and Pangerl, Jonas and R{\"u}ck, Thomas}, title = {Scopes and Limits of Photoacoustic Spectroscopy in Modern Breath Analysis}, series = {Breath Analysis}, booktitle = {Breath Analysis}, publisher = {Springer nature}, isbn = {978-3-031-18526-7}, doi = {10.1007/11663_2022_22}, pages = {101 -- 159}, abstract = {Photoacoustic spectroscopy is a viable tool for trace gas detection in various application fields. In recent years, this technique has been exploited more and more for modern breath analysis as well. Within this chapter, a holistic overview of photoacoustic spectroscopy is presented, while maintaining the relationship to breath analysis. Therefore, a concise description of the fundamentals of photoacoustic spectroscopy is provided. This is essential for understanding the scopes and limits of this outstanding measurement technique being described within this chapter. In the past several different types of photoacoustic measurement setups for trace gas detection have emerged, including different light sources, modulation techniques, and detection schemes. These are described shortly and advantages as well as disadvantages, especially in relation to breath analysis, are highlighted. Though being a promising sensor principle, measurement devices based on photoacoustic spectroscopy are still rare on the sensor market, especially when it comes to trace gas detection in complex gas matrices, e.g., human breath exhale. One main reason is due to possible molecular interactions influencing the relaxational behavior of the analyte altering the sensor signal. Recent results shedding light on the intricate relaxational processes within complex gas matrices are discussed in detail, providing approaches to overcome this issue. Finally, various applications of photoacoustic spectroscopy in breath analysis are described demonstrating the great potential of this technology.}, language = {en} } @misc{OlbrichPongratzBierletal., author = {Olbrich, Florian and Pongratz, Christian and Bierl, Rudolf and Ehrlich, Ingo}, title = {Method and System for Evaluating a Structural Integrity of an Aerial Vehicle}, series = {Europ{\"a}isches Patentblatt (09.12.2020) zur Anmeldung: OTH Regensburg, Anmeldenummer: 19179054.2, Patentnummer 1001/3748327, Ver{\"o}ffentlichungsnummer: 3 748 327}, journal = {Europ{\"a}isches Patentblatt (09.12.2020) zur Anmeldung: OTH Regensburg, Anmeldenummer: 19179054.2, Patentnummer 1001/3748327, Ver{\"o}ffentlichungsnummer: 3 748 327}, pages = {395 -- 396}, language = {en} } @article{KleshchSerbunLuetzenkirchenHechtetal., author = {Kleshch, Victor I. and Serbun, Pavel and L{\"u}tzenkirchen-Hecht, Dirk and Orekhov, Anton and Ivanov, Victor E. and Prommesberger, Christian and Langer, Christoph and Schreiner, Rupert and Obraztsov, Alexander N.}, title = {A Comparative Study of Field Emission from Pristine, Ion-treated and Tungsten Nanoparticle-decorated p-type Silicon Tips}, series = {Physica Status Solidi B}, volume = {256}, journal = {Physica Status Solidi B}, number = {9}, publisher = {Wiley}, doi = {10.1002/pssb.201800646}, abstract = {The field electron emission characteristics of individual tips of a silicon field emitter array are analyzed. The array of conical-shaped tips is fabricated on a p-type silicon wafer by using reactive ion etching and sharpening oxidation. The tips are decorated with single tungsten nanoparticles at their apexes. Furthermore, the focused ion beam is also used to increase surface conductivity of some of the tips. Comparative measurements of field emission are performed by using the scanning anode probe field emission microscopy technique. All types of tips demonstrated emission activation consisting of a sudden current increase at a certain value of the applied voltage. Compared to the pristine tips, a noticeable reduction of the saturation effect in the current-voltage characteristics and a smaller light sensitivity for the decorated tips is found. For ion-treated tips, saturation effects and light sensitivity are completely suppressed. Scanning electron microscopy observations reveal the formation of single nanoscale protrusions extending from the metal particles and from the apexes of bare ion-treated tips after exposure under strong electric fields during the field emission measurements. The influence of protrusions growth on characteristics of silicon field emitter arrays is discussed.}, language = {en} } @inproceedings{SerbunPorshynMuelleretal., author = {Serbun, Pavel and Porshyn, Vitali and M{\"u}ller, G{\"u}nter and L{\"u}tzenkirchen-Hecht, Dirk and Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {Field emission behavior of single n- and p-type black Si pillar structures}, series = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, booktitle = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, publisher = {IEEE}, doi = {10.1109/IVNC.2018.8520292}, pages = {1-2}, abstract = {We have investigated the properties of single n- and p-type black silicon (b-Si) pillars with a height of 20 μ m under strong electric field and halogen lamp or laser illumination. For both type of b-Si pillar structures, I-V measurements revealed strong activation effects, which consisted in sudden current increases during the first up/down voltage sweeps. The maximum reproducible emission current from a single n-type b-Si pillar structure was about 15 μ A. A pronounced saturation region at 240 nA was observed for a single p-type b-Si pillar. The current fluctuation over time showed a standard deviation of 28\% and 2.5\% for n- and p-type single b-Si pillar structures, respectively. Optical switching under halogen lamp illumination resulted in at least 3 times higher saturation currents and showed a linear dependence of the FE current on the laser power.}, language = {en} } @inproceedings{SerbunPorshynLuetzenkirchenHechtetal., author = {Serbun, Pavel and Porshyn, Vitali and L{\"u}tzenkirchen-Hecht, Dirk and Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {Photosensitivity of single silicon high-aspect-ratio tips with different doping levels}, series = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, booktitle = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, publisher = {IEEE}, doi = {10.1109/IVNC.2018.8520288}, pages = {1-2}, abstract = {Photosensitivity of single lightly p-doped, highly p-doped, with an integrated p/n junction and intrinsic high-aspect-ratio (HAR) silicon tips was investigated in an ultra-high vacuum environment. The current-voltage characteristics (I-V) of the lightly doped p-type HAR tips showed a characteristic current saturation at around 10-12 nA, whereas the HAR Si tips with p/n junction showed similar saturation phenomena, however, at much smaller current values starting at ~20-30 pA. Optical switching under a halogen lamp illumination resulted in at least 2-4 times higher saturation currents and showed a linear dependence between the illumination power and the FE current, for both types of structures. In case of the highly p-doped HAR tips optical current switching effects, i. e. current saturation, were observed at rather low current levels 1-2 pA. Intrinsic HAR Si-tips showed relative unstable field emission behavior without a clear evidence of the photosensitivity.}, language = {en} } @article{UnterreitmeierNaglerPfitzneretal., author = {Unterreitmeier, M. and Nagler, Oliver and Pfitzner, L. and Weigel, R. and Holmer, Rainer}, title = {An acoustic emission sensor system for thin layer crack detection}, series = {Microelectronics Reliability}, volume = {88-90}, journal = {Microelectronics Reliability}, number = {September}, publisher = {Pergamon-Elsevier}, doi = {10.1016/j.microrel.2018.07.015}, pages = {16 -- 21}, abstract = {We present a new method for semiconductor layer characterization enabling simultaneous crack generation and detection based on the established acoustic emission testing. In this paper, we explain the test concept and failure mechanism of diamond tip indentation with acoustic wave measurement on oxide layers by analytical modeling and computer-aided simulations. For this purpose, an innovative design of a sensor-indenter system was developed and experimentally verified. In further tests, the new acoustic crack detection method is correlated with proven optical inspection methods and the good reproducibility of the measurement is demonstrated. The high sensitivity and resolution of this method offer new opportunities for thin layer characterization at lower time and cost. The new high-efficient method can be used especially for process qualification for semiconductor wafer test, where oxide cracks can be induced by sharp probes causing electrical failure of the chip.}, language = {en} } @article{ZimmermannChavezVegaBeckeretal., author = {Zimmermann, Klaus and Chavez Vega, Jhohan Harvey and Becker, Tatiana I. and Witte, Hartmut and Schilling, Cornelius and K{\"o}hring, Sebastian and B{\"o}hm, Valter and Monkman, Gareth J. and Prem, Nina and Sindersberger, Dirk and Lutz, I. I. and Merker, Lukas}, title = {An approach to a form-adaptive compliant gripper element based on magneto-sensitive elastomers with a bioinspired sensorized surface}, series = {Problems of Mechanics}, volume = {75}, journal = {Problems of Mechanics}, number = {2}, publisher = {Georgian Technical University}, address = {Tbilisi}, issn = {1512-0740}, pages = {23 -- 38}, language = {en} } @inproceedings{SchreinerLangerPrommesbergeretal., author = {Schreiner, Rupert and Langer, Christoph and Prommesberger, Christian and Ławrowski, Robert Damian and Dams, Florian and Bachmann, Michael and D{\"u}sberg, F. and Hofmann, Martin and Pahlke, Andreas and Serbun, Pavel and Mingels, Stephan and M{\"u}ller, G{\"u}nter}, title = {Semiconductor field emission electron sources using a modular system concept for application in sensors and x-ray-sources}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225572}, pages = {178 -- 179}, abstract = {Semiconductor field emitters are suitable candidates for applications, which require a very stable field emission (FE) current and a high emission uniformity over the entire emission area. By using different materials and geometries, we are able to vary the FE characteristics within a wide range. Each specific application requires its own optimized design for the cathode as well as for the other parts of the FE electron source. To meet as many of these requirements as possible while using only a limited number of different prefabricated components, we established a modular system concept for our FE electron source. This allows the implementation of almost every cathode material. For first characterizations, we used gated p-type Si cathodes with 16 tips. We obtained stable FE currents of 0.4 μA for a grid-potential of 400 V and a gate potential of 100 V. Almost 100\% of the electrons are emitted towards the grid-electrode. Parasitic leakage paths, as well as the electron emission towards the gate-electrode can be neglected. Approximately 10\% of the electrons are transmitted through the grid and reach the external anode. This is in good agreement with the optical transmission through the grid-mesh.}, language = {en} }