@article{ŁawrowskiPrommesbergerLangeretal., author = {Ławrowski, Robert Damian and Prommesberger, Christian and Langer, Christoph and Dams, Florian and Schreiner, Rupert}, title = {Improvement of Homogenity and Aspect Ratio of Silicon Tips for Field Emission by Reactive-Ion Etching}, series = {Advances in materials science and engineering}, volume = {2014}, journal = {Advances in materials science and engineering}, publisher = {Hindawi}, doi = {10.1155/2014/948708}, abstract = {The homogeneity of emitters is very important for the performance of field emission (FE) devices. Reactive-ion etching (RIE) and oxidation have significant influences on the geometry of silicon tips. The RIE influences mainly the anisotropy of the emitters. Pressure has a strong impact on the anisotropic factor. Reducing the pressure results in a higher anisotropy, but the etch rate is also lower. A longer time of etching compensates this effect. Furthermore an improvement of homogeneity was observed. The impact of uprating is quite low for the anisotropic factor, but significant for the homogeneity. At low power the height and undercut of the emitters are more constant over the whole wafer. The oxidation itself is very homogeneous and has no observable effect on further variation of the homogeneity. This modified fabrication process allows solving the problem of inhomogeneity of previous field emission arrays.}, language = {en} } @misc{BiekerSchlaakWilfertetal., author = {Bieker, Johannes and Schlaak, Helmut F. and Wilfert, Stefan and Ławrowski, Robert Damian and Hausladen, Matthias and Schreiner, Rupert}, title = {Development of FE-based electron sources for XHVion gauges in cryogenic vacuum environments}, series = {32nd International Vacuum Nanoelectronics Conference (IVNC 2019), 22.-26.07.2019, Cincinnati, USA}, journal = {32nd International Vacuum Nanoelectronics Conference (IVNC 2019), 22.-26.07.2019, Cincinnati, USA}, language = {en} } @misc{ŁawrowskiHausladenSchreiner, author = {Ławrowski, Robert Damian and Hausladen, Matthias and Schreiner, Rupert}, title = {Individually Addressable Silicon Field Emission Cathodes Fabricated by Laser Micromachining}, series = {7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef}, journal = {7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef}, language = {en} } @misc{HausladenŁawrowskiSchreiner, author = {Hausladen, Matthias and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {Fast Pulse Source for Field Emission Applications}, series = {7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef}, journal = {7th ITG International Vacuum Electronics Workshop (IVEW) 2020 and 13th International Vacuum Electron Sources Conference (IVeSC) 2020, 26. - 29.5.2020, Bad Honnef}, language = {en} } @inproceedings{PrommesbergerLangerŁawrowskietal., author = {Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Muller, F. and Dams, Florian and Schreiner, Rupert and Serbun, Pavel and M{\"u}ller, G{\"u}nter}, title = {Comparison of integral and local field-emission properties of Mo-coated p-Si tip arrays}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225579}, pages = {192 -- 193}, abstract = {Silicon tip arrays were fabricated by means of reactive ion etching followed by oxidation for final sharpening and molybdenum thin film coating. The field-emission (FE) properties of these Mo-coated p-Si tip arrays were systemically investigated by different measurement techniques. Integral measurements in diode configuration yielded a turn-on field (for 1 nA) of 22 V/μm and nearly stable FE currents up to 6.6 μA at 38 V/μm. The effective field enhancements factor extracted from the FN plots is about 180. Detailed investigations of these FE arrays were also performed by means of field emission scanning microscopy combined with electron microscopy. A rather limited efficiency of the tips (50\% at 1500 V) and FE homogeneity (180 nA at 700 V) might be correlated with the varying morphology of the tips and the presence of oxides. Local I-V measurements of selected single tips revealed both activation and deactivation effects, which finally resulted in nearly reproducible I-V curves. Current stability measurements at a constant voltage showed rather large fluctuations (0.1-1 μA) of the FE current, which could be reduced up to 1.7\% by using of a PID-regulated voltage source. SEM images showed unchanged tip shape after the current processing.}, language = {en} } @inproceedings{ŁawrowskiLangerPrommesbergeretal., author = {Ławrowski, Robert Damian and Langer, Christoph and Prommesberger, Christian and Dams, Florian and Bachmann, Michael and Schreiner, Rupert}, title = {Fabrication and simulation of silicon structures with high aspect ratio for field emission devices}, series = {2014 27th International Vacuum Nanoelectronics Conference (IVNC), 6-10 July 2014, Engelberg, Switzerland}, booktitle = {2014 27th International Vacuum Nanoelectronics Conference (IVNC), 6-10 July 2014, Engelberg, Switzerland}, publisher = {IEEE}, doi = {10.1109/IVNC.2014.6894805}, pages = {193 -- 194}, abstract = {To obtain higher field enhancement factors of Si-tip structures, we present an improved fabrication process utilizing reactive-ion etching (RIE) with an inductively coupled plasma (ICP). In our design, a pillar under the tips is realized by a combination of RIE with ICP. With adjusted power settings (≈ 240 W) and step times (<; 5 s), vertical slopes with a low roughness of approximately 10 nm to 20 nm are possible. The remaining silicon is oxidized thermally to sharpen the emitters. A final tip radius of R <; 20 nm is obtained for the tips of the emitters. The pillar height HP can be mainly adjusted by the duration of the ICP-etching step. A total emitter height of H ≈ 6 μm with a pillar height of HP ≈ 5 μm is achieved. Simulations with COMSOL Multiphysics® are applied to calculate the field enhancement factor β. A two-dimensional model is used in rotational symmetry. In addition to the previous model, a pillar with a varying diameter {\O}P and height HP is added. A conventional emitter (H = 1 μm and R = 20 nm) placed on a pillar of the height HP ≈ 5 μm approximately results in a three times higher β-factor (β≈ 105). By decreasing the diameter {\O}P a slight increase of the β-factor is observed. However, the aspect ratio of the emitter mainly influences on the β-factor.}, language = {en} } @inproceedings{PrommesbergerLangerŁawrowskietal., author = {Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Dams, Florian and Schreiner, Rupert and Ławrowski, Robert Damian}, title = {Gated p-Si field emitter arrays for sensor applications}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC)}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC)}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225567}, pages = {164 -- 165}, abstract = {We report on gated p-type Si-tip array cathodes for implementation into field emission electron sources for sensor applications. Arrays of 16 and 100 tips with tip heights of 3 μm and tip radii below 30 nm with integrated gate electrodes concentrically positioned 2 μm below the tip apexes were fabricated using an improved process, which leads to an enhanced isolation layer quality with sufficient breakdown field strengths and low leakage currents. Integral measurements with a fixed grid potential of 400 V showed emission currents up to 35 μA for 100 tips at a cathode voltage of 150 V and an almost negligible parasitic gate current. The array with 16 p-type Si-tips showed a significant stabilization of the emission current in the range of 0.3 - 0.4 μA, for cathode voltages between 90 V and 150 V. The current fluctuation in this saturation regime was measured for 10 minutes and a value of less than ± 1\% was observed. No degradation of the cathode was found after 6 hours of operation at a constant cathode voltage of 100 V and a constant grid voltage of 400 V.}, language = {en} } @inproceedings{LangerPrommesbergerŁawrowskietal., author = {Langer, Christoph and Prommesberger, Christian and Ławrowski, Robert Damian and M{\"u}ller, F. and Schreiner, Rupert and Serbun, Pavel and M{\"u}ller, G{\"u}nter}, title = {Enhanced field emission from p-doped black silicon on pillar structures}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225547}, pages = {104 -- 105}, abstract = {Aligned square arrays of black silicon (b-Si) on top of pillars were fabricated on p-type silicon substrate by a deep-etching step combined with a b-Si process. Two 10×10 arrays with pillar heights of 8 μm and 20 μm and one b-Si reference sample without pillars were investigated. Integral field emission (FE) measurements of the arrays yielded rather low onset-fields between 6.4 V/μm and 13.5 V/μm and field enhancement factors between 430 and 800. The I-V curves showed typical Fowler-Nordheim behavior for low fields, whereas a saturation region was observed at higher fields. The maximum integral current in the saturation region was 8 μA at a field of 20 V/μm. The stability of the emission current was investigated over 3 hours and revealed moderate fluctuations of ± 8\% in the saturation region. Voltage scans showed well-aligned FE from nearly all pillars.}, language = {en} } @inproceedings{PrommesbergerŁawrowskiLangeretal., author = {Prommesberger, Christian and Ławrowski, Robert Damian and Langer, Christoph and Dams, Florian and Schreiner, Rupert}, title = {Realisierung von Siliziumspitzenarrays mit integrierter Gate-Elektrode f{\"u}r Anwendungen in der Vakuumsensorik}, series = {4. Landshuter Symposium Mikrosystemtechnik, Mikrosystemtechnik als Schl{\"u}sseltechnologie der Systemintegration, Tagungsband zum Symposium 12./13. M{\"a}rz 2014, Hochschule Landshut}, booktitle = {4. Landshuter Symposium Mikrosystemtechnik, Mikrosystemtechnik als Schl{\"u}sseltechnologie der Systemintegration, Tagungsband zum Symposium 12./13. M{\"a}rz 2014, Hochschule Landshut}, address = {Landshut}, isbn = {978-3-9812696-5-9}, pages = {36 -- 41}, abstract = {Bei der Feldemission (kalte Emission) k{\"o}nnen Elektronen durch ein starkes elektrisches Feld eine glatte und leitende Oberfl{\"a}che verlassen. Die Elektronen tunneln dabei durch eine Potentialbarriere, deren Breite durch ein {\"a}ußeres elektrisches Feld verkleinert wird. Durch das Hinzuf{\"u}gen einer integrierten Gate-Elektrode um eine Siliziumspitze kann die notwendige Einsatzspannung f{\"u}r Feldemission deutlich gesenkt werden. Zwischen Si-Kathode und Gate-Elektrode befindet sich dabei eine Isolationsschicht, die h{\"o}chste Anforderungen bez{\"u}glich der elektrischen Durchbruchsfestigkeit erf{\"u}llen muss. Mit einer Kombination aus Trocken- (Schichtdicke 50 nm) und Feuchtoxid (Schichtdicke 950 nm) konnte eine Isolationsschicht entwickelt werden, die im integrierten Aufbau eine minimale Durchbruchsfeldst{\"a}rke von 3,2 MV/cm aufweist. F{\"u}r die Realisierung von Siliziumkathoden mit integrierter Gate-Elektrode wurde ein bereits bestehender Herstellungsprozess um zus{\"a}tzliche Prozessschritte erweitert. Die {\"U}bertragung der lateralen Position der Spitze erfolgt durch Strukturierung des Umkehrlacks AZ5214 und einer RIE-{\"A}tzung der zuvor hergestellten SiO2-Schicht. Nach dem Entfernen der Lackschicht wird die vertikale Struktur der Siliziumspitzen durch einen RIE-{\"A}tzprozess mit den Prozessgasen SF6 und O)2 realisiert. Aus einer thermischen Oxidation bei 940 °C resultiert anschließend die Isolationsschicht zwischen Si-Kathode und Gate-Elektrode . Gleichzeitig wird diese Ansch{\"a}rfeoxidation auch zur Realisierung der endg{\"u}ltigen Spitzengeometrie verwendet. Durch die lithographische Strukturierung des Photolacks AZ5214 kann dabei die Fl{\"a}che der aufgedampften Gate-Elektrode festgelegt werden. Die Gate-Elektrode wird in einem selbstjustierenden Prozessschritt exakt konzentrisch um die Si-Spitze aufgedampft. Der gerichtete Aufdampfprozess bewirkt eine Abschattung, so dass das Oxidpl{\"a}ttchen nicht komplett von Metall ummantelt wird. Die Opferschicht aus Photolack wird mit den nicht ben{\"o}tigten Metallfl{\"a}chen in einem Lift-off-Prozess entfernt.}, language = {de} } @inproceedings{ŁawrowskiDemlVargheseetal., author = {Ławrowski, Robert Damian and Deml, Sonja and Varghese, T. and Schimpke, T.}, title = {Leuchtdiodenchips mit dreidimensional epitaktisch gewachsenen kristallinen GaN S{\"a}ulen}, series = {7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, M{\"u}nchen}, booktitle = {7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, M{\"u}nchen}, publisher = {VDE-Verlag}, address = {M{\"u}nchen}, isbn = {978-3-8007-4491-6}, pages = {131 -- 134}, abstract = {Um die Eigenschaften von Leuchtdioden zu verbessern und den Herstellungsprozess zu vereinfachen, wurde ein erweitertes Verfahren der metallorganischen Gasphasenepitaxie verwendet, um dichtgepackte dreidimensionale GaN-S{\"a}ulen mit hohen Aspektverh{\"a}ltnis auf Chipoberfl{\"a}chen zu wachsen. Diese selbstorganisierenden dreidimensionalen Strukturen sollen einerseits die lichtabstrahlende Oberfl{\"a}che der Leuchtdiode bei gleichbleibender Chipgr{\"o}ße vergr{\"o}ßern und andererseits durch die nichtpolaren Kristallebenen an den Seiten- und Deckfl{\"a}chen der S{\"a}ulen die Effizienz dieser Bauteile erh{\"o}hen. Messungen an ersten Bauteilen, die mit dieser Methode realisiert wurden, zeigen eine homogene blaue Emission bei Wellenl{\"a}ngen von 450 nm und abgestrahlte Lichtleistungen von bereits mehr als 50 mW bei Stromdichten von 120 A/cm². Diese Ergebnisse sind bereits sehr vielversprechend und lassen eine deutliche Performancesteigerung bei Optimierung der Herstellungstechnologie erwarten.}, language = {de} } @inproceedings{ŁawrowskiLangerPrommesbergeretal., author = {Ławrowski, Robert Damian and Langer, Christoph and Prommesberger, Christian and Dams, Florian and Serbun, Pavel and M{\"u}ller, G{\"u}nter and Schreiner, Rupert}, title = {Spitzen- und Kantenemitter aus Silizium mit einem hohen Aspektverh{\"a}ltnis f{\"u}r Ionisationsgassensoren}, series = {Mikrosystemtechnik als Schl{\"u}sseltechnologie der Systemintegration : 4. Landshuter Symposium Mikrosystemtechnik ; Tagungsband zum Symposium ; 12./13. M{\"a}rz 2014, Hochschule Landshut}, booktitle = {Mikrosystemtechnik als Schl{\"u}sseltechnologie der Systemintegration : 4. Landshuter Symposium Mikrosystemtechnik ; Tagungsband zum Symposium ; 12./13. M{\"a}rz 2014, Hochschule Landshut}, publisher = {Cluster Mikrosystemtechnik}, address = {Landshut}, isbn = {978-3-9812696-5-9}, pages = {28 -- 35}, abstract = {Durch die Optimierung von reaktivem Ionen{\"a}tzen mit induktiv gekoppeltem Plasma ist die Herstellung von verschiedenen Siliziumkathoden mit hoher Anisotropie und hohem Aspektverh{\"a}ltnis f{\"u}r Feldemissionsanwendungen m{\"o}glich. Simulationen mit COMSOL Multiphysics untermauern das Potential von solchen Spitzen- und Kantenfeldemittern. Die Ergebnisse der Simulation zeigen einen zwei- bis sechsfach h{\"o}heren Feld{\"u}berh{\"o}hungsfaktor der tiefge{\"a}tzten Strukturen im Vergleich zu identischen Emittern ohne zus{\"a}tzliche Tiefen{\"a}tzung. Feldemissionsmessungen best{\"a}tigen die Simulationsergebnisse. Der modifizierte Herstellungsprozess der Feldemitter erm{\"o}glicht somit einen zuverl{\"a}ssigen Betrieb von Feldemissionselektronenquellen bei kleineren makroskopischen Feldst{\"a}rken. Außerdem weisen die Messungen des Emissionsstroms im S{\"a}ttigungsbereich eine weitgehende Unabh{\"a}ngigkeit vom elektrischen Feld auf. Lokale Feldemissionsmessungen ergeben dadurch eine deutliche Stromstabilisierung, welche {\"u}ber große Feldst{\"a}rkenbereiche konstant bleibt. Die Nutzung der HAR-Emitter (high aspect ratio) ist damit eine gute Voraussetzung f{\"u}r einen zuverl{\"a}ssigen Betrieb der Emissionskathoden bei kleinen Feldst{\"a}rken f{\"u}r die Anwendung in Ionisationsgassensoren.}, language = {de} } @article{ŁawrowskiPrommesbergerLangeretal., author = {Ławrowski, Robert Damian and Prommesberger, Christian and Langer, Christoph and Dams, Florian and Schreiner, Rupert}, title = {Improvement of Homogeneity and Aspect Ratio of Silicon Tips for Field Emission by Reactive-Ion Etching}, series = {Advances in Materials Science and Engineering. Special issue: Advances in Smart Materials and Applications}, volume = {2014}, journal = {Advances in Materials Science and Engineering. Special issue: Advances in Smart Materials and Applications}, publisher = {Hindawi}, issn = {1687-8442}, doi = {10.1155/2014/948708}, pages = {1 -- 6}, abstract = {The homogeneity of emitters is very important for the performance of field emission (FE) devices. Reactive-ion etching (RIE) and oxidation have significant influences on the geometry of silicon tips. The RIE influences mainly the anisotropy of the emitters. Pressure has a strong impact on the anisotropic factor. Reducing the pressure results in a higher anisotropy, but the etch rate is also lower. A longer time of etching compensates this effect. Furthermore an improvement of homogeneity was observed. The impact of uprating is quite low for the anisotropic factor, but significant for the homogeneity. At low power the height and undercut of the emitters are more constant over the whole wafer. The oxidation itself is very homogeneous and has no observable effect on further variation of the homogeneity. This modified fabrication process allows solving the problem of inhomogeneity of previous field emission arrays.}, language = {en} } @inproceedings{ŁawrowskiPrommesbergerLangeretal., author = {Ławrowski, Robert Damian and Prommesberger, Christian and Langer, Christoph and Dams, Florian and Schreiner, Rupert}, title = {Influence of reactive ion etching parameters on the geometry of silicon tip cathodes for field emission}, series = {Applied Research Conference 2013, ARC 2013 : 17th and 18th October 2013, Deggendorf}, booktitle = {Applied Research Conference 2013, ARC 2013 : 17th and 18th October 2013, Deggendorf}, publisher = {Shaker}, address = {Aachen}, isbn = {978-3-8440-2274-2}, pages = {67 -- 69}, language = {en} } @incollection{ŁawrowskiPrommesbergerLangeretal., author = {Ławrowski, Robert Damian and Prommesberger, Christian and Langer, Christoph and Dams, Florian and Schreiner, Rupert}, title = {Feldemissionselektronenquellen basierend auf Siliziumemittern mit hohen Aspektverh{\"a}ltnis}, series = {Forschungsbericht der OTH Regensburg 2013}, booktitle = {Forschungsbericht der OTH Regensburg 2013}, address = {Regensburg}, pages = {47 -- 48}, language = {de} } @article{LindnerPipaBrandenburgetal., author = {Lindner, Matthias and Pipa, Andrei V. and Brandenburg, Ronny and Schreiner, Rupert}, title = {Expansion of surface barrier discharge scrutinized}, series = {Plasma Sources Science and Technology}, volume = {31}, journal = {Plasma Sources Science and Technology}, number = {10}, publisher = {IOP Publishing}, doi = {10.1088/1361-6595/ac95bf}, abstract = {Developing the fundamentals for the electrical diagnostics of surface dielectric barrier discharges (SDBDs) is of enormous importance for several applications, for example, flow control and gas cleaning. The main challenge is to account for the discharge expansion along the dielectric surface. Typically, a linear expansion with the amplitude of the applied voltage is observed. In this work, we report on a step-wise SDBD expansion along the Al 2 O 3 dielectric surface. More specific, the discharge occupied a certain area after ignition, which remained constant until the voltage exceeded the critical amplitude V L . This absence of expansion is seen as a linear dependence of the discharge power on the applied voltage and it was additionally confirmed by photographs with long exposure times. This novel phenomenon is more pronounced for thicker dielectrics. It is suggested that the derivative of the charge-voltage characteristics can be used for the determination of all essential parameters of the simplest equivalent circuit of SDBDs. Moreover, it was shown that the derivative of the charge-voltage characteristics for the positive half-cycle of the discharge agrees numerically with the voltage dependence of the reactor capacitance derived from photographs. This agreement between both measurement methods indicates a similar step-wise expansion of the SDBD even if a voltage amplitude above V L is applied. …}, language = {en} } @inproceedings{MingelsBornmannLuetzenkirchenHechtetal., author = {Mingels, Stephan and Bornmann, Benjamin and L{\"u}tzenkirchen-Hecht, Dirk and M{\"u}ller, G{\"u}nter and Langer, Christoph and Prommesberger, Christian and Schreiner, Rupert}, title = {Electric Field Dependence of Photoemission from n- and p-type Si Crystals}, series = {Proceedings, 35th International Free Electron Laser Conference (FEL 2013) : New York, NY, USA, August 26-19, 2013}, booktitle = {Proceedings, 35th International Free Electron Laser Conference (FEL 2013) : New York, NY, USA, August 26-19, 2013}, editor = {Scholl, Caitlin and Schaa, Volker R.W.}, publisher = {Curran}, address = {Red Hook, NY}, isbn = {9783954501267}, pages = {339 -- 343}, abstract = {The performance of free electron lasers depends on the brilliance of the electron source. Nowadays photo-cathodes (e.g. Cs2Te) are used despite of their high emittance. To develop robust and more brilliant cathodes we have built up an UHV system which enables systematic photoemission (PE) measurements with a tunable pulsed laser (hv) at high electric fields (E). First results on Au and Ag crystals revealed only low quantum efficiency (QE) due to fast electron relaxation. Hence, we have started QE(hv,E) investigations on n- and p-Si wafers. Resonant PE was observed above as well as below the work function O, which can be assigned to optical transitions in the electronic band structure or explained by thermally excited states at the bottom of the conduction band. As expected, only low QE values were achieved even for n-Si probably due to surface oxide. Moreover, a significant rise of the QE peaks above O were obtained for n-Si at E >8 MV/m but limited by the occurrence of parasitic field emission from dust particles.}, language = {en} } @inproceedings{SchreinerPrommesbergerLangeretal., author = {Schreiner, Rupert and Prommesberger, Christian and Langer, Christoph and Dams, Florian and Serbun, Pavel and Bornmann, Benjamin and Navitski, Aliaksandr and M{\"u}ller, G{\"u}nter}, title = {Highly uniform and stable electron field emission from B-doped Si-tip arrays for applications in integrated vacuum microelectronic devices}, series = {25th International Vacuum Nanoelectronics Conference (IVNC) - Jeju, Korea (South), 09.07. - 13.07.2012}, booktitle = {25th International Vacuum Nanoelectronics Conference (IVNC) - Jeju, Korea (South), 09.07. - 13.07.2012}, publisher = {IEEE}, address = {Piscataway, NJ.}, isbn = {978-1-4673-1984-3}, issn = {2380-6311}, doi = {10.1109/IVNC.2012.6316857}, pages = {1 -- 2}, abstract = {In order to improve the uniformity and field emission stability of p-type silicon tip arrays for pulsed sensor applications, we have systematically studied the influence of the fabrication parameters on the tip shape and the specific operating conditions. Based on detailed design calculations of the field enhancement, we have fabricated a series of hexagonal arrays of B-doped Si-tips in a triangular arrangement, each containing a different number of tips (91, 575 and 1300) of 1 μm height, 20 nm apex radius, and 20 μm pitch. The field emission properties of both individual tips and complete arrays were investigated with by field emission scanning microscopy. The current plateaus of these tips typically occur at about 10 nA and 60 V/μm field level. In this carrier depletion range, single tips provide the highest current stability (<; 4\%) and optical current switching ratios of ~2.5. Rather homogeneous emission of the tip arrays leads to an almost linear scaling of the saturation current (2 nA/tip) and to a much improved current stability (<; 1\%) measured over 1 hour.}, language = {en} } @inproceedings{SchreinerDamsPrommesbergeretal., author = {Schreiner, Rupert and Dams, Florian and Prommesberger, Christian and Bornmann, Benjamin and Serbun, Pavel and Navitski, Aliaksandr and M{\"u}ller, G{\"u}nter}, title = {Silicon-based integrated field emission electron sources for sensor application}, series = {24th International Vacuum Nanoelectronics Conference (IVNC), 2011 : 18 - 22 July 2011, Wuppertal, Germany}, booktitle = {24th International Vacuum Nanoelectronics Conference (IVNC), 2011 : 18 - 22 July 2011, Wuppertal, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, pages = {19 -- 20}, abstract = {We report on the design, fabrication and characterization of p-type silicon field emitter arrays for the application in compact fast switchable electron sources. Since standard silicon technology has been used to prepare the devices, they can be easily integrated with other silicon based sensors and electronic components, too. The emitter arrays consist of approx. 3×105 tips per cm2, with a tip radius less than 20 nm. By using self-aligned processes, an integrated gate electrode with a diameter of  3 μm was placed concentrically around the tips. A mesh of silicon-beams with a grating period of 100 μm and beam width of 20 μm forms the anode of the electron source. A glass wafer (thickness 300 μm) acts as spacer between anode and Si-tip cathode. Characterization of the field emission properties of the emitter arrays was performed by high resolution field emission scanning microscopy. The emitter arrays exhibit a highly stable and very homogeneous emission. A maximum stable current of 0.1 μA per tip was found. A saturation level in the voltage current characteristics, which was found at around 10 nA, supports current stabilisation and will enable optical modulation of the emission current.}, language = {en} } @inproceedings{BornmannMingelsSerbunetal., author = {Bornmann, Benjamin and Mingels, Stephan and Serbun, Pavel and L{\"u}tzenkirchen-Hecht, Dirk and M{\"u}ller, G{\"u}nter and Prommesberger, Christian and Langer, Christoph and Dams, Florian and Schreiner, Rupert}, title = {Photosensitivity of electron field emission from B-doped Si-tip arrays}, series = {25th International Vacuum Nanoelectronics Conference (IVNC) ; Jeju, Korea (South), 09.07.2012 - 13.07.2012}, booktitle = {25th International Vacuum Nanoelectronics Conference (IVNC) ; Jeju, Korea (South), 09.07.2012 - 13.07.2012}, publisher = {IEEE}, isbn = {978-1-4673-1984-3}, issn = {2380-6311}, doi = {10.1109/IVNC.2012.6316980}, pages = {1 -- 2}, abstract = {The electron current from field-emitting B-doped Si-tip arrays under illumination was studied. An improved cathode design with a patch of 271 tips yielded a reproducible cathode current between 0.2-2000 nA in the electric field range of 3.8-6.6 V/μm. The plateau in the Fowler-Nordheim plot shows the actual carrier depletion and leads to a very stable emission at ~1 μA with a current noise of less than 3.3 \%. Color-filtered halogen lamp illumination was used to investigate the photo-sensitivity of the saturation current. The intensity-normalized current switching ratio increases nonlinearly with the photon energy. This hints either for secondary generation in the conduction band or deeper valence band excitation. The first is supported by a rough estimation of the quantum efficiency. Further experiments with a tunable laser and electron spectroscopy are planned.}, language = {en} } @inproceedings{LangerPrommesbergerDamsetal., author = {Langer, Christoph and Prommesberger, Christian and Dams, Florian and Serbun, Pavel and Bornmann, Benjamin and Mingels, Stephan and M{\"u}ller, G{\"u}nter and Schreiner, Rupert}, title = {Si-Feldemissionskathoden f{\"u}r Anwendungen in miniaturisierten Ionisationsvakuumsensoren}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft e.V. (DPG), Regensburg, 10. - 15. M{\"a}rz 2013}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft e.V. (DPG), Regensburg, 10. - 15. M{\"a}rz 2013}, publisher = {Deutsche Physikalische Gesellschaft e.V.}, abstract = {Feldemissionselektronenquellen sind aufgrund ihrer prinzipiellen Vorteile gegen{\"u}ber Gl{\"u}hkathoden bereits seit l{\"a}ngerer Zeit Gegenstand der Forschung und werden bisher nur in einigen Spezialanwendungen erfolgreich eingesetzt. Hierbei werden Einzelspitzen mit Spannungen im kV-Bereich und Str{\"o}men im nA-Bereich betrieben. Dagegen werden f{\"u}r miniaturisierte Sensorsysteme eher Spannungen von ca. 100 V und Str{\"o}me von ca. 1 mA ben{\"o}tigt. Dazu wurden bisher meist Feldemissionskathoden mit CNTs vorgeschlagen, welche f{\"u}r Anwendungen in der Halbleiterindustrie aufgrund des Kohlenstoffanteils nicht erw{\"u}nscht sind. Ziel unserer Arbeit ist es, Si-basierte Elektronenquellen zu realisieren, die mit anderen miniaturisierten Vakuumsensoren auf einem Chip integrierbar sind. Mithilfe eines optimierten Herstellungsprozesses konnten wir p-Si-Spitzenarrays mit Spitzenradien von wenigen nm realisieren [1]. Messungen an diesen Strukturen zeigen ein sehr homogenes Emissionsverhalten, das vor allem im S{\"a}ttigungsbereich bei Emissionsstr{\"o}men von ca. 10 nA pro Spitze zeitlich stabil (Schwankungen < 5 \%) und optisch schaltbar (Faktor > 2.5) ist [2].}, language = {de} } @article{BornmannMingelsDamsetal., author = {Bornmann, Benjamin and Mingels, Stephan and Dams, Florian and Prommesberger, Christian and Schreiner, Rupert and L{\"u}tzenkirchen-Hecht, Dirk and M{\"u}ller, G{\"u}nter}, title = {Electron spectrometer in adjustable triode configuration for photo-induced field emission measurements}, series = {The Review of scientific instruments}, volume = {83}, journal = {The Review of scientific instruments}, number = {1}, publisher = {American Institute of Physics}, address = {Melville, NY}, doi = {10.1063/1.3673475}, abstract = {We have constructed a new ultrahigh vacuum apparatus with a triode configuration for the systematic investigation of photo-induced field emission (PFE) from metallic or semiconducting cathodes. These are exposed to electric fields up to 400 MV∕m and laser irradiation by means of hole or mesh gates. Cathodes and gates are in situ exchangeable and adjustable with high precision to ensure a homogeneous extraction of electrons which are partially transmitted to the fixed electron spectrometer. Its hemispherical sector analyzer provides an energy resolution limit of 8 meV. The commissioning of the measurement system has been performed with a tungsten needle. Its temperature showed up in the high-energy tail of the electron spectrum, while its work function was derived from the spectral low-energy part combined with the integral current-voltage curve. First PFE measurements on B-doped Si-tip arrays yielded a small field emission current increase under green laser illumination. A shift and splitting of the energy spectra was observed which revealed different emission regimes as well as the photosensitivity of the cathode due to carrier excitation into the conduction band. For the full exploitation of the PFE system, a tunable laser over a wide eV-range is required.}, language = {en} } @inproceedings{BornmannMingelsLuetzenkirchenHechtetal., author = {Bornmann, Benjamin and Mingels, Stephan and L{\"u}tzenkirchen-Hecht, Dirk and M{\"u}ller, G{\"u}nter and Dams, Florian and Schreiner, Rupert}, title = {Field emission spectroscopy studies on photo-sensitive p-doped Si-tip arrays}, series = {24th International Vacuum Nanoelectronics Conference (IVNC), 2011 : 18 - 22 July 2011, Historische Stadthalle Wuppertal, Germany}, booktitle = {24th International Vacuum Nanoelectronics Conference (IVNC), 2011 : 18 - 22 July 2011, Historische Stadthalle Wuppertal, Germany}, publisher = {IEEE}, isbn = {978-3-00-035081-8}, issn = {2380-6311}, pages = {101 -- 102}, abstract = {The influence of laser illumination on the integral as well as on the energy-resolved electron currents from well-defined p-doped Si-tip arrays was investigated. First results have provided stable cathode currents between 100 nA and 500 μA in a field range of 2-20 V/μm. Green laser illumination resulted in an enhanced cathode current and an increased population of the conduction band which can be seen in the spectra. Charging of the cathode surface, however, leads to a shift and broadening of the spectra which complicate their analysis. Therefore, further experiments with a rotatable cathode and a varying number of tips as well as with a tunable laser are planned.}, language = {en} } @inproceedings{PrommesbergerDamsLangeretal., author = {Prommesberger, Christian and Dams, Florian and Langer, Christoph and Schreiner, Rupert and Rutkowski, S. and Bornmann, Benjamin and M{\"u}ller, G{\"u}nter}, title = {Simulation of electron trajectories of a field emission electron source in triode configuration by using finite element methods}, series = {24th International Vacuum Nanoelectronics Conference (IVNC), 2011 : 18 - 22 July 2011, Historische Stadthalle Wuppertal, Germany}, booktitle = {24th International Vacuum Nanoelectronics Conference (IVNC), 2011 : 18 - 22 July 2011, Historische Stadthalle Wuppertal, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-3-00-035081-8}, issn = {2380-6311}, pages = {144 -- 145}, abstract = {The finite element simulation program COMSOL Multiphysics® was used to simulate the emission efficiency of a silicon tip electron source in triode configuration for different geometries and electrode potentials. The simulation predicts a maximum emission efficiency of 84\% for an optimized structure. In a second simulation a gate electrode was concentrically arranged above a single CNT column. Here, the efficiency was simulated as a function of gate hole geometry, electrode potentials and distances between the electrodes. The simulation shows that a conical shape of the gate hole results in an efficiency up to nearly 100\%.}, language = {en} } @inproceedings{BachmannDamsDuesbergetal., author = {Bachmann, Michael and Dams, Florian and D{\"u}sberg, F. and Hofmann, Martin and Pahlke, Andreas and Langer, Christoph and Ławrowski, Robert Damian and Prommesberger, Christian and Schreiner, Rupert}, title = {Stability investigation of high aspect ratio n-type silicon field emitter arrays}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225584}, pages = {204 -- 205}, abstract = {Electron sources based on silicon field emitter arrays, produced in processes based on semiconductor technology, are good candidates for a miniaturized X-ray source. A key parameter for this application is the stability of the X-ray photon flux and, thus, the emission current. In the present work we have investigated the influence of the residual gas pressure and a resistor in series on the emission stability of a high aspect ratio n-type silicon emitter array with hybrid extraction electrode. An increase of current fluctuations was found for pressures above 10-6 mbar. High resistances in series to the emitter array alter the emission characteristics, but greatly suppress spikes in the emission current and improve its stability. This, however, strongly depends on the bias point. The field enhancement factor is not affected by the resistance. In a long term measurement the emission current was found to be constant after an initial phase of degradation.}, language = {en} } @article{PangerlMoserMuelleretal., author = {Pangerl, Jonas and Moser, Elisabeth and M{\"u}ller, Max and Weigl, Stefan and Jobst, Simon and R{\"u}ck, Thomas and Bierl, Rudolf and Matysik, Frank-Michael}, title = {A sub-ppbv-level Acetone and Ethanol Quantum Cascade Laser Based Photoacoustic Sensor- Characterization and Multi-Component Spectra Recording in Synthetic Breath}, series = {Photoacoustics}, volume = {30}, journal = {Photoacoustics}, publisher = {Elsevier}, issn = {2213-5979}, doi = {10.1016/j.pacs.2023.100473}, pages = {1 -- 12}, abstract = {Trace gas analysis in breath is challenging due to the vast number of different components. We present a highly sensitive quantum cascade laser based photoacoustic setup for breath analysis. Scanning the range between 8263 and 8270 nm with a spectral resolution of 48 pm, we are able to quantify acetone and ethanol within a typical breath matrix containing water and CO2. We photoacoustically acquired spectra within this region of mid-infra-red light and prove that those spectra do not suffer from non-spectral interferences. The purely additive behavior of a breath sample spectrum was verified by comparing it with the independently acquired single component spectra using Pearson and Spearman correlation coefficients. A previously presented simulation approach is improved and an error attribution study is presented. With a 3σ detection limit of 6.5 ppbv in terms of ethanol and 250 pptv regarding acetone, our system is among the best performing presented so far.}, language = {en} } @article{MenzelKammlerConradetal., author = {Menzel, Andreas and Kammler, Martin and Conrad, E. H. and Yeh, V. and Hupalo, Myron and Tringides, Michael C.}, title = {Kinetics measurements of Pb island growth on Si(111)}, series = {Physical Review B}, volume = {67}, journal = {Physical Review B}, number = {16}, publisher = {American Physical Society}, doi = {10.1103/PhysRevB.67.165314}, abstract = {We present the results of kinetics experiments on quantum-size-effects (QSE) Pb islands formed on Si(111). We have looked at the evolution of seven-layer Pb islands from five-layer Pb islands due to the transport of Pb atoms from the interisland region, overcoming a barrier at the island edges, and moving to the island tops. By analyzing low-energy electron-diffraction and scanning-tunneling microscopy data, we have estimated the barrier for layer formation in this system to be ∼0.32eV. This energy is much larger than that expected from QSE electronic contributions alone.}, language = {en} } @inproceedings{SerbunNavitskiMuelleretal., author = {Serbun, Pavel and Navitski, Aliaksandr and M{\"u}ller, G{\"u}nter and Schreiner, Rupert and Prommesberger, Christian and Langer, Christoph and Dams, Florian}, title = {Scaling of the field emission current from B-doped Si-tip arrays}, series = {25th International Vacuum Nanoelectronics Conference (IVNC) ; Jeju, Korea (South), 09.07.2012 - 13.07.2012}, booktitle = {25th International Vacuum Nanoelectronics Conference (IVNC) ; Jeju, Korea (South), 09.07.2012 - 13.07.2012}, publisher = {IEEE}, address = {Piscataway, N.J.}, isbn = {978-1-4673-1984-3}, issn = {2380-6311}, doi = {10.1109/IVNC.2012.6316965}, pages = {1 -- 2}, abstract = {We have fabricated a test chip with various hexagonal arrays of B-doped Si tips (height ~ 3 μm, apex radius <; 30 nm, number 1-4447, resistivity 4 Ωcm, 100 orientation) in triangular arrangement (pitch 10 μm, density 1.16×10 6 cm -2 ) in order to systematically investigate the field emission current scaling with the number N of tips. Regulated voltage scans for 1 nA revealed rather efficient emission from nearly all tips of the arrays at an average field of 15 V/μm. The expected current plateau was always obtained at fields around 20 V/μm, but its width strongly increased with N. In this carrier depletion range, the single tip provided a much higher stability (<; 5\%) of the current (2-3 nA) than at lower (>; 50 \%) and higher currents (>; 30\%). Integral current measurements of the hexagonal arrays resulted in a statistically improved current stability (<; 1\%) but only a weak increase of the total current with N 0.28 yet. These results will be discussed with respect to the remaining inhomogeneity of the tips.}, language = {en} } @masterthesis{Zhang, type = {Bachelor Thesis}, author = {Zhang, Yunjia}, title = {Microcontroller Programming of a Contactless Optical Position Measurement Device}, address = {Regensburg}, doi = {10.35096/othr/pub-8464}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-84647}, school = {Ostbayerische Technische Hochschule Regensburg}, pages = {37}, abstract = {This thesis focuses on programming a microcontroller to receive and process data from a waveguide optic distance sensor, and to visualize the measured distance on a display screen. During the measurement process, LED moves above the 3D-printed D-shaped waveguide. The light transmitted through the waveguide is converted into photocurrents by photodiodes located at both ends of the optical waveguide, which are then converted into voltage signals through specific electronic components. By computing the ratio of the optical power detected at each end, the relative position of the LED along the waveguide can be determined. In this project, a microcontroller is used to acquire the voltage data, correct measurement errors, calculate the LED position, and display the result on screen in real time. Compared to manual calculation of photocurrent values, using a microcontroller for automated data processing greatly improves speed and efficiency. At the same time, real-time visualization enhances the system's practicality and usability, making it more suitable for future applications.}, language = {en} } @inproceedings{KammlerHornvonHoegenVossetal., author = {Kammler, Martin and Horn- von Hoegen, Michael and Voss, N. and Tringides, Michael C. and Menzel, Andreas and Conrad, E. H.}, title = {Surface Dynamics of Stepped Si(001) Studied by Temporal Leed Spectroscopy}, series = {Collective Diffusion on Surfaces: Correlation Effects and Adatom Interactions (NATO Science Series II: Mathematics, Physics and Chemistry}, volume = {29}, booktitle = {Collective Diffusion on Surfaces: Correlation Effects and Adatom Interactions (NATO Science Series II: Mathematics, Physics and Chemistry}, publisher = {Springer}, doi = {10.1007/978-94-010-0816-7_3}, pages = {23 -- 32}, abstract = {We present the first demonstration of Temporal LEED Spectroscopy's ability to measure surface dynamics as shown by a study of step dynamics on vicinal Si(001). While we measure activation energies consistent with other work, the observed microscopic mechanism driving the fluctuations is inconsistent with previous claims. We exclude evaporation/condensation of atoms from the steps as the rate limiting kinetics in the temperature range of this experiment. Possible reasons for these differences are discussed.}, language = {en} } @article{StreubuehrKalusZhouetal., author = {Streub{\"u}hr, C. and Kalus, Annika and Zhou, Ping and Ligges, Manuel and Hanisch-Blicharski, Anja and Kammler, Martin and Bovensiepen, U. and Horn-von Hoegen, Michael and von der Linde, D.}, title = {Comparing ultrafast surface and bulk heating using time-resolved electron diffraction}, series = {Applied Physics Letters}, volume = {104}, journal = {Applied Physics Letters}, publisher = {American Institute of Physics}, doi = {10.1063/1.4872055}, pages = {1 -- 3}, abstract = {From measurements of the transient Debye-Waller effect in Bismuth, we determine the buildup time of the random atomic motion resulting from the electronic relaxation after short pulse laser excitation. The surface sensitive reflection high energy electron diffraction and transmission electron diffraction yield a time constant of about 12 ps and 3 ps, respectively. The different energy transfer rates indicate relatively weak coupling between bulk and surface vibrational modes. (C) 2014 AIP Publishing LLC.}, language = {en} } @incollection{WeiglMuellerPangerletal., author = {Weigl, Stefan and M{\"u}ller, Max and Pangerl, Jonas and R{\"u}ck, Thomas}, title = {Scopes and Limits of Photoacoustic Spectroscopy in Modern Breath Analysis}, series = {Breath Analysis}, booktitle = {Breath Analysis}, publisher = {Springer nature}, isbn = {978-3-031-18526-7}, doi = {10.1007/11663_2022_22}, pages = {101 -- 159}, abstract = {Photoacoustic spectroscopy is a viable tool for trace gas detection in various application fields. In recent years, this technique has been exploited more and more for modern breath analysis as well. Within this chapter, a holistic overview of photoacoustic spectroscopy is presented, while maintaining the relationship to breath analysis. Therefore, a concise description of the fundamentals of photoacoustic spectroscopy is provided. This is essential for understanding the scopes and limits of this outstanding measurement technique being described within this chapter. In the past several different types of photoacoustic measurement setups for trace gas detection have emerged, including different light sources, modulation techniques, and detection schemes. These are described shortly and advantages as well as disadvantages, especially in relation to breath analysis, are highlighted. Though being a promising sensor principle, measurement devices based on photoacoustic spectroscopy are still rare on the sensor market, especially when it comes to trace gas detection in complex gas matrices, e.g., human breath exhale. One main reason is due to possible molecular interactions influencing the relaxational behavior of the analyte altering the sensor signal. Recent results shedding light on the intricate relaxational processes within complex gas matrices are discussed in detail, providing approaches to overcome this issue. Finally, various applications of photoacoustic spectroscopy in breath analysis are described demonstrating the great potential of this technology.}, language = {en} } @misc{OlbrichPongratzBierletal., author = {Olbrich, Florian and Pongratz, Christian and Bierl, Rudolf and Ehrlich, Ingo}, title = {Method and System for Evaluating a Structural Integrity of an Aerial Vehicle}, series = {Europ{\"a}isches Patentblatt (09.12.2020) zur Anmeldung: OTH Regensburg, Anmeldenummer: 19179054.2, Patentnummer 1001/3748327, Ver{\"o}ffentlichungsnummer: 3 748 327}, journal = {Europ{\"a}isches Patentblatt (09.12.2020) zur Anmeldung: OTH Regensburg, Anmeldenummer: 19179054.2, Patentnummer 1001/3748327, Ver{\"o}ffentlichungsnummer: 3 748 327}, pages = {395 -- 396}, language = {en} } @article{ŁawrowskiPirkerKanekoetal., author = {Ławrowski, Robert Damian and Pirker, Luka and Kaneko, Keita and Kokubo, Hiroki and Bachmann, Michael and Ikuno, Takashi and Remskar, Maja and Schreiner, Rupert}, title = {Field emission from nanotubes and flakes of transition metal dichalcogenides}, series = {Journal of Vacuum Science and Technology B}, volume = {38}, journal = {Journal of Vacuum Science and Technology B}, number = {3}, publisher = {AIP Publishing}, doi = {10.1116/1.5140474}, pages = {032801}, abstract = {Transition metal dichalcogenides such as MoS2 and WS2 are low-dimensional semiconductor materials. MoS2 and WS2 nanotubes and flakes were grown by a chemical transport reaction under a temperature gradient. I2 was used as a transport agent for previously synthesized MoS2 and WS2, respectively. These multilayered nanotubes are indirect bandgap semiconductors with a bandgap depending on their diameter. WS2 flakes were prepared by the sulfurization of thin WOx flakes. To increase the field enhancement of such low-dimensional structures by a higher aspect ratio, two approaches were examined: (a) the MoS2 and WS2 nanotubes were attached individually by a focused ion beam with Pt on dry etched n-type Si pillars and (b) the WS2 flakes were grown directly on the surface of the (n-type and p-type) Si pillars. Integral field emission measurements were performed in a diode configuration with a 50 μm mica spacer in a vacuum chamber at pressures of about 10-9 mbar. At a voltage of 900 V (18 MV/m), the integral emission current from the nanotubes is up to 11 μA for the lateral mounted MoS2 and about 1.3 μA (1.0 μA) for the upright mounted WS2 (MoS2). The onset voltage for a current of 1 nA is about 550 V for MoS2 and 500 V for WS2, respectively. The voltage conversion factor is in the range of 6 × 104-8 × 104 cm-1 for the nanotubes. The mounted MoS2 flakes show a field emission current of about 6 μA at 18 MV/m in contrast to the directly grown WS2 flakes, which show a pronounced saturation regime and, therefore, a lower emission current of about 0.5 μA is reached at 1500 V (25 MV/m). The WS2 flakes show a two times higher (1 × 105 cm-1) voltage conversion factor in comparison to the MoS2 flakes (5 × 104 cm-1). The extracted characteristics of the current-limiting part show a difference in the behavior of the extracted current-limiting characteristics between the lateral (linear) and upright mounted (exponential) nanotubes and the MoS2 flakes. In contrast, the WS2 flakes show charge carrier depletion effects.}, language = {en} } @article{KleshchSerbunLuetzenkirchenHechtetal., author = {Kleshch, Victor I. and Serbun, Pavel and L{\"u}tzenkirchen-Hecht, Dirk and Orekhov, Anton and Ivanov, Victor E. and Prommesberger, Christian and Langer, Christoph and Schreiner, Rupert and Obraztsov, Alexander N.}, title = {A Comparative Study of Field Emission from Pristine, Ion-treated and Tungsten Nanoparticle-decorated p-type Silicon Tips}, series = {Physica Status Solidi B}, volume = {256}, journal = {Physica Status Solidi B}, number = {9}, publisher = {Wiley}, doi = {10.1002/pssb.201800646}, abstract = {The field electron emission characteristics of individual tips of a silicon field emitter array are analyzed. The array of conical-shaped tips is fabricated on a p-type silicon wafer by using reactive ion etching and sharpening oxidation. The tips are decorated with single tungsten nanoparticles at their apexes. Furthermore, the focused ion beam is also used to increase surface conductivity of some of the tips. Comparative measurements of field emission are performed by using the scanning anode probe field emission microscopy technique. All types of tips demonstrated emission activation consisting of a sudden current increase at a certain value of the applied voltage. Compared to the pristine tips, a noticeable reduction of the saturation effect in the current-voltage characteristics and a smaller light sensitivity for the decorated tips is found. For ion-treated tips, saturation effects and light sensitivity are completely suppressed. Scanning electron microscopy observations reveal the formation of single nanoscale protrusions extending from the metal particles and from the apexes of bare ion-treated tips after exposure under strong electric fields during the field emission measurements. The influence of protrusions growth on characteristics of silicon field emitter arrays is discussed.}, language = {en} } @inproceedings{SerbunPorshynMuelleretal., author = {Serbun, Pavel and Porshyn, Vitali and M{\"u}ller, G{\"u}nter and L{\"u}tzenkirchen-Hecht, Dirk and Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {Field emission behavior of single n- and p-type black Si pillar structures}, series = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, booktitle = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, publisher = {IEEE}, doi = {10.1109/IVNC.2018.8520292}, pages = {1-2}, abstract = {We have investigated the properties of single n- and p-type black silicon (b-Si) pillars with a height of 20 μ m under strong electric field and halogen lamp or laser illumination. For both type of b-Si pillar structures, I-V measurements revealed strong activation effects, which consisted in sudden current increases during the first up/down voltage sweeps. The maximum reproducible emission current from a single n-type b-Si pillar structure was about 15 μ A. A pronounced saturation region at 240 nA was observed for a single p-type b-Si pillar. The current fluctuation over time showed a standard deviation of 28\% and 2.5\% for n- and p-type single b-Si pillar structures, respectively. Optical switching under halogen lamp illumination resulted in at least 3 times higher saturation currents and showed a linear dependence of the FE current on the laser power.}, language = {en} } @article{MingelsPorshynPrommesbergeretal., author = {Mingels, Stephan and Porshyn, Vitali and Prommesberger, Christian and Langer, Christoph and Schreiner, Rupert and L{\"u}tzenkirchen-Hecht, Dirk and M{\"u}ller, G{\"u}nter}, title = {Photosensitivity of p-type black Si field emitter arrays}, series = {Journal of Applied Physics}, volume = {119}, journal = {Journal of Applied Physics}, number = {16}, doi = {10.1063/1.4948328}, abstract = {We have investigated the properties of black Si field emitter arrays under strong electric fields and laser illumination. A low onset field of 1.8 MV/m for an emission current of 1 nA was obtained. A pronounced saturation region of the dark and photo-enhanced current was observed, which provided a short-term stability of 0.1\% at 0.4 μA and 0.7\% at 1.0 μA, respectively. As maximum value for the photosensitivity, an on-off current switching ratio of 43 reaching about 13 μA was achieved at a laser power of 15 mW. Electron spectra in the dark and under laser illumination are presented, showing a current and light-sensitive voltage drop across the emitters as well as hints for hot electron emission.}, language = {en} } @inproceedings{SerbunPorshynMuelleretal., author = {Serbun, Pavel and Porshyn, Vitali and M{\"u}ller, G{\"u}nter and Mingels, Stephan and L{\"u}tzenkirchen-Hecht, Dirk and Bachmann, Michael and D{\"u}sberg, Felix and Dams, Florian and Hofmann, Martin and Pahlke, Andreas and Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {Field emission behavior of Au-tip-coated p-type Si pillar structures}, series = {29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada}, booktitle = {29th International Vacuum Nanoelectronics Conference (IVNC), 2016, 11-15 July, Vancouver, BC, Canada}, publisher = {IEEE}, issn = {2380-6311}, doi = {10.1109/IVNC.2016.7551516}, pages = {181 -- 182}, abstract = {Precisely aligned high-aspect-ratio (HAR) silicon tip arrays were fabricated using enhanced reactive ion etching with an inductively-coupled-plasma followed by a sharpening oxidation. A gold thin film was then sputtered only on the tips of the HAR structures. Field-emission (FE) properties from Au-coated HAR p-Si tip array cathodes have been systematically investigated by means of field emission scanning microscopy (FESM). A rather high efficiency of the HAR Si structures (71\% at 550 V), but limited homogeneous FE with currents of 1-600 nA might be correlated with the varying geometry of the tips and the presence of oxides. I-V measurements of single Au-coated HAR emitters revealed activation effects and the saturation current region at 3 nA. An increase of the saturation current by 4 orders of magnitude was observed during 20 hours of conditioning at constant voltage, which finally resulted in nearly reproducible FN curves with a ß-factor of 473. An excellent stability of the emission current of less than 1 \% was obtained during the additional long-time conditioning at constant voltage. Optical switching under halogen lamp illumination resulted in at least 2 times higher saturation currents and showed a linear dependence of the FE current on the light color temperature.}, language = {en} } @inproceedings{SerbunPorshynLuetzenkirchenHechtetal., author = {Serbun, Pavel and Porshyn, Vitali and L{\"u}tzenkirchen-Hecht, Dirk and Prommesberger, Christian and Langer, Christoph and Ławrowski, Robert Damian and Schreiner, Rupert}, title = {Photosensitivity of single silicon high-aspect-ratio tips with different doping levels}, series = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, booktitle = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, publisher = {IEEE}, doi = {10.1109/IVNC.2018.8520288}, pages = {1-2}, abstract = {Photosensitivity of single lightly p-doped, highly p-doped, with an integrated p/n junction and intrinsic high-aspect-ratio (HAR) silicon tips was investigated in an ultra-high vacuum environment. The current-voltage characteristics (I-V) of the lightly doped p-type HAR tips showed a characteristic current saturation at around 10-12 nA, whereas the HAR Si tips with p/n junction showed similar saturation phenomena, however, at much smaller current values starting at ~20-30 pA. Optical switching under a halogen lamp illumination resulted in at least 2-4 times higher saturation currents and showed a linear dependence between the illumination power and the FE current, for both types of structures. In case of the highly p-doped HAR tips optical current switching effects, i. e. current saturation, were observed at rather low current levels 1-2 pA. Intrinsic HAR Si-tips showed relative unstable field emission behavior without a clear evidence of the photosensitivity.}, language = {en} } @inproceedings{SchreinerLangerPrommesbergeretal., author = {Schreiner, Rupert and Langer, Christoph and Prommesberger, Christian and Ławrowski, Robert Damian and Dams, Florian and Bachmann, Michael and D{\"u}sberg, F. and Hofmann, Martin and Pahlke, Andreas and Serbun, Pavel and Mingels, Stephan and M{\"u}ller, G{\"u}nter}, title = {Semiconductor field emission electron sources using a modular system concept for application in sensors and x-ray-sources}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225572}, pages = {178 -- 179}, abstract = {Semiconductor field emitters are suitable candidates for applications, which require a very stable field emission (FE) current and a high emission uniformity over the entire emission area. By using different materials and geometries, we are able to vary the FE characteristics within a wide range. Each specific application requires its own optimized design for the cathode as well as for the other parts of the FE electron source. To meet as many of these requirements as possible while using only a limited number of different prefabricated components, we established a modular system concept for our FE electron source. This allows the implementation of almost every cathode material. For first characterizations, we used gated p-type Si cathodes with 16 tips. We obtained stable FE currents of 0.4 μA for a grid-potential of 400 V and a gate potential of 100 V. Almost 100\% of the electrons are emitted towards the grid-electrode. Parasitic leakage paths, as well as the electron emission towards the gate-electrode can be neglected. Approximately 10\% of the electrons are transmitted through the grid and reach the external anode. This is in good agreement with the optical transmission through the grid-mesh.}, language = {en} } @inproceedings{ŁawrowskiLangerPrommesbergeretal., author = {Ławrowski, Robert Damian and Langer, Christoph and Prommesberger, Christian and Schreiner, Rupert and Mingels, Stephan and Porshyn, Vitali and Serbun, Pavel and M{\"u}ller, G{\"u}nter}, title = {Field emission from surface textured GaN with buried double-heterostructures}, series = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, booktitle = {2015 28th International Vacuum Nanoelectronics Conference (IVNC), 13-17 July 2015, Guangzhou, China}, publisher = {IEEE}, doi = {10.1109/IVNC.2015.7225548}, pages = {106 -- 107}, abstract = {In this contribution we report on field emission (FE) cathodes based on thin-film LED-technology and surface texturing. The FE cathode can be used both as an n-GaN cathode with an electrical contact at the top side metallization as well as a pn-GaN diode contacting only the p-GaN layer at the bottom side of the structure. The local and integral FE properties of the textured surface of the LED structure were investigated. For n-GaN an integral emission current up to 1.0 μA at an electric field of 19 V/μm was achieved. The pn-GaN diode measurements showed an integral current saturation behavior with two orders of magnitude lower FE currents. Regulated voltage scans obtained by FE scanning microscopy revealed a well-distributed emission over the whole cathode area. Measurements under pulsed tunable laser illumination and moderate electric fields indicated charge carrier generation in the buried double-heterostructures at photon energies below 3.5 eV besides normal photoemission above 4.1 eV.}, language = {en} } @inproceedings{BresinskyReusner, author = {Bresinsky, Markus and Reusner, Florian}, title = {GLOBE - Learn and Innovate Digitization by a Virtual Collaboration Exercise and Living Lab}, series = {Interactivity, Game Creation, Design, Learning, and Innovation. 6th International Conference, ArtsIT 2017, and Second International Conference, DLI 2017, Heraklion, Crete, Greece, October 30-31, 2017, Proceedings}, booktitle = {Interactivity, Game Creation, Design, Learning, and Innovation. 6th International Conference, ArtsIT 2017, and Second International Conference, DLI 2017, Heraklion, Crete, Greece, October 30-31, 2017, Proceedings}, publisher = {Springer Nature}, doi = {10.1007/978-3-319-76908-0_26}, pages = {273 -- 281}, abstract = {This paper presents an advanced interactive learning platform .dot that implements the GLOBE exercise, using innovative information and communication technologies to enhance learning and development of management and leadership skills in a complex organizational setting. GLOBE on the one hand focuses on competences around ICT and virtual collaboration, and on the other hand on digital transformation, technologies and tools at higher education institutions. By this applied science, learning and developing on the real-world platform, analysis and drive of digital innovation and transformation can be fostered. The main goal is to co-create knowledge and solutions in the following focused subjects: Management and leadership of multidisciplinary, multinational and multicultural virtual and real collaboration in a complex organizational environment. GLOBE uses real world scenarios (e.g. United Nations mission) and involves real world actors. This comprehensive educational approach should enhance learning techniques and leverage learning progress with hands-on experiences and applied science in the context of ICT and virtual collaboration, and the embodied dynamics of behavior to support innovation and development.}, language = {en} } @inproceedings{MingelsPorshynSerbunetal., author = {Mingels, Stephan and Porshyn, Vitali and Serbun, Pavel and L{\"u}tzenkirchen-Hecht, Dirk and M{\"u}ller, G{\"u}nter and Prommesberger, Christian and Langer, Christoph and Schreiner, Rupert and Lutzenkirchen-Hecht, Dirk}, title = {Photo-enhanced field emission properties of p-doped black Si arrays}, series = {2016 29th International Vacuum Nanoelectronics Conference (IVNC), 11-15 July 2016, Vancouver, BC, Canada}, booktitle = {2016 29th International Vacuum Nanoelectronics Conference (IVNC), 11-15 July 2016, Vancouver, BC, Canada}, publisher = {IEEE}, doi = {10.1109/IVNC.2016.7551447}, pages = {1 -- 2}, abstract = {We have carried out systematic investigations of p-type black Si field emitter arrays under laser illumination. As expected the current-voltage characteristic revealed a strong saturation providing a high photosensitivity, which had a maximum on-off ratio of 43 at a maximum current of 13 μA. The saturation current was stable in the dark as well as under illumination with fluctuations <;0.7\%. Results from time-resolved measurements of the photo-sensitivity showed a rather fast response but a long decay time. Electron spectra in the dark and under laser illumination revealed the origin of the emission.}, language = {en} } @inproceedings{HauslerFischerWunderlichetal., author = {Hausler, Peter and Fischer, Johannes and Wunderlich, Lukas and Recum, Patrick and Peller, Sebastian and Hirsch, Thomas and Bierl, Rudolf}, title = {Miniaturisierte Sensoren basierend auf Oberfl{\"a}chenplasmonenresonanz, Chancen und Herausforderungen}, series = {DGaO-Proceedings 2021}, booktitle = {DGaO-Proceedings 2021}, publisher = {Dt. Gesellschaft f{\"u}r angewandte Optik}, address = {Erlangen-N{\"u}rnberg}, abstract = {Derzeit gibt es zahlreiche Bereiche, wie Umwelt Monitoring und zivile Infrastruktur in denen geeignete Sensoren f{\"u}r die {\"U}berwachung der Systeme fehlen. SPR-basierte Sensoren haben das Potential diese L{\"u}cke zu schließen. Um f{\"u}r den Einsatz in der Umwelt tauglich zu werden, m{\"u}ssen die Sensoren noch robuster werden. Hier wird eine m{\"o}gliche L{\"o}sung gezeigt.}, language = {de} } @techreport{HoellerQuirtMahnetal., author = {H{\"o}ller, Christoph and Quirt, David and Mahn, Jeffrey and M{\"u}ller-Trapet, Markus}, title = {Guide to calculating airborne sound transmission in buildings}, edition = {5th edition}, publisher = {National Research Council of Canada. Construction}, doi = {10.4224/40001814}, abstract = {In recent years, the science and engineering for controlling sound transmission in buildings have shifted from a focus on individual assemblies such as walls or floors, to a focus on performance of the complete system. Standardized procedures for calculating the overall transmission, combined with standardized measurements to characterize sub-assemblies, provide much better prediction of sound transmission between adjacent indoor spaces. The International Standards Organization (ISO) has published a calculation method, ISO 15712-1 that uses laboratory test data for sub-assemblies such as walls and floors as inputs for a detailed procedure to calculate the expected sound transmission between adjacent rooms in a building. This standard works very well for some types of construction, but to use it in a North American context one must overcome two obstacles - incompatibility with the ASTM standards used by our construction industry, and low accuracy of its predictions for lightweight wood or steel frame construction. To bypass limitations of ISO 15712-1, this Guide explains how to merge ASTM and ISO test data in the ISO calculation procedure, and provides recommendations for applying extended measurement and calculation procedures for specific common types of construction. This Guide was developed in a project established by the National Research Council of Canada to support the transition of construction industry practice to using apparent sound transmission class (ASTC) for sound control objectives in the National Building Code of Canada (NBCC). However, the potential range of application goes beyond the minimum requirements of the NBCC - the Guide also facilitates design to provide enhanced sound insulation, and should be generally applicable to construction in both Canada and the USA. This publication contains a limited set of examples for several types of construction, to provide an introduction and overview of the ASTC calculation procedure. Additional examples and measurement data can be found in the companion documents to this Guide, namely NRC Research Reports RR-333 to RR-337. Furthermore, the calculation procedure outlined and illustrated in this Guide is also used by the software web application soundPATHS, which is available for free on the website of the National Research Council of Canada (see the references in Section 7 of this Guide for access details). Au cours des derni{\`e}res ann{\´e}es, les scientifiques et les ing{\´e}nieurs ont fait porter leurs efforts en mati{\`e}re d'att{\´e}nuation de la transmission du son dans les b{\^a}timents davantage sur le rendement du syst{\`e}me dans sa totalit{\´e} que sur les ensembles de construction individuels. Les m{\´e}thodes normalis{\´e}es de calcul de la transmission globale, combin{\´e}es {\`a} des mesures normalis{\´e}es de caract{\´e}risation des sous-ensembles, permettent de mieux pr{\´e}dire la transmission du son entre des espaces int{\´e}rieurs adjacents. L'Organisation internationale de normalisation (ISO) a publi{\´e} une m{\´e}thode de calcul, la norme ISO 15712-1, qui utilise des donn{\´e}es d'essai en laboratoire pour les sous-ensembles, comme les murs et les planchers, comme donn{\´e}es d'entr{\´e}e en vue d'une m{\´e}thode d{\´e}taill{\´e}e de calcul de la transmission du son pr{\´e}vue entre des pi{\`e}ces adjacentes dans un b{\^a}timent. Cette norme fonctionne tr{\`e}s bien pour certains types de construction, mais pour l'utiliser dans un contexte nord-am{\´e}ricain, il faut surmonter deux obstacles - l'incompatibilit{\´e} avec les normes ASTM utilis{\´e}es par notre industrie de la construction et la faible exactitude de ses pr{\´e}visions pour la construction {\`a} ossature de bois ou d'acier l{\´e}g{\`e}re. Pour contourner les limites de la norme ISO 15712-1, le pr{\´e}sent guide explique comment fusionner les donn{\´e}es d'essai de l'ISO et de l'ASTM dans la m{\´e}thode de calcul de l'ISO, et formule des recommandations relativement {\`a} l'application de m{\´e}thodes {\´e}largies de mesure et de calcul pour des types de construction courants. Le pr{\´e}sent guide a {\´e}t{\´e} {\´e}labor{\´e} dans le cadre d'un projet mis sur pied par le Conseil national de recherches du Canada afin d'appuyer la transition de la pratique de l'industrie de la construction vers l'utilisation d'un indice de transmission du son apparent (ITSA) satisfaisant aux objectifs de r{\´e}duction rigoureux du Code national du b{\^a}timent du Canada (CNBC). Toutefois, l'{\´e}ventail potentiel d'applications va au-del{\`a} des exigences minimales du CNBC - le Guide facilite aussi une conception visant {\`a} am{\´e}liorer l'insonorisation et devrait s'appliquer de fa{\c{c}}on g{\´e}n{\´e}rale {\`a} la construction tant au Canada qu'aux {\´E}tats-Unis. La pr{\´e}sente publication contient un ensemble limit{\´e} d'exemples pour plusieurs types de construction, afin de fournir une introduction et un aper{\c{c}}u de la m{\´e}thode de calcul de l'ITSA. On trouvera d'autres exemples et donn{\´e}es de mesure dans les documents d'accompagnement du pr{\´e}sent guide, {\`a} savoir, les rapports de recherche RR-333 {\`a} RR-337 du CNRC. De plus, la m{\´e}thode de calcul d{\´e}crite et illustr{\´e}e dans le pr{\´e}sent guide est {\´e}galement utilis{\´e}e par l'application Web soundPATHS, disponible gratuitement sur le site Web du Conseil national de recherches du Canada (voir les r{\´e}f{\´e}rences {\`a} la section 7 du pr{\´e}sent guide pour les d{\´e}tails d'acc{\`e}s).}, language = {en} } @inproceedings{ShymanovichNicoulLuetal., author = {Shymanovich, Uladzimir and Nicoul, Matthieu and Lu, Wei and Tarasevitch, A. and Kammler, Martin and Horn-von Hoegen, Michael and von der Linde, D. and Sokolowski-Tinten, Klaus and Phipps, Claude}, title = {Coherent acoustic and optical phonons in laser-excited solids studied by ultrafast time-resolved X-ray diffraction}, series = {AIP Conference Proceedings}, booktitle = {AIP Conference Proceedings}, number = {1}, publisher = {AIP}, doi = {10.1063/1.3507146}, pages = {558 -- 566}, abstract = {We apply ultrafast time-resolved X-ray diffraction to directly study coherent acoustic and optical phonons in laser-excited materials. In Au the ps acoustic response has been investigated with the particular goal to clarify the interplay of electronic and thermal pressure contributions. In Bi the extreme softening of the coherently excited A 1 g optical phonon presents strong indication that upon intense laser-excitation the Peierls-transition which determines the equilibrium structure of Bi can be reversed. In FeRh we studied the lattice response after a fast laser-induced anti-ferromagnetic to ferromagnetic phase transition.}, language = {en} } @article{PayerKleinAcetetal., author = {Payer, Thomas and Klein, C. and Acet, M. and Ney, V. and Kammler, Martin and Meyer zu Heringdorf, Frank-Joachim and Horn-von Hoegen, Michael}, title = {High-quality epitaxial Bi(111) films on Si(111) by isochronal annealing}, series = {Thin Solid Films}, volume = {520}, journal = {Thin Solid Films}, number = {23}, publisher = {Elsevier}, doi = {10.1016/j.tsf.2012.06.004}, pages = {6905 -- 6908}, abstract = {Bi(111) films grown on Si(111) at room temperature show a significantly higher roughness compared to Bi films grown on Si(100) utilizing a kinetic pathway based on a low-temperature process. Isochronal annealing steps of 3 min duration each with temperatures up to 200 °C cause a relaxation of the Bi films' lattice parameter toward the Bi bulk value and yield an atomically flat Bi surface. Driving force for the relaxation and surface reordering is the magic mismatch of 11 Bi atoms to 13 Si atoms that emerges at annealing temperatures above 150 °C and reduces the remaining strain to less than 0.2\%.}, language = {en} } @techreport{HoellerQuirtMuellerTrapet, author = {H{\"o}ller, Christoph and Quirt, David and Mueller-Trapet, Markus}, title = {Apparent sound insulation in wood-framed buildings}, publisher = {National Research Council of Canada. Construction}, doi = {10.4224/23002820}, abstract = {This Report presents the results from substantial experimental studies of sound transmission, together with an explanation of calculation procedures to predict the sound transmission between adjacent spaces in a building with wood-framed walls and floors. This Report presents two types of experimental data for wood-framed constructions: - Test data for direct sound transmission through typical wood-framed wall assemblies and wood-framed floor assemblies, plus a summary of trends for such constructions and references to compilations of additional data - Test data for flanking sound transmission measured following the procedures of ISO 10848 for coupled wall/floor junctions and wall/wall junctions Worked examples for calculating the apparent sound transmission class (ASTC) rating between adjacent dwelling units are presented to illustrate how the experimental data can be applied.}, language = {en} } @inproceedings{ZhouStreubuehrKalusetal., author = {Zhou, Ping and Streub{\"u}hr, C. and Kalus, Annika and Frigge, Tim and Wall, S. and Hanisch-Blicharski, Anja and Kammler, Martin and Ligges, Manuel and Bovensiepen, U. and von der Linde, D. and Horn-von Hoegen, Michael}, title = {Ultrafast time resolved reflection high energy electron diffraction with tilted pump pulse fronts}, series = {EPJ Web of Conferences - XVIIIth International Conference on Ultrafast Phenomena}, volume = {41}, booktitle = {EPJ Web of Conferences - XVIIIth International Conference on Ultrafast Phenomena}, publisher = {EPJ}, doi = {10.1051/epjconf/20134110016}, abstract = {We present time-resolved RHEED from a laser excited Pb(111) surface using a pulse front tilter for the compensation of the velocity mismatch of electrons and light. The laser pulses with tilted fronts were characterized by a spatially resolving cross correlator. The response of the surface upon excitation was observed to be less than 2 ps.}, language = {en} } @inproceedings{LuNicoulShymanovichetal., author = {Lu, Wei and Nicoul, Matthieu and Shymanovich, Uladzimir and Tarasevitch, A. and Kammler, Martin and Horn-von Hoegen, Michael and von der Linde, D. and Sokolowski-Tinten, Klaus}, title = {Transient reversal of a Peierls-transition: Extreme phonon softening in laser-excited Bismuth}, series = {International Conference on Ultrafast Phenomena, Snowmass}, booktitle = {International Conference on Ultrafast Phenomena, Snowmass}, number = {ME41}, publisher = {Optica Publishing Group}, doi = {10.1364/UP.2010.ME41}, abstract = {Laser-excited coherent optical phonons in Bismuth were investigated using time-resolved X-ray diffraction. The observed extreme softening of the excited A1g-mode presents strong indication that the Peierls-distortion defining the equilibrium structure of Bismuth is transiently reversed.}, language = {en} } @article{PortavoceKammlerHulletal., author = {Portavoce, A. and Kammler, Martin and Hull, Robert and Reuter, Mark C. and Copel, M. and Ross, Frances M.}, title = {Growth of nanostructures by locally modified surface reactivity}, series = {Materials Science in Semiconductor Processing}, volume = {12}, journal = {Materials Science in Semiconductor Processing}, number = {1-2}, publisher = {Elsevier}, doi = {10.1016/j.mssp.2009.07.001}, pages = {25 -- 30}, abstract = {The chemical vapor deposition (CVD) of Si and Ge on Si(0 0 1) substrates covered by 1 monolayer of Ga has been studied. Ga modifies surface reactivity and surface atom mobility. We show that islanding occurs during Ga-mediated CVD even in the absence of strain, allowing for the formation of islands without a wetting layer or with a thinner wetting layer. The morphology of the grown layer is highly dependent on kinetic parameters, i.e. growth temperature and growth pressure, that control Si and Ge deposition and Ga desorption. Si Ga-mediated CVD promotes the formation of self-assembled epitaxial Si islands exhibiting {1 1 3} facets. Ge islands grown by Ga-mediated CVD present reduced lateral sizes and an increased surface density compared to non Ga-mediated CVD. The growth morphology (particularly island size and density) can be understood by considering a qualitative model in which atoms are deposited only on sites whose dangling bonds are not passivated by Ga. We suggest that modification of surface reactivity during surfactant-mediated CVD can thus provide a new degree of freedom for quantum dot fabrication.}, language = {en} } @article{PortavoceKammlerHulletal., author = {Portavoce, A. and Kammler, Martin and Hull, Robert and Reuter, Mark C. and Ross, Frances M.}, title = {Mechanism of the nanoscale localization of Ge quantum dot nucleation on focused ion beam templated Si(001) surfaces}, series = {Nanotechnology}, volume = {17}, journal = {Nanotechnology}, number = {17}, publisher = {IOP}, doi = {10.1088/0957-4484/17/17/028}, pages = {4451 -- 4455}, abstract = {We investigate the fundamental mechanism by which self-assembled Ge islands can be nucleated at specific sites on Si(001) using ultra-low-dose focused ion beam (FIB) pre-patterning. Island nucleation is controlled by a nanotopography that forms after the implantation of Ga ions during subsequent thermal annealing of the substrate. This nanotopography evolves during the annealing stage, changing from a nanoscale annular depression associated with each focused ion beam spot to a nanoscale pit, and eventually disappearing (planarizing). The correspondence of Ge quantum dot nucleation sites to the focused ion beam features requires a growth surface upon which the nanotopography is preserved. A further key observation is that the Ge wetting layer thickness is reduced in patterned regions, allowing the formation of islands on the templated regions without nucleation elsewhere. These results provide routes to the greatly enhanced design and control of quantum dot distributions and dimensions.}, language = {en} } @article{RossKammlerReuteretal., author = {Ross, Frances M. and Kammler, Martin and Reuter, Mark C. and Hull, Robert}, title = {In-situ observations of self-assembled island nucleation on patterned substrates}, series = {Philosophical Magazine}, volume = {84}, journal = {Philosophical Magazine}, number = {25-26}, publisher = {Taylor \& Francis}, doi = {10.1080/14786430410001671430}, pages = {2687 -- 2702}, abstract = {We compare in-situ electron microscopy observations of Ge island growth on Si surfaces modulated by different techniques. Si(001) substrates were patterned either using a focused Ga ion beam or lithographically to produce similar feature sizes. In the case of the focused-ion-beam patterned substrates, chemical or strain effects caused by low Ga doses control the positions at which islands nucleate. Nucleation on topographically modulated substrates, with the pattern produced either by high-dose sputtering or lithographically, is controlled by the nature of the side walls of topographic features. The two patterning approaches have different benefits in creating arrays of islands for device applications.}, language = {en} } @article{MenzelConradTringidesetal., author = {Menzel, Andreas and Conrad, E. H. and Tringides, Michael C. and Kammler, Martin and Horn- von Hoegen, Michael}, title = {Finite collection time effects in autocovariance function measurements}, series = {Journal of Applied Physics}, volume = {93}, journal = {Journal of Applied Physics}, number = {4}, publisher = {AIP Publishing}, doi = {10.1063/1.1537466}, pages = {2229 -- 2235}, abstract = {In this paper we discuss how finite data sets influence experimental measurements of the autocovariance function. Autocovariance estimators are biased, meaning that the expectation value for any measured autocovariance function is not identical to the actual autocovariance function. In this work we show that the measured autocovariance function for a finite length time series must become negative for some lag times. We derive analytic corrections to these finite time errors for different types of correlated random sequences. Our results explain the apparent anticorrelated noise observed in experimental observations.}, language = {en} } @article{KammlerHullReuteretal., author = {Kammler, Martin and Hull, Robert and Reuter, Mark C. and Ross, Frances M.}, title = {Lateral control of self-assembled island nucleation by focused-ion-beam micropatterning}, series = {Applied Physics Letters}, volume = {82}, journal = {Applied Physics Letters}, number = {7}, doi = {10.1063/1.1542680}, pages = {1093 -- 1095}, abstract = {We demonstrate that the nucleation sites of nanoscale, self-assembled Ge islands on Si(001) can be controlled by patterning the Si surface in situ with a focused ion beam. At low doses of 6000 Ga+ ions per <100 nm spot, the selective growth is achieved without modifying the initial surface topography. At larger doses, topographic effects produced by sputtering and redeposition control the selective nucleation sites. Islands grown on irradiated spots are smaller with higher aspect ratio than islands grown on clean Si(001), suggesting a strong surfactant effect of Ga.}, language = {en} } @article{SokolowskiTintenBlomeBlumsetal., author = {Sokolowski-Tinten, Klaus and Blome, Christian and Blums, Juris and Shymanovich, Uladzimir and Nicoul, Matthieu and Cavalleri, Andrea and Tarasevitch, A. and Horn-von Hoegen, Michael and Kammler, Martin and von der Linde, D.}, title = {Ultrafast X-ray diffraction}, series = {Ultrafast Phenomena XIV}, volume = {79}, journal = {Ultrafast Phenomena XIV}, publisher = {Springer}, doi = {10.1007/3-540-27213-5_53}, pages = {170 -- 174}, abstract = {In the last few years the generation of femtosecond pulses in the X-ray regime has become possible. These ultrashort X-ray pulses have enabled femtosecond time- resolution to be extended to X-rays.}, language = {en} } @inproceedings{HoellerZeitlerReinholdetal., author = {H{\"o}ller, Christoph and Zeitler, Berndt and Reinhold, Steffi and Jakob, A. and Hopkins, C.}, title = {Charakterisierung von K{\"o}rperschallquellen auf der Empfangsplatte mit Hilfe von orthogonalen Funktionen}, series = {Tagungsband - DAGA 2019 : 45. Jahrestagung f{\"u}r Akustik : 18.-21. M{\"a}rz 2019, Rostock}, booktitle = {Tagungsband - DAGA 2019 : 45. Jahrestagung f{\"u}r Akustik : 18.-21. M{\"a}rz 2019, Rostock}, publisher = {Deutsche Gesellschaft f{\"u}r Akustik e.V.}, address = {Berlin}, isbn = {978-3-939296-14-0}, pages = {93 -- 96}, language = {de} } @article{KammlerHullPortavoceetal., author = {Kammler, Martin and Hull, Robert and Portavoce, A. and Reuter, Mark C. and Ross, Frances M.}, title = {In-Situ Focused Ion Beam Micropatterning of Ge Islands}, series = {Microscopy and Microanalysis}, volume = {9}, journal = {Microscopy and Microanalysis}, number = {S02}, publisher = {Microscopy Society of America}, doi = {10.1017/S1431927603441214}, pages = {132 -- 134}, language = {en} } @article{MoserJobstBierletal., author = {Moser, Elisabeth and Jobst, Simon and Bierl, Rudolf and Jenko, Frank}, title = {A Deep Learning System to Transform Cross-Section Spectra to Varying Environmental Conditions}, series = {Vibrational Spectroscopy}, volume = {122}, journal = {Vibrational Spectroscopy}, number = {September}, publisher = {Elsevier}, issn = {0924-2031}, doi = {10.1016/j.vibspec.2022.103410}, abstract = {Absorption cross-sections provide a basis for many gas sensing applications. Therefore, any error in molecular cross-sections caused by varying environmental conditions propagates to spectroscopic applications. Original molecular cross-sections in varying environmental conditions can only be simulated for some molecules, whereas for most multi-atom molecules, one must rely on high-precision measurements at certain environmental configurations. In this study, a deep learning system trained with simulated absorption cross-sections for predicting cross-sections at a different pressure configuration is presented. The system's capability to transfer to measured, multi-atom cross-sections is demonstrated. Thus, it provides an alternative to (pseudo-) line lists whenever the required information for simulation is unavailable. The predictive performance of the system was evaluated on validation data via simulation, and its transfer learning capabilities were demonstrated on actual measurement chlorine nitrate data. From the comparison between the system and line lists, the system shows slightly worse performance than pseudo-line lists but its predictive quality is still deemed acceptable with less than 5\% relative integral change with a highly localized error around the peak center. This opens a promising way for further research to use deep learning to simulate the effect of varying environmental conditions on absorption cross-sections.}, language = {en} } @inproceedings{SchreinerLangerPrommesbergeretal., author = {Schreiner, Rupert and Langer, Christoph and Prommesberger, Christian and Mingels, Stephan and Serbun, Pavel and M{\"u}ller, G{\"u}nter}, title = {Field emission from surface textured extraction facets of GaN light emitting diodes}, series = {26th International Vacuum Nanoelectronics Conference (IVNC), 8-12 July 2013, Roanoke, VA, USA}, booktitle = {26th International Vacuum Nanoelectronics Conference (IVNC), 8-12 July 2013, Roanoke, VA, USA}, publisher = {IEEE}, doi = {10.1109/ivnc.2013.6624721}, abstract = {We report on the field emission properties of GaN LED surfaces. The textured extraction facet acts both as light scattering layer in order to increase the light extraction efficiency of the LED as well as nanostructured cathode surface for the field emission (FE) of electrons. The LED emits blue light with a peak wavelength of around 450 nm. The FE properties were investigated by a scanning microscope. Integral measurements as well as regulated voltage scans for 1 nA FE current over an area of 400 * 400 µm2were used to investigate both overall and local FE properties. A high number of well-distributed emitters with an average field enhancement factor ß of 85 and stable integral emission currents up to 100 µA at an electric field of   80 V/µm ({\O}anode= 880 µm) were found. Photo-field-emission spectroscopy (PFES) using a tunable pulsed laser revealed an enhanced photo absorption of the InGaN/GaN quantum well structures near the emission wavelength of the LED (<3.5 eV), whereas at high photon energies (>4.1 eV) photoemission from the GaN surface was observed.}, language = {en} } @inproceedings{MoserPangerlJobstetal., author = {Moser, Elisabeth and Pangerl, Jonas and Jobst, Simon and Weigl, Stefan and Bierl, Rudolf}, title = {Modeling the Photoacoustic Spectrum of a Quantum Cascade Laser for Human Breath}, series = {Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES): July 11 - 15, 2022, Vancouver, British Columbia Canada}, booktitle = {Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES): July 11 - 15, 2022, Vancouver, British Columbia Canada}, publisher = {Optica Publishing Group}, isbn = {978-1-957171-10-4}, doi = {10.1364/AIS.2022.ATu3G.2}, abstract = {A modeling approach to create a photoacoustic spectrum from synthetic data is presented and evaluated. The resulting model reaches a MAPE score of 2.7\% and can be used to enable data-driven development in future work.}, subject = {Quantenkaskadenlaser}, language = {en} } @article{GoldschmidtMoserNitzscheetal., author = {Goldschmidt, Jens and Moser, Elisabeth and Nitzsche, Leonard and Bierl, Rudolf and W{\"o}llenstein, J{\"u}rgen}, title = {Improving the performance of artificial neural networks trained on synthetic data in gas spectroscopy - a study on two sensing approaches}, series = {tm - Technisches Messen}, journal = {tm - Technisches Messen}, edition = {Online ver{\"o}ffentlicht}, publisher = {Oldenbourg Wissenschaftsverlag}, doi = {10.1515/teme-2023-0051}, abstract = {Artificial neural networks (ANNs) are used in quantitative infrared gas spectroscopy to predict concentrations on multi-component absorption spectra. Training of ANNs requires vast amounts of labelled training data which may be elaborate and time consuming to obtain. Additional data can be gained by the utilization of synthetically generated spectra, but at the cost of systematic deviations to measured data. Here, we present two approaches to train ANNs with a combination of comparatively small, measured data sets and synthetically generated data. For the first approach a neural network is trained hybridly with synthetically generated infrared absorption spectra of mixtures of N2O and CO and measured zero-gas spectra, taken with a mid-infrared dual comb spectrometer. This improves the mean absolute error (MAE) of the network predictions from 0.46 to 0.01 ppmV and 0.24 to 0.01 ppmV for the concentration predictions of N2O and CO respectively for zero-gas measurements which was previously observed for training with purely synthetic data. At the same time a similar performance on spectra from gas mixtures of 0-100 ppmV N2O and 0 to 60 ppmV CO was achieved. For the second approach an ANN pre-trained on synthetic infrared spectra of mixtures of acetone and ethanol is retrained on a small dataset consisting of 26 spectra taken with a mid-infrared photoacoustic spectrometer. In this case the MAE for the concentration predictions of ethanol and acetone are improved by 45 \% and 20 \% in comparison to purely synthetic training. This shows the capability of using synthetically generated data to train ANNs in combination with small amounts of measured data to further improve neural networks for gas sensing and the transferability between different sensing approaches.}, language = {en} } @inproceedings{UlreichMoserOlbrichetal., author = {Ulreich, Fabian and Moser, Elisabeth and Olbrich, Florian and Ebert, Martin and Bierl, Rudolf and Kaup, Andr{\´e}}, title = {Luminance Simulation in CARLA under Cloud Coverage - Model Validation and Implications}, series = {2023 IEEE International Workshop on Metrology for Automotive (MetroAutomotive), -30 June 2023, Modena, Italy}, booktitle = {2023 IEEE International Workshop on Metrology for Automotive (MetroAutomotive), -30 June 2023, Modena, Italy}, editor = {Keil, Rudolf and Tschorn, Jan Alexander and T{\"u}mler, Johannes and Altinsoy, Mehmet Ercan}, publisher = {IEEE}, isbn = {979-8-3503-2187-6}, doi = {10.1109/MetroAutomotive57488.2023.10219098}, pages = {228 -- 233}, abstract = {To decrease the number of kilometers driven during the development of autonomous cars or driving assistance systems, performant simulation tools are necessary. Currently, domain distance effects between simulation and reality are limiting the successful application of rendering engines in data-driven perception tasks. In order to mitigate those domain distance effects, simulation tools have to be as close to reality as possible for the given task. For optical sensors like cameras, the luminance of the scene is essential. We provide within this paper a method to measure the luminance of rendered scenes within CARLA, an often used open-source simulation environment. Thereby, it is possible to validate the environment and weather models by taking real-world measurements with photometric sensors or with the help of open-source weather data, published e.g. by the German federal service for weather data (DWD - "Deutscher Wetterdienst"). Employing our proposed luminance measurement, the domain gap resulting from the simulation can be specified, which makes it possible to evaluate the statements about the safety of the automated driving system determined within the simulation. We show that the ratio between global and diffuse radiation modeled by the default atmosphere models within CARLA are under limited conditions similar to real-world measurements taken by the DWD. Nevertheless, we show, that the ratio's temporal variability in real-world situations is not modeled by CARLA.}, language = {en} } @article{MuellerWeiglMuellerWilliamsetal., author = {M{\"u}ller, Max and Weigl, Stefan and M{\"u}ller-Williams, Jennifer and Lindauer, Matthias and R{\"u}ck, Thomas and Jobst, Simon and Bierl, Rudolf and Matysik, Frank-Michael}, title = {Comparison of photoacoustic spectroscopy and cavity ring-down spectroscopy for ambient methane monitoring at Hohenpeißenberg}, series = {Atmospheric Measurement Techniques}, volume = {16}, journal = {Atmospheric Measurement Techniques}, number = {18}, publisher = {Copernicus Publications}, issn = {1867-8548}, doi = {10.5194/amt-16-4263-2023}, pages = {4263 -- 4270}, abstract = {With an atmospheric concentration of approximately 2000 parts per billion (ppbV, 10-9), methane (CH4) is the second most abundant greenhouse gas (GHG) in the atmosphere after carbon dioxide (CO2). The task of long-term and spatially resolved GHG monitoring to verify whether climate policy actions are effective is becoming more crucial as climate change progresses. In this paper we report the CH4 concentration readings of our photoacoustic (PA) sensor over a 5 d period at Hohenpeißenberg, Germany. As a reference device, a calibrated cavity ring-down spectrometer, Picarro G2301, from the meteorological observatory of the German Weather Service (DWD) was employed. Trace gas measurements with photoacoustic instruments promise to provide low detection limits at comparably low costs. However, PA devices are often susceptible to cross-sensitivities related to fluctuating environmental conditions, e.g. ambient humidity. The obtained results show that for PA sensor systems non-radiative relaxation effects induced by varying humidity are a non-negligible factor. Applying algorithm compensation techniques, which are capable of calculating the influence of non-radiative relaxation effects on the photoacoustic signal, increase the accuracy of the photoacoustic sensor significantly. With an average relative deviation of 1.11 \% from the G2301, the photoacoustic sensor shows good agreement with the reference instrument.}, language = {en} } @article{FritzReisAdamsetal., author = {Fritz, D. M. and Reis, D. A. and Adams, B. and Akre, R. A. and Arthur, J. and Blome, Christian and Bucksbaum, P. H. and Cavalieri, A. L. and Engemann, S. and Fahy, S. and Falcone, R. W. and Fuoss, P. H. and Gaffney, K. J. and George, M. J. and Hajdu, J. and Hertlein, M. P. and Hillyard, P. B. and Horn-von Hoegen, Michael and Kammler, Martin and Kaspar, J. and Kienberger, R. and Krejcik, P. and Lee, S. H. and Lindenberg, A. M. and McFarland, B. and Meyer, D. and Montagne, T. and Murray, E. D. and Nelson, A. J. and Nicoul, Matthieu and Pahl, R. and Rudati, J. and Schlarb, H. and Siddons, D. P. and Sokolowski-Tinten, Klaus and Tschentscher, Th and von der Linde, D. and Hastings, J. B.}, title = {Ultrafast bond softening in bismuth: mapping a solid's interatomic potential with X-rays}, series = {Science}, volume = {315}, journal = {Science}, number = {5812}, publisher = {AAAS}, doi = {10.1126/science.1135009}, pages = {633 -- 636}, abstract = {Intense femtosecond laser excitation can produce transient states of matter that would otherwise be inaccessible to laboratory investigation. At high excitation densities, the interatomic forces that bind solids and determine many of their properties can be substantially altered. Here, we present the detailed mapping of the carrier density-dependent interatomic potential of bismuth approaching a solid-solid phase transition. Our experiments combine stroboscopic techniques that use a high-brightness linear electron accelerator-based x-ray source with pulse-by-pulse timing reconstruction for femtosecond resolution, allowing quantitative characterization of the interatomic potential energy surface of the highly excited solid.}, language = {en} } @inproceedings{SokolowskiTintenBlomeBlumsetal., author = {Sokolowski-Tinten, Klaus and Blome, Christian and Blums, Juris and Shymanovich, Uladzimir and Nicoul, Matthieu and Cavalleri, Andrea and Tarasevitch, A. and Horn-von Hoegen, Michael and Kammler, Martin and von der Linde, Dietrich}, title = {Ultrafast X-ray diffraction}, series = {Ultrafast Phenomena XIV}, volume = {79}, booktitle = {Ultrafast Phenomena XIV}, editor = {Kobayashi, Tetsuro}, publisher = {Springer}, address = {Berlin, Heidelberg}, isbn = {978-3-540-27213-7}, doi = {10.1007/3-540-27213-5_53}, pages = {170 -- 174}, abstract = {In the last few years the generation of femtosecond pulses in the X-ray regime has become possible. These ultrashort X-ray pulses have enabled femtosecond time- resolution to be extended to X-rays.}, language = {en} } @article{KammlerHornvonHoegenVossetal., author = {Kammler, Martin and Horn- von Hoegen, Michael and Voss, N. and Tringides, Michael C. and Menzel, Andreas and Conrad, E. H.}, title = {Si(001) step dynamics: A temporal low-energy electron diffraction study}, series = {Physical Review B}, volume = {65}, journal = {Physical Review B}, number = {7}, publisher = {APS}, doi = {10.1103/PhysRevB.65.075312}, abstract = {We present equilibrium measurements of the dynamics of steps on Si(001) using temporal electron-diffraction spectroscopy. Activation energies and the rate limiting kinetics are identified for 950K<~T<~1130K. Unlike previous studies at higher temperatures, we can exclude evaporation and condensation of atoms or dimers from the step edges as the rate limiting process in this temperature regime. The possible reason for this difference is discussed in terms of a crossover from different rate-limiting kinetics.}, language = {en} } @inproceedings{NavitskiSerbunMuelleretal., author = {Navitski, Aliaksandr and Serbun, Pavel and M{\"u}ller, G{\"u}nter and Schreiner, Rupert and Dams, Florian}, title = {Efficient and reliable field emission from silicon tip arrays for miniaturized electron sources}, series = {2011 24th International Vacuum Nanoelectronics Conference ; 18-22 July 2011 Wuppertal}, booktitle = {2011 24th International Vacuum Nanoelectronics Conference ; 18-22 July 2011 Wuppertal}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-3-00-035081-8}, issn = {2380-6311}, pages = {71 -- 72}, abstract = {Silicon-based cathodes with precisely aligned field emitter arrays (FEA) applicable for miniaturized electron sources were successfully developed and fabricated. The cathode chips contain about 3×105 Si tips/cm2 in a triangular array with a tip height of 2.5 μm, tip radius of 20 nm, and lateral distance between tips of 20 μm. Amazingly homogeneous and well-aligned field emission (FE) from all tips (i.e. 100\% efficiency) and maximum stable currents of typically 0.1 μA for p- and 0.6 μA for n-type Si were reproducibly achieved. Current-voltage characteristics of p-type Si tips exhibit the expected saturation at around 10 nA due to limited supply of electrons from a depletion layer, while the n-type Si tips show the usual FN behaviour. Additional coating of the Si tips with a 10 nm Au layer resulted in at least 5 times higher average FE current levels i.e. typically 3 μA but lead, however, to a 30\% increase of the onset voltage.}, language = {en} } @article{PirkerŁawrowskiSchreineretal., author = {Pirker, Luka and Ławrowski, Robert Damian and Schreiner, Rupert and Remškar, Maja and Višić, Bojana}, title = {MoₓWₓ₋₁S₂ Nanotubes for Advanced Field Emission Application}, series = {Advanced Functional Materials}, journal = {Advanced Functional Materials}, publisher = {Wiley}, issn = {1616-3028}, doi = {10.1002/adfm.202213869}, pages = {1 -- 8}, abstract = {Transition metal dichalcogenide (TMDC) nanotubes complement the field of low-dimensional materials with their quasi-1D morphology and a wide set of intriguing properties. By introducing different transition metals into the crystal structure, their properties can be tailored for specific purpose and applications. Herein, the characterization and a subsequent preparation of single-nanotube field emission devices of MoxWx-1S2 nanotubes prepared via the chemical vapor transport reaction is presented. Energy-dispersive X-ray spectroscopy, Raman spectroscopy, and X-ray diffraction indicate that the molybdenum and tungsten atoms are randomly distributed within the crystal structure and that the material is highly crystalline. High resolution transmission electron microscopy and electron diffraction (ED) patterns further corroborate these findings. A detailed analysis of the ED patterns from an eight-layer nanotube reveal that the nanotubes grow in the 2H structure, with each shell consists of one bilayer. The work function of the nanotubes is comparable to that of pure MoS2 and lower of pure WS2 NTs, making them ideal candidates for field emission applications. Two devices with different geometrical setup are prepared and tested as field emitters, showing promising results for single nanotube field emission applications.}, language = {en} } @unpublished{PangerlMoserMuelleretal., author = {Pangerl, Jonas and Moser, Elisabeth and M{\"u}ller, Max and Weigl, Stefan and Jobst, Simon and R{\"u}ck, Thomas and Bierl, Rudolf and Matysik, Frank-Michael}, title = {A Highly Sensitive Acetone and Ethanol Quantum Cascade Laser Based Photoacoustic Sensor: Characterization and Multi-Component Spectra Recording in Synthetic Breath}, series = {SSRN Electronic Journal}, journal = {SSRN Electronic Journal}, publisher = {Elsevier}, doi = {10.2139/ssrn.4305376}, abstract = {Trace gas analysis in breath is challenging due to the vast number of different components. We present a highly sensitive quantum cascade laser based photoacoustic setup for breath analysis. Scanning the range between 8260 and 8270 nm with a spectral resolution of 48 pm, we are able to quantify acetone and ethanol within a typical breath matrix containing water and CO2. We photoacoustically acquired spectra within this region of mid-infra-red light and prove that those spectra do not suffer from non-spectral interferences. The purely additive behavior of a breath sample spectrum was verified by comparing it with the independently acquired single component spectra using Pearson and Spearman correlation coefficients. A previously presented simulation approach is improved and an error attribution study is presented. With a 3σ detection limit of 6.5 ppbV in terms of ethanol and 250 pptV regarding acetone, our system is among the best performing presented so far.}, language = {en} } @misc{OlbrichPongratzBierletal., author = {Olbrich, Florian and Pongratz, Christian and Bierl, Rudolf and Ehrlich, Ingo}, title = {Method and System for Evaluating a Structural Integrity of an Aerial Vehicle}, language = {en} } @inproceedings{PellerZanklFischeretal., author = {Peller, Sebastian and Zankl, Tobias and Fischer, Christoph and Bierl, Rudolf}, title = {Fast sound field characterization of beamforming capable capacitive micromachined ultrasonic transducer (CMUT) arrays by refracto-vibrometry}, series = {IEEE IUS 2023, International Ultrasonics Symposium, Montr{\´e}al, September 3-8, 2023}, booktitle = {IEEE IUS 2023, International Ultrasonics Symposium, Montr{\´e}al, September 3-8, 2023}, publisher = {IEEE}, isbn = {979-8-3503-4645-9}, issn = {1948-5727}, doi = {10.1109/IUS51837.2023.10308126}, pages = {1 -- 3}, abstract = {We introduce a time-optimized setup based on refracto-vibrometry for the purpose of scanning the sound field of capacitive micromachined ultrasonic transducer (CMUT) arrays primarily for the qualification of their beamforming capability. In comparison to commonly used microphones on a traversing stage the proposed method is substantially faster and consumes only a few minutes of time for a complete two-dimensional sound field containing about 100.000 scan points.}, language = {en} } @inproceedings{HerdlBachmannWohlfartsstaetteretal., author = {Herdl, Florian and Bachmann, Michael and Wohlfartsst{\"a}tter, Dominik and D{\"u}sberg, Felix and Dudeck, Markus and Eder, Magdalena and Meyer, Manuel and Pahlke, Andreas and Edler, Simon and Schels, Andreas and Hansch, Walter and Schreiner, Rupert and Wohlfartsstatter, Dominik and Dusberg, Felix}, title = {A novel current dependent field emission performance test}, series = {2021 34th International Vacuum Nanoelectronics Conference (IVNC): 5-9 July 2021, Lyon, France}, booktitle = {2021 34th International Vacuum Nanoelectronics Conference (IVNC): 5-9 July 2021, Lyon, France}, doi = {10.1109/IVNC52431.2021.9600695}, pages = {1 -- 2}, abstract = {A current dependent performance test for comparison of different field emitter arrays is introduced. Statistical analysis is enabled due to a short measurement time and as a main feature the electric field shift, comparable to the degradation of the emitter is examined. Significance of the test method is shown by a comparison of field emitter arrays with different doping levels.}, language = {en} } @inproceedings{BiekerRoustaieSchlaaketal., author = {Bieker, Johannes and Roustaie, Farough and Schlaak, Helmut F. and Langer, Christoph and Schreiner, Rupert}, title = {Field emission characterization of in-situ deposited metallic nanocones}, series = {2017 30th International Vacuum Nanoelectronics Conference (IVNC), 10-14 July 2017, Regensburg, Germany}, booktitle = {2017 30th International Vacuum Nanoelectronics Conference (IVNC), 10-14 July 2017, Regensburg, Germany}, publisher = {IEEE}, doi = {10.1109/IVNC.2017.8051571}, pages = {120 -- 121}, abstract = {An in-situ fabrication technique based on ion track etched template electrodeposition of metallic nanocones was used for the production of field emitter cathodes. Gold nanocones with a height of 24 microns, a base diameter between 3 to 4 microns and a tip diameter below 300 nanometers were deposited on a circular electrode with a diameter of 2.5 mm. The integral field emission (FE) measurements of samples with cone densities of 6 · 104 cones/cm2 (sample A) and 1 · 106 cones/cm2 (sample B) yielded in a maximum current of 37.5 μA at an applied field of 12.5 V/μm for sample A and 29.1 μA at 9.4 V/μm for sample B. The stability of emission current was investigated for over 48 hours and no degradation was observed.}, language = {en} } @inproceedings{SchelsEdlerHanschetal., author = {Schels, Andreas and Edler, Simon and Hansch, Walter and Bachmann, Michael and Herdl, Florian and Dusberg, F. and Eder, Magdalena and Meyer, Manuel and Dudek, M. and Pahlke, Andreas and Schreiner, Rupert}, title = {Current dependent performance test used on different types of silicon field emitter arrays}, series = {2021 34th International Vacuum Nanoelectronics Conference (IVNC): 5-9 July 2021, Lyon, France}, booktitle = {2021 34th International Vacuum Nanoelectronics Conference (IVNC): 5-9 July 2021, Lyon, France}, editor = {Purcell, Stephen and Mazellier, Jean-Paul}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-6654-2589-6}, doi = {10.1109/IVNC52431.2021.9600787}, pages = {1 -- 2}, abstract = {A current dependent performance test is used to investigate the influence of doping and emitter geometry on the lifetime of silicon field emitter arrays. The measurements reveal an improved performance for lower n-type dopant concentrations. Furthermore, two new types of field emitters are introduced by slightly varying the original fabrication process [1]. The comparison shows superiority of tip like emitters over blade like structures.}, language = {en} } @inproceedings{HoellerQuirtZeitleretal., author = {H{\"o}ller, Christoph and Quirt, David and Zeitler, Berndt and Sabourin, Ivan}, title = {Apparent sound insulation in cold-formed steel-framed buildings}, series = {24th International Congress on Sound and Vibration (ICSV 24), 23-27 July 2017, London, UK}, booktitle = {24th International Congress on Sound and Vibration (ICSV 24), 23-27 July 2017, London, UK}, publisher = {Curran Associates, Inc}, language = {en} } @inproceedings{HoellerZeitlerSchneideretal., author = {H{\"o}ller, Christoph and Zeitler, Berndt and Schneider, M. and Schanda, Ulrich}, title = {Tieffrequenter Trittschall - Stand der Wissenschaft und Technik}, series = {Fortschritte der Akustik - DAGA 2020 : 46. Deutsche Jahrestagung f{\"u}r Akustik}, booktitle = {Fortschritte der Akustik - DAGA 2020 : 46. Deutsche Jahrestagung f{\"u}r Akustik}, publisher = {Deutsche Gesellschaft f{\"u}r Akustik e.V.}, language = {de} } @article{KrenzerHanischBlicharskiSchneideretal., author = {Krenzer, Boris and Hanisch-Blicharski, Anja and Schneider, Paul and Payer, Thomas and M{\"o}llenbeck, Simone and Osmani, O. and Kammler, Martin and Meyer, R. and Horn-von Hoegen, Michael}, title = {Phonon confinement effects in ultrathin epitaxial bismuth films on silicon studied by time-resolved electron diffraction}, series = {Physical Review B}, volume = {80}, journal = {Physical Review B}, number = {2}, publisher = {APS}, doi = {10.1103/PhysRevB.80.024307}, abstract = {The transient temperature evolution of ultrathin bismuth films, epitaxially grown on a silicon single crystal, upon femtosecond laser excitation is studied by time-resolved electron diffraction. The exponential decay of the film temperature is explained by phonon reflection at the interface, which results in a strongly reduced thermal conduction in the cross plane of the layered system. The thermal boundary conductance is found to be as low as 1273 W/(K cm2). Model calculations, including phonon confinement effects, explain the linear relationship between the observed film-temperature decay constant and the film thickness. Even for 2.5 nm thin films the phonon transmission probability across the interface is given by bulk properties. Our simulations show that phonon confinement effects are negligible for bismuth-film thicknesses larger than 1 nm.}, language = {en} } @article{KleinNabbefeldHattabetal., author = {Klein, C. and Nabbefeld, T. and Hattab, H. and Meyer, D. and Jnawali, G. and Kammler, Martin and Meyer zu Heringdorf, Frank-Joachim and Golla-Franz, A. and M{\"u}ller, B. H. and Schmidt, Thomas and Henzler, M. and Horn-von Hoegen, Michael}, title = {Lost in reciprocal space? Determination of the scattering condition in spot profile analysis low-energy electron diffraction}, series = {Review of scientific instruments}, volume = {82}, journal = {Review of scientific instruments}, number = {3}, publisher = {American Institute of Physics}, doi = {10.1063/1.3554305}, abstract = {The precise knowledge of the diffraction condition, i.e., the angle of incidence and electron energy, is crucial for the study of surface morphology through spot profile analysis low-energy electron diffraction (LEED). We demonstrate four different procedures to determine the diffraction condition: employing the distortion of the LEED pattern under large angles of incidence, the layer-by-layer growth oscillations during homoepitaxial growth, a G(S) analysis of a rough surface, and the intersection of facet rods with 3D Bragg conditions.}, language = {en} } @article{SchmidtKroegerClausenetal., author = {Schmidt, Thomas and Kr{\"o}ger, Roland and Clausen, T. and Falta, J. and Janzen, Andreas and Kammler, Martin and Kury, P. and Zahl, P. and Horn-von Hoegen, Michael}, title = {Surfactant-mediated epitaxy of Ge on Si(111): Beyond the surface}, series = {Applied Physics Letters}, volume = {86}, journal = {Applied Physics Letters}, number = {11}, publisher = {AIP}, doi = {10.1063/1.1882760}, abstract = {For a characterization of interface and "bulk" properties of Ge films grown on Si(111) by Sb surfactant-mediated epitaxy, grazing incidence x-ray diffraction and transmission electron microscopy have been used. The interface roughness, defect structure, and strain state have been investigated in dependence of film thickness and growth temperature. For all growth parameters, atomically smooth interfaces are observed. For thin Ge layers, about 75\% of the strain induced by the lattice mismatch is relaxed by misfit dislocations at the Ge/Si interface. Only a slight increase of the degree of relaxation is found for thicker films. At growth temperatures below about 600 °C, the formation of twins is observed, which can be avoided at higher temperatures.}, language = {en} } @article{FriggeWallKrenzeretal., author = {Frigge, Tim and Wall, S. and Krenzer, Boris and Wippermann, St. and Sanna, Simone and Klasing, Friedrich and Hanisch-Blicharski, Anja and Kammler, Martin and Schmidt, Wolf Gero and Horn-von Hoegen, Michael}, title = {Abstract - A Reply to the Comment by H. Shim et al.}, series = {Physical review letters}, volume = {111}, journal = {Physical review letters}, number = {14}, publisher = {American Physical Society}, doi = {10.1103/PhysRevLett.111.149602}, language = {en} } @article{CheeKammlerGrahametal., author = {Chee, See Wee and Kammler, Martin and Graham, Jeremy and Ross, Frances M. and Hull, Robert}, title = {Direct Imaging of Microstructural Changes in Si Induced by FIB-Patterning with Si ++ and Ga + Ions}, series = {Microscopy and Microanalysis}, volume = {17}, journal = {Microscopy and Microanalysis}, number = {S2}, publisher = {Cambridge University Press}, doi = {10.1017/S1431927611004156}, pages = {656 -- 657}, language = {en} } @inproceedings{RothHauslerBierl, author = {Roth, Carina and Hausler, Peter and Bierl, Rudolf}, title = {Einbindung eines 2D-Photodetektors in einen hochintegrierten SPR-Imaging-Sensor}, series = {7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, M{\"u}nchen}, booktitle = {7. MikroSystemTechnik Kongress "MEMS, Mikroelektronik, Systeme", 23.-25. Oktober 2017, M{\"u}nchen}, publisher = {VDE-Verlag}, address = {M{\"u}nchen}, isbn = {978-3-8007-4491-6}, pages = {848 -- 850}, abstract = {Die Oberfl{\"a}chenplasmonenresonanzspektroskopie (SPR) ist eine hochempfindliche Messmethode, die es erlaubt, Gase und Fl{\"u}ssigkeiten zerst{\"o}rungs- und markierungsfrei in Echtzeit zu analysieren. Bisher vornehmlich im Labormaßstab in der Bioanalytik und dem Wirkstoffscreening eingesetzt, soll diese Technologie nun miniaturisiert und f{\"u}r weitere Anwendungsgebiete zug{\"a}nglich gemacht werden. Dazu wird ein kompakter Micro-Opto-Electro-Mechanical Systems Sensor (MOEMS) entwickelt, der mit Hilfe des SPR Imaging {\"A}nderungen der chemischen Zusammensetzung verschiedener Fl{\"u}ssigkeiten inline messen kann.}, language = {de} } @article{SchelsHerdlHausladenetal., author = {Schels, Andreas and Herdl, Florian and Hausladen, Matthias and Wohlfartsst{\"a}tter, Dominik and Edler, Simon and Bachmann, Michael and Pahlke, Andreas and Schreiner, Rupert and Hansch, Walter}, title = {Quantitative Field Emission Imaging for Studying the Doping-Dependent Emission Behavior of Silicon Field Emitter Arrays}, series = {Micromachines}, volume = {14}, journal = {Micromachines}, number = {11}, publisher = {MDPI}, doi = {10.3390/mi14112008}, abstract = {Field emitter arrays (FEAs) are a promising component for novel vacuum micro- and nanoelectronic devices, such as microwave power amplifiers or fast-switching X-ray sources. However, the interrelated mechanisms responsible for FEA degradation and failure are not fully understood. Therefore, we present a measurement method for quantitative observation of individual emission sites during integral operation using a low-cost, commercially available CMOS imaging sensor. The emission and degradation behavior of three differently doped FEAs is investigated in current-regulated operation. The measurements reveal that the limited current of the p-doped emitters leads to an activation of up to 55\% of the individual tips in the array, while the activation of the n-type FEA stopped at around 30\%. This enhanced activation results in a more continuous and uniform current distribution for the p-type FEA. An analysis of the individual emitter characteristics before and after a constant current measurement provides novel perspectives on degradation behavior. A burn-in process that trims the emitting tips to an integral current-specific ideal field enhancement factor is observed. In this process, blunt tips are sharpened while sharp tips are dulled, resulting in homogenization within the FEA. The methodology is described in detail, making it easily adaptable for other groups to apply in the further development of promising FEAs.}, language = {en} } @inproceedings{SchelsHerdlHausladenetal., author = {Schels, Andreas and Herdl, Florian and Hausladen, Matthias and Wohlfartsst{\"a}tter, Dominik and Bachmann, Michael and Edler, Simon and D{\"u}sberg, Felix and Pahlke, Andreas and Buchner, Philipp and Schreiner, Rupert and Hansch, Walter}, title = {Beta Factor Mapping of Individual Emitting Tips During Integral Operation of Field Emission Arrays}, series = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, booktitle = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, publisher = {IEEE}, isbn = {979-8-3503-0143-4}, doi = {10.1109/IVNC57695.2023.10188957}, pages = {224 -- 226}, abstract = {Emission uniformity mappings of field emitter arrays provide important insight into degradation mechanisms, but are often laborious, non-integral, costly, or not quantifiable. Here, a low-cost Raspberry Pi HQ camera is used as an extraction anode to quantify the emission distribution in field emitter arrays. A verification measurement using controlled SEM electron beams proves, that current-voltage characteristics of individual emission sites can be determined by combining the integral electrical data with the image data. The characteristics are used to quantify the field enhancement factors of an 30x30 silicon field emitter array during integral operation. Comparison of the field enhancement factor distributions before and after a one-hour constant current operation at 1 µA shows an increase from 50 actively emitting tips before to 156 after the measurement. It is shown, that the distribution of field enhancement factors shifts towards lower values, due to the increasing degradation for high field enhancement tips, especially above 1500.}, language = {en} } @inproceedings{HerdlKueddelsmannSchelsetal., author = {Herdl, Florian and Kueddelsmann, Maximillian J. and Schels, Andreas and Bachmann, Michael and Edler, Simon and Wohlfartsst{\"a}tter, Dominik and D{\"u}sberg, Felix and Prugger, Alexander and Dillig, Michael and Dams, Florian and Schreiner, Rupert and Coile{\´a}in, Cormac {\´O}. and Zimmermann, Stefan and Pahlke, Andreas and Duesberg, Georg S.}, title = {Characterization and Operation of Graphene-Oxide-Semiconductor Emitters at Atmospheric Pressure Levels}, series = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, booktitle = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, publisher = {IEEE}, isbn = {979-8-3503-0143-4}, doi = {10.1109/IVNC57695.2023.10188974}, pages = {14 -- 16}, abstract = {In recent years Graphene-Oxide-Semiconductor (GOS) electron emitters have attracted a lot of interest due to their outstanding durability in modest vacuum conditions. However, the performance at ambient pressure remains largely unexplored. In this study GOS-emitters are characterized in nitrogen and air at atmospheric pressure, and compared with their vacuum characteristics. For this purpose, lifetime and IV-characteristics measurements are shown. Furthermore, the GOS-emitter was operated as an ionization source for ion mobility spectrometry (IMS) at ambient conditions.}, language = {en} } @inproceedings{HausladenBuchnerSchelsetal., author = {Hausladen, Matthias and Buchner, Philipp and Schels, Andreas and Edler, Simon and Bachmann, Michael and Schreiner, Rupert}, title = {An Integrated Field Emission Electron Source on a Chip Fabricated by Laser-Micromachining and Mems Technology}, series = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, booktitle = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, publisher = {IEEE}, isbn = {979-8-3503-0143-4}, doi = {10.1109/IVNC57695.2023.10189001}, pages = {115 -- 116}, abstract = {A silicon field emission electron source consisting of a cathode and a grid electrode has been fabricated by laser micromachining. The cathode features 21×21 tips on an area of 4×4 mm 2 , With a self-aligning MEMS technology for the aperture grid, a high electron transmission (99 \%) was achieved. Onset voltages of 50…70 V were observed for an emission current of 1 nA. A stable emission current of 1 mA ± 1.3 \% at an extraction voltage of 250 V was observed during a 30-min operation.}, language = {en} } @inproceedings{BuchnerHausladenSchelsetal., author = {Buchner, Philipp and Hausladen, Matthias and Schels, Andreas and Herdl, Florian and Edler, Simon and Bachmann, Michael and Schreiner, Rupert}, title = {An Integrated Silicon Nanowire Field Emission Electron Source on a Chip with High Electron Transmission}, series = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, booktitle = {2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA}, publisher = {IEEE}, isbn = {979-8-3503-0143-4}, doi = {10.1109/IVNC57695.2023.10188878}, pages = {6 -- 8}, abstract = {Silicon nanowire field emission arrays (50 × 50 pillars) were fabricated on a silicon glass hybrid wafer. The glass acts both as the support for the whole structure and insulator between cathode and extraction grid. The extraction grid matches the emitter structures and is optically aligned and adhered to the emitter chip by a vacuum compatible epoxide adhesive. These chips exhibit an emission current of about 600 μA at an extraction voltage of 300 V. The electron transmission through the grid is above 80 \%. 58-hour longtime measurements were conducted showing low degradation of the emission current and high stability of electron transmission.}, language = {en} } @inproceedings{HausladenSchelsBuchneretal., author = {Hausladen, Matthias and Schels, Andreas and Buchner, Philipp and Bartl, Mathias and Asgharzade, Ali and Edler, Simon and Wohlfartsst{\"a}tter, Dominik and Bachmann, Michael and Schreiner, Rupert}, title = {Improved Method for Determining the Distribution of FEA Currents by Optical CMOS Sensors}, series = {37th International Vacuum Nanoelectronics Conference (IVNC), 15-19 July 2024, Brno, Czech Republic}, booktitle = {37th International Vacuum Nanoelectronics Conference (IVNC), 15-19 July 2024, Brno, Czech Republic}, publisher = {IEEE}, doi = {10.1109/IVNC63480.2024.10652543}, pages = {1 -- 2}, abstract = {CMOS image sensors are utilized to determine the time- and spatially-resolved distribution of the electron emission of silicon field emission arrays. During initial experiments, rather low field emission currents already visibly damaged the sensor surface, altering the system accuracy over the measurement time. Therefore, we coated the sensor surface with copper for protection. In contrast to the original insulating surface, the Cu coating provides a conductive surface for incident electrons and improves heat dissipation in addition. This prevents localized surface charges and surface damages which stabilize the system accuracy.}, language = {en} } @article{BachmannDuesbergPahlkeetal., author = {Bachmann, Michael and D{\"u}sberg, Felix and Pahlke, Andreas and Edler, Simon and Schels, Andreas and Herdl, Florian and Hausladen, Matthias and Buchner, Philipp and Schreiner, Rupert}, title = {The "LED-version" of the electron gun: An electron source for operation in ambient pressure environments based on silicon field emitter arrays}, series = {Vakuum in Forschung und Praxis}, volume = {35}, journal = {Vakuum in Forschung und Praxis}, number = {3}, publisher = {Wiley}, doi = {10.1002/vipr.202300801}, pages = {32 -- 37}, abstract = {We report on our progress to develop and optimize electron sources for practical applications. A simple fabrication process is introduced based on a wafer dicing saw and a wet chemical etch step without the need for a clean room. Due to the formation of crystal facets the samples show a homogeneous geometry throughout the array. Characterization techniques are developed to systematically compare various arrays. A very defined measurement procedure based on current controlled IV-sweeps as well as lifetime measurements at various currents is proposed. To investigate the current distribution in the array a commercial CMOS detector is used and shows the potential for in depth analysis of the arrays. Finally, a compact hermetically sealed housing is presented enabling electron generation in atmospheric pressure environments.}, language = {en} } @masterthesis{Zhong, type = {Bachelor Thesis}, author = {Zhong, Gantong}, title = {Calibration and Performance Evaluation of Contactless Optical Position Sensors Based on 3D Printed Optical Waveguides}, address = {Regensburg}, doi = {10.35096/othr/pub-8466}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-84668}, school = {Ostbayerische Technische Hochschule Regensburg}, pages = {35}, abstract = {This work presents the design, implementation, and performance evaluation of a positionsensing system based on a 3D printed optical waveguide. Building upon the conceptual foundation of D-shaped polymer optical fiber (POF) sensors [1], this study introduces a novel waveguide structure fabricated via multi-material fused filament fabrication (FFF) 3D printing. The waveguide incorporates a square-core geometry with integrated mechanical brackets and selective black cladding layer to enhance optical confinement and minimize boundary-induced nonlinearity. Three successive design iterations were developed and evaluated, with each version refined based on calibration results and structural observations. The final version demonstrated high fabrication stability and improved optical behavior, enabling consistent calibration across multiple samples. Using a center-corrected linear attenuation model, the position of a side-coupled LED was estimated from dual photodiode signals and compared with true light source position. The measurement results for five independently printed waveguides show mean absolute errors below 0.2 mm and standard deviations as low as 0.268 mm. The sensor response was found to be highly linear over the 5-55 mm sensing range, with worst-case errors bounded within ±1.7 mm. Compared with traditional D-shaped POF sensors, where performance is limited by manual polishing variability and nonuniform attenuation, the 3D-printed approach offers superior linearity, submillimeter accuracy, and batch-to-batch reproducibility. These findings prove the feasibility of 3D-printed optical waveguides in scalable and precise position sensing applications, marking a further step toward the batch fabrication and and potential industrialization of contactless optical position sensors. A conclusion of the research findings and suggestions for future improvements were provided at the end of this thesis, offering insights for the further development in this area.}, language = {en} } @article{HausladenSchelsBuchneretal., author = {Hausladen, Matthias and Schels, Andreas and Buchner, Philipp and Bartl, Mathias and Asgharzade, Ali and Edler, Simon and Wohlfartsst{\"a}tter, Dominik and Bachmann, Michael and Schreiner, Rupert}, title = {Measurement of field emission array current distributions by metal-coated CMOS image sensors}, series = {Journal of Vacuum Science \& Technology B}, volume = {42}, journal = {Journal of Vacuum Science \& Technology B}, number = {6}, publisher = {AIP Publishing}, doi = {10.1116/6.0004074}, abstract = {A CMOS image sensor is utilized to determine the time- and spatially resolved distribution of the total electron emission current of a silicon field emission array. The sensor measures electron emission without the need for phosphorus screens or scintillators as converters. However, in initial experiments, rather low field emission currents of several hundreds of nanoamperes per emitter already damaged the sensor surface, which altered the systems' signal response over the measurement time. In consequence, we coated the CMOS sensor surface with a Cu layer for surface protection. In contrast to the original insulating surface, Cu is an excellent current- and heat-conductor, which avoids lens charging by providing a conductive path for incident electrons and has an improved heat dissipation capability. Measurements using a segmented field emission cathode with four individually addressable tips demonstrate a consistent correlation between the emission current and the sensor signal of the metal-coated image sensor. Furthermore, the characterization of a field emission array showed that single tip emission currents of up to 12 μA per tip are measurable without discernible damage effects of the sensor's surface.}, language = {en} } @article{SchreinerWiedmannCoenningetal., author = {Schreiner, Rupert and Wiedmann, J. and Coenning, W. and Porsche, J. and Gentner, Jean-Louis and Berroth, Manfred and Scholz, Ferdinand and Schweizer, H.}, title = {Fabrication approach for antiphase narrow linewidth complex coupled 1.55 μm DFB lasers}, series = {Electronics Letters}, volume = {35}, journal = {Electronics Letters}, number = {2}, publisher = {The Institution of Engineering and Technology IET}, issn = {0013-5194}, doi = {10.1049/el:19990132}, pages = {146 -- 148}, abstract = {A new method for fabricating narrow linewidth antiphase complex coupled MQW DFB lasers by periodically etching the active layer and quartemary InGaAsP overgrowth is reported. The minimum linewidth for a 375 µm long ridge waveguide laser is only 250 kHz at an optical output power of 4 mW.}, language = {en} } @article{HausladenSchelsAsgharzadeetal., author = {Hausladen, Matthias and Schels, Andreas and Asgharzade, Ali and Buchner, Philipp and Bartl, Mathias and Wohlfartsst{\"a}tter, Dominik and Edler, Simon and Bachmann, Michael and Schreiner, Rupert}, title = {Investigation of Influencing Factors on the Measurement Signal of a CMOS Image Sensor for Measuring Field Emission Currents}, series = {Sensors}, volume = {25}, journal = {Sensors}, number = {5}, publisher = {MDPI}, doi = {10.3390/s25051529}, pages = {17}, language = {en} } @article{SchwarzPastoetterTranetal., author = {Schwarz, Tobias and Past{\"o}tter, Angelina and Tran, T. H. and Schlosser, Marc and Kaulen, Corinna and Lechner, Alfred and Slabon, A. and Kammler, Martin}, title = {Effect of temperature on the growth of Cupric and Cuprous Nanoparticles in a wet chemical synthesis}, series = {Materials Letters}, volume = {381}, journal = {Materials Letters}, publisher = {Springer Nature}, doi = {10.1016/j.matlet.2024.137672}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-79279}, abstract = {Cuprous oxide (Cu2O) and cupric oxide (CuO) particles were synthesized using a wet chemical surfactant free method at different synthesis temperatures from 25 °C to 60 °C. Morphology, size, and chemical composition of the prepared Cu2O particles were analyzed by FESEM, PXRD, and UV-vis. We discovered that the chemical composition of the Cu2O particles remained unaffected by the synthesis temperature. However, morphology and size of the particles showed a strong temperature dependency. This could be attributed to the temperature induced formation of CuO species from the copper hydroxide (Cu(OH)2) precursor which also functions as copper precursor for the Cu2O particle growth. The cupric oxide species was determined to be the main cause for the formation of micrometer sized particles, whereas with the Cu(OH)2 precursor species for the Cu2O particles nanocubes with smaller edge lengths as well as octahedrons were obtained.}, language = {en} } @inproceedings{ŁawrowskiLangerSchreineretal., author = {Ławrowski, Robert Damian and Langer, Christoph and Schreiner, Rupert and Sellmair, Josef}, title = {Nano Emitters on Silicon Pillar Structures generated by a Focused Electron Beam Induced Deposition}, series = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, booktitle = {International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan}, publisher = {IEEE}, doi = {10.1109/IVNC.2018.8520059}, pages = {1-2}, abstract = {Nano emitters were deposited by focused electron beam induced deposition of Trimethyl-(methylcyclopentadienyl)platinum(IV) on top of silicon pillars. The nano emitters were exactly positioned in the center on the top of up to four pillars of a quadratic arranged array of sixteen pillars with a pitch of 50 μm. Integral field emission measurements were performed in a diode configuration with a 50 μm mica spacer in a vacuum chamber at pressures of about 10 -9 mbar. The Fowler-Nordheim plots show a linear behavior, like expected for an n-type silicon material and a metal needle. The I-V measurement of the most promising sample shows an integral emission current up to 2 μm at a voltage of 600 V (12 MV/m) and an onset voltage for a current of 1 nA of about 300 V.}, language = {en} } @inproceedings{BuchnerHausladenBartletal., author = {Buchner, Philipp and Hausladen, Matthias and Bartl, Mathias and Schreiner, Rupert}, title = {Elektronenquellen basierend auf Feldemission aus Silizium}, series = {Tagungsband zum 4. Symposium Elektronik und Systemintegration ESI: 17. April 2024, Hochschule Landshut}, booktitle = {Tagungsband zum 4. Symposium Elektronik und Systemintegration ESI: 17. April 2024, Hochschule Landshut}, publisher = {Hochschule f{\"u}r Angewandte Wissenschaften Landshut}, address = {Landshut}, isbn = {978-3-9818439-9-6}, doi = {10.57688/421}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:860-opus4-4212}, pages = {46 -- 53}, abstract = {Der Beitrag gibt einen {\"U}berblick {\"u}ber zwei typische Bauformen f{\"u}r Elektronenquellen auf der Basis von Feldemission aus Silizium. Des Weiteren wird eine typische Trioden-Beschaltung solcher Elektronenquellen f{\"u}r hohe Elektronentransmission vorgestellt und dabei auf ihre Leistungsf{\"a}higkeit eingegangen.}, language = {de} } @article{BresinskyFillenberg, author = {Bresinsky, Markus and Fillenberg, Barbara}, title = {Krisen, Katastrophen und Konflikte}, series = {Hebammen Wissen}, volume = {6}, journal = {Hebammen Wissen}, number = {4}, doi = {10.1007/s43877-025-1335-x}, pages = {24 -- 27}, abstract = {Hebammen als Akteurinnen im Bev{\"o}lkerungsschutz In Deutschland folgt der Bev{\"o}lkerungsschutz einer komplexen Struktur, die sich gr{\"o}ßtenteils auch auf das Rettungswesen st{\"u}tzt. Doch die wertvolle Ressource Hebamment{\"a}tigkeit wurde dabei bisher nicht mitgedacht.}, language = {de} } @inproceedings{BresinskyBrischar, author = {Bresinsky, Markus and Brischar, Jule}, title = {Between association and dissociation : the legitimacy politics of CIMIC experimentation}, publisher = {CCOE}, doi = {10.35096/othr/pub-8562}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-85627}, pages = {21}, abstract = {NATO's Concept Development and Experimentation (CD\&E) works well for discrete technologies but is ill-suited to civil-military cooperation (CIMIC), where the 'capability' at stake is an interorganisational relationship. Drawing on regime-complex theory and organisational sociology, this paper argues that willingness to engage in joint CIMIC capability development hinges on legitimacy rather than technical utility. A legitimacy-scale metaphor captures the trade-off: functional gains from collaboration load one side; identity risks, such as threats to neutrality, autonomy, or safety, load the other. Three ideal-type cases test the framework. In stabilisation missions, humanitarian neutrality is vital, the scale tips toward identity risk, and co-creation remains siloed. In sudden-onset disasters, shared life-saving objectives reduce identity costs, functional incentives dominate, and integrated trials flourish. Territorial- and collective-defence scenarios occupy the middle ground: acute threat perception opens selective, often low-profile windows for cooperation, yet unresolved legal and reputational questions still temper overt collaboration. The analysis yields five practical lessons. First, legitimacy must be treated as a primary design variable. Second, the optimal depth of cooperation is context specific. Third, legitimacy-sensitive 'safe-to-fail' spaces - wargames, living labs, tabletop exercises - lower entry barriers. Fourth, structured reflection on legitimacy exposes red lines early and refines future joint efforts. Fifth, incremental processes can build trust and gradually relax legitimacy constraints. Recognising legitimacy as both constraint and resource allows practitioners to design CIMIC co-creation - and eventual experimentation - that is technically sound, politically acceptable, and ethically sustainable.}, language = {en} } @masterthesis{Xu, type = {Bachelor Thesis}, author = {Xu, Zhiming}, title = {Electronic circuit design and implementation of a contactless optical position measurement device}, address = {Regensburg}, doi = {10.35096/othr/pub-8520}, url = {http://nbn-resolving.de/urn:nbn:de:bvb:898-opus4-85201}, school = {Ostbayerische Technische Hochschule Regensburg}, pages = {49}, abstract = {This thesis presents the design and implementation of a low-cost, highprecision analog front-end for a non-contact optical displacement measurement system. While the principle of sensing based on D-shaped optical fibers is well-established, its practical replication faces challenges of poor consistency from manual polishing and high material costs. To address these issues, we employ 3D-printed polymer waveguides as the core sensing medium and design a dedicated signal conditioning circuit to accompany it. The core work of this thesis revolves around a dual-channel, two-stage amplifier analog front-end. The circuit converts weak, nanoampere-level (nA) photocurrents from the photodiodes into voltage signals. These signals are stable, linear, and suitable for the microcontroller (MCU) to process. The entire design follows this workflow: starting from theoretical calculations, the circuit's performance in frequency domain, time domain, and noise was verified through LTspice simulation. Subsequently, the design was realized in hardware via PCB implementation, including guard rings. The experimental results show that the performance of the fabricated circuit is consistent with simulation. When integrated with the 3D-printed waveguide, the complete system performed end-to-end calibration and decoding. Over a 50 mm measurement range, the system achieved a maximum absolute error of less than 0.81 mm and a root mean square error below 0.4 mm. This research validates the feasibility of a complete, low-cost, non-contact displacement measurement solution—from the sensing structure to the signal processing—suitable for small-scale use.}, language = {en} } @inproceedings{ShahabUllahShehzadetal., author = {Shahab, Muhammad and Ullah, Abdul Wahab Usman and Shehzad, Muhammad and Shah, Syed Bilal and Joyo, M. Kamran and Khan, Sheroz}, title = {Optimal distributed generation placement in radial distribution system using particle swarm optimization}, series = {2024 IEEE 9th International Conference on Engineering Technologies and Applied Sciences (ICETAS)}, booktitle = {2024 IEEE 9th International Conference on Engineering Technologies and Applied Sciences (ICETAS)}, publisher = {IEEE}, doi = {10.1109/ICETAS62372.2024.11120307}, pages = {7}, abstract = {This paper addresses losses of power in Radial Distribution Systems (RDS), which significantly affect voltage levels and operational costs. The main aim is to optimize the positioning and size of Distributed Generation (DG) units, including Photovoltaic (PV) cells, and Wind Turbines (WT), to analyze the effect of DG placement in reducing the losses in power and enhancing the voltage profiles in radial distribution system (IEEE 33 bus system). This research employs Particle Swarm Optimization (PSO), a robust algorithm well-suited for tackling non-linear optimization issues in order to identify the appropriate placement and size for DG units. A number of scenarios with varying numbers of DG units are simulated, indicating significant reductions in active as well as reactive power losses. Likewise, the consistency and reliability requirements of modern distribution systems are improved as the voltage profile is improved. The key findings demonstrate that optimal DG integration enhances system efficiency, contributes to operational cost savings, and improves grid stability. PSO was chosen for its ability to effectively balance computational effort while achieving high accuracy in minimizing the losses associated with power and enhancing voltage profiles. In contrast to traditional optimization techniques, PSO offers superior accuracy and efficiency in addressing the challenges of non-linear optimization in RDS.}, language = {en} }